[Scan]
initial_time=2016-01-28T18:57:28
final_time=2016-01-28T18:57:48
ip_count=19
run=1026
dataset=5
scan=327
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.19325E-2
qbias_imon=-3.78356E-6
ql1_vset=
ql1_vmon=-8.79997E1
ql1_imon=-1.2411E-9
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.48814E-9
ql3_vset=
ql3_vmon=-8.80013E1
ql3_imon=-3.63501E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.63415E-8
mult1=-1.22775E-8
mult2=-2.72326E-9
rf_tmon=-5.5536E-3
rf_agc=3.28667E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=6.13248E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67506E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19288E1
lens5a_imon=1.9858E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12467E2
lens4a_imon=2.05061E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53372E1
cs_ef1b_imon=3.10276E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.02135E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05195E1
cs_ea1_imon=1.25385E-5
lens1_vset=-2.7E0
lens1_vmon=-3.10144E0
lens1_imon=1.44958E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64707E1
os_ef1alow_imon=2.96897E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03962E1
cs_ea2_imon=1.40923E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84168E1
cs_ef1a_imon=3.00893E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.21957E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11372E1
os_restr1_imon=4.28956E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15353E1
os_ea1_imon=2.43071E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63699E1
os_ef1bup_imon=3.08886E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24325E0
cs_ionrep_imon=9.58668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91889E2
cs_nozzle_imon=1.93282E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01943E1
cs_anode1_imon=2.05359E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20525E0
olens4_imon=3.93261E-8
tplens_vset=1.4E-1
tplens_vmon=1.62492E0
tplens_imon=-2.88269E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26667E1
iondef3_imon=1.4956E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26478E1
iondef2_imon=1.57205E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02926E2
lens6_imon=2.98325E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.1027E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29457E0
ionrepsh_imon=9.36724E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33746E1
lens5b_imon=2.18224E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74652E1
cs_ef2b_imon=3.12327E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.45974E0
os_ea2_imon=-8.36877E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.0058E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.712E1
cs_ef2a_imon=3.17262E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06846E0
os_ef2alow_imon=-2.56416E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.98389E-1
os_ef2bup_imon=-5.30961E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10724E1
os_restr2_imon=3.38391E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23049E2
cs_ionfoca_imon=6.31061E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01711E1
cs_anode2_imon=2.10676E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72797E1
iondef1_imon=1.0914E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67938E1
iondef4_imon=1.08607E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.43258E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82094E-1
olens1_imon=7.52675E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12493E0
cs_ionaccel_imon=-1.1254E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02101E2
cs_ionfocb_imon=1.4731E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56237E1
einzel_imon=7.57663E-6
window_vset=0.0E0
window_vmon=1.84092E-1
window_imon=-1.06285E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39119E-4
mask2_vset=0.0E0
mask2_vmon=-1.86593E1
mask2_imon=-6.84045E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92618E3
multa_neg_imon=7.85237E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93731E3
defgrida_imon=6.33396E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50143E3
multb_neg_imon=7.19404E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.42918E0
defgridb_imon=6.17115E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33219E1
os_fil1_imon=9.4143E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07468E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62498E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30578E1
