[Scan]
initial_time=2016-01-28T18:51:31
final_time=2016-01-28T18:51:51
ip_count=19
run=1026
dataset=4
scan=314
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09518E0
qbias_imon=-1.08785E-4
ql1_vset=
ql1_vmon=-8.16703E-1
ql1_imon=1.38192E-8
ql2_vset=
ql2_vmon=-7.98631E-1
ql2_imon=1.99127E-9
ql3_vset=
ql3_vmon=-9.13155E0
ql3_imon=3.27754E-10
ql4_vset=
ql4_vmon=-9.14185E0
ql4_imon=-1.06239E-10
mult1=-9.84219E-9
mult2=-2.79381E-9
rf_tmon=-3.45355E-3
rf_agc=3.42294E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=1.70988E-9
bslens_vset=-6.2E0
bslens_vmon=-6.65532E0
bslens_imon=2.48368E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20716E1
lens5a_imon=1.97081E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.04981E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53731E1
cs_ef1b_imon=3.10589E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04576E2
lens23_imon=1.02161E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05018E1
cs_ea1_imon=1.24081E-5
lens1_vset=-5.0E0
lens1_vmon=-5.38578E0
lens1_imon=2.63148E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64539E1
os_ef1alow_imon=2.96827E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03768E1
cs_ea2_imon=1.42034E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8433E1
cs_ef1a_imon=3.00163E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.21491E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11274E1
os_restr1_imon=4.29547E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15203E1
os_ea1_imon=2.44018E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63809E1
os_ef1bup_imon=3.09825E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24669E0
cs_ionrep_imon=9.61067E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91881E2
cs_nozzle_imon=1.93366E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02058E1
cs_anode1_imon=2.05393E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.18498E-8
tplens_vset=1.4E-1
tplens_vmon=1.62821E0
tplens_imon=-2.34457E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.5083E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26632E1
iondef2_imon=1.56814E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02929E2
lens6_imon=2.98494E-4
ql6_vset=1.0E-1
ql6_vmon=9.39131E-2
ql6_imon=3.99388E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28274E0
ionrepsh_imon=9.40158E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.19072E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74629E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47681E0
os_ea2_imon=-6.05767E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06112E2
lens4b_imon=2.00547E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.17922E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04992E0
os_ef2alow_imon=-2.74139E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.03602E-1
os_ef2bup_imon=-5.5077E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10735E1
os_restr2_imon=3.37453E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.3155E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.10259E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73428E1
iondef1_imon=1.08832E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.08816E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.2896E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.52709E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0757E0
cs_ionaccel_imon=-1.03157E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56214E1
einzel_imon=7.51408E-6
window_vset=0.0E0
window_vmon=1.93359E-1
window_imon=-9.72491E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.3915E-4
mask2_vset=0.0E0
mask2_vmon=-1.86442E1
mask2_imon=-6.49292E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92663E3
multa_neg_imon=7.56306E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.41308E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.31792E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40156E0
defgridb_imon=6.09224E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.38163E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07468E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62434E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30619E1
cs_fil1_imon=9.24812E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29436E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62807E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.30586E-2
os_fil2_imon=-2.70394E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01082E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.96753E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32648E-1
