[Scan]
initial_time=2016-01-28T18:42:07
final_time=2016-01-28T18:42:27
ip_count=19
run=1026
dataset=4
scan=293
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08786E-4
ql1_vset=
ql1_vmon=-8.16846E-1
ql1_imon=1.37875E-8
ql2_vset=
ql2_vmon=-7.98368E-1
ql2_imon=2.02014E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.9314E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.01364E-10
mult1=-9.75944E-9
mult2=-2.72914E-9
rf_tmon=-4.65105E-3
rf_agc=3.25186E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=1.69319E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67152E0
bslens_imon=2.63528E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19883E1
lens5a_imon=1.99784E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12475E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53556E1
cs_ef1b_imon=3.10199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.02333E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05035E1
cs_ea1_imon=1.24076E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40972E0
lens1_imon=2.72023E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64759E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04068E1
cs_ea2_imon=1.42481E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84322E1
cs_ef1a_imon=3.00901E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.20894E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1131E1
os_restr1_imon=4.29563E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15264E1
os_ea1_imon=2.43248E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63635E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22024E0
cs_ionrep_imon=9.87691E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93385E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.04134E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.16263E-8
tplens_vset=1.4E-1
tplens_vmon=1.64202E0
tplens_imon=-3.4136E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26325E1
iondef3_imon=1.5048E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26526E1
iondef2_imon=1.57948E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=3.99025E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26154E0
ionrepsh_imon=9.2469E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33764E1
lens5b_imon=2.18295E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74417E1
cs_ef2b_imon=3.11965E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47154E0
os_ea2_imon=-5.18331E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06086E2
lens4b_imon=2.00559E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05816E0
os_ef2alow_imon=-2.6159E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8481E-1
os_ef2bup_imon=-5.22517E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10889E1
os_restr2_imon=3.37553E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01797E1
cs_anode2_imon=2.10586E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72933E1
iondef1_imon=1.08963E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68024E1
iondef4_imon=1.09134E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.37468E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82666E-1
olens1_imon=7.50892E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08509E0
cs_ionaccel_imon=-1.10223E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.4728E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56075E1
einzel_imon=7.63378E-6
window_vset=0.0E0
window_vmon=1.90914E-1
window_imon=-1.05178E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86554E1
mask2_imon=-6.58946E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92643E3
multa_neg_imon=7.2259E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.84364E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50138E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42327E0
defgridb_imon=6.06851E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33194E1
os_fil1_imon=9.44426E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06993E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61868E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30452E1
cs_fil1_imon=9.25914E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31364E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62447E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35722E-2
os_fil2_imon=-2.64795E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.30241E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33277E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.01608E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2162E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.6621E-1
res40_imon=-2.40687E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=157
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16536E-1	-7.98726E-1	-9.13143E0	-9.14195E0	4.76837E-3	9.37462E-2	2.73069E1	-3.26344E1	-3.26254E1	2.67998E1	1.20055E-7	2.50989E-3	2.50989E-3	6.3074E-3	3.01995E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.0965E0	-8.16917E-1	-7.98607E-1	-9.13155E0	-9.14195E0	5.07832E-3	9.33647E-2	2.73314E1	-3.26254E1	-3.26285E1	2.6792E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.03185E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09634E0	-8.16703E-1	-7.98869E-1	-9.13155E0	-9.14207E0	4.86374E-3	9.39131E-2	2.729E1	-3.26527E1	-3.26538E1	2.68094E1	1.20297E-7	2.51804E-3	2.51804E-3	6.31299E-3	3.01209E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09642E0	-8.16703E-1	-7.98655E-1	-9.1316E0	-9.14242E0	4.81606E-3	9.38177E-2	2.72721E1	-3.26518E1	-3.26849E1	2.67806E1	1.2026E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.00966E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09696E0	-8.16488E-1	-7.98845E-1	-9.13148E0	-9.14245E0	4.98295E-3	9.39608E-2	2.73428E1	-3.26561E1	-3.2626E1	2.681E1	1.19953E-7	2.51739E-3	2.51739E-3	6.30202E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16679E-1	-7.98917E-1	-9.13169E0	-9.14209E0	4.72069E-3	9.35078E-2	2.73247E1	-3.26738E1	-3.26242E1	2.67956E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09541E0	-8.16727E-1	-7.98726E-1	-9.1315E0	-9.14237E0	4.86374E-3	9.34839E-2	2.72945E1	-3.26313E1	-3.25936E1	2.68154E1	1.19705E-7	2.51771E-3	2.51771E-3	6.34037E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09634E0	-8.17156E-1	-7.98583E-1	-9.1316E0	-9.14223E0	5.05447E-3	9.377E-2	2.72967E1	-3.26687E1	-3.26416E1	2.67992E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.0148E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16917E-1	-7.98893E-1	-9.13141E0	-9.14226E0	4.86374E-3	9.38177E-2	2.73322E1	-3.26573E1	-3.26225E1	2.67873E1	1.19913E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00302E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09595E0	-8.16917E-1	-7.98821E-1	-9.13172E0	-9.14202E0	5.29289E-3	9.38892E-2	2.73075E1	-3.26717E1	-3.26122E1	2.6789E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	2.9943E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16917E-1	-7.98988E-1	-9.13186E0	-9.14197E0	5.24521E-3	9.39369E-2	2.73045E1	-3.26685E1	-3.26048E1	2.68052E1	1.19601E-7	2.5199E-3	2.5199E-3	6.31837E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09526E0	-8.16917E-1	-7.98464E-1	-9.13134E0	-9.14202E0	5.14984E-3	9.38654E-2	2.7291E1	-3.26689E1	-3.26591E1	2.68088E1	1.20069E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.9978E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09595E0	-8.16798E-1	-7.98416E-1	-9.13146E0	-9.1419E0	4.93526E-3	9.36508E-2	2.72957E1	-3.26791E1	-3.26154E1	2.681E1	1.20069E-7	2.51225E-3	2.51225E-3	6.31288E-3	2.9952E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.0958E0	-8.16917E-1	-7.98655E-1	-9.1315E0	-9.1418E0	4.8399E-3	9.35555E-2	2.73045E1	-3.2649E1	-3.26679E1	2.67868E1	1.20158E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16846E-1	-7.98583E-1	-9.13157E0	-9.14187E0	5.14984E-3	9.3627E-2	2.72979E1	-3.26741E1	-3.26086E1	2.67956E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.98222E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09533E0	-8.1656E-1	-7.98655E-1	-9.13162E0	-9.14204E0	4.81606E-3	9.34839E-2	2.73207E1	-3.26651E1	-3.2638E1	2.68328E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01609E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.16417E-1	-7.98416E-1	-9.13136E0	-9.14178E0	5.19753E-3	9.35555E-2	2.72732E1	-3.26677E1	-3.26341E1	2.67931E1	1.198E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.01223E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16631E-1	-7.98345E-1	-9.13138E0	-9.14204E0	5.05447E-3	9.34362E-2	2.73147E1	-3.26741E1	-3.26567E1	2.6831E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32356E-3	3.00453E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09503E0	-8.16512E-1	-7.98321E-1	-9.13134E0	-9.14221E0	5.05447E-3	9.36747E-2	2.73299E1	-3.26602E1	-3.25971E1	2.68196E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33977E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16846E-1	-7.98368E-1	-9.13155E0	-9.14199E0	5.00679E-3	9.36031E-2	2.72933E1	-3.26526E1	-3.26325E1	2.68024E1	1.19953E-7	2.51203E-3	2.51203E-3	6.3074E-3	3.00453E-1
