[Scan]
initial_time=2016-01-28T18:38:00
final_time=2016-01-28T18:38:20
ip_count=19
run=1026
dataset=4
scan=284
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08741E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.38057E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=2.00864E-9
ql3_vset=
ql3_vmon=-9.13177E0
ql3_imon=4.05419E-10
ql4_vset=
ql4_vmon=-9.14209E0
ql4_imon=-1.36971E-10
mult1=-9.70427E-9
mult2=-2.76652E-9
rf_tmon=-3.16658E-3
rf_agc=3.42709E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.70861E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63925E0
bslens_imon=2.57696E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19511E1
lens5a_imon=1.98578E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12489E2
lens4a_imon=2.05023E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53465E1
cs_ef1b_imon=3.10537E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04637E2
lens23_imon=1.0223E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05231E1
cs_ea1_imon=1.23833E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40095E0
lens1_imon=2.58101E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64696E1
os_ef1alow_imon=2.96144E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03974E1
cs_ea2_imon=1.39691E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84921E1
cs_ef1a_imon=3.01617E-5
olens2_vset=9.7E-1
olens2_vmon=9.69744E-1
olens2_imon=1.19859E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11171E1
os_restr1_imon=4.30387E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.153E1
os_ea1_imon=2.4331E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63696E1
os_ef1bup_imon=3.08267E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23655E0
cs_ionrep_imon=9.65393E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01653E1
cs_anode1_imon=2.05891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.16289E-8
tplens_vset=1.4E-1
tplens_vmon=1.62453E0
tplens_imon=-6.32215E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26536E1
iondef3_imon=1.50438E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2644E1
iondef2_imon=1.59563E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98427E-4
ql6_vset=1.0E-1
ql6_vmon=9.32455E-2
ql6_imon=3.98242E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27981E0
ionrepsh_imon=9.42276E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33476E1
lens5b_imon=2.1776E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7488E1
cs_ef2b_imon=3.10334E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45826E0
os_ea2_imon=-7.6078E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06063E2
lens4b_imon=2.0057E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71041E1
cs_ef2a_imon=3.19822E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05996E0
os_ef2alow_imon=-2.80511E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89991E-1
os_ef2bup_imon=-5.37564E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11144E1
os_restr2_imon=3.3681E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23067E2
cs_ionfoca_imon=6.30455E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01754E1
cs_anode2_imon=2.1023E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73003E1
iondef1_imon=1.10369E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.07611E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.27878E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.48419E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.18015E0
cs_ionaccel_imon=-1.04547E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02098E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56297E1
einzel_imon=7.4243E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-9.19783E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39031E-4
mask2_vset=0.0E0
mask2_vmon=-1.86885E1
mask2_imon=-5.46772E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9263E3
multa_neg_imon=7.82487E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.52708E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.0462E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=5.91064E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33197E1
os_fil1_imon=9.45907E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07187E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61893E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30522E1
cs_fil1_imon=9.25297E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34127E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62343E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.43161E-2