cs_fil1_imon=9.25762E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29436E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63452E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1926E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9529E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.9316E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.49542E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.85622E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21838E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.28006E-3
inlet_lpb_pmon=2.9926E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40083E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85271E-1
res40_imon=-2.44947E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.03E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.79994E1	-6.67572E-4	-8.80009E1	-1.19209E-4	4.673E-3	9.37223E-2	2.72609E1	-3.26809E1	-3.26101E1	2.67998E1					
2.0E0	8.695E3	6.0E0	3.16E2	1.6E2	-7.27053E-2	-8.79992E1	-6.4373E-4	-8.80011E1	2.14577E-4	4.48227E-3	9.35555E-2	2.73014E1	-3.26444E1	-3.26107E1	2.67857E1	1.19965E-7	2.51771E-3	2.51771E-3	6.31288E-3	2.9952E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.79991E1	-4.76837E-4	-8.80009E1	2.14577E-4	4.76837E-3	9.33647E-2	2.73057E1	-3.26455E1	-3.259E1	2.68001E1	1.19925E-7	2.50914E-3	2.50914E-3	6.3074E-3	3.0201E-1
4.0E0	2.01E3	0.0E0	6.55E2	3.98E2	-7.20871E-2	-8.79993E1	-5.24521E-4	-8.8001E1	1.90735E-4	4.62532E-3	9.38177E-2	2.72945E1	-3.26744E1	-3.26437E1	2.68184E1	1.19697E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02253E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.79992E1	-5.24521E-4	-8.80014E1	1.43051E-4	4.57764E-3	9.39608E-2	2.73051E1	-3.26664E1	-3.26585E1	2.68202E1	1.20158E-7	2.51525E-3	2.51525E-3	6.3074E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.18554E-2	-8.79995E1	-6.4373E-4	-8.80011E1	2.14577E-4	4.91142E-3	9.39369E-2	2.73311E1	-3.26708E1	-3.26366E1	2.67931E1	1.2033E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01609E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.32464E-2	-8.79992E1	-3.09944E-4	-8.80013E1	2.38419E-4	4.98295E-3	9.36747E-2	2.73151E1	-3.26337E1	-3.26384E1	2.6801E1	1.19749E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00197E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.37874E-2	-8.7999E1	-2.6226E-4	-8.80009E1	-1.19209E-4	4.69685E-3	9.36031E-2	2.72909E1	-3.26667E1	-3.2649E1	2.68124E1	1.198E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.01738E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.34782E-2	-8.79991E1	-6.19888E-4	-8.80009E1	1.43051E-4	4.76837E-3	9.38892E-2	2.7301E1	-3.26538E1	-3.26614E1	2.68082E1	1.19913E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00563E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.7999E1	-4.29153E-4	-8.80011E1	-1.19209E-4	4.93526E-3	9.38177E-2	2.73003E1	-3.26669E1	-3.25978E1	2.68238E1	1.20078E-7	2.5199E-3	2.5199E-3	6.29185E-3	3.00247E-1
1.4E1	2.91E2	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.7999E1	-5.96046E-4	-8.80012E1	4.29153E-4	4.91142E-3	9.38416E-2	2.7268E1	-3.26527E1	-3.26289E1	2.68088E1	1.20062E-7	2.52026E-3	2.52026E-3	6.30197E-3	3.01155E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.79992E1	-4.52995E-4	-8.80009E1	4.05312E-4	4.62532E-3	9.35793E-2	2.73538E1	-3.26669E1	-3.26879E1	2.6825E1					
1.6E1	4.1E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.79993E1	-8.10623E-4	-8.80009E1	5.24521E-4	4.8399E-3	9.39131E-2	2.73149E1	-3.26529E1	-3.26199E1	2.68088E1	1.19809E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.7E1	4.6E1	0.0E0	6.87E2	4.7E2	-7.26282E-2	-8.79993E1	-8.82149E-4	-8.8001E1	4.76837E-4	5.03063E-3	9.34601E-2	2.73428E1	-3.26767E1	-3.26331E1	2.68178E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.98481E-1
1.8E1	2.17E2	0.0E0	7.27E2	5.0E2	-7.29374E-2	-8.79991E1	-5.48363E-4	-8.8001E1	4.52995E-4	4.74453E-3	9.33409E-2	2.73034E1	-3.26399E1	-3.26573E1	2.67897E1	1.19757E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.98481E-1
1.9E1	3.86E2	1.0E0	7.68E2	5.29E2	-7.32464E-2	-8.79993E1	-7.62939E-4	-8.80016E1	3.09944E-4	4.76837E-3	9.35555E-2	2.73088E1	-3.26609E1	-3.25767E1	2.67851E1	1.20028E-7	2.51679E-3	2.51679E-3	6.33341E-3	2.99753E-1
2.0E1	2.206E3	0.0E0	8.08E2	5.58E2	-7.27053E-2	-8.79996E1	-5.96046E-4	-8.80016E1	5.24521E-4	4.74453E-3	9.35793E-2	2.72883E1	-3.26549E1	-3.26711E1	2.67908E1	1.20316E-7	2.51271E-3	2.51271E-3	6.3074E-3	3.02426E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.79995E1	-3.57628E-4	-8.80013E1	2.86102E-4	5.00679E-3	9.36985E-2	2.73069E1	-3.26526E1	-3.26225E1	2.6807E1	1.20174E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.02922E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.79996E1	-4.76837E-4	-8.80015E1	3.57628E-4	4.88758E-3	9.35793E-2	2.73315E1	-3.26855E1	-3.26158E1	2.68004E1	1.19902E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.19325E-2	-8.79997E1	-7.39098E-4	-8.80013E1	2.14577E-4	4.76837E-3	9.3627E-2	2.72797E1	-3.26478E1	-3.26667E1	2.67938E1	1.19913E-7	2.51662E-3	2.51662E-3	6.28006E-3	2.9926E-1
