[Scan]
initial_time=2016-01-28T18:48:24
final_time=2016-01-28T18:48:44
ip_count=19
run=1026
dataset=4
scan=307
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0951E0
qbias_imon=-1.08791E-4
ql1_vset=
ql1_vmon=-8.16274E-1
ql1_imon=1.37039E-8
ql2_vset=
ql2_vmon=-7.99012E-1
ql2_imon=2.03382E-9
ql3_vset=
ql3_vmon=-9.13126E0
ql3_imon=3.72112E-10
ql4_vset=
ql4_vmon=-9.14211E0
ql4_imon=-9.90868E-11
mult1=-9.86079E-9
mult2=-2.68468E-9
rf_tmon=-4.89695E-3
rf_agc=3.27027E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.91142E-3
ql5_imon=1.71986E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65914E0
bslens_imon=2.5468E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.2078E1
lens5a_imon=1.98651E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12445E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53568E1
cs_ef1b_imon=3.10271E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04624E2
lens23_imon=1.02266E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04947E1
cs_ea1_imon=1.22766E-5
lens1_vset=-5.0E0
lens1_vmon=-5.44984E0
lens1_imon=2.85473E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.98306E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04221E1
cs_ea2_imon=1.39685E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84664E1
cs_ef1a_imon=2.99856E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.2092E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.29274E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14916E1
os_ea1_imon=2.42398E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63707E1
os_ef1bup_imon=3.07965E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2639E0
cs_ionrep_imon=9.69994E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01935E1
cs_anode1_imon=2.04603E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.17521E-8
tplens_vset=1.4E-1
tplens_vmon=1.61312E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2644E1
iondef3_imon=1.49772E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.56285E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02923E2
lens6_imon=2.98505E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.98608E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27156E0
ionrepsh_imon=9.43449E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33545E1
lens5b_imon=2.17799E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74681E1
cs_ef2b_imon=3.1319E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47272E0
os_ea2_imon=-7.09459E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06106E2
lens4b_imon=2.00432E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71342E1
cs_ef2a_imon=3.1802E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06957E0
os_ef2alow_imon=-2.71321E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.00427E-1
os_ef2bup_imon=-5.40177E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11015E1
os_restr2_imon=3.38634E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23039E2
cs_ionfoca_imon=6.29185E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.10117E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73135E1
iondef1_imon=1.08644E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67974E1
iondef4_imon=1.08305E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.25006E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.50786E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12353E0
cs_ionaccel_imon=-9.68887E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.59774E-6
window_vset=0.0E0
window_vmon=2.10735E-1
window_imon=-1.01213E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82664E2
mask1_imon=2.39221E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-5.76054E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92705E3
multa_neg_imon=7.43826E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.57818E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50053E3
multb_neg_imon=6.41183E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45871E0
defgridb_imon=5.90924E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.41651E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07239E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61619E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30637E1
cs_fil1_imon=9.25536E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30043E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63104E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44586E-2
os_fil2_imon=-2.77409E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.91708E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.38214E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32889E-1
