[Scan]
initial_time=2016-01-28T18:44:49
final_time=2016-01-28T18:45:09
ip_count=19
run=1026
dataset=4
scan=299
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0958E0
qbias_imon=-1.08803E-4
ql1_vset=
ql1_vmon=-8.16345E-1
ql1_imon=1.37981E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=2.02619E-9
ql3_vset=
ql3_vmon=-9.13131E0
ql3_imon=3.52919E-10
ql4_vset=
ql4_vmon=-9.14192E0
ql4_imon=-1.18244E-10
mult1=-9.5357E-9
mult2=-2.68667E-9
rf_tmon=-4.99909E-3
rf_agc=3.32795E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=1.71008E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62588E0
bslens_imon=2.46205E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19857E1
lens5a_imon=1.9719E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53652E1
cs_ef1b_imon=3.10163E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04597E2
lens23_imon=1.02272E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04778E1
cs_ea1_imon=1.23865E-5
lens1_vset=-5.0E0
lens1_vmon=-5.43685E0
lens1_imon=2.82615E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64506E1
os_ef1alow_imon=2.96828E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04285E1
cs_ea2_imon=1.40376E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8422E1
cs_ef1a_imon=3.01081E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21196E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11286E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15167E1
os_ea1_imon=2.43261E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.09334E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24369E0
cs_ionrep_imon=9.60346E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93395E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01893E1
cs_anode1_imon=2.04891E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.18233E-8
tplens_vset=1.4E-1
tplens_vmon=1.63122E0
tplens_imon=-3.57025E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26488E1
iondef3_imon=1.48559E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26879E1
iondef2_imon=1.58328E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.3317E-2
ql6_imon=3.97543E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.23527E0
ionrepsh_imon=9.35472E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33477E1
lens5b_imon=2.19576E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74615E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48462E0
os_ea2_imon=-7.78805E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06084E2
lens4b_imon=2.00428E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71516E1
cs_ef2a_imon=3.18452E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.02933E0
os_ef2alow_imon=-2.58707E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77001E-1
os_ef2bup_imon=-5.30446E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.38743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.29892E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01833E1
cs_anode2_imon=2.10189E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72985E1
iondef1_imon=1.10202E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68076E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.24334E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.50077E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16438E0
cs_ionaccel_imon=-9.79699E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0206E2
cs_ionfocb_imon=1.47136E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56513E1
einzel_imon=7.75632E-6
window_vset=0.0E0
window_vmon=2.00524E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82671E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.77877E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.89111E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.61495E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50122E3
multb_neg_imon=7.19535E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4948E0
defgridb_imon=6.17155E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33189E1
os_fil1_imon=9.41459E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07269E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61768E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3057E1
cs_fil1_imon=9.26923E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37671E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62693E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.56386E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.97113E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.31942E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.3356E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=7.7582E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21665E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02769E-1
