[Scan]
initial_time=2016-01-28T18:54:11
final_time=2016-01-28T18:54:31
ip_count=19
run=1026
dataset=4
scan=320
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.0941E0
qbias_imon=-1.08774E-4
ql1_vset=
ql1_vmon=-8.1687E-1
ql1_imon=1.37457E-8
ql2_vset=
ql2_vmon=-7.98178E-1
ql2_imon=2.01929E-9
ql3_vset=
ql3_vmon=-9.13148E0
ql3_imon=3.21507E-10
ql4_vset=
ql4_vmon=-9.14218E0
ql4_imon=-8.75235E-11
mult1=-9.84219E-9
mult2=-2.77421E-9
rf_tmon=-4.9755E-3
rf_agc=3.2324E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.10216E-3
ql5_imon=1.70234E-9
bslens_vset=-6.2E0
bslens_vmon=-6.61387E0
bslens_imon=2.50891E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.21034E1
lens5a_imon=1.97009E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1251E2
lens4a_imon=2.05017E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.09947E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04618E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04814E1
cs_ea1_imon=1.25884E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42183E0
lens1_imon=2.59183E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6471E1
os_ef1alow_imon=2.96612E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03714E1
cs_ea2_imon=1.41673E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8443E1
cs_ef1a_imon=3.00577E-5
olens2_vset=9.7E-1
olens2_vmon=9.69887E-1
olens2_imon=1.21872E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11111E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14999E1
os_ea1_imon=2.42143E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63683E1
os_ef1bup_imon=3.07748E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22927E0
cs_ionrep_imon=9.40158E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91893E2
cs_nozzle_imon=1.93348E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.05144E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20473E0
olens4_imon=3.18254E-8
tplens_vset=1.4E-1
tplens_vmon=1.59998E0
tplens_imon=-2.81321E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26071E1
iondef3_imon=1.49929E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27021E1
iondef2_imon=1.57751E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02904E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=4.04097E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26171E0
ionrepsh_imon=9.41961E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33838E1
lens5b_imon=2.1662E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74573E1
cs_ef2b_imon=3.11857E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4744E0
os_ea2_imon=-6.95891E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06088E2
lens4b_imon=2.00583E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71372E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06357E0
os_ef2alow_imon=-2.6123E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.82407E-1
os_ef2bup_imon=-5.29725E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10985E1
os_restr2_imon=3.37878E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.30829E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01875E1
cs_anode2_imon=2.08964E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72815E1
iondef1_imon=1.08868E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67764E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.2615E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.56966E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.16198E0
cs_ionaccel_imon=-9.47263E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02081E2
cs_ionfocb_imon=1.47295E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56423E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=2.13138E-1
window_imon=-1.09863E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.39225E-4
mask2_vset=0.0E0
mask2_vmon=-1.8677E1
mask2_imon=-7.16609E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92682E3
multa_neg_imon=7.29269E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93716E3
defgrida_imon=6.26527E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50113E3
multb_neg_imon=7.13046E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32036E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33193E1
os_fil1_imon=9.40732E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07419E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61889E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30514E1
cs_fil1_imon=9.25536E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.20553E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62875E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.0995E-2
os_fil2_imon=-2.67197E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.82097E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.24853E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32241E-1
