[Scan]
initial_time=2016-01-28T18:41:12
final_time=2016-01-28T18:41:32
ip_count=19
run=1026
dataset=4
scan=291
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09549E0
qbias_imon=-1.08765E-4
ql1_vset=
ql1_vmon=-8.16584E-1
ql1_imon=1.38321E-8
ql2_vset=
ql2_vmon=-7.98416E-1
ql2_imon=2.0457E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=4.24588E-10
ql4_vset=
ql4_vmon=-9.14214E0
ql4_imon=-1.08302E-10
mult1=-9.9812E-9
mult2=-2.74256E-9
rf_tmon=-4.75876E-3
rf_agc=3.28769E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.38826E-3
ql5_imon=1.71762E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66614E0
bslens_imon=2.58462E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2077E1
lens5a_imon=2.00218E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12501E2
lens4a_imon=2.05154E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53676E1
cs_ef1b_imon=3.10992E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0521E1
cs_ea1_imon=1.2455E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42363E0
lens1_imon=2.6459E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6456E1
os_ef1alow_imon=2.96216E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.40303E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84358E1
cs_ef1a_imon=3.00865E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.20475E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11238E1
os_restr1_imon=4.28878E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14933E1
os_ea1_imon=2.45135E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63755E1
os_ef1bup_imon=3.09046E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2557E0
cs_ionrep_imon=9.89546E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.03774E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.17241E-8
tplens_vset=1.4E-1
tplens_vmon=1.615E0
tplens_imon=-3.93075E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26543E1
iondef3_imon=1.50361E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26579E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=3.96104E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=9.4881E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.17485E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74669E1
cs_ef2b_imon=3.13479E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45217E0
os_ea2_imon=-6.59841E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06079E2
lens4b_imon=2.00388E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7136E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05696E0
os_ef2alow_imon=-2.59067E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.83008E-1
os_ef2bup_imon=-5.27563E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10751E1
os_restr2_imon=3.37265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.10405E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73207E1
iondef1_imon=1.08111E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68298E1
iondef4_imon=1.07981E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.24896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81665E-1
olens1_imon=7.47725E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16017E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02066E2
cs_ionfocb_imon=1.47194E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56399E1
einzel_imon=7.78515E-6
window_vset=0.0E0
window_vmon=1.88511E-1
window_imon=-1.17792E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39279E-4
mask2_vset=0.0E0
mask2_vmon=-1.86452E1
mask2_imon=-6.80569E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.33955E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.67263E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.23501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34141E0
defgridb_imon=6.36621E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3318E1
os_fil1_imon=9.38582E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07455E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61339E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30558E1
cs_fil1_imon=9.2568E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34968E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62141E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94711E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.65327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.23349E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.23872E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21621E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.30771E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=173
