[Scan]
initial_time=2016-01-28T18:45:43
final_time=2016-01-28T18:46:03
ip_count=19
run=1026
dataset=4
scan=301
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.0876E-4
ql1_vset=
ql1_vmon=-8.1656E-1
ql1_imon=1.38047E-8
ql2_vset=
ql2_vmon=-7.98512E-1
ql2_imon=2.0346E-9
ql3_vset=
ql3_vmon=-9.13167E0
ql3_imon=3.53515E-10
ql4_vset=
ql4_vmon=-9.14164E0
ql4_imon=-1.1003E-10
mult1=-9.86079E-9
mult2=-2.74855E-9
rf_tmon=-5.73811E-3
rf_agc=3.25044E-2
counter1=2
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.72698E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65855E0
bslens_imon=2.56803E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1983E1
lens5a_imon=1.98899E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04951E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5364E1
cs_ef1b_imon=3.08758E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04664E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05195E1
cs_ea1_imon=1.25067E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39734E0
lens1_imon=2.54326E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64476E1
os_ef1alow_imon=2.97261E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.41313E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84202E1
cs_ef1a_imon=3.00973E-5
olens2_vset=9.7E-1
olens2_vmon=9.69934E-1
olens2_imon=1.20808E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11201E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15182E1
os_ea1_imon=2.41903E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63851E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2108E0
cs_ionrep_imon=9.67163E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93505E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01779E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.1809E-8
tplens_vset=1.4E-1
tplens_vmon=1.63671E0
tplens_imon=-3.44899E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.265E1
iondef3_imon=1.50515E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.5632E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0289E2
lens6_imon=2.98541E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=3.98343E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29162E0
ionrepsh_imon=9.49466E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33776E1
lens5b_imon=2.19994E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45797E0
os_ea2_imon=-5.43106E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00499E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71246E1
cs_ef2a_imon=3.17948E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95622E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10943E1
os_restr2_imon=3.38022E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2311E2
cs_ionfoca_imon=6.29503E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01887E1
cs_anode2_imon=2.09072E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73171E1
iondef1_imon=1.0875E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.29118E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82237E-1
olens1_imon=7.47129E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11993E0
cs_ionaccel_imon=-1.10584E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56465E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39109E-4
mask2_vset=0.0E0
mask2_vmon=-1.8641E1
mask2_imon=-7.27421E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.926E3
multa_neg_imon=7.75327E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.52863E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50115E3
multb_neg_imon=7.27191E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.39374E0
defgridb_imon=6.08975E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33207E1
os_fil1_imon=9.4242E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06957E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61787E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30573E1
cs_fil1_imon=9.25469E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35028E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63015E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9411E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.26191E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3496E-1
cs_fil2_imon=-2.49178E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.46658E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21777E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.30182E-3
inlet_lpb_pmon=3.01742E-1
chamber_ion_pmon=1.19819E-7
chamber_cvt_pmon=2.51359E-3