os_fil2_imon=-2.74931E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79169E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.23628E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32274E-1
cs_fil2_imon=-2.70201E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.35921E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21423E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.02922E-1
chamber_ion_pmon=1.20122E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.90001E-1
res40_imon=-2.3875E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09325E0	-8.16607E-1	-7.98416E-1	-9.13129E0	-9.14199E0	4.64916E-3	9.38654E-2	2.73062E1	-3.26983E1	-3.263E1	2.68188E1	1.19958E-7	2.51596E-3	2.51596E-3	6.33565E-3	3.00466E-1
2.0E0	4.8E1	0.0E0	3.16E2	1.6E2	-2.09333E0	-8.16631E-1	-7.98488E-1	-9.13129E0	-9.14176E0	4.76837E-3	9.37462E-2	2.73213E1	-3.26678E1	-3.26535E1	2.68151E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0941E0	-8.16321E-1	-7.98726E-1	-9.13143E0	-9.14207E0	4.45843E-3	9.36508E-2	2.73004E1	-3.26655E1	-3.2616E1	2.68298E1	1.19829E-7	2.51725E-3	2.51725E-3	6.34164E-3	2.9944E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09441E0	-8.1625E-1	-7.98559E-1	-9.13169E0	-9.14156E0	4.55379E-3	9.33886E-2	2.72895E1	-3.26771E1	-3.26056E1	2.6801E1	1.20158E-7	2.51739E-3	2.51739E-3	6.35601E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.16321E-1	-7.98798E-1	-9.1316E0	-9.14176E0	4.48227E-3	9.35555E-2	2.72823E1	-3.26651E1	-3.26314E1	2.67992E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09503E0	-8.16655E-1	-7.98631E-1	-9.13153E0	-9.14192E0	4.48227E-3	9.33886E-2	2.73128E1	-3.2675E1	-3.2636E1	2.68366E1	1.20278E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16631E-1	-7.98821E-1	-9.13157E0	-9.14195E0	4.52995E-3	9.34839E-2	2.72829E1	-3.26615E1	-3.26735E1	2.67968E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09426E0	-8.1656E-1	-7.98607E-1	-9.13155E0	-9.14173E0	4.74453E-3	9.37223E-2	2.72763E1	-3.26669E1	-3.25918E1	2.68076E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16321E-1	-7.98845E-1	-9.13179E0	-9.14171E0	4.64916E-3	9.33886E-2	2.73255E1	-3.26554E1	-3.25978E1	2.68244E1	1.20069E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.02133E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16631E-1	-7.98869E-1	-9.13186E0	-9.14178E0	4.60148E-3	9.3174E-2	2.73009E1	-3.26561E1	-3.26831E1	2.6789E1	1.2033E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09464E0	-8.16703E-1	-7.9875E-1	-9.13155E0	-9.14149E0	4.74453E-3	9.31263E-2	2.7321E1	-3.26679E1	-3.26266E1	2.68034E1	1.20278E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01871E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0951E0	-8.16965E-1	-7.98559E-1	-9.13155E0	-9.1418E0	4.8399E-3	9.3317E-2	2.72606E1	-3.26374E1	-3.26452E1	2.68178E1	1.20311E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16846E-1	-7.98464E-1	-9.13169E0	-9.14176E0	4.57764E-3	9.36985E-2	2.73134E1	-3.26626E1	-3.2639E1	2.68036E1	1.19861E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09426E0	-8.16917E-1	-7.98559E-1	-9.13165E0	-9.14173E0	4.62532E-3	9.377E-2	2.73213E1	-3.26561E1	-3.2599E1	2.68076E1	1.19749E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.01223E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09595E0	-8.16965E-1	-7.98416E-1	-9.13143E0	-9.1418E0	5.05447E-3	9.35316E-2	2.72961E1	-3.26603E1	-3.262E1	2.68106E1	1.20017E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.02396E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16941E-1	-7.98583E-1	-9.13138E0	-9.14204E0	4.8399E-3	9.36747E-2	2.72809E1	-3.26567E1	-3.26425E1	2.6828E1	1.20017E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.02396E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16917E-1	-7.98702E-1	-9.13172E0	-9.14237E0	4.74453E-3	9.36508E-2	2.73075E1	-3.2639E1	-3.26207E1	2.68424E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16441E-1	-7.98702E-1	-9.13157E0	-9.14192E0	4.673E-3	9.34124E-2	2.73021E1	-3.26826E1	-3.26384E1	2.68082E1	1.20055E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00966E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09549E0	-8.16584E-1	-7.98655E-1	-9.13188E0	-9.14192E0	4.93526E-3	9.34124E-2	2.73135E1	-3.26603E1	-3.26188E1	2.68112E1	1.20106E-7	2.52276E-3	2.52276E-3	6.28592E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.1656E-1	-7.98678E-1	-9.13177E0	-9.14209E0	4.91142E-3	9.32455E-2	2.73003E1	-3.2644E1	-3.26536E1	2.68016E1	1.20122E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.02922E-1
