[Scan]
initial_time=2016-01-28T18:50:11
final_time=2016-01-28T18:50:31
ip_count=19
run=1026
dataset=4
scan=311
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09503E0
qbias_imon=-1.08795E-4
ql1_vset=
ql1_vmon=-8.16441E-1
ql1_imon=1.37469E-8
ql2_vset=
ql2_vmon=-7.9844E-1
ql2_imon=2.02447E-9
ql3_vset=
ql3_vmon=-9.13141E0
ql3_imon=3.29971E-10
ql4_vset=
ql4_vmon=-9.14197E0
ql4_imon=-1.16384E-10
mult1=-9.3728E-9
mult2=-2.71626E-9
rf_tmon=-5.10088E-3
rf_agc=3.23758E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.69915E-9
bslens_vset=-6.2E0
bslens_vmon=-6.66016E0
bslens_imon=2.49704E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19262E1
lens5a_imon=1.98453E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05005E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53502E1
cs_ef1b_imon=3.10882E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04592E2
lens23_imon=1.02136E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05204E1
cs_ea1_imon=1.25205E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42536E0
lens1_imon=2.53139E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64706E1
os_ef1alow_imon=2.98271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03754E1
cs_ea2_imon=1.40969E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84206E1
cs_ef1a_imon=2.99556E-5
olens2_vset=9.7E-1
olens2_vmon=9.7003E-1
olens2_imon=1.21476E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11266E1
os_restr1_imon=4.30492E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15147E1
os_ea1_imon=2.42845E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63772E1
os_ef1bup_imon=3.08703E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26164E0
cs_ionrep_imon=9.65011E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9189E2
cs_nozzle_imon=1.9337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01822E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.18504E-8
tplens_vset=1.4E-1
tplens_vmon=1.62871E0
tplens_imon=-1.40516E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.49787E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26502E1
iondef2_imon=1.57497E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02933E2
lens6_imon=2.98373E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=3.96291E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27373E0
ionrepsh_imon=9.37529E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33652E1
lens5b_imon=2.17882E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74683E1
cs_ef2b_imon=3.1279E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45376E0
os_ea2_imon=-7.4742E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.0063E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71407E1
cs_ef2a_imon=3.18472E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05845E0
os_ef2alow_imon=-2.59557E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94613E-1
os_ef2bup_imon=-5.27736E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10812E1
os_restr2_imon=3.3809E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30882E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01828E1
cs_anode2_imon=2.09761E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73006E1
iondef1_imon=1.09517E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67972E1
iondef4_imon=1.07705E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.21139E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.52961E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12236E0
cs_ionaccel_imon=-9.41352E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02086E2
cs_ionfocb_imon=1.47238E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56353E1
einzel_imon=7.71898E-6
window_vset=0.0E0
window_vmon=1.53649E-1
window_imon=-1.08926E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82632E2
mask1_imon=2.391E-4
mask2_vset=0.0E0
mask2_vmon=-1.86681E1
mask2_imon=-6.61108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92614E3
multa_neg_imon=7.52786E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93697E3
defgrida_imon=6.8866E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50145E3
multb_neg_imon=7.20723E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3791E0
defgridb_imon=6.13083E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33216E1
os_fil1_imon=9.41136E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06972E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61663E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30571E1
cs_fil1_imon=9.24529E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.36009E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62974E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.42649E-2
os_fil2_imon=-2.46415E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96657E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.46455E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34406E-1