cs_fil2_imon=-2.51859E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.08988E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21669E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31288E-3
inlet_lpb_pmon=3.03185E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.52209E-3
foreline_cvt_pmon=2.52209E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.21761E-1
res40_imon=-2.50855E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=205
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09619E0	-8.16679E-1	-7.98869E-1	-9.13191E0	-9.14178E0	4.95911E-3	9.37462E-2	2.72992E1	-3.26502E1	-3.26431E1	2.67998E1	1.19913E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.9978E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09487E0	-8.16369E-1	-7.98702E-1	-9.13172E0	-9.14204E0	5.05447E-3	9.37223E-2	2.73228E1	-3.26787E1	-3.27031E1	2.68106E1	1.20142E-7	2.52025E-3	2.52025E-3	6.32328E-3	2.97843E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09503E0	-8.16584E-1	-7.98583E-1	-9.1315E0	-9.14195E0	4.93526E-3	9.35793E-2	2.72856E1	-3.2662E1	-3.26101E1	2.67698E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.0041E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09526E0	-8.16393E-1	-7.98774E-1	-9.13157E0	-9.14178E0	4.79221E-3	9.36031E-2	2.73169E1	-3.26343E1	-3.26537E1	2.68004E1	1.19965E-7	2.51443E-3	2.51443E-3	6.33486E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09526E0	-8.16441E-1	-7.98941E-1	-9.13162E0	-9.14199E0	4.673E-3	9.36031E-2	2.7311E1	-3.26667E1	-3.26396E1	2.6814E1	1.20209E-7	2.52276E-3	2.52276E-3	6.31817E-3	3.00453E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09595E0	-8.1656E-1	-7.98655E-1	-9.13146E0	-9.14171E0	4.81606E-3	9.36747E-2	2.72896E1	-3.26779E1	-3.2638E1	2.6817E1	1.19851E-7	2.5131E-3	2.5131E-3	6.34518E-3	3.00453E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09572E0	-8.16631E-1	-7.98488E-1	-9.13157E0	-9.14166E0	4.76837E-3	9.32455E-2	2.73113E1	-3.26336E1	-3.26688E1	2.68124E1	1.1997E-7	2.51721E-3	2.51721E-3	6.32536E-3	3.00539E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-2.09572E0	-8.16774E-1	-7.98488E-1	-9.13162E0	-9.14187E0	4.86374E-3	9.40323E-2	2.7274E1	-3.26909E1	-3.26128E1	2.67991E1	1.19838E-7	2.52204E-3	2.52204E-3	6.30097E-3	3.00075E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09518E0	-8.16488E-1	-7.98607E-1	-9.1315E0	-9.14207E0	4.79221E-3	9.38654E-2	2.72957E1	-3.26537E1	-3.27062E1	2.68052E1	1.20076E-7	2.51557E-3	2.51557E-3	6.31332E-3	3.02743E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09495E0	-8.16536E-1	-7.98655E-1	-9.13181E0	-9.14183E0	4.88758E-3	9.40323E-2	2.73219E1	-3.26789E1	-3.26146E1	2.6816E1	1.20226E-7	2.5188E-3	2.5188E-3	6.32936E-3	2.9926E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09541E0	-8.16655E-1	-7.98535E-1	-9.13165E0	-9.14202E0	4.88758E-3	9.35078E-2	2.72955E1	-3.26753E1	-3.2644E1	2.67872E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09595E0	-8.16727E-1	-7.98464E-1	-9.13188E0	-9.14202E0	5.24521E-3	9.34362E-2	2.73129E1	-3.26861E1	-3.26476E1	2.67908E1	1.20017E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01085E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09627E0	-8.16703E-1	-7.9844E-1	-9.13179E0	-9.1419E0	5.05447E-3	9.33647E-2	2.73105E1	-3.26669E1	-3.2623E1	2.6822E1	1.20209E-7	2.51096E-3	2.51096E-3	6.3074E-3	3.0148E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09634E0	-8.16083E-1	-7.98464E-1	-9.13155E0	-9.14178E0	5.03063E-3	9.35078E-2	2.7269E1	-3.2632E1	-3.26789E1	2.67872E1	1.19861E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02659E-1
1.8E1	0.0E0	0.0E0	7.27E2	5.0E2	-2.09557E0	-8.16584E-1	-7.98202E-1	-9.1315E0	-9.14142E0	5.24521E-3	9.35555E-2	2.73504E1	-3.26878E1	-3.25838E1	2.67848E1	1.19819E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.03081E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09588E0	-8.16393E-1	-7.98392E-1	-9.1315E0	-9.14207E0	4.93526E-3	9.34839E-2	2.72957E1	-3.26726E1	-3.25829E1	2.6801E1	1.20174E-7	2.52647E-3	2.52647E-3	6.3074E-3	3.02396E-1
2.0E1	8.0E0	0.0E0	8.08E2	5.58E2	-2.09588E0	-8.1656E-1	-7.98702E-1	-9.13162E0	-9.14185E0	4.74453E-3	9.38177E-2	2.73027E1	-3.26673E1	-3.2639E1	2.68004E1	1.20278E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09572E0	-8.16512E-1	-7.98893E-1	-9.13143E0	-9.14171E0	4.8399E-3	9.37939E-2	2.73231E1	-3.26789E1	-3.26398E1	2.67891E1	1.19953E-7	2.51632E-3	2.51632E-3	6.31278E-3	3.00966E-1
2.2E1	1.0E0	0.0E0	8.89E2	6.17E2	-2.0948E0	-8.16655E-1	-7.98726E-1	-9.13155E0	-9.14183E0	4.79221E-3	9.36031E-2	2.72998E1	-3.26815E1	-3.26514E1	2.68196E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09518E0	-8.16703E-1	-7.98631E-1	-9.13155E0	-9.14185E0	4.8399E-3	9.39131E-2	2.73428E1	-3.26632E1	-3.26071E1	2.67992E1	1.20017E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.03185E-1
