[Scan]
initial_time=2016-01-28T18:43:28
final_time=2016-01-28T18:43:48
ip_count=19
run=1026
dataset=4
scan=296
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09487E0
qbias_imon=-1.08843E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.38115E-8
ql2_vset=
ql2_vmon=-7.98225E-1
ql2_imon=2.02945E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.88801E-10
ql4_vset=
ql4_vmon=-9.14252E0
ql4_imon=-9.84788E-11
mult1=-9.46345E-9
mult2=-2.80245E-9
rf_tmon=-3.51505E-3
rf_agc=3.32735E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.72058E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63082E0
bslens_imon=2.65298E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19972E1
lens5a_imon=1.9674E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12477E2
lens4a_imon=2.05199E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53418E1
cs_ef1b_imon=3.09859E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02163E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=1.25244E-5
lens1_vset=-5.0E0
lens1_vmon=-5.40559E0
lens1_imon=2.56449E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64765E1
os_ef1alow_imon=2.97348E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03796E1
cs_ea2_imon=1.41065E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83954E1
cs_ef1a_imon=3.00024E-5
olens2_vset=9.7E-1
olens2_vmon=9.70125E-1
olens2_imon=1.19902E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11471E1
os_restr1_imon=4.30659E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15229E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63496E1
os_ef1bup_imon=3.08747E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.75657E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91891E2
cs_nozzle_imon=1.93498E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.0196E1
cs_anode1_imon=2.05532E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.17557E-8
tplens_vset=1.4E-1
tplens_vmon=1.61135E0
tplens_imon=-3.59057E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26512E1
iondef3_imon=1.50091E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26825E1
iondef2_imon=1.58196E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98332E-4
ql6_vset=1.0E-1
ql6_vmon=9.38177E-2
ql6_imon=4.00281E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28041E0
ionrepsh_imon=9.26813E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33622E1
lens5b_imon=2.16985E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12257E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47508E0
os_ea2_imon=-6.06816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00531E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7135E1
cs_ef2a_imon=3.18617E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.03487E0
os_ef2alow_imon=-2.61976E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82751E-1
os_ef2bup_imon=-5.2818E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10735E1
os_restr2_imon=3.36688E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23011E2
cs_ionfoca_imon=6.31309E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01914E1
cs_anode2_imon=2.09008E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72955E1
iondef1_imon=1.06556E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68304E1
iondef4_imon=1.09024E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.24089E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82428E-1
olens1_imon=7.47704E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1591E0
cs_ionaccel_imon=-1.09065E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47313E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56527E1
einzel_imon=7.55578E-6
window_vset=0.0E0
window_vmon=2.06681E-1
window_imon=-1.0559E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39081E-4
mask2_vset=0.0E0
mask2_vmon=-1.86466E1
mask2_imon=-6.18015E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.48427E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.63128E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.03831E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40851E0
defgridb_imon=5.97648E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33191E1
os_fil1_imon=9.37983E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61514E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30618E1
cs_fil1_imon=9.26428E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35112E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62653E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.38254E-2