cs_fil2_imon=-2.61984E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.25298E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21703E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29185E-3
inlet_lpb_pmon=3.01237E-1
chamber_ion_pmon=1.20226E-7
chamber_cvt_pmon=2.51472E-3
foreline_cvt_pmon=2.51472E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.02948E-1
res40_imon=-2.44767E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	4.0E0	0.0E0	1.47E2	4.1E1	-2.0951E0	-8.16607E-1	-7.98631E-1	-9.13196E0	-9.14218E0	5.03063E-3	9.35078E-2	2.73275E1	-3.26561E1	-3.26012E1	2.68059E1	1.20226E-7	2.51642E-3	2.51642E-3	6.32483E-3	2.98985E-1
2.0E0	3.6E1	0.0E0	3.16E2	1.6E2	-2.09603E0	-8.16679E-1	-7.98631E-1	-9.13205E0	-9.14221E0	4.98295E-3	9.3317E-2	2.72973E1	-3.26579E1	-3.26675E1	2.68028E1	1.198E-7	2.51417E-3	2.51417E-3	6.32356E-3	2.98665E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09557E0	-8.16917E-1	-7.98655E-1	-9.13191E0	-9.14209E0	5.03063E-3	9.33886E-2	2.73193E1	-3.2659E1	-3.26667E1	2.68052E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01347E-1
4.0E0	6.0E0	0.0E0	6.55E2	3.98E2	-2.09533E0	-8.16727E-1	-7.98655E-1	-9.13177E0	-9.14166E0	4.81606E-3	9.35316E-2	2.72829E1	-3.26771E1	-3.25713E1	2.68302E1	1.19953E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.03286E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09541E0	-8.16703E-1	-7.98535E-1	-9.13203E0	-9.14176E0	4.74453E-3	9.34601E-2	2.72889E1	-3.26645E1	-3.26272E1	2.68017E1	1.20017E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09518E0	-8.16536E-1	-7.98321E-1	-9.13169E0	-9.14133E0	4.88758E-3	9.36031E-2	2.72925E1	-3.26633E1	-3.26314E1	2.68029E1	1.20383E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9874E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16154E-1	-7.98273E-1	-9.13157E0	-9.14149E0	4.98295E-3	9.33647E-2	2.72974E1	-3.26408E1	-3.26868E1	2.67806E1	1.20122E-7	2.51771E-3	2.51771E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09464E0	-8.16369E-1	-7.98583E-1	-9.1315E0	-9.14187E0	4.8399E-3	9.35078E-2	2.72824E1	-3.26707E1	-3.25997E1	2.68157E1	1.20106E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.01223E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16321E-1	-7.98702E-1	-9.13138E0	-9.14185E0	4.93526E-3	9.33409E-2	2.73163E1	-3.26484E1	-3.26225E1	2.68151E1	1.20191E-7	2.5147E-3	2.5147E-3	6.34661E-3	3.00676E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09464E0	-8.16178E-1	-7.98464E-1	-9.1315E0	-9.14187E0	4.74453E-3	9.3627E-2	2.73173E1	-3.26915E1	-3.26817E1	2.68052E1	1.20363E-7	2.5131E-3	2.5131E-3	6.32356E-3	2.9943E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16345E-1	-7.98559E-1	-9.13174E0	-9.14187E0	4.95911E-3	9.32932E-2	2.72827E1	-3.26443E1	-3.26791E1	2.68142E1	1.20122E-7	2.52045E-3	2.52045E-3	6.30192E-3	3.01085E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09565E0	-8.16441E-1	-7.98297E-1	-9.13174E0	-9.14152E0	5.07832E-3	9.32217E-2	2.73281E1	-3.26331E1	-3.26543E1	2.67896E1					
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16131E-1	-7.98345E-1	-9.13146E0	-9.14164E0	4.93526E-3	9.33886E-2	2.72702E1	-3.26729E1	-3.26098E1	2.67902E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.02511E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09472E0	-8.16321E-1	-7.98488E-1	-9.1316E0	-9.14176E0	4.98295E-3	9.35793E-2	2.73072E1	-3.26372E1	-3.26239E1	2.68071E1	1.2033E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.00824E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09441E0	-8.1656E-1	-7.98297E-1	-9.1315E0	-9.14192E0	4.81606E-3	9.34839E-2	2.73111E1	-3.26988E1	-3.26823E1	2.67738E1	1.20211E-7	2.5157E-3	2.5157E-3	6.33171E-3	3.00105E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09394E0	-8.16298E-1	-7.98488E-1	-9.13141E0	-9.14164E0	4.74453E-3	9.35078E-2	2.7298E1	-3.26791E1	-3.25989E1	2.68058E1	1.20132E-7	2.52029E-3	2.52029E-3	6.31925E-3	2.99634E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16393E-1	-7.98559E-1	-9.13162E0	-9.14185E0	4.64916E-3	9.36508E-2	2.73063E1	-3.26753E1	-3.26524E1	2.68058E1	1.19965E-7	2.5188E-3	2.5188E-3	6.29645E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.1656E-1	-7.98488E-1	-9.13129E0	-9.14185E0	4.98295E-3	9.35078E-2	2.72588E1	-3.26675E1	-3.26675E1	2.68214E1	1.20069E-7	2.51334E-3	2.51334E-3	6.33486E-3	3.03185E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09541E0	-8.16536E-1	-7.98583E-1	-9.13129E0	-9.14187E0	4.91142E-3	9.39131E-2	2.73588E1	-3.26557E1	-3.26048E1	2.67892E1	1.20209E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.03286E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09503E0	-8.16441E-1	-7.9844E-1	-9.13141E0	-9.14197E0	4.93526E-3	9.35793E-2	2.73006E1	-3.26502E1	-3.26356E1	2.67972E1	1.20226E-7	2.51472E-3	2.51472E-3	6.29185E-3	3.01237E-1
