[Scan]
initial_time=2016-01-28T18:47:30
final_time=2016-01-28T18:47:50
ip_count=19
run=1026
dataset=4
scan=305
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09572E0
qbias_imon=-1.08775E-4
ql1_vset=
ql1_vmon=-8.16536E-1
ql1_imon=1.37673E-8
ql2_vset=
ql2_vmon=-7.98464E-1
ql2_imon=2.00618E-9
ql3_vset=
ql3_vmon=-9.13165E0
ql3_imon=3.53396E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-1.16098E-10
mult1=-9.25877E-9
mult2=-2.55693E-9
rf_tmon=-3.82148E-3
rf_agc=3.33816E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.14984E-3
ql5_imon=1.69617E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63009E0
bslens_imon=2.44402E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19941E1
lens5a_imon=1.98596E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.051E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5361E1
cs_ef1b_imon=3.09695E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04588E2
lens23_imon=1.02348E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05162E1
cs_ea1_imon=1.2437E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41882E0
lens1_imon=2.59904E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64831E1
os_ef1alow_imon=2.97657E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03684E1
cs_ea2_imon=1.42034E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84226E1
cs_ef1a_imon=2.99928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.20764E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10937E1
os_restr1_imon=4.2895E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15336E1
os_ea1_imon=2.43838E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63671E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.27613E0
cs_ionrep_imon=9.80173E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93553E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01941E1
cs_anode1_imon=2.04675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.18376E-8
tplens_vset=1.4E-1
tplens_vmon=1.62161E0
tplens_imon=-2.70506E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25828E1
iondef3_imon=1.5101E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26933E1
iondef2_imon=1.57499E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02912E2
lens6_imon=2.98393E-4
ql6_vset=1.0E-1
ql6_vmon=9.35555E-2
ql6_imon=4.0046E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28995E0
ionrepsh_imon=9.45205E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33616E1
lens5b_imon=2.1918E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7473E1
cs_ef2b_imon=3.11461E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49964E0
os_ea2_imon=-7.57175E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06119E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71468E1
cs_ef2a_imon=3.19029E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08639E0
os_ef2alow_imon=-2.60148E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.72797E-1
os_ef2bup_imon=-5.14588E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10961E1
os_restr2_imon=3.37481E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.31046E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.11739E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73237E1
iondef1_imon=1.0757E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.07836E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.28741E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82738E-1
olens1_imon=7.50628E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13014E0
cs_ionaccel_imon=-1.06619E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47244E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.58332E-6
window_vset=0.0E0
window_vmon=1.789E-1
window_imon=-1.14909E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39235E-4
mask2_vset=0.0E0
mask2_vmon=-1.86512E1
mask2_imon=-5.36411E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92622E3
multa_neg_imon=7.51619E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.83486E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50159E3
multb_neg_imon=6.9394E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42262E0
defgridb_imon=6.1355E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33215E1
os_fil1_imon=9.41513E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06644E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62078E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30531E1
cs_fil1_imon=9.24448E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.1797E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62785E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.40904E-2
