[Scan]
initial_time=2016-01-28T18:37:03
final_time=2016-01-28T18:37:24
ip_count=19
run=1026
dataset=4
scan=282
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.08739E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.37995E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.00943E-9
ql3_vset=
ql3_vmon=-9.13146E0
ql3_imon=4.21274E-10
ql4_vset=
ql4_vmon=-9.14204E0
ql4_imon=-1.28281E-10
mult1=-9.57182E-9
mult2=-2.76851E-9
rf_tmon=-3.479E-3
rf_agc=3.26847E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.69132E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.60343E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20509E1
lens5a_imon=1.98439E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12476E2
lens4a_imon=2.05054E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53592E1
cs_ef1b_imon=3.09587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02082E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04858E1
cs_ea1_imon=1.23757E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41562E0
lens1_imon=2.64236E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6462E1
os_ef1alow_imon=2.9809E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0359E1
cs_ea2_imon=1.40888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84082E1
cs_ef1a_imon=2.99531E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.20163E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1146E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15282E1
os_ea1_imon=2.43566E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63737E1
os_ef1bup_imon=3.08902E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22732E0
cs_ionrep_imon=9.81674E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93427E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.03918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2053E0
olens4_imon=3.17594E-8
tplens_vset=1.4E-1
tplens_vmon=1.60132E0
tplens_imon=-4.36924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26561E1
iondef3_imon=1.50551E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26458E1
iondef2_imon=1.58054E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02896E2
lens6_imon=2.98275E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=3.98984E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2639E0
ionrepsh_imon=9.50527E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.18578E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46446E0
os_ea2_imon=-6.74064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00417E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70951E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07858E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96223E-1
os_ef2bup_imon=-5.39095E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.37625E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23051E2
cs_ionfoca_imon=6.31273E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.08928E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72751E1
iondef1_imon=1.10237E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09963E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.25088E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.48484E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47187E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56225E1
einzel_imon=7.60855E-6
window_vset=0.0E0
window_vmon=1.84907E-1
window_imon=-1.08782E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39217E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-6.84173E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.14449E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.61712E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.31084E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.2461E0
defgridb_imon=5.98356E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33172E1
os_fil1_imon=9.43225E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07708E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61396E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30516E1
cs_fil1_imon=9.26821E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28181E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62623E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31923E-2
os_fil2_imon=-2.70201E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.6846E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32112E-1
