[Scan]
initial_time=2016-01-28T18:35:08
final_time=2016-01-28T18:35:29
ip_count=19
run=1026
dataset=4
scan=278
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09533E0
qbias_imon=-1.08757E-4
ql1_vset=
ql1_vmon=-8.16727E-1
ql1_imon=1.38095E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.02031E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=4.76027E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-9.99928E-11
mult1=-9.61998E-9
mult2=-2.68069E-9
rf_tmon=-5.25144E-3
rf_agc=3.25405E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=1.71245E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65265E0
bslens_imon=2.45123E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2031E1
lens5a_imon=1.97589E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12461E2
lens4a_imon=2.05283E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53703E1
cs_ef1b_imon=3.12244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02056E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04919E1
cs_ea1_imon=1.24383E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43057E0
lens1_imon=2.58691E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64662E1
os_ef1alow_imon=2.95613E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0428E1
cs_ea2_imon=1.40605E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84615E1
cs_ef1a_imon=3.00567E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.21018E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11202E1
os_restr1_imon=4.29838E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14965E1
os_ea1_imon=2.40652E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63788E1
os_ef1bup_imon=3.09059E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=9.97248E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91858E2
cs_nozzle_imon=1.93479E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02149E1
cs_anode1_imon=2.03319E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20544E0
olens4_imon=3.1702E-8
tplens_vset=1.4E-1
tplens_vmon=1.63848E0
tplens_imon=8.57286E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26446E1
iondef3_imon=1.47861E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.57889E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98334E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=3.96986E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.32387E0
ionrepsh_imon=9.41207E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33671E1
lens5b_imon=2.20242E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74708E1
cs_ef2b_imon=3.13659E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46151E0
os_ea2_imon=-5.74961E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06044E2
lens4b_imon=2.00393E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71336E1
cs_ef2a_imon=3.19556E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08061E0
os_ef2alow_imon=-2.55594E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89561E-1
os_ef2bup_imon=-5.25695E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10888E1
os_restr2_imon=3.36777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23075E2
cs_ionfoca_imon=6.27805E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01835E1
cs_anode2_imon=2.09806E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73309E1
iondef1_imon=1.08455E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.09314E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.26414E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.50255E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1036E0
cs_ionaccel_imon=-1.14646E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47303E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56238E1
einzel_imon=7.68784E-6
window_vset=0.0E0
window_vmon=1.94026E-1
window_imon=-9.87234E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82657E2
mask1_imon=2.39037E-4
mask2_vset=0.0E0
mask2_vmon=-1.86659E1
mask2_imon=-6.5698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92632E3
multa_neg_imon=7.55388E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93693E3
defgrida_imon=6.51565E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.21174E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.56698E0
defgridb_imon=5.94935E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33187E1
os_fil1_imon=9.39953E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0786E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61261E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30537E1
cs_fil1_imon=9.23598E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.27149E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62666E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.32345E-2
