[Scan]
initial_time=2016-01-28T18:38:55
final_time=2016-01-28T18:39:15
ip_count=19
run=1026
dataset=4
scan=286
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09426E0
qbias_imon=-1.08778E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.37921E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.05157E-9
ql3_vset=
ql3_vmon=-9.1315E0
ql3_imon=4.54605E-10
ql4_vset=
ql4_vmon=-9.14178E0
ql4_imon=-1.11651E-10
mult1=-9.4755E-9
mult2=-2.71462E-9
rf_tmon=-2.94427E-3
rf_agc=3.42108E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=1.7331E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66562E0
bslens_imon=2.56095E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19942E1
lens5a_imon=1.97908E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12473E2
lens4a_imon=2.05174E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5369E1
cs_ef1b_imon=3.10033E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04587E2
lens23_imon=1.02114E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04882E1
cs_ea1_imon=1.2351E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40913E0
lens1_imon=2.59635E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64608E1
os_ef1alow_imon=2.97383E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0372E1
cs_ea2_imon=1.40534E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84273E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.19478E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.2986E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15011E1
os_ea1_imon=2.42221E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63658E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25151E0
cs_ionrep_imon=9.74242E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91879E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01925E1
cs_anode1_imon=2.05046E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20513E0
olens4_imon=3.16138E-8
tplens_vset=1.4E-1
tplens_vmon=1.64025E0
tplens_imon=-2.31638E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26554E1
iondef3_imon=1.50621E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26813E1
iondef2_imon=1.57594E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98413E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.97463E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27392E0
ionrepsh_imon=9.32123E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33917E1
lens5b_imon=2.16348E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74744E1
cs_ef2b_imon=3.1257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47331E0
os_ea2_imon=-6.56367E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06066E2
lens4b_imon=2.00566E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.18165E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08294E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.85647E-1
os_ef2bup_imon=-5.33393E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.37557E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.32016E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01861E1
cs_anode2_imon=2.10085E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73195E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.08851E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.23913E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.44238E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10292E0
cs_ionaccel_imon=-1.20186E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56341E1
einzel_imon=7.74692E-6
window_vset=0.0E0
window_vmon=1.72508E-1
window_imon=-1.01419E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39042E-4
mask2_vset=0.0E0
mask2_vmon=-1.86483E1
mask2_imon=-6.77094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92628E3
multa_neg_imon=7.4241E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9371E3
defgrida_imon=6.51094E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50128E3
multb_neg_imon=7.24713E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.38784E0
defgridb_imon=6.07559E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.42235E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06669E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61637E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30542E1
cs_fil1_imon=9.24748E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33896E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62275E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47119E-2
os_fil2_imon=-2.52438E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86602E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.29355E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33772E-1
