[Scan]
initial_time=2016-01-28T18:41:39
final_time=2016-01-28T18:41:59
ip_count=19
run=1026
dataset=4
scan=292
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08787E-4
ql1_vset=
ql1_vmon=-8.16321E-1
ql1_imon=1.38242E-8
ql2_vset=
ql2_vmon=-7.98297E-1
ql2_imon=1.97201E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.69334E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.15216E-10
mult1=-9.51162E-9
mult2=-2.78049E-9
rf_tmon=-4.54247E-3
rf_agc=3.30572E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.71608E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67093E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20414E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04874E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53622E1
cs_ef1b_imon=3.10271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04644E2
lens23_imon=1.02057E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04959E1
cs_ea1_imon=1.24748E-5
lens1_vset=-5.0E0
lens1_vmon=-5.35604E0
lens1_imon=2.59989E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97009E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03932E1
cs_ea2_imon=1.41808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84298E1
cs_ef1a_imon=2.99784E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.19399E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11424E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.44345E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63539E1
os_ef1bup_imon=3.08253E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2285E0
cs_ionrep_imon=9.63977E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02037E1
cs_anode1_imon=2.05756E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.17106E-8
tplens_vset=1.4E-1
tplens_vmon=1.64733E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26597E1
iondef3_imon=1.48498E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26903E1
iondef2_imon=1.577E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98364E-4
ql6_vset=1.0E-1
ql6_vmon=9.34601E-2
ql6_imon=3.99686E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27687E0
ionrepsh_imon=9.52651E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3387E1
lens5b_imon=2.17127E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74477E1
cs_ef2b_imon=3.11929E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44618E0
os_ea2_imon=-6.66986E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06085E2
lens4b_imon=2.00474E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.19533E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07678E0
os_ef2alow_imon=-2.73123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.38022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.29857E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01863E1
cs_anode2_imon=2.08459E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.09387E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67956E1
iondef4_imon=1.0762E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.25058E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.47425E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10491E0
cs_ionaccel_imon=-1.08421E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0211E2
cs_ionfocb_imon=1.47266E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.68424E-6
window_vset=0.0E0
window_vmon=1.59078E-1
window_imon=-9.54471E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82609E2
mask1_imon=2.3908E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9265E3
multa_neg_imon=7.69664E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93729E3
defgrida_imon=6.59588E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50154E3
multb_neg_imon=6.9746E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37898E0
defgridb_imon=6.14992E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33176E1
os_fil1_imon=9.40156E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07654E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6194E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30474E1
cs_fil1_imon=9.24989E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31845E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61825E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25591E-2