cs_fil2_imon=-2.4257E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.29879E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21891E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33436E-3
inlet_lpb_pmon=3.01738E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.40071E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09541E0	-8.16345E-1	-7.98559E-1	-9.1315E0	-9.14214E0	5.00679E-3	9.3627E-2	2.73087E1	-3.2641E1	-3.2629E1	2.68214E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32896E-3	2.9892E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09449E0	-8.1625E-1	-7.9844E-1	-9.13169E0	-9.14204E0	4.86374E-3	9.37223E-2	2.72702E1	-3.26548E1	-3.26389E1	2.68136E1	1.20069E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9874E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0948E0	-8.1625E-1	-7.98583E-1	-9.13181E0	-9.14216E0	4.88758E-3	9.34601E-2	2.73138E1	-3.26666E1	-3.26185E1	2.68215E1	1.19925E-7	2.51693E-3	2.51693E-3	6.31299E-3	3.01209E-1
4.0E0	0.0E0	0.0E0	6.55E2	3.98E2	-2.09449E0	-8.16536E-1	-7.98655E-1	-9.1315E0	-9.14209E0	5.22137E-3	9.32693E-2	2.72853E1	-3.26981E1	-3.26771E1	2.68118E1	1.20344E-7	2.51287E-3	2.51287E-3	6.32858E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09503E0	-8.16464E-1	-7.98726E-1	-9.1315E0	-9.14195E0	4.91142E-3	9.34362E-2	2.73039E1	-3.26585E1	-3.25876E1	2.67968E1	1.20226E-7	2.51826E-3	2.51826E-3	6.31563E-3	3.01609E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16369E-1	-7.98297E-1	-9.13134E0	-9.14178E0	4.8399E-3	9.34839E-2	2.73189E1	-3.26735E1	-3.25431E1	2.6822E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0948E0	-8.16393E-1	-7.98512E-1	-9.13155E0	-9.14164E0	5.14984E-3	9.33886E-2	2.73339E1	-3.26362E1	-3.2608E1	2.6789E1	1.19809E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.04241E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09503E0	-8.16464E-1	-7.98464E-1	-9.1316E0	-9.14197E0	5.03063E-3	9.36747E-2	2.73321E1	-3.2641E1	-3.26825E1	2.68238E1	1.19861E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09572E0	-8.16441E-1	-7.98655E-1	-9.13162E0	-9.14185E0	4.86374E-3	9.33886E-2	2.72757E1	-3.26663E1	-3.25809E1	2.68184E1	1.19809E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9926E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16321E-1	-7.98535E-1	-9.13138E0	-9.14199E0	5.03063E-3	9.33409E-2	2.72973E1	-3.2629E1	-3.26152E1	2.67824E1	1.19861E-7	2.52099E-3	2.52099E-3	6.33486E-3	2.9952E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16464E-1	-7.98607E-1	-9.13138E0	-9.14166E0	4.95911E-3	9.35316E-2	2.72654E1	-3.26867E1	-3.25888E1	2.6789E1	1.20252E-7	2.51662E-3	2.51662E-3	6.31563E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09572E0	-8.16393E-1	-7.9875E-1	-9.13131E0	-9.14176E0	4.91142E-3	9.35078E-2	2.72733E1	-3.26476E1	-3.26116E1	2.68214E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09634E0	-8.1625E-1	-7.98535E-1	-9.13134E0	-9.14192E0	4.88758E-3	9.34362E-2	2.72945E1	-3.2675E1	-3.26006E1	2.67986E1	1.19757E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09696E0	-8.16226E-1	-7.98774E-1	-9.13143E0	-9.14192E0	4.79221E-3	9.32217E-2	2.7349E1	-3.26314E1	-3.26801E1	2.67949E1	1.19861E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16226E-1	-7.98583E-1	-9.13134E0	-9.14187E0	4.76837E-3	9.34601E-2	2.73122E1	-3.26738E1	-3.26225E1	2.6813E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	2.9943E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09565E0	-8.16298E-1	-7.98774E-1	-9.13146E0	-9.1419E0	4.86374E-3	9.35316E-2	2.72799E1	-3.26476E1	-3.26104E1	2.6789E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.01995E-1
2.0E1	6.0E0	0.0E0	8.08E2	5.58E2	-2.09572E0	-8.16417E-1	-7.98893E-1	-9.13112E0	-9.14171E0	4.8399E-3	9.3627E-2	2.73045E1	-3.26585E1	-3.26344E1	2.68124E1	1.19913E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00302E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09518E0	-8.16464E-1	-7.98988E-1	-9.13124E0	-9.14176E0	4.72069E-3	9.38177E-2	2.73216E1	-3.26549E1	-3.26372E1	2.68036E1	1.19653E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01609E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16131E-1	-7.9875E-1	-9.13143E0	-9.14187E0	4.74453E-3	9.35555E-2	2.73281E1	-3.26714E1	-3.26042E1	2.68034E1	1.20209E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0951E0	-8.16274E-1	-7.99012E-1	-9.13126E0	-9.14211E0	4.91142E-3	9.38654E-2	2.73135E1	-3.26561E1	-3.2644E1	2.67974E1	1.19902E-7	2.51525E-3	2.51525E-3	6.33436E-3	3.01738E-1