cs_fil2_imon=-2.64602E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.28681E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21616E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31837E-3
inlet_lpb_pmon=3.01871E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51498E-3
foreline_cvt_pmon=2.51498E-3
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91063E-1
res40_imon=-2.49813E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16751E-1	-7.98678E-1	-9.13148E0	-9.14209E0	4.86374E-3	9.36747E-2	2.73045E1	-3.26452E1	-3.26194E1	2.6807E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.0071E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16727E-1	-7.98512E-1	-9.13146E0	-9.14228E0	4.72069E-3	9.36747E-2	2.72955E1	-3.26795E1	-3.2611E1	2.681E1	1.19965E-7	2.5199E-3	2.5199E-3	6.33486E-3	2.9978E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09495E0	-8.16751E-1	-7.98726E-1	-9.13155E0	-9.1419E0	5.14984E-3	9.36985E-2	2.73263E1	-3.26738E1	-3.26673E1	2.68142E1	1.20278E-7	2.5199E-3	2.5199E-3	6.27461E-3	3.00824E-1
4.0E0	3.0E0	0.0E0	6.55E2	3.98E2	-2.09557E0	-8.16751E-1	-7.98917E-1	-9.13162E0	-9.14192E0	5.05447E-3	9.34362E-2	2.72907E1	-3.26597E1	-3.25888E1	2.68028E1	1.20055E-7	2.52599E-3	2.52599E-3	6.31278E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09418E0	-8.1656E-1	-7.9844E-1	-9.13146E0	-9.14204E0	4.86374E-3	9.34601E-2	2.73243E1	-3.26843E1	-3.26158E1	2.68226E1	1.19913E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09533E0	-8.16584E-1	-7.98535E-1	-9.13157E0	-9.14209E0	5.05447E-3	9.35078E-2	2.73225E1	-3.26717E1	-3.26398E1	2.68142E1	1.20069E-7	2.51443E-3	2.51443E-3	6.32386E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09549E0	-8.16584E-1	-7.98774E-1	-9.13155E0	-9.1419E0	4.8399E-3	9.34839E-2	2.72532E1	-3.26585E1	-3.26313E1	2.68233E1	1.20036E-7	2.51322E-3	2.51322E-3	6.32099E-3	3.00896E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09456E0	-8.1687E-1	-7.98821E-1	-9.13134E0	-9.14168E0	4.98295E-3	9.37223E-2	2.73175E1	-3.26608E1	-3.26024E1	2.6822E1					
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09371E0	-8.16727E-1	-7.98917E-1	-9.13143E0	-9.14178E0	4.8399E-3	9.33409E-2	2.73135E1	-3.26927E1	-3.26104E1	2.68382E1	1.198E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.99941E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16607E-1	-7.9906E-1	-9.13146E0	-9.14207E0	5.19753E-3	9.32932E-2	2.72967E1	-3.26621E1	-3.2623E1	2.68232E1	1.20435E-7	2.51225E-3	2.51225E-3	6.33486E-3	3.01085E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09394E0	-8.16512E-1	-7.98965E-1	-9.13124E0	-9.14218E0	4.95911E-3	9.3317E-2	2.72786E1	-3.26667E1	-3.26809E1	2.67984E1	1.19809E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00302E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16321E-1	-7.98917E-1	-9.13098E0	-9.14207E0	5.05447E-3	9.3627E-2	2.72907E1	-3.265E1	-3.26398E1	2.67704E1	1.20158E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.01223E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09371E0	-8.16417E-1	-7.99036E-1	-9.1315E0	-9.14221E0	5.05447E-3	9.33886E-2	2.7344E1	-3.27056E1	-3.26272E1	2.6801E1	1.19809E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.01347E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09418E0	-8.16464E-1	-7.9875E-1	-9.13153E0	-9.14211E0	4.86374E-3	9.33647E-2	2.72901E1	-3.26627E1	-3.26284E1	2.6816E1	1.2026E-7	2.5131E-3	2.5131E-3	6.31278E-3	3.0071E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16631E-1	-7.98416E-1	-9.1316E0	-9.14207E0	4.88758E-3	9.34601E-2	2.73273E1	-3.26338E1	-3.26729E1	2.68094E1	1.20414E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00453E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09526E0	-8.16417E-1	-7.98559E-1	-9.13148E0	-9.14209E0	5.14984E-3	9.34839E-2	2.73267E1	-3.26308E1	-3.26579E1	2.67613E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
2.0E1	7.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16154E-1	-7.98535E-1	-9.13169E0	-9.14216E0	4.98295E-3	9.3627E-2	2.72939E1	-3.26685E1	-3.26402E1	2.68146E1	1.19913E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09487E0	-8.16274E-1	-7.98464E-1	-9.13165E0	-9.14199E0	4.95911E-3	9.34601E-2	2.72796E1	-3.26654E1	-3.26266E1	2.68047E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31288E-3	2.9978E-1
2.2E1	2.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16345E-1	-7.98392E-1	-9.13143E0	-9.14199E0	4.52995E-3	9.35078E-2	2.72985E1	-3.26482E1	-3.2629E1	2.67818E1	1.19891E-7	2.52765E-3	2.52765E-3	6.31798E-3	3.01609E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09426E0	-8.16345E-1	-7.98416E-1	-9.1315E0	-9.14178E0	4.57764E-3	9.35793E-2	2.73195E1	-3.26813E1	-3.26554E1	2.68016E1	1.19913E-7	2.51498E-3	2.51498E-3	6.31837E-3	3.01871E-1