os_fil2_imon=-2.62864E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95869E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.46187E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.36768E-1
cs_fil2_imon=-2.25795E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19993E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21698E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=2.9943E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.7389E-1
res40_imon=-2.34174E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09518E0	-8.1656E-1	-7.98559E-1	-9.13174E0	-9.14209E0	4.79221E-3	9.36985E-2	2.73033E1	-3.26626E1	-3.26549E1	2.68016E1	1.19902E-7	2.52276E-3	2.52276E-3	6.34518E-3	2.97394E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16369E-1	-7.98059E-1	-9.13153E0	-9.14204E0	4.79221E-3	9.34601E-2	2.73192E1	-3.26456E1	-3.26682E1	2.67607E1	1.2026E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0958E0	-8.16345E-1	-7.97796E-1	-9.13186E0	-9.14164E0	4.93526E-3	9.38654E-2	2.73231E1	-3.26488E1	-3.2644E1	2.6786E1	1.20191E-7	2.51359E-3	2.51359E-3	6.31299E-3	2.99879E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09572E0	-8.16417E-1	-7.98202E-1	-9.13169E0	-9.14202E0	4.91142E-3	9.35793E-2	2.72698E1	-3.26816E1	-3.26133E1	2.68163E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09557E0	-8.16393E-1	-7.98368E-1	-9.13167E0	-9.14204E0	4.8399E-3	9.34601E-2	2.73435E1	-3.265E1	-3.25816E1	2.68196E1	1.19646E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09603E0	-8.16584E-1	-7.98631E-1	-9.13162E0	-9.14207E0	5.05447E-3	9.33409E-2	2.73175E1	-3.26201E1	-3.26296E1	2.68058E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09595E0	-8.16607E-1	-7.98583E-1	-9.1315E0	-9.14207E0	4.8399E-3	9.35316E-2	2.73187E1	-3.26484E1	-3.26331E1	2.6792E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31278E-3	2.99941E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16584E-1	-7.98488E-1	-9.13169E0	-9.14202E0	4.98295E-3	9.35555E-2	2.7299E1	-3.26695E1	-3.25911E1	2.67968E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.0071E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09595E0	-8.16536E-1	-7.98512E-1	-9.13169E0	-9.14202E0	5.05447E-3	9.37939E-2	2.73075E1	-3.26343E1	-3.26095E1	2.68052E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.01347E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09588E0	-8.16727E-1	-7.98464E-1	-9.13155E0	-9.14221E0	5.00679E-3	9.38177E-2	2.73265E1	-3.2656E1	-3.26634E1	2.67739E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.02396E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09627E0	-8.16512E-1	-7.98273E-1	-9.13138E0	-9.14204E0	5.00679E-3	9.37462E-2	2.72691E1	-3.26366E1	-3.26349E1	2.68047E1	1.20403E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.03081E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09627E0	-8.16703E-1	-7.98345E-1	-9.13172E0	-9.14209E0	4.79221E-3	9.377E-2	2.73105E1	-3.26687E1	-3.26621E1	2.6783E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.99686E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09611E0	-8.16631E-1	-7.98273E-1	-9.13148E0	-9.14187E0	5.00679E-3	9.37939E-2	2.7346E1	-3.26428E1	-3.26092E1	2.67884E1	1.20383E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00041E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09549E0	-8.16727E-1	-7.98678E-1	-9.13155E0	-9.14173E0	4.88758E-3	9.3627E-2	2.72931E1	-3.26621E1	-3.26044E1	2.67902E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16417E-1	-7.98774E-1	-9.13148E0	-9.14195E0	4.72069E-3	9.35316E-2	2.73261E1	-3.26627E1	-3.26494E1	2.67866E1	1.20158E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.01995E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09541E0	-8.16727E-1	-7.9844E-1	-9.13157E0	-9.14202E0	4.673E-3	9.35316E-2	2.73249E1	-3.26488E1	-3.25864E1	2.67571E1	1.20137E-7	2.51804E-3	2.51804E-3	6.3074E-3	3.03349E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.09611E0	-8.16727E-1	-7.98607E-1	-9.13169E0	-9.14199E0	4.55379E-3	9.34839E-2	2.73141E1	-3.26693E1	-3.26188E1	2.67944E1	1.19705E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09495E0	-8.16584E-1	-7.98297E-1	-9.13165E0	-9.14214E0	4.72069E-3	9.38416E-2	2.72654E1	-3.26314E1	-3.2647E1	2.68052E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09533E0	-8.16393E-1	-7.98249E-1	-9.13124E0	-9.14207E0	4.64916E-3	9.36747E-2	2.73039E1	-3.26555E1	-3.26095E1	2.68268E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09487E0	-8.16441E-1	-7.98225E-1	-9.13148E0	-9.14252E0	4.74453E-3	9.38177E-2	2.72955E1	-3.26825E1	-3.26512E1	2.68304E1	1.19953E-7	2.52384E-3	2.52384E-3	6.31278E-3	2.9943E-1
