[Scan]
initial_time=2016-01-28T18:34:12
final_time=2016-01-28T18:34:33
ip_count=19
run=1026
dataset=4
scan=276
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08824E-4
ql1_vset=
ql1_vmon=-8.16679E-1
ql1_imon=1.38041E-8
ql2_vset=
ql2_vmon=-7.98917E-1
ql2_imon=2.03362E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=4.80521E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.07777E-10
mult1=-9.7697E-9
mult2=-2.75243E-9
rf_tmon=-5.20723E-3
rf_agc=3.29243E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=1.6997E-9
bslens_vset=-6.2E0
bslens_vmon=-6.6415E0
bslens_imon=2.35029E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.991E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12505E2
lens4a_imon=2.05028E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53736E1
cs_ef1b_imon=3.10596E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04605E2
lens23_imon=1.02027E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=1.23613E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41221E0
lens1_imon=2.67474E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64849E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.40159E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84274E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70364E-1
olens2_imon=1.21499E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14963E1
os_ea1_imon=2.42143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63533E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.7044E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93499E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.06117E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.17836E-8
tplens_vset=1.4E-1
tplens_vmon=1.62942E0
tplens_imon=-2.56087E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26058E1
iondef3_imon=1.49748E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2675E1
iondef2_imon=1.56418E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02906E2
lens6_imon=2.98346E-4
ql6_vset=1.0E-1
ql6_vmon=9.32217E-2
ql6_imon=3.9801E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26832E0
ionrepsh_imon=9.33669E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33856E1
lens5b_imon=2.18927E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7476E1
cs_ef2b_imon=3.11497E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46659E0
os_ea2_imon=-6.85076E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06062E2
lens4b_imon=2.00522E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71168E1
cs_ef2a_imon=3.19642E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.72402E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.08836E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10967E1
os_restr2_imon=3.3777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23042E2
cs_ionfoca_imon=6.2946E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01587E1
cs_anode2_imon=2.08279E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73155E1
iondef1_imon=1.10815E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67752E1
iondef4_imon=1.07728E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.26175E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.51537E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.07909E0
cs_ionaccel_imon=-9.68887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47154E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56021E1
einzel_imon=7.64099E-6
window_vset=0.0E0
window_vmon=1.63884E-1
window_imon=-1.09503E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.07579E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92636E3
multa_neg_imon=7.41165E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.63658E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.25303E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.35344E0
defgridb_imon=6.08863E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33171E1
os_fil1_imon=9.40096E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61837E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30508E1
cs_fil1_imon=9.24761E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32746E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63142E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.20268E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.04922E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27044E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.52181E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.41853E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21793E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49391E-1