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09495E0	-8.16536E-1	-7.98154E-1	-9.13172E0	-9.14192E0	4.43459E-3	9.35555E-2	2.72642E1	-3.26549E1	-3.26356E1	2.68094E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	2.97445E-1
2.0E0	3.7E1	0.0E0	3.16E2	1.6E2	-2.09557E0	-8.16464E-1	-7.98392E-1	-9.1315E0	-9.14197E0	4.3869E-3	9.35316E-2	2.73309E1	-3.26621E1	-3.26296E1	2.68232E1	1.19851E-7	2.51417E-3	2.51417E-3	6.31278E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16417E-1	-7.98225E-1	-9.13174E0	-9.14202E0	4.8399E-3	9.39608E-2	2.73074E1	-3.26741E1	-3.267E1	2.67972E1	1.20122E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.00041E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.0958E0	-8.1656E-1	-7.98368E-1	-9.13167E0	-9.14214E0	4.76837E-3	9.38177E-2	2.73381E1	-3.26773E1	-3.26331E1	2.67914E1	1.20092E-7	2.52659E-3	2.52659E-3	6.31269E-3	3.02368E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16846E-1	-7.9844E-1	-9.13172E0	-9.14204E0	4.91142E-3	9.38654E-2	2.72967E1	-3.26711E1	-3.2599E1	2.67986E1	1.20174E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.03712E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16512E-1	-7.98535E-1	-9.13117E0	-9.14168E0	4.76837E-3	9.37462E-2	2.73165E1	-3.26374E1	-3.26224E1	2.68142E1	1.20209E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.03286E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16727E-1	-7.98655E-1	-9.13138E0	-9.14209E0	4.86374E-3	9.36031E-2	2.73213E1	-3.26579E1	-3.26579E1	2.68106E1	1.19965E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09565E0	-8.16464E-1	-7.98798E-1	-9.13124E0	-9.14199E0	5.07832E-3	9.35078E-2	2.72927E1	-3.2662E1	-3.26054E1	2.681E1	1.20226E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16584E-1	-7.98941E-1	-9.1311E0	-9.14171E0	5.126E-3	9.36508E-2	2.73473E1	-3.26468E1	-3.26303E1	2.68358E1	1.19861E-7	2.51662E-3	2.51662E-3	6.34037E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.0951E0	-8.16464E-1	-7.98631E-1	-9.13122E0	-9.1419E0	4.76837E-3	9.37462E-2	2.73237E1	-3.26254E1	-3.26645E1	2.67998E1	1.20031E-7	2.5225E-3	2.5225E-3	6.33538E-3	3.00676E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09572E0	-8.1656E-1	-7.98893E-1	-9.1311E0	-9.14202E0	4.74453E-3	9.38892E-2	2.72769E1	-3.26579E1	-3.26422E1	2.67986E1	1.20106E-7	2.53139E-3	2.53139E-3	6.31817E-3	2.98665E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09518E0	-8.16607E-1	-7.98917E-1	-9.13131E0	-9.14245E0	4.86374E-3	9.36031E-2	2.73128E1	-3.26703E1	-3.26644E1	2.68186E1	1.20174E-7	2.5199E-3	2.5199E-3	6.34588E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.0951E0	-8.16679E-1	-7.98702E-1	-9.1315E0	-9.14176E0	4.72069E-3	9.34601E-2	2.73117E1	-3.26344E1	-3.265E1	2.682E1	1.19851E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00966E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09533E0	-8.16464E-1	-7.98607E-1	-9.13153E0	-9.14211E0	4.57764E-3	9.33886E-2	2.73057E1	-3.26915E1	-3.2603E1	2.68169E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01609E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09533E0	-8.16607E-1	-7.98559E-1	-9.13148E0	-9.14207E0	4.69685E-3	9.36508E-2	2.72955E1	-3.26663E1	-3.26524E1	2.68142E1	1.19757E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09549E0	-8.16393E-1	-7.98273E-1	-9.13134E0	-9.14187E0	4.95911E-3	9.35316E-2	2.73145E1	-3.26307E1	-3.26744E1	2.68034E1	1.19902E-7	2.52384E-3	2.52384E-3	6.28592E-3	2.99686E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09557E0	-8.16607E-1	-7.98774E-1	-9.13138E0	-9.14211E0	4.93526E-3	9.36031E-2	2.72949E1	-3.26512E1	-3.26326E1	2.68028E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33977E-3	3.00197E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16154E-1	-7.98535E-1	-9.13124E0	-9.14192E0	4.88758E-3	9.35793E-2	2.72668E1	-3.26838E1	-3.26148E1	2.68082E1	1.19913E-7	2.51116E-3	2.51116E-3	6.35692E-3	3.02659E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09603E0	-8.16154E-1	-7.98702E-1	-9.13122E0	-9.14199E0	4.81606E-3	9.36508E-2	2.7308E1	-3.26762E1	-3.26296E1	2.68202E1	1.19749E-7	2.52492E-3	2.52492E-3	6.31278E-3	3.03804E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09549E0	-8.16584E-1	-7.98416E-1	-9.13138E0	-9.14214E0	5.38826E-3	9.35555E-2	2.73207E1	-3.26579E1	-3.26543E1	2.68298E1	1.19861E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.02133E-1
