[Scan]
initial_time=2016-01-28T18:55:31
final_time=2016-01-28T18:55:51
ip_count=19
run=1026
dataset=4
scan=323
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=OSNB
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-2.09472E0
qbias_imon=-1.0877E-4
ql1_vset=
ql1_vmon=-8.16655E-1
ql1_imon=1.36734E-8
ql2_vset=
ql2_vmon=-7.9875E-1
ql2_imon=2.05522E-9
ql3_vset=
ql3_vmon=-9.13212E0
ql3_imon=3.052E-10
ql4_vset=
ql4_vmon=-9.14187E0
ql4_imon=-9.96351E-11
mult1=-1.04628E-8
mult2=-2.74456E-9
rf_tmon=-5.7321E-3
rf_agc=3.25946E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=1.69488E-9
bslens_vset=-6.2E0
bslens_vmon=-6.64309E0
bslens_imon=2.53299E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20323E1
lens5a_imon=1.97961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12474E2
lens4a_imon=2.05026E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53885E1
cs_ef1b_imon=3.1061E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04652E2
lens23_imon=1.02218E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04592E1
cs_ea1_imon=1.24065E-5
lens1_vset=-5.0E0
lens1_vmon=-5.42382E0
lens1_imon=2.46681E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64595E1
os_ef1alow_imon=2.97415E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03969E1
cs_ea2_imon=1.40729E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8501E1
cs_ef1a_imon=3.02553E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.22727E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11195E1
os_restr1_imon=4.28741E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15196E1
os_ea1_imon=2.418E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.09053E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2482E0
cs_ionrep_imon=9.77073E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93533E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01556E1
cs_anode1_imon=2.02288E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.18948E-8
tplens_vset=1.4E-1
tplens_vmon=1.63949E0
tplens_imon=-2.27391E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26506E1
iondef3_imon=1.50462E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26158E1
iondef2_imon=1.55407E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02922E2
lens6_imon=2.98467E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=3.97249E-9
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25729E0
ionrepsh_imon=9.28017E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33528E1
lens5b_imon=2.19219E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7456E1
cs_ef2b_imon=3.12945E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47791E0
os_ea2_imon=-5.93366E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06102E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71082E1
cs_ef2a_imon=3.18122E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06299E0
os_ef2alow_imon=-2.56833E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.76449E-1
os_ef2bup_imon=-5.14891E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10942E1
os_restr2_imon=3.39646E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.30629E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01828E1
cs_anode2_imon=2.09566E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73123E1
iondef1_imon=1.08375E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67937E1
iondef4_imon=1.0969E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.25409E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.53212E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.09706E0
cs_ionaccel_imon=-1.0698E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02054E2
cs_ionfocb_imon=1.47277E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56321E1
einzel_imon=7.58275E-6
window_vset=0.0E0
window_vmon=2.13979E-1
window_imon=-1.2216E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39314E-4
mask2_vset=0.0E0
mask2_vmon=-1.86292E1
mask2_imon=-6.45539E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.99147E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.13045E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50102E3
multb_neg_imon=7.18555E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.49119E0
defgridb_imon=5.9825E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33203E1
os_fil1_imon=9.40954E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07251E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62365E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30529E1
cs_fil1_imon=9.26436E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.38539E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62851E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21919E-2
os_fil2_imon=-2.60686E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83034E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.86947E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35105E-1
