[Scan]
initial_time=2016-01-28T18:46:10
final_time=2016-01-28T18:46:30
ip_count=19
run=1026
dataset=4
scan=302
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0948E0
qbias_imon=-1.088E-4
ql1_vset=
ql1_vmon=-8.16941E-1
ql1_imon=1.37894E-8
ql2_vset=
ql2_vmon=-7.98678E-1
ql2_imon=1.96228E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.9432E-10
ql4_vset=
ql4_vmon=-9.14183E0
ql4_imon=-1.03009E-10
mult1=-9.54774E-9
mult2=-2.82041E-9
rf_tmon=-5.01111E-3
rf_agc=3.20959E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=1.71716E-9
bslens_vset=-6.2E0
bslens_vmon=-6.62648E0
bslens_imon=2.57741E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19731E1
lens5a_imon=1.97622E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1249E2
lens4a_imon=2.05115E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.09226E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04631E2
lens23_imon=1.0198E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0506E1
cs_ea1_imon=1.25199E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4008E0
lens1_imon=2.77207E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64698E1
os_ef1alow_imon=2.97549E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04237E1
cs_ea2_imon=1.4225E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84208E1
cs_ef1a_imon=2.99964E-5
olens2_vset=9.7E-1
olens2_vmon=9.6972E-1
olens2_imon=1.21703E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11406E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15023E1
os_ea1_imon=2.45712E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63653E1
os_ef1bup_imon=3.09262E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=9.75487E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91892E2
cs_nozzle_imon=1.93416E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02067E1
cs_anode1_imon=2.04351E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.17519E-8
tplens_vset=1.4E-1
tplens_vmon=1.64624E0
tplens_imon=-3.20976E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26374E1
iondef3_imon=1.49388E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26669E1
iondef2_imon=1.58725E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98458E-4
ql6_vset=1.0E-1
ql6_vmon=9.33647E-2
ql6_imon=3.96949E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24969E0
ionrepsh_imon=9.37995E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33706E1
lens5b_imon=2.17702E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45518E0
os_ea2_imon=-7.28335E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06125E2
lens4b_imon=2.00662E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71312E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06297E0
os_ef2alow_imon=-2.65554E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.38735E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.38707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.31623E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02049E1
cs_anode2_imon=2.09108E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.07823E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68142E1
iondef4_imon=1.078E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.23077E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.52563E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11092E0
cs_ionaccel_imon=-1.08782E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56189E1
einzel_imon=7.61576E-6
window_vset=0.0E0
window_vmon=2.07131E-1
window_imon=-9.90511E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82675E2
mask1_imon=2.39171E-4
mask2_vset=0.0E0
mask2_vmon=-1.86338E1
mask2_imon=-6.76965E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92634E3
multa_neg_imon=7.57027E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93704E3
defgrida_imon=6.39145E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.11244E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.27825E0
defgridb_imon=6.08142E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33206E1
os_fil1_imon=9.4084E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06765E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62169E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30536E1
cs_fil1_imon=9.24629E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35629E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62458E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.15701E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.76207E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21486E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02253E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.13351E-1