cs_fil2_imon=-2.696E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.09417E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2177E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02659E-1
chamber_ion_pmon=1.20017E-7
chamber_cvt_pmon=2.5199E-3
foreline_cvt_pmon=2.5199E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.07635E-1
res40_imon=-2.51859E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	5.0E0	0.0E0	1.47E2	4.1E1	-2.09472E0	-8.16441E-1	-7.98297E-1	-9.13174E0	-9.14199E0	4.673E-3	9.38654E-2	2.73181E1	-3.26573E1	-3.26413E1	2.68412E1	1.20017E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.97445E-1
2.0E0	2.7E1	0.0E0	3.16E2	1.6E2	-2.09495E0	-8.16369E-1	-7.98535E-1	-9.13153E0	-9.14187E0	4.57764E-3	9.37939E-2	2.73075E1	-3.26536E1	-3.26729E1	2.68376E1	1.20122E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.97445E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09364E0	-8.16274E-1	-7.98559E-1	-9.1316E0	-9.14202E0	4.76837E-3	9.38416E-2	2.73123E1	-3.26356E1	-3.26062E1	2.67998E1	1.20311E-7	2.5131E-3	2.5131E-3	6.29128E-3	3.00453E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09402E0	-8.16464E-1	-7.98655E-1	-9.13162E0	-9.14176E0	4.8399E-3	9.36031E-2	2.73287E1	-3.26679E1	-3.26378E1	2.68136E1	1.20069E-7	2.52318E-3	2.52318E-3	6.31837E-3	3.01871E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09371E0	-8.16631E-1	-7.98535E-1	-9.13181E0	-9.14166E0	4.88758E-3	9.35316E-2	2.73171E1	-3.2644E1	-3.26753E1	2.68365E1	1.19985E-7	2.51322E-3	2.51322E-3	6.32916E-3	3.02975E-1
6.0E0	2.0E0	0.0E0	9.93E2	6.35E2	-2.0941E0	-8.17037E-1	-7.98345E-1	-9.13208E0	-9.14197E0	4.74453E-3	9.37223E-2	2.72703E1	-3.2639E1	-3.25847E1	2.68241E1					
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09325E0	-8.16607E-1	-7.98535E-1	-9.13229E0	-9.14204E0	4.74453E-3	9.38177E-2	2.73111E1	-3.26681E1	-3.2611E1	2.67842E1	1.19953E-7	2.51417E-3	2.51417E-3	6.29128E-3	3.01223E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09402E0	-8.16846E-1	-7.98178E-1	-9.13179E0	-9.1418E0	4.93526E-3	9.35078E-2	2.72925E1	-3.26807E1	-3.259E1	2.68154E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	2.9874E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09433E0	-8.16536E-1	-7.98106E-1	-9.13184E0	-9.14178E0	5.05447E-3	9.38416E-2	2.72973E1	-3.26374E1	-3.26452E1	2.68028E1	1.20174E-7	2.52428E-3	2.52428E-3	6.33486E-3	2.99E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09356E0	-8.16512E-1	-7.97987E-1	-9.13196E0	-9.14187E0	5.19753E-3	9.377E-2	2.73008E1	-3.26578E1	-3.26915E1	2.67517E1	1.20278E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.98222E-1
1.4E1	1.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16655E-1	-7.98011E-1	-9.1321E0	-9.14202E0	5.24521E-3	9.3627E-2	2.73051E1	-3.2662E1	-3.25989E1	2.6792E1	1.19819E-7	2.51581E-3	2.51581E-3	6.34099E-3	3.0041E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09433E0	-8.16607E-1	-7.98011E-1	-9.13153E0	-9.14178E0	4.91142E-3	9.37462E-2	2.73565E1	-3.26536E1	-3.26034E1	2.67878E1	1.20209E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.9943E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09472E0	-8.16631E-1	-7.98106E-1	-9.13115E0	-9.14166E0	4.45843E-3	9.36508E-2	2.73116E1	-3.2659E1	-3.26514E1	2.68004E1	1.19819E-7	2.51581E-3	2.51581E-3	6.29624E-3	3.01209E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09356E0	-8.16488E-1	-7.98106E-1	-9.13124E0	-9.14159E0	4.64916E-3	9.35793E-2	2.72903E1	-3.2659E1	-3.25776E1	2.68154E1	1.20158E-7	2.52276E-3	2.52276E-3	6.32356E-3	3.00453E-1
1.8E1	1.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16417E-1	-7.98035E-1	-9.13129E0	-9.1418E0	4.33922E-3	9.36985E-2	2.7367E1	-3.26891E1	-3.2614E1	2.67937E1	1.20055E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.99941E-1
1.9E1	0.0E0	0.0E0	7.68E2	5.29E2	-2.09449E0	-8.1656E-1	-7.98082E-1	-9.13126E0	-9.14187E0	4.673E-3	9.35078E-2	2.73381E1	-3.26543E1	-3.26603E1	2.68046E1	1.19965E-7	2.51771E-3	2.51771E-3	6.32386E-3	2.9978E-1
2.0E1	3.0E0	0.0E0	8.08E2	5.58E2	-2.09464E0	-8.16655E-1	-7.98416E-1	-9.13112E0	-9.14209E0	4.8399E-3	9.34362E-2	2.73015E1	-3.26657E1	-3.26008E1	2.67908E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	2.9926E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09433E0	-8.16536E-1	-7.98273E-1	-9.13167E0	-9.14207E0	4.91142E-3	9.377E-2	2.7298E1	-3.26496E1	-3.26472E1	2.6834E1	1.20017E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9978E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.09487E0	-8.16751E-1	-7.98178E-1	-9.13165E0	-9.14199E0	4.79221E-3	9.377E-2	2.73321E1	-3.26567E1	-3.26711E1	2.67776E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.0941E0	-8.1687E-1	-7.98178E-1	-9.13148E0	-9.14218E0	5.10216E-3	9.35078E-2	2.72815E1	-3.27021E1	-3.26071E1	2.67764E1	1.20017E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.02659E-1