os_fil2_imon=-2.76207E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20341E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.30817E-1
cs_fil2_imon=-2.01725E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21612E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.0071E-1
chamber_ion_pmon=1.20311E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09748E-1
res40_imon=-2.41408E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.09588E0	-8.16321E-1	-7.98583E-1	-9.13134E0	-9.1418E0	4.88758E-3	9.36031E-2	2.73153E1	-3.26554E1	-3.26561E1	2.68094E1	1.19819E-7	2.51804E-3	2.51804E-3	6.31299E-3	2.99879E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09642E0	-8.16393E-1	-7.98488E-1	-9.13122E0	-9.14185E0	4.62532E-3	9.35793E-2	2.73139E1	-3.26449E1	-3.26667E1	2.68273E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01347E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09533E0	-8.16393E-1	-7.98464E-1	-9.13134E0	-9.14149E0	4.45843E-3	9.33886E-2	2.73057E1	-3.26654E1	-3.25831E1	2.6792E1	1.19941E-7	2.52025E-3	2.52025E-3	6.3074E-3	3.02115E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09565E0	-8.16464E-1	-7.98392E-1	-9.13119E0	-9.14204E0	4.57764E-3	9.35555E-2	2.72811E1	-3.26699E1	-3.26062E1	2.68412E1	1.19493E-7	2.51954E-3	2.51954E-3	6.31278E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09572E0	-8.16512E-1	-7.98607E-1	-9.13122E0	-9.14197E0	4.98295E-3	9.35078E-2	2.72992E1	-3.26614E1	-3.26531E1	2.681E1	1.20011E-7	2.51972E-3	2.51972E-3	6.32644E-3	2.99475E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09472E0	-8.16631E-1	-7.98583E-1	-9.1315E0	-9.14178E0	4.48227E-3	9.35555E-2	2.73051E1	-3.27089E1	-3.2605E1	2.68382E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.16536E-1	-7.98726E-1	-9.1316E0	-9.1419E0	4.79221E-3	9.34362E-2	2.73273E1	-3.26536E1	-3.26344E1	2.68331E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.0951E0	-8.16488E-1	-7.98655E-1	-9.13155E0	-9.14187E0	4.74453E-3	9.35555E-2	2.73249E1	-3.26723E1	-3.26212E1	2.68028E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.00302E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16631E-1	-7.98535E-1	-9.13153E0	-9.1419E0	4.79221E-3	9.34124E-2	2.72987E1	-3.26799E1	-3.26776E1	2.68328E1	1.19965E-7	2.51552E-3	2.51552E-3	6.32936E-3	3.01609E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16488E-1	-7.98607E-1	-9.13138E0	-9.14161E0	4.88758E-3	9.35555E-2	2.72781E1	-3.26675E1	-3.26038E1	2.68028E1	1.19749E-7	2.50882E-3	2.50882E-3	6.3074E-3	3.01995E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09603E0	-8.16488E-1	-7.98607E-1	-9.13117E0	-9.14176E0	4.72069E-3	9.34839E-2	2.72965E1	-3.26572E1	-3.26493E1	2.68064E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9874E-1
1.5E1	1.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16727E-1	-7.98798E-1	-9.13134E0	-9.14156E0	4.88758E-3	9.31978E-2	2.72949E1	-3.26506E1	-3.25821E1	2.67968E1	1.19965E-7	2.52428E-3	2.52428E-3	6.31837E-3	3.01609E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16441E-1	-7.98631E-1	-9.13117E0	-9.14161E0	4.74453E-3	9.35316E-2	2.72892E1	-3.2688E1	-3.25788E1	2.6807E1	1.19913E-7	2.51771E-3	2.51771E-3	6.35692E-3	3.00302E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16584E-1	-7.98655E-1	-9.13141E0	-9.14168E0	4.74453E-3	9.36508E-2	2.72871E1	-3.26693E1	-3.26512E1	2.67856E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09464E0	-8.16774E-1	-7.98297E-1	-9.13167E0	-9.14178E0	4.673E-3	9.36031E-2	2.73269E1	-3.2675E1	-3.26419E1	2.68088E1	1.20226E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.01609E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.0948E0	-8.16655E-1	-7.98726E-1	-9.13172E0	-9.14209E0	4.72069E-3	9.35555E-2	2.72895E1	-3.26717E1	-3.26314E1	2.68052E1	1.19697E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.00453E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09533E0	-8.16655E-1	-7.98488E-1	-9.13141E0	-9.14199E0	4.86374E-3	9.34839E-2	2.72986E1	-3.26791E1	-3.26402E1	2.68214E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32936E-3	2.9978E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1656E-1	-7.9844E-1	-9.13169E0	-9.14147E0	4.76837E-3	9.35078E-2	2.72925E1	-3.26621E1	-3.25996E1	2.67966E1	1.19861E-7	2.52428E-3	2.52428E-3	6.36244E-3	3.00302E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16703E-1	-7.98583E-1	-9.13165E0	-9.14197E0	4.79221E-3	9.35316E-2	2.72803E1	-3.26691E1	-3.26148E1	2.67806E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.00966E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09572E0	-8.16536E-1	-7.98464E-1	-9.13165E0	-9.14173E0	5.14984E-3	9.35555E-2	2.73237E1	-3.26933E1	-3.25828E1	2.6807E1	1.20311E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.0071E-1
