[Scan]
initial_time=2016-01-28T18:36:35
final_time=2016-01-28T18:36:56
ip_count=19
run=1026
dataset=4
scan=281
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09418E0
qbias_imon=-1.08764E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.38237E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.00088E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=4.6109E-10
ql4_vset=
ql4_vmon=-9.14176E0
ql4_imon=-1.20759E-10
mult1=-9.18652E-9
mult2=-2.67669E-9
rf_tmon=-4.98107E-3
rf_agc=3.27748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=1.75431E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66728E0
bslens_imon=2.33737E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.98758E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12498E2
lens4a_imon=2.05129E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.09731E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04564E2
lens23_imon=1.02011E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05368E1
cs_ea1_imon=1.24601E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40684E0
lens1_imon=2.57244E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6468E1
os_ef1alow_imon=2.97585E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03911E1
cs_ea2_imon=1.42598E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84634E1
cs_ef1a_imon=3.00252E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.20394E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11244E1
os_restr1_imon=4.30175E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15447E1
os_ea1_imon=2.42834E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63611E1
os_ef1bup_imon=3.08181E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.20435E0
cs_ionrep_imon=9.59516E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91901E2
cs_nozzle_imon=1.93585E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.16615E-8
tplens_vset=1.4E-1
tplens_vmon=1.59185E0
tplens_imon=-3.5859E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26783E1
iondef3_imon=1.50495E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26296E1
iondef2_imon=1.58098E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02891E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.34362E-2
ql6_imon=3.99013E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26985E0
ionrepsh_imon=9.38948E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33186E1
lens5b_imon=2.17233E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74687E1
cs_ef2b_imon=3.12542E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48043E0
os_ea2_imon=-5.86314E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00468E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71143E1
cs_ef2a_imon=3.18164E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0906E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.84209E-1
os_ef2bup_imon=-5.36933E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.37049E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30038E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01953E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72684E1
iondef1_imon=1.09101E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68154E1
iondef4_imon=1.09458E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.23239E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.49279E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13074E0
cs_ionaccel_imon=-1.15629E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.66982E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.01574E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8265E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.86404E1
mask2_imon=-7.05797E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92635E3
multa_neg_imon=7.41342E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93719E3
defgrida_imon=6.56496E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.10489E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.47709E0
defgridb_imon=6.03238E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3319E1
os_fil1_imon=9.4078E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0766E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.617E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30516E1
cs_fil1_imon=9.26388E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24217E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62342E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.3577E-2
os_fil2_imon=-2.62993E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.32789E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32759E-1
cs_fil2_imon=-2.34161E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.36447E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21581E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40056E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.9413E-1
res40_imon=-2.49336E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=200
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16512E-1	-7.98607E-1	-9.13131E0	-9.14218E0	5.07832E-3	9.34601E-2	2.72952E1	-3.26521E1	-3.26926E1	2.67734E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99348E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09433E0	-8.16441E-1	-7.98488E-1	-9.13138E0	-9.14185E0	4.74453E-3	9.33886E-2	2.73333E1	-3.26658E1	-3.26554E1	2.67976E1	1.20243E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00348E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.17132E-1	-7.98631E-1	-9.13141E0	-9.1423E0	5.26905E-3	9.3317E-2	2.72827E1	-3.26673E1	-3.26431E1	2.67955E1	1.19872E-7	2.5225E-3	2.5225E-3	6.3074E-3	3.01475E-1
4.0E0	2.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.17132E-1	-7.98702E-1	-9.13148E0	-9.14199E0	5.14984E-3	9.35555E-2	2.73003E1	-3.26783E1	-3.2608E1	2.67992E1	1.2026E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.17204E-1	-7.98821E-1	-9.13141E0	-9.14202E0	5.00679E-3	9.35793E-2	2.7311E1	-3.26573E1	-3.26248E1	2.681E1	1.19965E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.1718E-1	-7.98488E-1	-9.1315E0	-9.14209E0	5.22137E-3	9.3627E-2	2.72751E1	-3.26338E1	-3.26236E1	2.68076E1	1.19697E-7	2.51954E-3	2.51954E-3	6.30202E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09456E0	-8.1687E-1	-7.98702E-1	-9.13146E0	-9.14173E0	4.91142E-3	9.37462E-2	2.73045E1	-3.26398E1	-3.26789E1	2.68058E1	1.20278E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09526E0	-8.16774E-1	-7.98535E-1	-9.13141E0	-9.14197E0	4.93526E-3	9.35793E-2	2.72739E1	-3.2644E1	-3.25743E1	2.68022E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.02133E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09503E0	-8.16655E-1	-7.98583E-1	-9.1316E0	-9.14195E0	5.05447E-3	9.3627E-2	2.7311E1	-3.26655E1	-3.25829E1	2.68186E1	1.19705E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09394E0	-8.16607E-1	-7.99036E-1	-9.1316E0	-9.14199E0	4.88758E-3	9.33886E-2	2.72797E1	-3.2675E1	-3.27068E1	2.68448E1	1.19953E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00966E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16655E-1	-7.98821E-1	-9.13124E0	-9.14223E0	4.8399E-3	9.377E-2	2.73157E1	-3.26644E1	-3.25582E1	2.68215E1	1.20158E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09387E0	-8.16441E-1	-7.98559E-1	-9.13141E0	-9.14233E0	4.52995E-3	9.34839E-2	2.73039E1	-3.26446E1	-3.2617E1	2.68007E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99686E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16488E-1	-7.9875E-1	-9.13124E0	-9.14204E0	4.62532E-3	9.35555E-2	2.73257E1	-3.26632E1	-3.27475E1	2.68169E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99348E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16512E-1	-7.98345E-1	-9.13126E0	-9.14209E0	4.673E-3	9.35316E-2	2.72914E1	-3.26431E1	-3.25742E1	2.68144E1	1.19841E-7	2.51919E-3	2.51919E-3	6.33388E-3	3.01104E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09449E0	-8.16441E-1	-7.98321E-1	-9.13134E0	-9.14192E0	4.72069E-3	9.36747E-2	2.73308E1	-3.26523E1	-3.25911E1	2.68207E1	1.19749E-7	2.51686E-3	2.51686E-3	6.32087E-3	3.01352E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16298E-1	-7.98225E-1	-9.13138E0	-9.14164E0	4.64916E-3	9.37223E-2	2.73129E1	-3.2653E1	-3.26488E1	2.67932E1					
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09433E0	-8.16727E-1	-7.98345E-1	-9.1316E0	-9.14171E0	4.62532E-3	9.34362E-2	2.73057E1	-3.26597E1	-3.26014E1	2.67878E1	1.20084E-7	2.52027E-3	2.52027E-3	6.29067E-3	3.01742E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09402E0	-8.16631E-1	-7.98416E-1	-9.13136E0	-9.14166E0	4.8399E-3	9.36747E-2	2.72696E1	-3.26729E1	-3.25966E1	2.68286E1	1.19953E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01738E-1
2.2E1	3.0E0	0.0E0	8.89E2	6.17E2	-2.09348E0	-8.16679E-1	-7.98607E-1	-9.13126E0	-9.14185E0	5.07832E-3	9.32932E-2	2.73151E1	-3.26856E1	-3.26472E1	2.67989E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09418E0	-8.16655E-1	-7.98225E-1	-9.13126E0	-9.14176E0	4.88758E-3	9.34362E-2	2.72684E1	-3.26296E1	-3.26783E1	2.68154E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.00966E-1
