[Scan]
initial_time=2016-01-28T18:50:38
final_time=2016-01-28T18:50:57
ip_count=19
run=1026
dataset=4
scan=312
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09603E0
qbias_imon=-1.08781E-4
ql1_vset=
ql1_vmon=-8.16298E-1
ql1_imon=1.3828E-8
ql2_vset=
ql2_vmon=-7.98488E-1
ql2_imon=1.98629E-9
ql3_vset=
ql3_vmon=-9.13138E0
ql3_imon=3.48604E-10
ql4_vset=
ql4_vmon=-9.14166E0
ql4_imon=-1.08719E-10
mult1=-1.01023E-8
mult2=-2.74285E-9
rf_tmon=-4.57436E-3
rf_agc=3.32619E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.48227E-3
ql5_imon=1.70586E-9
bslens_vset=-6.2E0
bslens_vmon=-6.68202E0
bslens_imon=2.63033E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20966E1
lens5a_imon=1.98117E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.04867E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53605E1
cs_ef1b_imon=3.08619E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0464E2
lens23_imon=1.02133E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04852E1
cs_ea1_imon=1.21768E-5
lens1_vset=-5.0E0
lens1_vmon=-5.4089E0
lens1_imon=2.68094E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64652E1
os_ef1alow_imon=2.96268E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03781E1
cs_ea2_imon=1.39171E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84407E1
cs_ef1a_imon=3.00722E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.21063E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11323E1
os_restr1_imon=4.30665E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15228E1
os_ea1_imon=2.41216E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63673E1
os_ef1bup_imon=3.07721E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23912E0
cs_ionrep_imon=9.82913E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93478E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01778E1
cs_anode1_imon=2.05286E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20501E0
olens4_imon=3.17767E-8
tplens_vset=1.4E-1
tplens_vmon=1.63105E0
tplens_imon=-1.06697E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2639E1
iondef3_imon=1.47075E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26785E1
iondef2_imon=1.55485E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98404E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=3.98669E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2826E0
ionrepsh_imon=9.2607E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.18752E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74757E1
cs_ef2b_imon=3.12474E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47467E0
os_ea2_imon=-6.6734E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06073E2
lens4b_imon=2.00459E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71133E1
cs_ef2a_imon=3.18724E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06017E0
os_ef2alow_imon=-2.75022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.86404E-1
os_ef2bup_imon=-5.37002E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10986E1
os_restr2_imon=3.37699E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23091E2
cs_ionfoca_imon=6.31135E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01884E1
cs_anode2_imon=2.09628E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73358E1
iondef1_imon=1.07324E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.08241E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71787E1
olens3_imon=6.25789E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82499E-1
olens1_imon=7.52314E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10332E0
cs_ionaccel_imon=-1.03237E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02068E2
cs_ionfocb_imon=1.47148E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56212E1
einzel_imon=7.5793E-6
window_vset=0.0E0
window_vmon=1.92646E-1
window_imon=-1.01366E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39256E-4
mask2_vset=0.0E0
mask2_vmon=-1.86618E1
mask2_imon=-5.9449E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92647E3
multa_neg_imon=7.57488E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93726E3
defgrida_imon=6.70277E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50131E3
multb_neg_imon=7.22059E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36126E0
defgridb_imon=6.08373E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33209E1
os_fil1_imon=9.36513E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07466E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62286E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3059E1
cs_fil1_imon=9.25435E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31383E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6315E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.64379E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01572E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.98779E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35568E-1