res40_imon=-2.40327E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=202
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09456E0	-8.16369E-1	-7.98345E-1	-9.13177E0	-9.14173E0	5.17368E-3	9.35078E-2	2.73063E1	-3.2662E1	-3.2639E1	2.6792E1	1.19965E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.01871E-1
2.0E0	2.3E1	0.0E0	3.16E2	1.6E2	-2.09526E0	-8.16846E-1	-7.98249E-1	-9.13172E0	-9.14185E0	5.24521E-3	9.35078E-2	2.73151E1	-3.26709E1	-3.2618E1	2.68214E1	1.20004E-7	2.51525E-3	2.51525E-3	6.35059E-3	3.0071E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09603E0	-8.16703E-1	-7.98106E-1	-9.1316E0	-9.14178E0	5.22137E-3	9.377E-2	2.72766E1	-3.26659E1	-3.26186E1	2.6806E1	1.20013E-7	2.5199E-3	2.5199E-3	6.32986E-3	3.00539E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16727E-1	-7.98106E-1	-9.13174E0	-9.14192E0	5.05447E-3	9.34124E-2	2.73321E1	-3.26549E1	-3.26921E1	2.68058E1	1.20042E-7	2.51814E-3	2.51814E-3	6.29157E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09549E0	-8.16727E-1	-7.98202E-1	-9.13134E0	-9.1418E0	5.05447E-3	9.38416E-2	2.73105E1	-3.26422E1	-3.262E1	2.68316E1	1.20069E-7	2.51771E-3	2.51771E-3	6.31288E-3	3.02659E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09526E0	-8.16369E-1	-7.98368E-1	-9.13146E0	-9.14195E0	4.673E-3	9.38177E-2	2.72921E1	-3.26567E1	-3.2636E1	2.68401E1	1.20209E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02769E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16369E-1	-7.98488E-1	-9.13134E0	-9.14164E0	4.64916E-3	9.3627E-2	2.73128E1	-3.26573E1	-3.26272E1	2.6825E1	1.20004E-7	2.51847E-3	2.51847E-3	6.33436E-3	2.9892E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16536E-1	-7.98345E-1	-9.13148E0	-9.14164E0	4.69685E-3	9.36747E-2	2.72845E1	-3.26644E1	-3.26549E1	2.677E1	1.19851E-7	2.51525E-3	2.51525E-3	6.32896E-3	2.98665E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09449E0	-8.16274E-1	-7.98249E-1	-9.13153E0	-9.14199E0	4.88758E-3	9.37462E-2	2.72757E1	-3.2647E1	-3.26266E1	2.67914E1	1.19953E-7	2.52384E-3	2.52384E-3	6.30202E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09364E0	-8.16393E-1	-7.98249E-1	-9.13155E0	-9.1419E0	4.81606E-3	9.35555E-2	2.7349E1	-3.26675E1	-3.26266E1	2.68034E1	1.19819E-7	2.51248E-3	2.51248E-3	6.32418E-3	2.98819E-1
1.4E1	3.0E0	0.0E0	5.66E2	3.82E2	-2.09333E0	-8.16345E-1	-7.97796E-1	-9.13138E0	-9.14214E0	5.00679E-3	9.38892E-2	2.73195E1	-3.26591E1	-3.26092E1	2.67974E1	1.19965E-7	2.50789E-3	2.50789E-3	6.31288E-3	3.00041E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16369E-1	-7.98178E-1	-9.1316E0	-9.14164E0	4.88758E-3	9.37939E-2	2.73189E1	-3.26675E1	-3.26212E1	2.67817E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.01347E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09426E0	-8.16345E-1	-7.98202E-1	-9.13169E0	-9.14197E0	4.55379E-3	9.36985E-2	2.72868E1	-3.2695E1	-3.26384E1	2.68194E1	1.20158E-7	2.51632E-3	2.51632E-3	6.3074E-3	2.9892E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09487E0	-8.16274E-1	-7.98416E-1	-9.13172E0	-9.14202E0	4.64916E-3	9.35078E-2	2.73706E1	-3.26995E1	-3.26138E1	2.68172E1	1.19965E-7	2.5199E-3	2.5199E-3	6.29098E-3	2.9978E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16607E-1	-7.98273E-1	-9.1316E0	-9.14166E0	4.3869E-3	9.38177E-2	2.7288E1	-3.2639E1	-3.26708E1	2.67932E1	1.19861E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9926E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0934E0	-8.16536E-1	-7.98273E-1	-9.13136E0	-9.14183E0	4.55379E-3	9.38892E-2	2.72805E1	-3.26585E1	-3.25719E1	2.68022E1	1.19939E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.01085E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16631E-1	-7.98655E-1	-9.1316E0	-9.14152E0	4.62532E-3	9.36508E-2	2.73018E1	-3.26354E1	-3.26282E1	2.68149E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09394E0	-8.16822E-1	-7.98631E-1	-9.13155E0	-9.14168E0	5.07832E-3	9.3627E-2	2.73019E1	-3.26585E1	-3.26364E1	2.68011E1	1.2029E-7	2.52324E-3	2.52324E-3	6.29237E-3	2.99816E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0941E0	-8.16822E-1	-7.98345E-1	-9.13157E0	-9.14187E0	4.91142E-3	9.33647E-2	2.73213E1	-3.26699E1	-3.26386E1	2.67962E1	1.19907E-7	2.52266E-3	2.52266E-3	6.30149E-3	2.98792E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0948E0	-8.16941E-1	-7.98678E-1	-9.13153E0	-9.14183E0	4.72069E-3	9.33647E-2	2.72907E1	-3.26669E1	-3.26374E1	2.68142E1	1.19902E-7	2.52169E-3	2.52169E-3	6.3074E-3	3.02253E-1