cs_fil2_imon=-2.29956E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.33443E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21371E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31012E-3
inlet_lpb_pmon=3.01934E-1
chamber_ion_pmon=1.20321E-7
chamber_cvt_pmon=2.5143E-3
foreline_cvt_pmon=2.5143E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50592E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09611E0	-8.1656E-1	-7.9875E-1	-9.13138E0	-9.14178E0	5.22137E-3	9.35078E-2	2.73129E1	-3.26627E1	-3.2748E1	2.68148E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.00302E-1
2.0E0	3.9E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16655E-1	-7.98535E-1	-9.13138E0	-9.14209E0	5.00679E-3	9.32932E-2	2.73009E1	-3.26963E1	-3.25575E1	2.67698E1	1.20209E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16822E-1	-7.98678E-1	-9.13138E0	-9.14207E0	4.91142E-3	9.34839E-2	2.7311E1	-3.26738E1	-3.26313E1	2.68151E1	1.20435E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02133E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16512E-1	-7.98678E-1	-9.13157E0	-9.14187E0	5.22137E-3	9.31501E-2	2.73022E1	-3.26782E1	-3.26243E1	2.68076E1	1.20055E-7	2.51417E-3	2.51417E-3	6.31278E-3	3.01995E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16536E-1	-7.98583E-1	-9.13153E0	-9.14173E0	5.07832E-3	9.32693E-2	2.72861E1	-3.26805E1	-3.26603E1	2.68169E1	1.20192E-7	2.51919E-3	2.51919E-3	6.33388E-3	2.99845E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16655E-1	-7.98559E-1	-9.13155E0	-9.14207E0	4.76837E-3	9.35316E-2	2.72898E1	-3.26799E1	-3.25648E1	2.67986E1	1.20031E-7	2.5225E-3	2.5225E-3	6.29624E-3	2.9829E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09418E0	-8.16846E-1	-7.98416E-1	-9.13146E0	-9.1418E0	4.91142E-3	9.33886E-2	2.72927E1	-3.26638E1	-3.25818E1	2.68238E1	1.20031E-7	2.51693E-3	2.51693E-3	6.32418E-3	3.0041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0934E0	-8.16774E-1	-7.98678E-1	-9.13174E0	-9.14171E0	4.91142E-3	9.33886E-2	2.72913E1	-3.26705E1	-3.26789E1	2.67956E1	1.20209E-7	2.52169E-3	2.52169E-3	6.29665E-3	3.00966E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09379E0	-8.16941E-1	-7.98607E-1	-9.13177E0	-9.14183E0	4.95911E-3	9.31978E-2	2.72955E1	-3.26524E1	-3.25569E1	2.6822E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09387E0	-8.16727E-1	-7.98798E-1	-9.13174E0	-9.14209E0	4.48227E-3	9.32932E-2	2.73225E1	-3.2653E1	-3.27654E1	2.68124E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.01871E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.0934E0	-8.1656E-1	-7.9875E-1	-9.13172E0	-9.14176E0	4.81606E-3	9.3317E-2	2.73202E1	-3.26758E1	-3.25663E1	2.68053E1	1.19861E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.02659E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09371E0	-8.16727E-1	-7.98297E-1	-9.13184E0	-9.14192E0	4.74453E-3	9.37223E-2	2.73234E1	-3.26756E1	-3.26225E1	2.68221E1	1.20092E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09379E0	-8.16822E-1	-7.98392E-1	-9.13191E0	-9.1418E0	4.88758E-3	9.35078E-2	2.73034E1	-3.26506E1	-3.26389E1	2.6802E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16584E-1	-7.98535E-1	-9.13155E0	-9.14178E0	5.03063E-3	9.35793E-2	2.73356E1	-3.26814E1	-3.26343E1	2.68108E1	1.19628E-7	2.51142E-3	2.51142E-3	6.33809E-3	3.00149E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16703E-1	-7.98678E-1	-9.13186E0	-9.14183E0	4.86374E-3	9.35555E-2	2.72696E1	-3.265E1	-3.26098E1	2.67902E1	1.20226E-7	2.51065E-3	2.51065E-3	6.33648E-3	3.00916E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09433E0	-8.16727E-1	-7.98488E-1	-9.13157E0	-9.14185E0	5.126E-3	9.34601E-2	2.73075E1	-3.26272E1	-3.26787E1	2.68268E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09364E0	-8.1656E-1	-7.98273E-1	-9.13167E0	-9.14159E0	5.00679E-3	9.36031E-2	2.72638E1	-3.26738E1	-3.26142E1	2.68106E1	1.19925E-7	2.52027E-3	2.52027E-3	6.30182E-3	3.02545E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09325E0	-8.16774E-1	-7.97987E-1	-9.13138E0	-9.14195E0	4.8399E-3	9.36508E-2	2.73225E1	-3.26741E1	-3.2584E1	2.67764E1	1.20106E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09449E0	-8.16655E-1	-7.98297E-1	-9.13124E0	-9.14171E0	4.95911E-3	9.36747E-2	2.7288E1	-3.26337E1	-3.26685E1	2.68215E1	1.19757E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16703E-1	-7.98178E-1	-9.13146E0	-9.14204E0	5.17368E-3	9.38177E-2	2.72751E1	-3.26458E1	-3.26561E1	2.6801E1	1.20321E-7	2.5143E-3	2.5143E-3	6.31012E-3	3.01934E-1
