[Scan]
initial_time=2016-01-28T18:33:43
final_time=2016-01-28T18:34:04
ip_count=19
run=1026
dataset=4
scan=275
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09588E0
qbias_imon=-1.08823E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.38294E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.00994E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=4.76718E-10
ql4_vset=
ql4_vmon=-9.14202E0
ql4_imon=-1.1853E-10
mult1=-9.61998E-9
mult2=-2.81642E-9
rf_tmon=-5.30551E-3
rf_agc=3.32254E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=1.72238E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68356E0
bslens_imon=2.52333E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19875E1
lens5a_imon=1.97983E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12513E2
lens4a_imon=2.05161E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53923E1
cs_ef1b_imon=3.09767E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04611E2
lens23_imon=1.01926E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04844E1
cs_ea1_imon=1.25523E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39119E0
lens1_imon=2.51973E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64584E1
os_ef1alow_imon=2.97477E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03828E1
cs_ea2_imon=1.41457E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8461E1
cs_ef1a_imon=3.01405E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.20701E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1122E1
os_restr1_imon=4.29599E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15552E1
os_ea1_imon=2.42792E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63792E1
os_ef1bup_imon=3.07857E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24549E0
cs_ionrep_imon=9.74405E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93168E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.04819E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.17802E-8
tplens_vset=1.4E-1
tplens_vmon=1.64564E0
tplens_imon=-5.42091E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.25924E1
iondef3_imon=1.4809E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26416E1
iondef2_imon=1.59338E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98259E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=4.00642E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27613E0
ionrepsh_imon=9.416E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33682E1
lens5b_imon=2.17341E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7485E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4702E0
os_ea2_imon=-5.44483E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00644E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70885E1
cs_ef2a_imon=3.19317E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07919E0
os_ef2alow_imon=-2.54382E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08236E-1
os_ef2bup_imon=-5.42339E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.37085E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01647E1
cs_anode2_imon=2.09793E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73183E1
iondef1_imon=1.07895E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68256E1
iondef4_imon=1.08161E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.29362E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.4877E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13975E0
cs_ionaccel_imon=-1.11665E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02106E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56249E1
einzel_imon=7.70226E-6
window_vset=0.0E0
window_vmon=1.93917E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82659E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86614E1
mask2_imon=-6.94985E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.63155E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.65461E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50157E3
multb_neg_imon=7.0872E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47074E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.39062E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06969E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61498E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30558E1
cs_fil1_imon=9.24106E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29863E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6281E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.49778E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.39934E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3263E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31041E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21679E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51417E-3