chamber_ion_pmon=1.20106E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.63032E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=164
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09572E0	-8.16441E-1	-7.9844E-1	-9.13174E0	-9.14178E0	4.60148E-3	9.36985E-2	2.73057E1	-3.26826E1	-3.26296E1	2.68412E1	1.19913E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.02133E-1
2.0E0	1.8E1	0.0E0	3.16E2	1.6E2	-2.09595E0	-8.16274E-1	-7.98678E-1	-9.13167E0	-9.14209E0	4.8399E-3	9.34601E-2	2.72922E1	-3.26548E1	-3.26303E1	2.67995E1	1.19991E-7	2.52025E-3	2.52025E-3	6.32328E-3	3.00097E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09464E0	-8.16512E-1	-7.98392E-1	-9.13179E0	-9.14209E0	4.60148E-3	9.34839E-2	2.72868E1	-3.26773E1	-3.26632E1	2.68094E1	1.201E-7	2.52179E-3	2.52179E-3	6.3245E-3	2.9971E-1
4.0E0	1.0E1	0.0E0	6.55E2	3.98E2	-2.09588E0	-8.16536E-1	-7.98368E-1	-9.13165E0	-9.14202E0	4.88758E-3	9.35793E-2	2.73016E1	-3.26661E1	-3.26189E1	2.67974E1	1.20209E-7	2.52169E-3	2.52169E-3	6.33436E-3	3.03804E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09588E0	-8.16464E-1	-7.97987E-1	-9.13126E0	-9.14183E0	5.07832E-3	9.3627E-2	2.73327E1	-3.26573E1	-3.26278E1	2.68348E1	1.19902E-7	2.52384E-3	2.52384E-3	6.29665E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09619E0	-8.16512E-1	-7.98059E-1	-9.13148E0	-9.14197E0	4.91142E-3	9.38177E-2	2.72632E1	-3.26231E1	-3.2652E1	2.6798E1	1.19851E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09441E0	-8.16584E-1	-7.98392E-1	-9.13153E0	-9.14183E0	5.03063E-3	9.377E-2	2.72684E1	-3.26338E1	-3.26651E1	2.68376E1	1.19705E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.97704E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09518E0	-8.16441E-1	-7.98345E-1	-9.13165E0	-9.14223E0	5.14984E-3	9.39369E-2	2.72979E1	-3.2626E1	-3.26326E1	2.6804E1	1.19913E-7	2.5199E-3	2.5199E-3	6.29645E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09627E0	-8.16417E-1	-7.98464E-1	-9.13177E0	-9.14161E0	4.76837E-3	9.36031E-2	2.73045E1	-3.26591E1	-3.26615E1	2.68364E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.00197E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09557E0	-8.16369E-1	-7.98464E-1	-9.13196E0	-9.14195E0	4.88758E-3	9.34601E-2	2.72943E1	-3.26536E1	-3.26224E1	2.6789E1	1.19978E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.03081E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09565E0	-8.16488E-1	-7.98392E-1	-9.13198E0	-9.1418E0	5.03063E-3	9.35078E-2	2.73033E1	-3.26413E1	-3.26685E1	2.68088E1	1.19595E-7	2.50989E-3	2.50989E-3	6.31278E-3	2.99941E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09588E0	-8.16393E-1	-7.98225E-1	-9.13165E0	-9.14178E0	4.91142E-3	9.36747E-2	2.72669E1	-3.26567E1	-3.26411E1	2.68065E1	1.2003E-7	2.51793E-3	2.51793E-3	6.30471E-3	3.00069E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09518E0	-8.16679E-1	-7.98368E-1	-9.13153E0	-9.14183E0	5.19753E-3	9.35078E-2	2.73095E1	-3.26622E1	-3.26422E1	2.68038E1					
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16584E-1	-7.98559E-1	-9.1316E0	-9.14176E0	4.76837E-3	9.34601E-2	2.72827E1	-3.26673E1	-3.26638E1	2.67978E1	1.19883E-7	2.52066E-3	2.52066E-3	6.33592E-3	3.00251E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09518E0	-8.16298E-1	-7.98583E-1	-9.13136E0	-9.14178E0	4.64916E-3	9.3627E-2	2.73051E1	-3.26921E1	-3.26356E1	2.67878E1	1.20209E-7	2.51847E-3	2.51847E-3	6.29665E-3	2.99686E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09557E0	-8.16441E-1	-7.98678E-1	-9.13143E0	-9.14192E0	4.55379E-3	9.3317E-2	2.72925E1	-3.26392E1	-3.26518E1	2.6801E1	1.19913E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.02396E-1
2.0E1	1.0E0	0.0E0	8.08E2	5.58E2	-2.09565E0	-8.1656E-1	-7.98559E-1	-9.13131E0	-9.1419E0	4.60148E-3	9.34839E-2	2.72715E1	-3.26484E1	-3.26785E1	2.6807E1	1.20174E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09541E0	-8.16679E-1	-7.98512E-1	-9.13141E0	-9.14166E0	4.88758E-3	9.33409E-2	2.73069E1	-3.26819E1	-3.26332E1	2.6804E1	1.2026E-7	2.51847E-3	2.51847E-3	6.34518E-3	3.02253E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09572E0	-8.16226E-1	-7.98225E-1	-9.13138E0	-9.14168E0	4.81606E-3	9.31501E-2	2.72673E1	-3.26455E1	-3.26514E1	2.68215E1	1.20383E-7	2.51662E-3	2.51662E-3	6.34588E-3	3.00563E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0958E0	-8.16345E-1	-7.98488E-1	-9.13131E0	-9.14192E0	4.74453E-3	9.3317E-2	2.72985E1	-3.26879E1	-3.26488E1	2.68076E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	3.02769E-1
