[Scan]
initial_time=2016-01-28T18:42:34
final_time=2016-01-28T18:42:54
ip_count=19
run=1026
dataset=4
scan=294
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08805E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.38012E-8
ql2_vset=
ql2_vmon=-7.98726E-1
ql2_imon=1.99876E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=3.93605E-10
ql4_vset=
ql4_vmon=-9.14199E0
ql4_imon=-1.0494E-10
mult1=-9.61021E-9
mult2=-2.81141E-9
rf_tmon=-4.8032E-3
rf_agc=3.20979E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=1.74255E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63667E0
bslens_imon=2.54673E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18801E1
lens5a_imon=1.97289E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.0492E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53668E1
cs_ef1b_imon=3.09854E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04615E2
lens23_imon=1.02132E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05355E1
cs_ea1_imon=1.24821E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39766E0
lens1_imon=2.67161E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64615E1
os_ef1alow_imon=2.97653E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03672E1
cs_ea2_imon=1.40174E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84232E1
cs_ef1a_imon=3.00086E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.19962E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11273E1
os_restr1_imon=4.29167E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15049E1
os_ea1_imon=2.43017E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63579E1
os_ef1bup_imon=3.09143E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23496E0
cs_ionrep_imon=9.69066E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91898E2
cs_nozzle_imon=1.93358E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01622E1
cs_anode1_imon=2.05548E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.17958E-8
tplens_vset=1.4E-1
tplens_vmon=1.66959E0
tplens_imon=-3.98992E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26132E1
iondef3_imon=1.50385E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26499E1
iondef2_imon=1.56519E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98724E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.97223E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24904E0
ionrepsh_imon=9.40417E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33903E1
lens5b_imon=2.17013E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7472E1
cs_ef2b_imon=3.13222E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49329E0
os_ea2_imon=-7.73635E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.0059E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7127E1
cs_ef2a_imon=3.17639E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05768E0
os_ef2alow_imon=-2.6342E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.69562E-1
os_ef2bup_imon=-5.3588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10693E1
os_restr2_imon=3.37849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.29083E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01921E1
cs_anode2_imon=2.09066E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73284E1
iondef1_imon=1.11488E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.08391E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.23029E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.45672E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11579E0
cs_ionaccel_imon=-9.79976E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02091E2
cs_ionfocb_imon=1.47301E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56168E1
einzel_imon=7.59053E-6
window_vset=0.0E0
window_vmon=1.79547E-1
window_imon=-1.15588E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82642E2
mask1_imon=2.39114E-4
mask2_vset=0.0E0
mask2_vmon=-1.86525E1
mask2_imon=-7.96589E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92596E3
multa_neg_imon=8.4896E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.80738E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.10122E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.10018E0
defgridb_imon=6.03973E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.42982E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07847E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61726E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30499E1
cs_fil1_imon=9.26121E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33005E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62831E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21315E-2