foreline_cvt_pmon=2.51417E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82117E-1
res40_imon=-2.45012E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09503E0	-8.16679E-1	-7.98583E-1	-9.13117E0	-9.14185E0	4.86374E-3	9.35793E-2	2.72819E1	-3.26776E1	-3.26121E1	2.68117E1	1.20122E-7	2.52209E-3	2.52209E-3	6.29645E-3	3.02922E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.1687E-1	-7.98845E-1	-9.13129E0	-9.14197E0	4.8399E-3	9.31978E-2	2.72865E1	-3.26561E1	-3.26074E1	2.67974E1	1.20004E-7	2.52384E-3	2.52384E-3	6.32896E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16846E-1	-7.98607E-1	-9.13155E0	-9.14204E0	4.98295E-3	9.33886E-2	2.73051E1	-3.26693E1	-3.27203E1	2.6804E1	1.20278E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00041E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16727E-1	-7.98821E-1	-9.13126E0	-9.14226E0	4.74453E-3	9.33886E-2	2.72945E1	-3.26655E1	-3.26166E1	2.67856E1	1.2003E-7	2.51954E-3	2.51954E-3	6.32356E-3	3.00197E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16369E-1	-7.98559E-1	-9.13115E0	-9.14214E0	4.8399E-3	9.35793E-2	2.73496E1	-3.26609E1	-3.2623E1	2.68112E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.16655E-1	-7.98416E-1	-9.13129E0	-9.14226E0	4.79221E-3	9.34839E-2	2.72799E1	-3.26549E1	-3.25948E1	2.68058E1	1.19861E-7	2.51334E-3	2.51334E-3	6.31837E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.1687E-1	-7.98559E-1	-9.13148E0	-9.14192E0	4.50611E-3	9.35555E-2	2.72915E1	-3.26897E1	-3.26183E1	2.68106E1	1.19965E-7	2.51007E-3	2.51007E-3	6.33486E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16631E-1	-7.98464E-1	-9.13162E0	-9.14204E0	5.00679E-3	9.33409E-2	2.72817E1	-3.26254E1	-3.26506E1	2.67932E1	1.20278E-7	2.51662E-3	2.51662E-3	6.30192E-3	2.98481E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.17013E-1	-7.98321E-1	-9.13126E0	-9.14183E0	4.74453E-3	9.33886E-2	2.73175E1	-3.26372E1	-3.25552E1	2.68314E1	1.19953E-7	2.5131E-3	2.5131E-3	6.29665E-3	3.0148E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09487E0	-8.16965E-1	-7.98512E-1	-9.13134E0	-9.1418E0	4.74453E-3	9.34839E-2	2.73263E1	-3.2659E1	-3.26107E1	2.67926E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.02511E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09518E0	-8.16894E-1	-7.98631E-1	-9.13126E0	-9.14192E0	5.14984E-3	9.36508E-2	2.72648E1	-3.26422E1	-3.26887E1	2.67998E1	1.20383E-7	2.52538E-3	2.52538E-3	6.32936E-3	3.01347E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09603E0	-8.16679E-1	-7.98607E-1	-9.13136E0	-9.14216E0	5.29289E-3	9.31263E-2	2.72776E1	-3.26634E1	-3.25973E1	2.67932E1	1.20016E-7	2.51244E-3	2.51244E-3	6.32784E-3	2.99906E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16584E-1	-7.98488E-1	-9.13143E0	-9.14204E0	4.93526E-3	9.36031E-2	2.73321E1	-3.26567E1	-3.26597E1	2.67908E1	1.20045E-7	2.51725E-3	2.51725E-3	6.3245E-3	3.00251E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0951E0	-8.16536E-1	-7.98512E-1	-9.13136E0	-9.14214E0	4.72069E-3	9.34839E-2	2.73063E1	-3.26419E1	-3.26187E1	2.68292E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33762E-3	3.01216E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0958E0	-8.16417E-1	-7.9875E-1	-9.1316E0	-9.14211E0	4.64916E-3	9.3627E-2	2.73333E1	-3.26795E1	-3.26663E1	2.6789E1					
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16202E-1	-7.98917E-1	-9.13141E0	-9.14197E0	4.673E-3	9.33886E-2	2.72781E1	-3.26404E1	-3.26368E1	2.68016E1	1.20017E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02659E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16393E-1	-7.99108E-1	-9.13157E0	-9.14204E0	4.8399E-3	9.37223E-2	2.72782E1	-3.26713E1	-3.26411E1	2.68082E1	1.19757E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.02659E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16679E-1	-7.9875E-1	-9.13143E0	-9.14173E0	4.60148E-3	9.35793E-2	2.73092E1	-3.26714E1	-3.26791E1	2.67998E1	1.19831E-7	2.51679E-3	2.51679E-3	6.34907E-3	2.98522E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09595E0	-8.16774E-1	-7.98965E-1	-9.13141E0	-9.14221E0	4.673E-3	9.34124E-2	2.72921E1	-3.26561E1	-3.26354E1	2.67978E1	1.20004E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.98156E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09588E0	-8.16321E-1	-7.98345E-1	-9.13134E0	-9.14202E0	4.76837E-3	9.35793E-2	2.73183E1	-3.26416E1	-3.25924E1	2.68256E1	1.20311E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
