[Scan]
initial_time=2016-01-28T18:51:58
final_time=2016-01-28T18:52:17
ip_count=19
run=1026
dataset=4
scan=315
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09595E0
qbias_imon=-1.08835E-4
ql1_vset=
ql1_vmon=-8.16369E-1
ql1_imon=1.37476E-8
ql2_vset=
ql2_vmon=-7.98345E-1
ql2_imon=2.03892E-9
ql3_vset=
ql3_vmon=-9.13172E0
ql3_imon=3.74854E-10
ql4_vset=
ql4_vmon=-9.1419E0
ql4_imon=-9.26852E-11
mult1=-9.66815E-9
mult2=-2.65873E-9
rf_tmon=-3.36485E-3
rf_agc=3.41267E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.93526E-3
ql5_imon=1.74494E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64571E0
bslens_imon=2.41518E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19676E1
lens5a_imon=1.97298E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12448E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53742E1
cs_ef1b_imon=3.08145E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04596E2
lens23_imon=1.02388E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05331E1
cs_ea1_imon=1.23649E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42183E0
lens1_imon=2.65311E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.95531E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0363E1
cs_ea2_imon=1.40376E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84268E1
cs_ef1a_imon=3.01297E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.21375E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10991E1
os_restr1_imon=4.30031E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1551E1
os_ea1_imon=2.42215E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63779E1
os_ef1bup_imon=3.10812E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24309E0
cs_ionrep_imon=9.80173E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91871E2
cs_nozzle_imon=1.93597E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01971E1
cs_anode1_imon=2.06081E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20494E0
olens4_imon=3.18686E-8
tplens_vset=1.4E-1
tplens_vmon=1.6162E0
tplens_imon=-2.89745E-8
iondef3_vset=-3.249E1
iondef3_vmon=-3.26176E1
iondef3_imon=1.50001E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26885E1
iondef2_imon=1.5959E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02899E2
lens6_imon=2.98252E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=4.00511E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28094E0
ionrepsh_imon=9.43403E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.16548E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74766E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47681E0
os_ea2_imon=-7.86015E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06105E2
lens4b_imon=2.00464E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7124E1
cs_ef2a_imon=3.17515E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.64473E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.27923E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10595E1
os_restr2_imon=3.38202E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23047E2
cs_ionfoca_imon=6.28775E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01695E1
cs_anode2_imon=2.1091E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73189E1
iondef1_imon=1.08039E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67996E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71785E1
olens3_imon=6.22109E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82213E-1
olens1_imon=7.52349E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13375E0
cs_ionaccel_imon=-7.88688E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47327E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56633E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=1.81303E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82641E2
mask1_imon=2.39124E-4
mask2_vset=0.0E0
mask2_vmon=-1.86728E1
mask2_imon=-6.91381E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9262E3
multa_neg_imon=7.79017E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93712E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5012E3
multb_neg_imon=7.43328E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50984E0
defgridb_imon=6.1391E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33236E1
os_fil1_imon=9.40204E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06879E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61945E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30583E1
cs_fil1_imon=9.24689E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.24637E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62967E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.25626E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33666E-1
