[Scan]
initial_time=2016-01-28T18:56:08
final_time=2016-01-28T18:56:28
ip_count=19
run=1026
dataset=5
scan=324
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.32464E-2
qbias_imon=-3.81554E-6
ql1_vset=
ql1_vmon=-8.79978E1
ql1_imon=-3.35155E-9
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.60151E-9
ql3_vset=
ql3_vmon=-8.80014E1
ql3_imon=-9.148E-9
ql4_vset=
ql4_vmon=4.76837E-4
ql4_imon=1.68039E-8
mult1=-1.02087E-8
mult2=-2.72522E-9
rf_tmon=-5.09938E-3
rf_agc=3.32147E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.98295E-3
ql5_imon=7.6648E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.59183E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19376E1
lens5a_imon=1.99244E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.04823E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.09839E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.01991E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0461E1
cs_ea1_imon=1.23E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04797E0
lens1_imon=1.43103E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64734E1
os_ef1alow_imon=2.96396E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03943E1
cs_ea2_imon=1.42502E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83649E1
cs_ef1a_imon=3.00649E-5
olens2_vset=9.7E-1
olens2_vmon=9.69815E-1
olens2_imon=1.21722E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11183E1
os_restr1_imon=4.29959E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15372E1
os_ea1_imon=2.40593E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63785E1
os_ef1bup_imon=3.08794E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2569E0
cs_ionrep_imon=9.70079E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91873E2
cs_nozzle_imon=1.93276E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01809E1
cs_anode1_imon=2.03774E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.95366E-8
tplens_vset=1.4E-1
tplens_vmon=1.63903E0
tplens_imon=-1.22703E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26396E1
iondef3_imon=1.51082E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26437E1
iondef2_imon=1.57066E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02905E2
lens6_imon=2.98259E-4
ql6_vset=1.0E-1
ql6_vmon=9.3174E-2
ql6_imon=9.90951E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.31158E0
ionrepsh_imon=9.33309E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3352E1
lens5b_imon=2.16584E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74513E1
cs_ef2b_imon=3.12326E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43655E0
os_ea2_imon=-7.21126E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00453E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70993E1
cs_ef2a_imon=3.17191E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05756E0
os_ef2alow_imon=-2.5258E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96823E-1
os_ef2bup_imon=-5.4378E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10847E1
os_restr2_imon=3.38815E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23022E2
cs_ionfoca_imon=6.2964E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01731E1
cs_anode2_imon=2.1127E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72939E1
iondef1_imon=1.07751E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68094E1
iondef4_imon=1.08774E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.40178E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8207E-1
olens1_imon=7.5164E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13915E0
cs_ionaccel_imon=-1.03376E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.4732E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56105E1
einzel_imon=7.46079E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-9.36451E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82651E2
mask1_imon=2.39026E-4
mask2_vset=0.0E0
mask2_vmon=-1.86524E1
mask2_imon=-6.15698E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.52701E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.25085E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50153E3
multb_neg_imon=6.62577E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.62412E0
defgridb_imon=6.0634E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33201E1
os_fil1_imon=9.41928E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06867E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62347E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30508E1
cs_fil1_imon=9.24623E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30764E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63275E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.61191E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.89664E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3509E-1