os_fil2_imon=-2.76854E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.84731E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.4185E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33013E-1
cs_fil2_imon=-2.59389E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27968E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21763E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.26985E-3
inlet_lpb_pmon=2.99686E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09285E-1
res40_imon=-2.53689E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=244
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09595E0	-8.16679E-1	-7.98559E-1	-9.1315E0	-9.14183E0	5.19753E-3	9.35555E-2	2.73267E1	-3.26845E1	-3.26266E1	2.68182E1	1.20084E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.01209E-1
2.0E0	3.5E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16822E-1	-7.98798E-1	-9.13136E0	-9.14197E0	5.05447E-3	9.35316E-2	2.73333E1	-3.26579E1	-3.26543E1	2.6795E1	1.20005E-7	2.52222E-3	2.52222E-3	6.31321E-3	2.9926E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16631E-1	-7.98512E-1	-9.13117E0	-9.14176E0	5.17368E-3	9.3627E-2	2.72974E1	-3.26685E1	-3.26856E1	2.67885E1	1.19965E-7	2.51771E-3	2.51771E-3	6.29645E-3	3.00563E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09456E0	-8.16655E-1	-7.98535E-1	-9.13126E0	-9.14202E0	5.10216E-3	9.3317E-2	2.72892E1	-3.26608E1	-3.25924E1	2.6801E1	1.20004E-7	2.51203E-3	2.51203E-3	6.29665E-3	3.0071E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09472E0	-8.16679E-1	-7.98631E-1	-9.13146E0	-9.14192E0	4.95911E-3	9.29594E-2	2.73075E1	-3.26462E1	-3.26248E1	2.67956E1	1.2026E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09456E0	-8.16679E-1	-7.98416E-1	-9.13138E0	-9.14187E0	4.91142E-3	9.33886E-2	2.72909E1	-3.26732E1	-3.26124E1	2.68232E1	1.20031E-7	2.51915E-3	2.51915E-3	6.35223E-3	3.01475E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09533E0	-8.16655E-1	-7.98464E-1	-9.13105E0	-9.14178E0	4.64916E-3	9.34124E-2	2.72895E1	-3.26554E1	-3.26392E1	2.67962E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16822E-1	-7.98559E-1	-9.13134E0	-9.14209E0	4.74453E-3	9.36747E-2	2.72865E1	-3.26813E1	-3.26194E1	2.6804E1	1.19809E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09541E0	-8.16727E-1	-7.9906E-1	-9.13131E0	-9.14216E0	4.72069E-3	9.36985E-2	2.73351E1	-3.2632E1	-3.2608E1	2.68605E1	1.20017E-7	2.5188E-3	2.5188E-3	6.26371E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09472E0	-8.1656E-1	-7.98464E-1	-9.13165E0	-9.14207E0	4.55379E-3	9.36031E-2	2.7324E1	-3.26054E1	-3.26154E1	2.68641E1	1.20122E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.02133E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09456E0	-8.16345E-1	-7.98678E-1	-9.13172E0	-9.14185E0	4.86374E-3	9.34362E-2	2.73302E1	-3.26903E1	-3.26425E1	2.67824E1	1.19749E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.16274E-1	-7.98559E-1	-9.1316E0	-9.14216E0	4.79221E-3	9.33409E-2	2.72793E1	-3.26422E1	-3.25978E1	2.68106E1	1.19978E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.98026E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.1656E-1	-7.98273E-1	-9.1316E0	-9.14187E0	4.62532E-3	9.36031E-2	2.7285E1	-3.26944E1	-3.26172E1	2.6801E1	1.19913E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9978E-1
1.7E1	2.0E0	0.0E0	6.87E2	4.7E2	-2.09557E0	-8.16607E-1	-7.98368E-1	-9.13169E0	-9.14185E0	4.93526E-3	9.34362E-2	2.73484E1	-3.26494E1	-3.26536E1	2.6801E1	1.19953E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00197E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.0951E0	-8.16655E-1	-7.98392E-1	-9.13141E0	-9.14211E0	4.76837E-3	9.36031E-2	2.72937E1	-3.27083E1	-3.25809E1	2.68159E1	1.20278E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0951E0	-8.1656E-1	-7.98702E-1	-9.1315E0	-9.14209E0	4.95911E-3	9.35555E-2	2.72528E1	-3.27011E1	-3.25743E1	2.67545E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02396E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.0951E0	-8.16131E-1	-7.98607E-1	-9.13131E0	-9.14218E0	4.86374E-3	9.35555E-2	2.73034E1	-3.26642E1	-3.26405E1	2.68328E1	1.2014E-7	2.51809E-3	2.51809E-3	6.31827E-3	3.01155E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09565E0	-8.16298E-1	-7.98512E-1	-9.13174E0	-9.14204E0	4.91142E-3	9.33409E-2	2.73123E1	-3.26645E1	-3.26711E1	2.68458E1					
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.1625E-1	-7.98535E-1	-9.13162E0	-9.14183E0	4.79221E-3	9.38892E-2	2.72338E1	-3.26758E1	-3.25941E1	2.67992E1	1.19953E-7	2.52276E-3	2.52276E-3	6.29665E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16369E-1	-7.98726E-1	-9.13165E0	-9.14199E0	4.673E-3	9.38654E-2	2.73284E1	-3.26499E1	-3.26132E1	2.6801E1	1.19749E-7	2.51203E-3	2.51203E-3	6.26985E-3	2.99686E-1