cs_fil2_imon=-2.20346E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.29839E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21677E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51847E-3
foreline_cvt_pmon=2.51847E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49391E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=149
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	1.0E0	0.0E0	1.47E2	4.1E1	-2.09557E0	-8.16512E-1	-7.98368E-1	-9.13126E0	-9.14187E0	4.86374E-3	9.36985E-2	2.73115E1	-3.2681E1	-3.26034E1	2.67824E1	1.20278E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9952E-1
2.0E0	3.8E1	0.0E0	3.16E2	1.6E2	-2.09472E0	-8.16512E-1	-7.98559E-1	-9.13169E0	-9.14168E0	5.03063E-3	9.38416E-2	2.73113E1	-3.26678E1	-3.26035E1	2.68058E1	1.198E-7	2.52061E-3	2.52061E-3	6.3074E-3	2.99941E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.0951E0	-8.16464E-1	-7.98464E-1	-9.13169E0	-9.14199E0	4.60148E-3	9.39369E-2	2.73034E1	-3.26805E1	-3.26301E1	2.68022E1	1.20084E-7	2.51915E-3	2.51915E-3	6.29624E-3	3.00676E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09657E0	-8.16679E-1	-7.98512E-1	-9.13136E0	-9.14195E0	4.62532E-3	9.41277E-2	2.72727E1	-3.26644E1	-3.2626E1	2.68209E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09464E0	-8.1656E-1	-7.98345E-1	-9.13174E0	-9.14171E0	4.8399E-3	9.36508E-2	2.73021E1	-3.26693E1	-3.26296E1	2.68028E1	1.198E-7	2.51739E-3	2.51739E-3	6.33436E-3	2.98665E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09588E0	-8.16393E-1	-7.98655E-1	-9.1316E0	-9.14183E0	4.79221E-3	9.36747E-2	2.72961E1	-3.26488E1	-3.26212E1	2.68202E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.01085E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-2.0965E0	-8.16703E-1	-7.98464E-1	-9.13167E0	-9.14183E0	4.8399E-3	9.38892E-2	2.72997E1	-3.26476E1	-3.26603E1	2.68082E1	1.20122E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00563E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09588E0	-8.16727E-1	-7.98464E-1	-9.13162E0	-9.14178E0	4.69685E-3	9.36031E-2	2.72474E1	-3.27053E1	-3.26422E1	2.68052E1					
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-2.09565E0	-8.16798E-1	-7.98321E-1	-9.13165E0	-9.14192E0	4.91142E-3	9.36508E-2	2.73009E1	-3.26681E1	-3.2587E1	2.68226E1	1.20174E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.01871E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09611E0	-8.16512E-1	-7.98178E-1	-9.13172E0	-9.14195E0	4.64916E-3	9.37939E-2	2.72624E1	-3.26753E1	-3.25894E1	2.67788E1	1.19902E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.00966E-1
1.4E1	2.0E0	0.0E0	5.66E2	3.82E2	-2.09557E0	-8.16536E-1	-7.98607E-1	-9.13196E0	-9.14192E0	4.74453E-3	9.35316E-2	2.73711E1	-3.26497E1	-3.26898E1	2.68166E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.00563E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.0948E0	-8.16488E-1	-7.98607E-1	-9.13188E0	-9.14171E0	4.72069E-3	9.377E-2	2.72986E1	-3.26714E1	-3.25754E1	2.67985E1	1.20356E-7	2.51549E-3	2.51549E-3	6.31761E-3	3.01121E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09557E0	-8.16488E-1	-7.9844E-1	-9.13169E0	-9.1419E0	4.76837E-3	9.36985E-2	2.73015E1	-3.26518E1	-3.26554E1	2.68184E1	1.20076E-7	2.51439E-3	2.51439E-3	6.33112E-3	3.01043E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09526E0	-8.16464E-1	-7.98321E-1	-9.13174E0	-9.14216E0	4.79221E-3	9.39846E-2	2.73135E1	-3.26741E1	-3.26579E1	2.68059E1	1.20069E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00563E-1
1.8E1	2.0E0	0.0E0	7.27E2	5.0E2	-2.09541E0	-8.16393E-1	-7.98512E-1	-9.13143E0	-9.14159E0	4.76837E-3	9.36747E-2	2.72951E1	-3.2672E1	-3.2557E1	2.68244E1	1.20106E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00197E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09657E0	-8.16655E-1	-7.98321E-1	-9.13153E0	-9.14171E0	4.48227E-3	9.37939E-2	2.73204E1	-3.26278E1	-3.27007E1	2.67843E1	1.19809E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00563E-1
2.0E1	4.0E0	0.0E0	8.08E2	5.58E2	-2.09719E0	-8.16679E-1	-7.98297E-1	-9.13179E0	-9.14209E0	4.55379E-3	9.408E-2	2.73087E1	-3.26909E1	-3.26116E1	2.68029E1	1.20122E-7	2.52318E-3	2.52318E-3	6.32386E-3	3.01085E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09665E0	-8.16321E-1	-7.98702E-1	-9.1315E0	-9.14209E0	4.60148E-3	9.38654E-2	2.73169E1	-3.26685E1	-3.26183E1	2.6777E1	1.19913E-7	2.51225E-3	2.51225E-3	6.30192E-3	3.00824E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09657E0	-8.16321E-1	-7.98965E-1	-9.13167E0	-9.14204E0	4.8399E-3	9.37223E-2	2.73204E1	-3.26667E1	-3.25741E1	2.68259E1	1.20106E-7	2.51954E-3	2.51954E-3	6.32896E-3	3.0071E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09595E0	-8.16369E-1	-7.98345E-1	-9.13172E0	-9.1419E0	4.93526E-3	9.38416E-2	2.73189E1	-3.26885E1	-3.26176E1	2.67996E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32896E-3	3.00966E-1