cs_fil2_imon=-2.60013E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09255E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21751E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.02511E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40058E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.62503E-1
res40_imon=-2.50695E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E0	0.0E0	1.47E2	4.1E1	-2.0934E0	-8.16679E-1	-7.98464E-1	-9.13167E0	-9.14202E0	4.79221E-3	9.35316E-2	2.72921E1	-3.2675E1	-3.26254E1	2.67908E1	1.19937E-7	2.51384E-3	2.51384E-3	6.33592E-3	2.9944E-1
2.0E0	3.4E1	0.0E0	3.16E2	1.6E2	-2.09364E0	-8.16321E-1	-7.98249E-1	-9.13146E0	-9.14168E0	4.76837E-3	9.34839E-2	2.73496E1	-3.26711E1	-3.25888E1	2.683E1	1.20226E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09426E0	-8.16822E-1	-7.98392E-1	-9.13172E0	-9.14192E0	4.81606E-3	9.34839E-2	2.72721E1	-3.26651E1	-3.27354E1	2.68273E1	1.19501E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.01209E-1
4.0E0	8.0E0	0.0E0	6.55E2	3.98E2	-2.09364E0	-8.1594E-1	-7.98392E-1	-9.13177E0	-9.1418E0	4.64916E-3	9.35316E-2	2.72744E1	-3.26661E1	-3.25776E1	2.67946E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09441E0	-8.16202E-1	-7.98631E-1	-9.13157E0	-9.14178E0	4.74453E-3	9.35316E-2	2.73315E1	-3.26735E1	-3.2641E1	2.68057E1	1.20209E-7	2.50989E-3	2.50989E-3	6.31278E-3	3.03286E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09371E0	-8.16345E-1	-7.98583E-1	-9.1315E0	-9.14187E0	4.62532E-3	9.32932E-2	2.72847E1	-3.26248E1	-3.26068E1	2.67976E1	1.19861E-7	2.52209E-3	2.52209E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.0951E0	-8.16154E-1	-7.98368E-1	-9.13167E0	-9.14185E0	5.05447E-3	9.38177E-2	2.73327E1	-3.26987E1	-3.26182E1	2.68265E1	1.20017E-7	2.52647E-3	2.52647E-3	6.31837E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16202E-1	-7.98512E-1	-9.13165E0	-9.14199E0	5.126E-3	9.36031E-2	2.72847E1	-3.26506E1	-3.26098E1	2.68182E1	1.20697E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00041E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.0951E0	-8.16345E-1	-7.98726E-1	-9.13143E0	-9.14176E0	4.88758E-3	9.33647E-2	2.73027E1	-3.26867E1	-3.2638E1	2.68256E1	1.20122E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09456E0	-8.16298E-1	-7.98821E-1	-9.13162E0	-9.14185E0	4.79221E-3	9.34601E-2	2.73171E1	-3.26639E1	-3.27071E1	2.68125E1	1.19953E-7	2.51525E-3	2.51525E-3	6.32896E-3	3.02769E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09433E0	-8.16321E-1	-7.98702E-1	-9.13136E0	-9.14161E0	4.72069E-3	9.32932E-2	2.72919E1	-3.26554E1	-3.25395E1	2.67947E1	1.20244E-7	2.51693E-3	2.51693E-3	6.31858E-3	2.99613E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09495E0	-8.16202E-1	-7.98583E-1	-9.13174E0	-9.1418E0	4.81606E-3	9.36508E-2	2.72835E1	-3.26524E1	-3.26386E1	2.68238E1	1.20174E-7	2.52209E-3	2.52209E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09503E0	-8.16393E-1	-7.98297E-1	-9.13184E0	-9.14199E0	4.93526E-3	9.377E-2	2.73275E1	-3.2662E1	-3.26585E1	2.6813E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00824E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09518E0	-8.16178E-1	-7.98368E-1	-9.13148E0	-9.14178E0	5.17368E-3	9.3627E-2	2.72925E1	-3.26843E1	-3.26554E1	2.68046E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32896E-3	2.99686E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09495E0	-8.16321E-1	-7.98607E-1	-9.13153E0	-9.14197E0	5.00679E-3	9.36985E-2	2.72781E1	-3.26368E1	-3.25569E1	2.68022E1	1.19913E-7	2.51662E-3	2.51662E-3	6.34037E-3	3.00041E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09426E0	-8.16345E-1	-7.98559E-1	-9.13172E0	-9.14171E0	5.43594E-3	9.37223E-2	2.72901E1	-3.26903E1	-3.26759E1	2.68058E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32386E-3	3.01085E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.1656E-1	-7.98774E-1	-9.13162E0	-9.1419E0	5.36442E-3	9.35078E-2	2.72892E1	-3.2626E1	-3.25942E1	2.6804E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9926E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-2.09526E0	-8.16464E-1	-7.98678E-1	-9.13136E0	-9.14187E0	5.07832E-3	9.35078E-2	2.72841E1	-3.265E1	-3.26218E1	2.68082E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00197E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09526E0	-8.16417E-1	-7.98392E-1	-9.1315E0	-9.14173E0	4.69685E-3	9.34839E-2	2.73087E1	-3.26597E1	-3.26446E1	2.68388E1	1.19757E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09603E0	-8.16298E-1	-7.98488E-1	-9.13138E0	-9.14166E0	4.48227E-3	9.35078E-2	2.73358E1	-3.26785E1	-3.2639E1	2.68022E1	1.19953E-7	2.52384E-3	2.52384E-3	6.33977E-3	3.02511E-1