res40_imon=-2.4393E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	6.0E0	0.0E0	1.47E2	4.1E1	-2.09603E0	-8.16345E-1	-7.98845E-1	-9.13148E0	-9.14214E0	4.88758E-3	9.35555E-2	2.72727E1	-3.26332E1	-3.26362E1	2.67968E1	1.20226E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9978E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09565E0	-8.16512E-1	-7.9875E-1	-9.13155E0	-9.14211E0	4.86374E-3	9.35793E-2	2.7272E1	-3.26738E1	-3.26254E1	2.68113E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.01223E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09588E0	-8.16655E-1	-7.98631E-1	-9.13141E0	-9.14195E0	4.98295E-3	9.32693E-2	2.72912E1	-3.26718E1	-3.26081E1	2.68076E1	1.19872E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16894E-1	-7.98631E-1	-9.13103E0	-9.14202E0	4.74453E-3	9.37223E-2	2.73081E1	-3.26657E1	-3.26627E1	2.68304E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09487E0	-8.16512E-1	-7.98607E-1	-9.13115E0	-9.14204E0	4.72069E-3	9.37223E-2	2.73094E1	-3.26597E1	-3.26266E1	2.67794E1	1.20363E-7	2.51417E-3	2.51417E-3	6.33436E-3	3.03804E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09541E0	-8.16679E-1	-7.98869E-1	-9.13134E0	-9.14202E0	4.76837E-3	9.38416E-2	2.72998E1	-3.2629E1	-3.26573E1	2.6801E1	1.19978E-7	2.51248E-3	2.51248E-3	6.32418E-3	3.00942E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09627E0	-8.16679E-1	-7.98798E-1	-9.13129E0	-9.14226E0	4.76837E-3	9.36985E-2	2.72985E1	-3.26693E1	-3.26194E1	2.67854E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16727E-1	-7.98941E-1	-9.13129E0	-9.14226E0	4.95911E-3	9.36031E-2	2.72679E1	-3.26838E1	-3.25977E1	2.67989E1	1.2014E-7	2.51755E-3	2.51755E-3	6.31012E-3	2.98317E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16631E-1	-7.98702E-1	-9.13136E0	-9.14195E0	4.95911E-3	9.36985E-2	2.72998E1	-3.26508E1	-3.26531E1	2.67992E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16655E-1	-7.98345E-1	-9.13117E0	-9.14166E0	4.8399E-3	9.36031E-2	2.73069E1	-3.26676E1	-3.25942E1	2.6825E1	1.20106E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99686E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09495E0	-8.16727E-1	-7.98726E-1	-9.13126E0	-9.14183E0	4.76837E-3	9.35555E-2	2.7301E1	-3.26844E1	-3.26402E1	2.67962E1	1.20017E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09549E0	-8.16584E-1	-7.98559E-1	-9.13124E0	-9.14195E0	4.81606E-3	9.34124E-2	2.73033E1	-3.26614E1	-3.26425E1	2.68117E1	1.20106E-7	2.51525E-3	2.51525E-3	6.33977E-3	3.0071E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16774E-1	-7.98655E-1	-9.1315E0	-9.14207E0	4.64916E-3	9.36747E-2	2.73145E1	-3.26885E1	-3.26012E1	2.68028E1	1.19953E-7	2.51954E-3	2.51954E-3	6.30202E-3	2.9943E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09588E0	-8.16727E-1	-7.98869E-1	-9.13126E0	-9.14187E0	4.62532E-3	9.36985E-2	2.73137E1	-3.26419E1	-3.26585E1	2.68256E1	1.19861E-7	2.51443E-3	2.51443E-3	6.28006E-3	2.9926E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09572E0	-8.16584E-1	-7.98774E-1	-9.13138E0	-9.14202E0	4.76837E-3	9.377E-2	2.73063E1	-3.26518E1	-3.2632E1	2.6795E1	1.2033E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9952E-1
1.9E1	0.0E0	1.0E0	7.68E2	5.29E2	-2.09526E0	-8.16441E-1	-7.98655E-1	-9.13162E0	-9.14207E0	4.673E-3	9.38177E-2	2.73092E1	-3.26732E1	-3.26832E1	2.68142E1	1.20069E-7	2.52209E-3	2.52209E-3	6.29098E-3	2.9926E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09595E0	-8.16774E-1	-7.98774E-1	-9.13122E0	-9.14207E0	4.86374E-3	9.37462E-2	2.73358E1	-3.26726E1	-3.25859E1	2.6796E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.0148E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16631E-1	-7.98821E-1	-9.13124E0	-9.1423E0	4.72069E-3	9.377E-2	2.7263E1	-3.26356E1	-3.26536E1	2.68202E1	1.19757E-7	2.5188E-3	2.5188E-3	6.29645E-3	2.9952E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16751E-1	-7.98774E-1	-9.13126E0	-9.14192E0	5.03063E-3	9.36985E-2	2.73207E1	-3.26509E1	-3.26422E1	2.68106E1	1.20055E-7	2.51954E-3	2.51954E-3	6.3074E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16679E-1	-7.98917E-1	-9.13165E0	-9.14192E0	4.86374E-3	9.32217E-2	2.73155E1	-3.2675E1	-3.26058E1	2.67752E1	1.20106E-7	2.51739E-3	2.51739E-3	6.29665E-3	2.9892E-1