foreline_cvt_pmon=2.51359E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.86922E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16488E-1	-7.98726E-1	-9.13146E0	-9.14214E0	4.79221E-3	9.35555E-2	2.73234E1	-3.26372E1	-3.25995E1	2.6825E1	1.20069E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00563E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09394E0	-8.16441E-1	-7.98583E-1	-9.13179E0	-9.14204E0	4.64916E-3	9.32932E-2	2.72323E1	-3.26695E1	-3.26217E1	2.68088E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09402E0	-8.16417E-1	-7.98607E-1	-9.13157E0	-9.14221E0	4.98295E-3	9.3174E-2	2.73434E1	-3.26797E1	-3.26378E1	2.68034E1	1.19978E-7	2.52362E-3	2.52362E-3	6.31858E-3	3.01475E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09418E0	-8.16393E-1	-7.9844E-1	-9.13181E0	-9.14228E0	4.93526E-3	9.34124E-2	2.7301E1	-3.26585E1	-3.2639E1	2.67995E1	1.1964E-7	2.52342E-3	2.52342E-3	6.3445E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16488E-1	-7.98416E-1	-9.13186E0	-9.1423E0	4.93526E-3	9.36031E-2	2.72668E1	-3.26413E1	-3.26767E1	2.67824E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9952E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09402E0	-8.16536E-1	-7.98607E-1	-9.13193E0	-9.14223E0	4.60148E-3	9.32455E-2	2.73112E1	-3.26474E1	-3.2607E1	2.68124E1	1.19953E-7	2.51525E-3	2.51525E-3	6.28592E-3	3.0148E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16512E-1	-7.98655E-1	-9.13162E0	-9.14173E0	4.43459E-3	9.34124E-2	2.73111E1	-3.26567E1	-3.2641E1	2.68202E1	1.20069E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00041E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09557E0	-8.16441E-1	-7.98416E-1	-9.13184E0	-9.14197E0	4.43459E-3	9.35078E-2	2.72774E1	-3.26354E1	-3.26006E1	2.67974E1	1.20191E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.02545E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09464E0	-8.16488E-1	-7.98559E-1	-9.13167E0	-9.14192E0	4.57764E-3	9.32217E-2	2.73057E1	-3.26807E1	-3.26272E1	2.68052E1	1.20311E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09541E0	-8.16607E-1	-7.98178E-1	-9.13119E0	-9.14223E0	4.88758E-3	9.35793E-2	2.72973E1	-3.26603E1	-3.25821E1	2.68401E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.00302E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.0951E0	-8.16584E-1	-7.98392E-1	-9.13134E0	-9.14216E0	4.76837E-3	9.37462E-2	2.7263E1	-3.26681E1	-3.265E1	2.68007E1	1.20158E-7	2.51954E-3	2.51954E-3	6.33436E-3	2.97394E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16774E-1	-7.98464E-1	-9.13169E0	-9.1423E0	4.52995E-3	9.35316E-2	2.72974E1	-3.26496E1	-3.26018E1	2.67949E1	1.20137E-7	2.52027E-3	2.52027E-3	6.29067E-3	2.99348E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09449E0	-8.16345E-1	-7.98345E-1	-9.13162E0	-9.14204E0	4.86374E-3	9.33647E-2	2.72931E1	-3.26693E1	-3.265E1	2.67986E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.0071E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09541E0	-8.16274E-1	-7.98178E-1	-9.13172E0	-9.14195E0	4.52995E-3	9.33647E-2	2.72931E1	-3.26837E1	-3.26524E1	2.68058E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.00302E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09565E0	-8.16274E-1	-7.98488E-1	-9.13169E0	-9.14171E0	4.72069E-3	9.34124E-2	2.73222E1	-3.26307E1	-3.26396E1	2.68142E1	1.19697E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0071E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09518E0	-8.16488E-1	-7.98488E-1	-9.13143E0	-9.14176E0	4.64916E-3	9.34362E-2	2.73249E1	-3.26645E1	-3.2584E1	2.67968E1	1.19809E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00563E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09503E0	-8.16703E-1	-7.98368E-1	-9.13124E0	-9.14187E0	4.79221E-3	9.35793E-2	2.72947E1	-3.26701E1	-3.26695E1	2.68202E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.98481E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09472E0	-8.16798E-1	-7.98488E-1	-9.13129E0	-9.14187E0	4.88758E-3	9.34362E-2	2.72732E1	-3.26366E1	-3.26396E1	2.67758E1	1.19861E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00302E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09456E0	-8.16464E-1	-7.98678E-1	-9.1316E0	-9.14192E0	4.98295E-3	9.3317E-2	2.72985E1	-3.26735E1	-3.26254E1	2.68082E1	1.20055E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.00197E-1
2.3E1	2.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.1656E-1	-7.98512E-1	-9.13167E0	-9.14164E0	5.10216E-3	9.36747E-2	2.73171E1	-3.26561E1	-3.265E1	2.68094E1	1.19819E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.01742E-1
