[Scan]
initial_time=2016-01-28T18:49:17
final_time=2016-01-28T18:49:37
ip_count=19
run=1026
dataset=4
scan=309
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09495E0
qbias_imon=-1.08766E-4
ql1_vset=
ql1_vmon=-8.16417E-1
ql1_imon=1.38028E-8
ql2_vset=
ql2_vmon=-7.98655E-1
ql2_imon=1.9697E-9
ql3_vset=
ql3_vmon=-9.13134E0
ql3_imon=3.37231E-10
ql4_vset=
ql4_vmon=-9.14173E0
ql4_imon=-1.16932E-10
mult1=-1.01739E-8
mult2=-2.80444E-9
rf_tmon=-4.83086E-3
rf_agc=3.27568E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=1.70263E-9
bslens_vset=-6.2E0
bslens_vmon=-6.63189E0
bslens_imon=2.60264E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21371E1
lens5a_imon=1.98199E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12457E2
lens4a_imon=2.05158E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53524E1
cs_ef1b_imon=3.1049E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04621E2
lens23_imon=1.02153E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05288E1
cs_ea1_imon=1.25812E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42904E0
lens1_imon=2.44763E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64746E1
os_ef1alow_imon=2.96194E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03834E1
cs_ea2_imon=1.40448E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84363E1
cs_ef1a_imon=3.00834E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.21677E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11454E1
os_restr1_imon=4.3059E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15041E1
os_ea1_imon=2.4391E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6371E1
os_ef1bup_imon=3.09367E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=9.62149E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9186E2
cs_nozzle_imon=1.93453E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01921E1
cs_anode1_imon=2.04276E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.19346E-8
tplens_vset=1.4E-1
tplens_vmon=1.63603E0
tplens_imon=-3.10161E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26212E1
iondef3_imon=1.50794E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26783E1
iondef2_imon=1.57391E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=3.95571E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27433E0
ionrepsh_imon=9.37635E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3391E1
lens5b_imon=2.1781E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74557E1
cs_ef2b_imon=3.11538E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.49243E0
os_ea2_imon=-6.81471E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00443E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71083E1
cs_ef2a_imon=3.18574E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06703E0
os_ef2alow_imon=-2.66788E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.93889E-1
os_ef2bup_imon=-5.28769E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10949E1
os_restr2_imon=3.3841E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2307E2
cs_ionfoca_imon=6.30721E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01834E1
cs_anode2_imon=2.10975E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.10418E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68106E1
iondef4_imon=1.08204E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.27327E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81903E-1
olens1_imon=7.47831E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14511E0
cs_ionaccel_imon=-9.5752E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02075E2
cs_ionfocb_imon=1.47309E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56012E1
einzel_imon=7.66538E-6
window_vset=0.0E0
window_vmon=2.07617E-1
window_imon=-9.94946E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39136E-4
mask2_vset=0.0E0
mask2_vmon=-1.86575E1
mask2_imon=-6.54371E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.94879E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93723E3
defgrida_imon=6.70868E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50142E3
multb_neg_imon=7.42607E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=5.96606E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.42389E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06362E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62022E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30639E1
cs_fil1_imon=9.25373E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33379E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6269E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.29297E-2
os_fil2_imon=-2.78102E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82859E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.27302E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32072E-1