os_fil2_imon=-2.66597E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96513E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.21635E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.49778E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.13972E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21492E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.42183E-1
res40_imon=-2.47534E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.17084E-1	-7.98798E-1	-9.13179E0	-9.14226E0	5.07832E-3	9.37462E-2	2.73099E1	-3.26579E1	-3.26717E1	2.68007E1	1.20122E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.01609E-1
2.0E0	3.2E1	0.0E0	3.16E2	1.6E2	-2.09619E0	-8.16822E-1	-7.98655E-1	-9.13157E0	-9.14207E0	5.10216E-3	9.35316E-2	2.73143E1	-3.26695E1	-3.26015E1	2.68182E1	1.20004E-7	2.51096E-3	2.51096E-3	6.31278E-3	3.0148E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09526E0	-8.17156E-1	-7.98726E-1	-9.13165E0	-9.14223E0	5.43594E-3	9.377E-2	2.7275E1	-3.26671E1	-3.26764E1	2.67972E1	1.20084E-7	2.51804E-3	2.51804E-3	6.34661E-3	3.00144E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09503E0	-8.17275E-1	-7.98321E-1	-9.13172E0	-9.14216E0	5.126E-3	9.33409E-2	2.72859E1	-3.26573E1	-3.25912E1	2.67992E1	1.19953E-7	2.52707E-3	2.52707E-3	6.31278E-3	2.9714E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09533E0	-8.17156E-1	-7.98225E-1	-9.13172E0	-9.14204E0	5.36442E-3	9.35078E-2	2.73137E1	-3.26597E1	-3.26125E1	2.68294E1	1.20017E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-2.0948E0	-8.17037E-1	-7.98512E-1	-9.13157E0	-9.14207E0	5.07832E-3	9.35316E-2	2.73033E1	-3.26675E1	-3.26122E1	2.68052E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00302E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09472E0	-8.16774E-1	-7.98583E-1	-9.13105E0	-9.14223E0	5.126E-3	9.377E-2	2.7266E1	-3.26705E1	-3.26585E1	2.682E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0941E0	-8.16727E-1	-7.98392E-1	-9.13136E0	-9.14199E0	5.07832E-3	9.34839E-2	2.72922E1	-3.26691E1	-3.26327E1	2.68273E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.03449E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09456E0	-8.16512E-1	-7.98607E-1	-9.13117E0	-9.14197E0	4.93526E-3	9.36031E-2	2.72623E1	-3.26448E1	-3.25949E1	2.68031E1	1.1993E-7	2.51886E-3	2.51886E-3	6.3282E-3	3.02479E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09433E0	-8.16178E-1	-7.98249E-1	-9.13112E0	-9.14164E0	5.4121E-3	9.36985E-2	2.73466E1	-3.26386E1	-3.26939E1	2.68483E1	1.1995E-7	2.51874E-3	2.51874E-3	6.34815E-3	3.01748E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09441E0	-8.1625E-1	-7.9813E-1	-9.13115E0	-9.14197E0	5.26905E-3	9.36747E-2	2.73484E1	-3.26687E1	-3.26374E1	2.67963E1	1.19653E-7	2.52757E-3	2.52757E-3	6.32936E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16393E-1	-7.98416E-1	-9.13124E0	-9.14192E0	5.38826E-3	9.35555E-2	2.73399E1	-3.26543E1	-3.26404E1	2.68082E1	1.20069E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16679E-1	-7.98082E-1	-9.13157E0	-9.14164E0	5.29289E-3	9.33886E-2	2.73399E1	-3.26506E1	-3.26002E1	2.68016E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00563E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09657E0	-8.16464E-1	-7.98297E-1	-9.13153E0	-9.14154E0	5.34058E-3	9.36985E-2	2.73141E1	-3.26981E1	-3.26074E1	2.67982E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.02922E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09642E0	-8.16345E-1	-7.98798E-1	-9.13165E0	-9.1419E0	5.29289E-3	9.34124E-2	2.72961E1	-3.26825E1	-3.2623E1	2.67982E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09572E0	-8.16751E-1	-7.98488E-1	-9.13146E0	-9.14164E0	5.36442E-3	9.31978E-2	2.73021E1	-3.26189E1	-3.26667E1	2.68046E1	1.19705E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00302E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16703E-1	-7.98559E-1	-9.13155E0	-9.14166E0	5.03063E-3	9.35316E-2	2.72991E1	-3.26554E1	-3.26464E1	2.68124E1	1.19861E-7	2.52647E-3	2.52647E-3	6.31288E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16417E-1	-7.98535E-1	-9.13141E0	-9.14185E0	5.03063E-3	9.33409E-2	2.72835E1	-3.26747E1	-3.25948E1	2.6795E1	1.20069E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.97963E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09557E0	-8.16488E-1	-7.98726E-1	-9.1316E0	-9.14204E0	5.03063E-3	9.36031E-2	2.73145E1	-3.26614E1	-3.26413E1	2.6816E1	1.2014E-7	2.52243E-3	2.52243E-3	6.29926E-3	3.01544E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16321E-1	-7.98297E-1	-9.13148E0	-9.14183E0	4.673E-3	9.34601E-2	2.73099E1	-3.26903E1	-3.26597E1	2.67956E1					
