[Scan]
initial_time=2016-01-28T18:49:44
final_time=2016-01-28T18:50:04
ip_count=19
run=1026
dataset=4
scan=310
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09456E0
qbias_imon=-1.0878E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.3769E-8
ql2_vset=
ql2_vmon=-7.98273E-1
ql2_imon=2.02633E-9
ql3_vset=
ql3_vmon=-9.13143E0
ql3_imon=3.18027E-10
ql4_vset=
ql4_vmon=-9.14216E0
ql4_imon=-1.04582E-10
mult1=-9.54888E-9
mult2=-2.74633E-9
rf_tmon=-4.77259E-3
rf_agc=3.35059E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.17368E-3
ql5_imon=1.73806E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67447E0
bslens_imon=2.58573E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20125E1
lens5a_imon=1.98191E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.05047E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53328E1
cs_ef1b_imon=3.09406E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.01831E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05047E1
cs_ea1_imon=1.24359E-5
lens1_vset=-5.0E0
lens1_vmon=-5.41916E0
lens1_imon=2.60697E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64909E1
os_ef1alow_imon=2.98054E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.41631E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84484E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.21912E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11442E1
os_restr1_imon=4.31184E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.43177E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.07172E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24207E0
cs_ionrep_imon=9.84152E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91876E2
cs_nozzle_imon=1.93409E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01743E1
cs_anode1_imon=2.04026E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.19385E-8
tplens_vset=1.4E-1
tplens_vmon=1.61784E0
tplens_imon=-3.90912E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25911E1
iondef3_imon=1.50374E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26591E1
iondef2_imon=1.58904E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98388E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=3.97888E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28454E0
ionrepsh_imon=9.45572E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33481E1
lens5b_imon=2.17835E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74525E1
cs_ef2b_imon=3.12145E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46092E0
os_ea2_imon=-8.29799E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06099E2
lens4b_imon=2.00389E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70921E1
cs_ef2a_imon=3.19209E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06657E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94421E-1
os_ef2bup_imon=-5.33689E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10991E1
os_restr2_imon=3.38238E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23069E2
cs_ionfoca_imon=6.30955E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.0954E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72861E1
iondef1_imon=1.08821E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68157E1
iondef4_imon=1.08557E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.28576E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.49429E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13795E0
cs_ionaccel_imon=-1.04817E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02087E2
cs_ionfocb_imon=1.47298E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.50043E-6
window_vset=0.0E0
window_vmon=2.08333E-1
window_imon=-1.06259E-6
mask1_vset=-4.8E2
mask1_vmon=-4.8262E2
mask1_imon=2.39163E-4
mask2_vset=0.0E0
mask2_vmon=-1.8647E1
mask2_imon=-5.65243E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93705E3
defgrida_imon=6.8578E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50126E3
multb_neg_imon=7.30376E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.4469E0
defgridb_imon=6.15345E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.40858E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07083E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62011E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30534E1
cs_fil1_imon=9.25986E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32325E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62905E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.45852E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92308E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.22648E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.75607E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.53906E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21673E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33388E-3