cs_fil2_imon=-2.24551E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.4846E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21733E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=2.99845E-1
chamber_ion_pmon=1.19941E-7
chamber_cvt_pmon=2.51603E-3
foreline_cvt_pmon=2.51603E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.95332E-1
res40_imon=-2.45372E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=209
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.36E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.79979E1	-5.72205E-4	-8.80013E1	3.09944E-4	4.81606E-3	9.34124E-2	2.73529E1	-3.26526E1	-3.25989E1	2.67862E1	1.20226E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01085E-1
2.0E0	8.466E3	7.0E0	3.16E2	1.6E2	-7.201E-2	-8.79976E1	-5.72205E-4	-8.80014E1	2.14577E-4	4.79221E-3	9.3174E-2	2.73063E1	-3.26744E1	-3.26523E1	2.68169E1	1.20092E-7	2.51919E-3	2.51919E-3	6.31798E-3	3.00852E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.79981E1	-7.15256E-4	-8.80013E1	9.53674E-5	4.81606E-3	9.34601E-2	2.72651E1	-3.26376E1	-3.26156E1	2.67902E1	1.19937E-7	2.51158E-3	2.51158E-3	6.29603E-3	3.00251E-1
4.0E0	2.147E3	1.0E0	6.55E2	3.98E2	-7.19325E-2	-8.79977E1	-5.48363E-4	-8.80012E1	3.09944E-4	5.00679E-3	9.34839E-2	2.7352E1	-3.26573E1	-3.2653E1	2.67872E1	1.20042E-7	2.51919E-3	2.51919E-3	6.31269E-3	3.006E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.25507E-2	-8.79977E1	-6.91414E-4	-8.80016E1	3.33786E-4	4.86374E-3	9.35793E-2	2.72702E1	-3.26825E1	-3.26296E1	2.68226E1	1.19809E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.16233E-2	-8.79977E1	-5.00679E-4	-8.80016E1	3.57628E-4	4.93526E-3	9.35078E-2	2.72696E1	-3.26567E1	-3.2632E1	2.67926E1	1.19913E-7	2.51443E-3	2.51443E-3	6.31837E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.26282E-2	-8.79973E1	-4.05312E-4	-8.80015E1	1.19209E-4	4.72069E-3	9.37462E-2	2.73381E1	-3.26687E1	-3.26404E1	2.68454E1	1.19646E-7	2.51525E-3	2.51525E-3	6.31278E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30918E-2	-8.79976E1	-5.48363E-4	-8.80013E1	1.19209E-4	5.05447E-3	9.36985E-2	2.72365E1	-3.26542E1	-3.26315E1	2.67896E1	1.19819E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00942E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.23964E-2	-8.79978E1	-5.48363E-4	-8.80014E1	-3.57628E-4	4.88758E-3	9.35793E-2	2.73057E1	-3.26478E1	-3.25924E1	2.67752E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9978E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.286E-2	-8.79978E1	-5.24521E-4	-8.80017E1	3.8147E-4	4.72069E-3	9.37939E-2	2.725E1	-3.26144E1	-3.26425E1	2.67866E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.01347E-1
1.4E1	2.73E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.79977E1	-4.52995E-4	-8.80013E1	2.6226E-4	5.03063E-3	9.38654E-2	2.73478E1	-3.26824E1	-3.26209E1	2.67827E1	1.20226E-7	2.52318E-3	2.52318E-3	6.31837E-3	2.9952E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.79976E1	-4.76837E-4	-8.80013E1	2.86102E-4	4.88758E-3	9.33647E-2	2.73076E1	-3.26653E1	-3.25886E1	2.6802E1	1.1979E-7	2.52131E-3	2.52131E-3	6.3445E-3	2.98092E-1
1.6E1	2.7E1	0.0E0	6.47E2	4.41E2	-7.26282E-2	-8.79977E1	-4.05312E-4	-8.80015E1	4.05312E-4	4.79221E-3	9.38177E-2	2.72805E1	-3.26591E1	-3.2623E1	2.68184E1	1.20154E-7	2.51498E-3	2.51498E-3	6.31879E-3	2.97823E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.79977E1	-6.91414E-4	-8.80016E1	4.52995E-4	4.95911E-3	9.35078E-2	2.7291E1	-3.26707E1	-3.25605E1	2.67974E1	1.20383E-7	2.51443E-3	2.51443E-3	6.29645E-3	2.99E-1
1.8E1	2.01E2	0.0E0	7.27E2	5.0E2	-7.34782E-2	-8.79977E1	-5.96046E-4	-8.80016E1	1.66893E-4	4.95911E-3	9.35555E-2	2.73231E1	-3.26735E1	-3.2653E1	2.67998E1	1.19978E-7	2.5225E-3	2.5225E-3	6.31858E-3	3.00676E-1
1.9E1	3.71E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.79978E1	-4.76837E-4	-8.80018E1	-1.43051E-4	5.03063E-3	9.34839E-2	2.72868E1	-3.26897E1	-3.26178E1	2.67607E1	1.20004E-7	2.52492E-3	2.52492E-3	6.32896E-3	2.99686E-1
2.0E1	2.234E3	0.0E0	8.08E2	5.58E2	-7.24736E-2	-8.79979E1	-2.86102E-4	-8.80018E1	4.76837E-5	4.81606E-3	9.32455E-2	2.7301E1	-3.2649E1	-3.26573E1	2.68052E1	1.19804E-7	2.51918E-3	2.51918E-3	6.3074E-3	2.98831E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.79979E1	-4.05312E-4	-8.80017E1	1.90735E-4	4.95911E-3	9.33647E-2	2.72805E1	-3.26615E1	-3.26182E1	2.68065E1					
2.2E1	1.62E2	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.79977E1	-4.29153E-4	-8.80014E1	1.66893E-4	5.03063E-3	9.32932E-2	2.72738E1	-3.26767E1	-3.26107E1	2.68238E1	1.20069E-7	2.51662E-3	2.51662E-3	6.31837E-3	2.9978E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.32464E-2	-8.79978E1	-4.29153E-4	-8.80014E1	4.76837E-4	4.98295E-3	9.3174E-2	2.72939E1	-3.26437E1	-3.26396E1	2.68094E1	1.19941E-7	2.51603E-3	2.51603E-3	6.3074E-3	2.99845E-1
