[Scan]
initial_time=2016-01-28T18:51:04
final_time=2016-01-28T18:51:24
ip_count=19
run=1026
dataset=4
scan=313
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09557E0
qbias_imon=-1.08801E-4
ql1_vset=
ql1_vmon=-8.16488E-1
ql1_imon=1.37593E-8
ql2_vset=
ql2_vmon=-7.98583E-1
ql2_imon=1.97731E-9
ql3_vset=
ql3_vmon=-9.13153E0
ql3_imon=3.83163E-10
ql4_vset=
ql4_vmon=-9.1414E0
ql4_imon=-9.12309E-11
mult1=-9.83671E-9
mult2=-2.68667E-9
rf_tmon=-3.50304E-3
rf_agc=3.38443E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.70881E-9
bslens_vset=-6.2E0
bslens_vmon=-6.67034E0
bslens_imon=2.28901E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20049E1
lens5a_imon=1.98127E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12509E2
lens4a_imon=2.04855E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53802E1
cs_ef1b_imon=3.11028E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02211E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05126E1
cs_ea1_imon=1.261E-5
lens1_vset=-5.0E0
lens1_vmon=-5.39419E0
lens1_imon=2.48007E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64668E1
os_ef1alow_imon=2.96E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04501E1
cs_ea2_imon=1.40808E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84292E1
cs_ef1a_imon=2.99928E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.20652E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15468E1
os_ea1_imon=2.43009E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.07676E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24909E0
cs_ionrep_imon=9.65753E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91908E2
cs_nozzle_imon=1.93474E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01803E1
cs_anode1_imon=2.05324E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20487E0
olens4_imon=3.17244E-8
tplens_vset=1.4E-1
tplens_vmon=1.62341E0
tplens_imon=-3.6063E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26356E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26855E1
iondef2_imon=1.60996E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02924E2
lens6_imon=2.98522E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=3.96454E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2521E0
ionrepsh_imon=9.40519E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33405E1
lens5b_imon=2.16765E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48101E0
os_ea2_imon=-6.92286E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06107E2
lens4b_imon=2.00677E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71324E1
cs_ef2a_imon=3.18524E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07258E0
os_ef2alow_imon=-2.54022E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76401E-1
os_ef2bup_imon=-5.31887E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10811E1
os_restr2_imon=3.38743E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23041E2
cs_ionfoca_imon=6.29387E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01827E1
cs_anode2_imon=2.10766E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73099E1
iondef1_imon=1.09445E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.25014E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82618E-1
olens1_imon=7.51996E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13314E0
cs_ionaccel_imon=-1.09142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02077E2
cs_ionfocb_imon=1.47219E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.65901E-6
window_vset=0.0E0
window_vmon=1.6929E-1
window_imon=-1.24639E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82622E2
mask1_imon=2.39102E-4
mask2_vset=0.0E0
mask2_vmon=-1.86542E1
mask2_imon=-6.69758E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92617E3
multa_neg_imon=7.41886E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93696E3
defgrida_imon=6.85288E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50125E3
multb_neg_imon=7.02231E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34442E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33224E1
os_fil1_imon=9.40612E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07575E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61968E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3054E1
cs_fil1_imon=9.24659E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35329E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62705E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.31876E-2
os_fil2_imon=-2.56986E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.02519E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25626E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35737E-1