cs_fil2_imon=-2.52902E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=4.81015E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21835E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52169E-3
foreline_cvt_pmon=2.52169E-3
chamber_tmon=1.40078E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.08138E-1
res40_imon=-2.69288E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=201
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	0.0E0	0.0E0	1.47E2	4.1E1	-2.09526E0	-8.16584E-1	-7.9844E-1	-9.13138E0	-9.14207E0	4.57764E-3	9.34839E-2	2.73428E1	-3.2629E1	-3.26838E1	2.68018E1	1.19895E-7	2.5199E-3	2.5199E-3	6.33648E-3	3.01193E-1
2.0E0	3.3E1	0.0E0	3.16E2	1.6E2	-2.09503E0	-8.16464E-1	-7.98535E-1	-9.1316E0	-9.1418E0	4.55379E-3	9.33886E-2	2.73198E1	-3.26689E1	-3.26536E1	2.67751E1	1.19861E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.02133E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-2.09487E0	-8.16512E-1	-7.98321E-1	-9.13172E0	-9.14197E0	4.72069E-3	9.33409E-2	2.7319E1	-3.26735E1	-3.26191E1	2.67885E1	1.19601E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.02133E-1
4.0E0	4.0E0	0.0E0	6.55E2	3.98E2	-2.09371E0	-8.16727E-1	-7.98225E-1	-9.13165E0	-9.14192E0	4.55379E-3	9.35078E-2	2.72715E1	-3.26862E1	-3.26236E1	2.68016E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.01223E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-2.09449E0	-8.16607E-1	-7.98249E-1	-9.13153E0	-9.14183E0	4.55379E-3	9.36747E-2	2.72978E1	-3.26682E1	-3.25936E1	2.68172E1	1.20106E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.02253E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-2.09418E0	-8.16393E-1	-7.98273E-1	-9.13181E0	-9.14192E0	4.72069E-3	9.36508E-2	2.72962E1	-3.26596E1	-3.25977E1	2.67932E1	1.19913E-7	2.52318E-3	2.52318E-3	6.31288E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-2.09464E0	-8.16584E-1	-7.98607E-1	-9.13172E0	-9.14168E0	4.86374E-3	9.33886E-2	2.72904E1	-3.26359E1	-3.26441E1	2.68302E1	1.20122E-7	2.52757E-3	2.52757E-3	6.33486E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-2.09379E0	-8.16679E-1	-7.98345E-1	-9.13174E0	-9.14197E0	4.76837E-3	9.36747E-2	2.73166E1	-3.26695E1	-3.2653E1	2.68412E1	1.19969E-7	2.51513E-3	2.51513E-3	6.31987E-3	3.00791E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-2.09472E0	-8.16965E-1	-7.98154E-1	-9.13157E0	-9.14152E0	4.673E-3	9.35316E-2	2.72231E1	-3.26482E1	-3.25543E1	2.68406E1	1.19956E-7	2.51423E-3	2.51423E-3	6.31242E-3	3.00054E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-2.09426E0	-8.16751E-1	-7.98559E-1	-9.1316E0	-9.14166E0	4.86374E-3	9.35793E-2	2.72922E1	-3.26854E1	-3.26229E1	2.67914E1	1.20226E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.4E1	0.0E0	0.0E0	5.66E2	3.82E2	-2.09472E0	-8.16488E-1	-7.98297E-1	-9.13146E0	-9.14159E0	5.36442E-3	9.38177E-2	2.72921E1	-3.2652E1	-3.26484E1	2.67836E1	1.19851E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.01223E-1
1.5E1	0.0E0	0.0E0	6.06E2	4.11E2	-2.09456E0	-8.16441E-1	-7.98273E-1	-9.13174E0	-9.1418E0	4.93526E-3	9.36985E-2	2.72993E1	-3.26735E1	-3.2615E1	2.68123E1	1.19809E-7	2.51007E-3	2.51007E-3	6.3074E-3	3.00824E-1
1.6E1	0.0E0	0.0E0	6.47E2	4.41E2	-2.09441E0	-8.16369E-1	-7.98273E-1	-9.13174E0	-9.14195E0	4.76837E-3	9.36985E-2	2.72985E1	-3.26494E1	-3.26458E1	2.6789E1	1.20092E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.006E-1
1.7E1	0.0E0	0.0E0	6.87E2	4.7E2	-2.09503E0	-8.16321E-1	-7.98392E-1	-9.13143E0	-9.14178E0	4.95911E-3	9.34839E-2	2.72873E1	-3.26762E1	-3.26193E1	2.67956E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.03185E-1
1.8E1	5.0E0	0.0E0	7.27E2	5.0E2	-2.09433E0	-8.16369E-1	-7.98345E-1	-9.13153E0	-9.14197E0	4.91142E-3	9.377E-2	2.72817E1	-3.26861E1	-3.26549E1	2.68169E1	1.20031E-7	2.52697E-3	2.52697E-3	6.34099E-3	3.02277E-1
1.9E1	1.0E0	0.0E0	7.68E2	5.29E2	-2.09495E0	-8.16345E-1	-7.98464E-1	-9.13177E0	-9.14197E0	4.81606E-3	9.37223E-2	2.72805E1	-3.26669E1	-3.2593E1	2.68294E1	1.20278E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00302E-1
2.0E1	1.2E1	0.0E0	8.08E2	5.58E2	-2.0941E0	-8.16226E-1	-7.98249E-1	-9.13172E0	-9.14185E0	4.95911E-3	9.35555E-2	2.72787E1	-3.2638E1	-3.26639E1	2.67988E1	1.19913E-7	2.51116E-3	2.51116E-3	6.29098E-3	3.00824E-1
2.1E1	0.0E0	0.0E0	8.49E2	5.88E2	-2.09371E0	-8.16298E-1	-7.98535E-1	-9.132E0	-9.14192E0	4.74453E-3	9.34839E-2	2.73269E1	-3.26838E1	-3.26172E1	2.67944E1	1.20017E-7	2.51771E-3	2.51771E-3	6.3074E-3	2.9952E-1
2.2E1	0.0E0	0.0E0	8.89E2	6.17E2	-2.0951E0	-8.1656E-1	-7.98607E-1	-9.13186E0	-9.14185E0	4.62532E-3	9.35316E-2	2.73122E1	-3.2636E1	-3.2606E1	2.67619E1	1.20055E-7	2.5131E-3	2.5131E-3	6.29128E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-2.09472E0	-8.16655E-1	-7.9875E-1	-9.13212E0	-9.14187E0	4.98295E-3	9.36508E-2	2.73123E1	-3.26158E1	-3.26506E1	2.67937E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31817E-3	3.0148E-1