os_fil2_imon=-2.60863E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.88322E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.66604E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34419E-1
cs_fil2_imon=-2.79538E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.39177E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21755E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.01223E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.64517E-1
res40_imon=-2.67389E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09549E0	-8.17275E-1	-7.98392E-1	-9.13155E0	-9.14214E0	5.05447E-3	9.33647E-2	2.73323E1	-3.26735E1	-3.26289E1	2.6796E1	1.198E-7	2.52887E-3	2.52887E-3	6.3074E-3	2.98835E-1
2.0E0	4.2E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16536E-1	-7.98321E-1	-9.13165E0	-9.1418E0	4.8399E-3	9.35555E-2	2.73039E1	-3.26499E1	-3.26187E1	2.68247E1	1.20545E-7	2.51393E-3	2.51393E-3	6.3074E-3	3.02368E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09541E0	-8.16751E-1	-7.98559E-1	-9.13148E0	-9.14187E0	4.74453E-3	9.37462E-2	2.73028E1	-3.2666E1	-3.2633E1	2.67775E1	1.19965E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.02396E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09541E0	-8.16894E-1	-7.98798E-1	-9.13167E0	-9.14202E0	4.88758E-3	9.37223E-2	2.73134E1	-3.26779E1	-3.26443E1	2.6798E1	1.20192E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01104E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16894E-1	-7.98655E-1	-9.13122E0	-9.14197E0	4.88758E-3	9.36508E-2	2.73051E1	-3.26555E1	-3.26234E1	2.68153E1	1.19861E-7	2.51552E-3	2.51552E-3	6.3074E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09433E0	-8.1706E-1	-7.98464E-1	-9.13155E0	-9.14204E0	4.79221E-3	9.36508E-2	2.72933E1	-3.26655E1	-3.26543E1	2.6807E1	1.20065E-7	2.51808E-3	2.51808E-3	6.31909E-3	2.99014E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16846E-1	-7.98559E-1	-9.13153E0	-9.14218E0	4.81606E-3	9.36985E-2	2.73327E1	-3.26554E1	-3.26206E1	2.681E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16607E-1	-7.98488E-1	-9.13136E0	-9.14197E0	5.126E-3	9.35555E-2	2.73163E1	-3.2698E1	-3.26213E1	2.67876E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32936E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16417E-1	-7.98416E-1	-9.13157E0	-9.14207E0	5.126E-3	9.34839E-2	2.72919E1	-3.26464E1	-3.25912E1	2.6797E1	1.20055E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09619E0	-8.16607E-1	-7.98106E-1	-9.13136E0	-9.14192E0	5.50747E-3	9.35793E-2	2.73201E1	-3.26753E1	-3.26567E1	2.68202E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.97963E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09611E0	-8.16631E-1	-7.98178E-1	-9.13146E0	-9.14173E0	5.38826E-3	9.36985E-2	2.73269E1	-3.26608E1	-3.26649E1	2.67932E1	1.19902E-7	2.51954E-3	2.51954E-3	6.29665E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16798E-1	-7.98512E-1	-9.13117E0	-9.14221E0	4.98295E-3	9.34601E-2	2.72907E1	-3.26663E1	-3.25317E1	2.68166E1	1.20278E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.00041E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16679E-1	-7.98512E-1	-9.13119E0	-9.14192E0	4.91142E-3	9.38416E-2	2.72973E1	-3.26615E1	-3.26356E1	2.67962E1	1.20363E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16965E-1	-7.98297E-1	-9.13134E0	-9.14192E0	5.126E-3	9.36747E-2	2.73448E1	-3.26464E1	-3.26476E1	2.68034E1	1.20226E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.02133E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09619E0	-8.1687E-1	-7.98416E-1	-9.13093E0	-9.14195E0	4.79221E-3	9.34601E-2	2.73635E1	-3.26496E1	-3.27062E1	2.68082E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00563E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09595E0	-8.16798E-1	-7.98464E-1	-9.13136E0	-9.14164E0	4.74453E-3	9.35078E-2	2.73075E1	-3.26699E1	-3.26446E1	2.68118E1	1.198E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.99941E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09603E0	-8.16631E-1	-7.98225E-1	-9.13155E0	-9.14178E0	4.8399E-3	9.36031E-2	2.73303E1	-3.26512E1	-3.25671E1	2.68124E1	1.19809E-7	2.51443E-3	2.51443E-3	6.31837E-3	2.9952E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09549E0	-8.16894E-1	-7.9844E-1	-9.13112E0	-9.14207E0	4.81606E-3	9.3627E-2	2.73273E1	-3.26188E1	-3.26549E1	2.67866E1	1.19913E-7	2.51443E-3	2.51443E-3	6.29098E-3	2.98222E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09495E0	-8.16774E-1	-7.98297E-1	-9.1311E0	-9.14207E0	4.93526E-3	9.37223E-2	2.72952E1	-3.26405E1	-3.26388E1	2.68175E1	1.2033E-7	2.51771E-3	2.51771E-3	6.28552E-3	2.9952E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09533E0	-8.16727E-1	-7.98345E-1	-9.13155E0	-9.14204E0	5.03063E-3	9.35316E-2	2.73309E1	-3.26783E1	-3.26446E1	2.67938E1	1.20055E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01223E-1