inlet_lpb_pmon=2.99093E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51814E-3
foreline_cvt_pmon=2.51814E-3
chamber_tmon=1.40055E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.94731E-1
res40_imon=-2.49697E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=169
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0948E0	-8.16822E-1	-7.9844E-1	-9.13177E0	-9.14166E0	5.24521E-3	9.36985E-2	2.73303E1	-3.26723E1	-3.26074E1	2.68166E1	1.19953E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.01738E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.0941E0	-8.16798E-1	-7.98368E-1	-9.13157E0	-9.14183E0	4.98295E-3	9.38654E-2	2.73118E1	-3.26847E1	-3.26808E1	2.68227E1	1.19913E-7	2.52318E-3	2.52318E-3	6.29098E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09418E0	-8.16584E-1	-7.98702E-1	-9.13184E0	-9.1419E0	4.8399E-3	9.3627E-2	2.73006E1	-3.26572E1	-3.26072E1	2.68032E1	1.20113E-7	2.51956E-3	2.51956E-3	6.3023E-3	3.00878E-1
4.0E0	7.0E0	0.0E0	6.55E2	3.98E2	-2.09464E0	-8.16751E-1	-7.98631E-1	-9.13165E0	-9.14207E0	4.88758E-3	9.34601E-2	2.72903E1	-3.26803E1	-3.25593E1	2.6801E1	1.20188E-7	2.51675E-3	2.51675E-3	6.32518E-3	3.00479E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09394E0	-8.16441E-1	-7.9906E-1	-9.13169E0	-9.14168E0	4.8399E-3	9.34601E-2	2.72898E1	-3.26561E1	-3.26213E1	2.68227E1	1.1982E-7	2.51937E-3	2.51937E-3	6.32877E-3	3.00527E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09487E0	-8.16584E-1	-7.98917E-1	-9.13186E0	-9.14187E0	5.10216E-3	9.35555E-2	2.72943E1	-3.26573E1	-3.26627E1	2.68004E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09565E0	-8.16679E-1	-7.98559E-1	-9.1315E0	-9.14183E0	4.69685E-3	9.35316E-2	2.73117E1	-3.26865E1	-3.26574E1	2.68099E1	1.1966E-7	2.52697E-3	2.52697E-3	6.32418E-3	3.02813E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09533E0	-8.16488E-1	-7.98488E-1	-9.13169E0	-9.14211E0	4.98295E-3	9.36031E-2	2.72875E1	-3.26686E1	-3.26639E1	2.68156E1	1.19956E-7	2.51323E-3	2.51323E-3	6.29237E-3	3.02209E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09495E0	-8.16321E-1	-7.98678E-1	-9.13143E0	-9.14221E0	4.76837E-3	9.35555E-2	2.72845E1	-3.26602E1	-3.2626E1	2.68065E1	1.20149E-7	2.52916E-3	2.52916E-3	6.32555E-3	3.006E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09526E0	-8.16298E-1	-7.98893E-1	-9.13143E0	-9.14161E0	4.8399E-3	9.36985E-2	2.73045E1	-3.26667E1	-3.26419E1	2.67932E1	1.20383E-7	2.51443E-3	2.51443E-3	6.27461E-3	3.01085E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09549E0	-8.1625E-1	-7.98607E-1	-9.13143E0	-9.14192E0	4.673E-3	9.40084E-2	2.7318E1	-3.26731E1	-3.26523E1	2.67812E1	1.20004E-7	2.52061E-3	2.52061E-3	6.30202E-3	3.02511E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09487E0	-8.1625E-1	-7.98655E-1	-9.13129E0	-9.14195E0	5.07832E-3	9.408E-2	2.72939E1	-3.26868E1	-3.25936E1	2.67956E1	1.19809E-7	2.5199E-3	2.5199E-3	6.34588E-3	2.9926E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09433E0	-8.16298E-1	-7.98893E-1	-9.13131E0	-9.14192E0	4.86374E-3	9.37939E-2	2.72594E1	-3.26753E1	-3.26122E1	2.67998E1	1.19757E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01609E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09371E0	-8.16512E-1	-7.98726E-1	-9.13136E0	-9.14171E0	4.673E-3	9.36985E-2	2.73267E1	-3.26765E1	-3.26278E1	2.67914E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.02922E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.0934E0	-8.16607E-1	-7.98607E-1	-9.13124E0	-9.14185E0	5.126E-3	9.39608E-2	2.72862E1	-3.26313E1	-3.26679E1	2.67968E1	1.20311E-7	2.50882E-3	2.50882E-3	6.3074E-3	3.01223E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09294E0	-8.16464E-1	-7.98225E-1	-9.13134E0	-9.14185E0	5.22137E-3	9.36508E-2	2.73075E1	-3.26681E1	-3.26777E1	2.68298E1	1.19705E-7	2.51225E-3	2.51225E-3	6.31288E-3	3.02133E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09394E0	-8.16369E-1	-7.98798E-1	-9.13126E0	-9.14207E0	5.07832E-3	9.377E-2	2.73117E1	-3.26609E1	-3.26056E1	2.68007E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02133E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09356E0	-8.16393E-1	-7.98321E-1	-9.13146E0	-9.14168E0	5.17368E-3	9.3627E-2	2.72809E1	-3.26537E1	-3.25971E1	2.6798E1	1.20106E-7	2.52384E-3	2.52384E-3	6.31278E-3	3.01995E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09426E0	-8.16655E-1	-7.98178E-1	-9.13148E0	-9.14176E0	5.22137E-3	9.37462E-2	2.72703E1	-3.26782E1	-3.26098E1	2.67972E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.00041E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09456E0	-8.16488E-1	-7.98273E-1	-9.13143E0	-9.14216E0	5.17368E-3	9.38416E-2	2.72861E1	-3.26591E1	-3.25911E1	2.68157E1	1.19941E-7	2.51814E-3	2.51814E-3	6.33388E-3	2.99093E-1