cs_fil2_imon=-2.44372E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42453E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2178E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40037E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.50592E-1
res40_imon=-2.45732E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=175
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.0E0	0.0E0	1.47E2	4.1E1	-2.09487E0	-8.16107E-1	-7.98631E-1	-9.1315E0	-9.1418E0	4.60148E-3	9.40084E-2	2.73257E1	-3.26649E1	-3.25894E1	2.67938E1	1.20122E-7	2.51662E-3	2.51662E-3	6.29098E-3	3.01085E-1
2.0E0	2.8E1	0.0E0	3.16E2	1.6E2	-2.09456E0	-8.16298E-1	-7.98249E-1	-9.13165E0	-9.1419E0	4.91142E-3	9.35078E-2	2.72886E1	-3.26713E1	-3.26572E1	2.6798E1	1.19902E-7	2.51954E-3	2.51954E-3	6.34518E-3	3.01738E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09565E0	-8.16607E-1	-7.98321E-1	-9.13155E0	-9.14137E0	4.76837E-3	9.37939E-2	2.73173E1	-3.26515E1	-3.26399E1	2.67949E1	1.20244E-7	2.52139E-3	2.52139E-3	6.34661E-3	3.02545E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.0951E0	-8.16441E-1	-7.98535E-1	-9.13146E0	-9.14168E0	4.79221E-3	9.35555E-2	2.72886E1	-3.26181E1	-3.26566E1	2.68058E1	1.20042E-7	2.52236E-3	2.52236E-3	6.33919E-3	3.01104E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-2.09433E0	-8.1656E-1	-7.98774E-1	-9.13146E0	-9.14183E0	4.81606E-3	9.37462E-2	2.73243E1	-3.26807E1	-3.26488E1	2.68118E1	1.20069E-7	2.51116E-3	2.51116E-3	6.3074E-3	3.00563E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.0951E0	-8.16751E-1	-7.98559E-1	-9.13146E0	-9.14168E0	4.64916E-3	9.34362E-2	2.72973E1	-3.26927E1	-3.25575E1	2.68076E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.01871E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09495E0	-8.16607E-1	-7.98392E-1	-9.13131E0	-9.14161E0	4.55379E-3	9.37939E-2	2.72803E1	-3.26661E1	-3.26567E1	2.6825E1	1.19872E-7	2.52585E-3	2.52585E-3	6.35786E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09495E0	-8.16846E-1	-7.98488E-1	-9.13177E0	-9.1419E0	4.52995E-3	9.38177E-2	2.72895E1	-3.26518E1	-3.26272E1	2.68082E1	1.19902E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.02511E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09549E0	-8.16488E-1	-7.98392E-1	-9.13146E0	-9.14159E0	4.81606E-3	9.36031E-2	2.73249E1	-3.26831E1	-3.26452E1	2.6795E1	1.20106E-7	2.51847E-3	2.51847E-3	6.31817E-3	2.99686E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09503E0	-8.16679E-1	-7.98416E-1	-9.13153E0	-9.14187E0	4.8399E-3	9.32932E-2	2.73303E1	-3.26735E1	-3.26554E1	2.6822E1	1.20297E-7	2.51248E-3	2.51248E-3	6.32978E-3	2.99083E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16846E-1	-7.98345E-1	-9.13141E0	-9.14197E0	4.76837E-3	9.36508E-2	2.72775E1	-3.26554E1	-3.25882E1	2.68058E1	1.19861E-7	2.5188E-3	2.5188E-3	6.29098E-3	3.02396E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09503E0	-8.16631E-1	-7.98488E-1	-9.13153E0	-9.14199E0	4.62532E-3	9.377E-2	2.73249E1	-3.26771E1	-3.26687E1	2.6798E1	1.19497E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02133E-1
1.6E1	1.0E0	0.0E0	6.47E2	4.41E2	-2.09541E0	-8.16464E-1	-7.98392E-1	-9.13134E0	-9.14176E0	4.62532E-3	9.34601E-2	2.72991E1	-3.26549E1	-3.26549E1	2.681E1	1.19697E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.01995E-1
1.7E1	1.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16774E-1	-7.98869E-1	-9.13136E0	-9.14168E0	4.57764E-3	9.36508E-2	2.73275E1	-3.26455E1	-3.27045E1	2.68172E1	1.20122E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.02133E-1
1.8E1	3.0E0	0.0E0	7.27E2	5.0E2	-2.09426E0	-8.16655E-1	-7.98559E-1	-9.13146E0	-9.14185E0	4.69685E-3	9.39131E-2	2.72771E1	-3.26406E1	-3.25857E1	2.683E1	1.20174E-7	2.5188E-3	2.5188E-3	6.28552E-3	3.01085E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09487E0	-8.16417E-1	-7.98655E-1	-9.1316E0	-9.1419E0	4.76837E-3	9.39131E-2	2.73082E1	-3.2689E1	-3.26946E1	2.67845E1	1.1983E-7	2.51647E-3	2.51647E-3	6.32371E-3	3.00766E-1
2.0E1	2.0E0	0.0E0	8.08E2	5.58E2	-2.09518E0	-8.16321E-1	-7.98631E-1	-9.13162E0	-9.14195E0	4.60148E-3	9.37939E-2	2.73182E1	-3.26585E1	-3.25992E1	2.68045E1					
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09503E0	-8.16417E-1	-7.9875E-1	-9.13162E0	-9.14195E0	4.86374E-3	9.36747E-2	2.72935E1	-3.26787E1	-3.2677E1	2.67984E1	1.19872E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.0041E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0958E0	-8.16298E-1	-7.98798E-1	-9.1315E0	-9.14168E0	4.93526E-3	9.35793E-2	2.73249E1	-3.26717E1	-3.25888E1	2.68018E1	1.20106E-7	2.51954E-3	2.51954E-3	6.33166E-3	3.02382E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09557E0	-8.16488E-1	-7.98583E-1	-9.13153E0	-9.1414E0	4.93526E-3	9.38654E-2	2.73099E1	-3.26855E1	-3.26356E1	2.6804E1					