cs_fil2_imon=-2.3132E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37325E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21813E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.9874E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51225E-3
foreline_cvt_pmon=2.51225E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.60008E-1
res40_imon=-2.57806E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=208
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09364E0	-8.16441E-1	-7.98821E-1	-9.13112E0	-9.14197E0	4.62532E-3	9.34839E-2	2.72715E1	-3.26735E1	-3.26164E1	2.68277E1	1.19913E-7	2.50898E-3	2.50898E-3	6.3074E-3	2.9978E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09402E0	-8.16488E-1	-7.99012E-1	-9.13136E0	-9.14211E0	4.48227E-3	9.35316E-2	2.72843E1	-3.26517E1	-3.26554E1	2.68155E1	1.20017E-7	2.52428E-3	2.52428E-3	6.32386E-3	2.9926E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-2.09394E0	-8.16798E-1	-7.9906E-1	-9.13155E0	-9.1419E0	4.76837E-3	9.32455E-2	2.73275E1	-3.26667E1	-3.25623E1	2.6796E1	1.19872E-7	2.51581E-3	2.51581E-3	6.3074E-3	2.97499E-1
4.0E0	5.0E0	0.0E0	6.55E2	3.98E2	-2.09387E0	-8.16989E-1	-7.98512E-1	-9.13157E0	-9.14173E0	5.03063E-3	9.33409E-2	2.7301E1	-3.26567E1	-3.2672E1	2.68046E1	1.19851E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.9892E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09402E0	-8.17108E-1	-7.98559E-1	-9.13165E0	-9.1419E0	4.81606E-3	9.33886E-2	2.73472E1	-3.26404E1	-3.26224E1	2.67944E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16584E-1	-7.98416E-1	-9.13162E0	-9.1418E0	4.3869E-3	9.34124E-2	2.72821E1	-3.26815E1	-3.25936E1	2.68262E1	1.20209E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01738E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09394E0	-8.16655E-1	-7.98559E-1	-9.13155E0	-9.14187E0	4.673E-3	9.33409E-2	2.72931E1	-3.26591E1	-3.2641E1	2.6804E1	1.20069E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.98481E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09364E0	-8.16345E-1	-7.98702E-1	-9.13146E0	-9.14168E0	4.93526E-3	9.31501E-2	2.73069E1	-3.26591E1	-3.2596E1	2.6828E1	1.20226E-7	2.51552E-3	2.51552E-3	6.32386E-3	3.00563E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0941E0	-8.16655E-1	-7.98821E-1	-9.13172E0	-9.14187E0	4.72069E-3	9.36031E-2	2.73269E1	-3.26667E1	-3.259E1	2.68058E1	1.20031E-7	2.51693E-3	2.51693E-3	6.30182E-3	3.0201E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16298E-1	-7.98678E-1	-9.13153E0	-9.1419E0	4.72069E-3	9.33886E-2	2.72877E1	-3.26795E1	-3.26669E1	2.67821E1	1.20004E-7	2.51632E-3	2.51632E-3	6.3074E-3	3.00197E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09387E0	-8.16226E-1	-7.98488E-1	-9.13143E0	-9.14159E0	4.76837E-3	9.35078E-2	2.72973E1	-3.265E1	-3.26248E1	2.68064E1	1.19913E-7	2.52757E-3	2.52757E-3	6.30192E-3	2.9952E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0941E0	-8.16274E-1	-7.98678E-1	-9.13153E0	-9.14216E0	4.19617E-3	9.37223E-2	2.7263E1	-3.26579E1	-3.25852E1	2.68136E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	2.98481E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09356E0	-8.16393E-1	-7.98702E-1	-9.13181E0	-9.14204E0	4.19617E-3	9.38177E-2	2.73151E1	-3.2639E1	-3.26077E1	2.67884E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	2.97704E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09402E0	-8.16298E-1	-7.98345E-1	-9.1315E0	-9.14199E0	4.50611E-3	9.37939E-2	2.72636E1	-3.26771E1	-3.26512E1	2.67854E1	1.198E-7	2.51417E-3	2.51417E-3	6.31817E-3	2.9841E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09402E0	-8.16607E-1	-7.98368E-1	-9.13148E0	-9.14202E0	4.62532E-3	9.34124E-2	2.73381E1	-3.26645E1	-3.26044E1	2.67968E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09464E0	-8.16655E-1	-7.98392E-1	-9.13153E0	-9.14218E0	4.45843E-3	9.33409E-2	2.72907E1	-3.26549E1	-3.2608E1	2.6807E1	1.19861E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01347E-1
2.0E1	5.0E0	0.0E0	8.08E2	5.58E2	-2.0948E0	-8.16441E-1	-7.98488E-1	-9.13172E0	-9.14226E0	4.86374E-3	9.3627E-2	2.73105E1	-3.26687E1	-3.26452E1	2.68058E1	1.19809E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.02396E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.0951E0	-8.16536E-1	-7.98368E-1	-9.13124E0	-9.14235E0	4.86374E-3	9.38177E-2	2.73491E1	-3.26851E1	-3.26301E1	2.67856E1	1.19705E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.09472E0	-8.16584E-1	-7.98893E-1	-9.13126E0	-9.14199E0	5.03063E-3	9.37223E-2	2.73135E1	-3.26693E1	-3.2644E1	2.68046E1	1.20192E-7	2.52236E-3	2.52236E-3	6.33919E-3	2.98842E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09495E0	-8.16417E-1	-7.98655E-1	-9.13134E0	-9.14173E0	4.64916E-3	9.3627E-2	2.72949E1	-3.26783E1	-3.26212E1	2.68106E1	1.20069E-7	2.51225E-3	2.51225E-3	6.3074E-3	2.9874E-1
