[Scan]
initial_time=2016-01-28T18:58:21
final_time=2016-01-28T18:58:41
ip_count=19
run=1026
dataset=5
scan=329
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.80839E-6
ql1_vset=
ql1_vmon=-8.79998E1
ql1_imon=-1.0419E-9
ql2_vset=
ql2_vmon=-4.29153E-4
ql2_imon=1.47114E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-3.08268E-9
ql4_vset=
ql4_vmon=7.15256E-4
ql4_imon=1.62652E-8
mult1=-1.13908E-8
mult2=-2.7311E-9
rf_tmon=-4.3679E-3
rf_agc=3.34271E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.98455E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66013E0
bslens_imon=2.44763E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19598E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04999E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53482E1
cs_ef1b_imon=3.10937E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.02128E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04916E1
cs_ea1_imon=1.24442E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03535E0
lens1_imon=1.24718E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6444E1
os_ef1alow_imon=2.96097E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04417E1
cs_ea2_imon=1.4344E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84278E1
cs_ef1a_imon=2.99156E-5
olens2_vset=9.7E-1
olens2_vmon=9.7034E-1
olens2_imon=1.2229E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11216E1
os_restr1_imon=4.28817E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1521E1
os_ea1_imon=2.41819E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63798E1
os_ef1bup_imon=3.08261E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26592E0
cs_ionrep_imon=9.67556E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91886E2
cs_nozzle_imon=1.93532E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01908E1
cs_anode1_imon=2.05637E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.9301E-8
tplens_vset=1.4E-1
tplens_vmon=1.621E0
tplens_imon=-3.42605E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26142E1
iondef3_imon=1.50181E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26661E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02898E2
lens6_imon=2.9827E-4
ql6_vset=1.0E-1
ql6_vmon=9.37223E-2
ql6_imon=8.63743E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27072E0
ionrepsh_imon=9.17447E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33694E1
lens5b_imon=2.17377E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74565E1
cs_ef2b_imon=3.14099E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.42634E0
os_ea2_imon=-7.10311E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06087E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18478E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06904E0
os_ef2alow_imon=-2.53635E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89701E-1
os_ef2bup_imon=-5.38259E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10979E1
os_restr2_imon=3.39886E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23056E2
cs_ionfoca_imon=6.30433E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01908E1
cs_anode2_imon=2.09077E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72845E1
iondef1_imon=1.08472E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68022E1
iondef4_imon=1.06731E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71788E1
olens3_imon=6.32887E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82141E-1
olens1_imon=7.52567E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10176E0
cs_ionaccel_imon=-1.10108E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02069E2
cs_ionfocb_imon=1.47209E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.64266E-6
window_vset=0.0E0
window_vmon=1.59186E-1
window_imon=-1.00029E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82627E2
mask1_imon=2.39164E-4
mask2_vset=0.0E0
mask2_vmon=-1.86651E1
mask2_imon=-7.95253E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9267E3
multa_neg_imon=7.43328E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93744E3
defgrida_imon=6.69066E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50136E3
multb_neg_imon=7.18814E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.51284E0
defgridb_imon=6.12829E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33237E1
os_fil1_imon=9.411E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07126E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62092E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30657E1
cs_fil1_imon=9.24609E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28046E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63137E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.25427E-2
os_fil2_imon=-2.65181E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.94132E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.07323E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.3527E-1
cs_fil2_imon=-2.26953E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.31577E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21842E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.97394E-1
chamber_ion_pmon=1.198E-7
chamber_cvt_pmon=2.52384E-3
foreline_cvt_pmon=2.52384E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.57672E-1
res40_imon=-2.30351E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.65E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.79998E1	-4.76837E-5	-8.80008E1	4.29153E-4	5.05447E-3	9.36747E-2	2.73236E1	-3.26764E1	-3.26144E1	2.68052E1	1.20235E-7	2.519E-3	2.519E-3	6.31278E-3	3.00197E-1
2.0E0	8.708E3	7.0E0	3.16E2	1.6E2	-7.22418E-2	-8.79995E1	-4.05312E-4	-8.80007E1	4.29153E-4	5.29289E-3	9.377E-2	2.73182E1	-3.26728E1	-3.26329E1	2.68021E1					
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23189E-2	-8.79995E1	-5.96046E-4	-8.80009E1	1.43051E-4	5.36442E-3	9.3174E-2	2.72903E1	-3.26697E1	-3.26284E1	2.68153E1	1.19937E-7	2.51384E-3	2.51384E-3	6.3245E-3	3.01065E-1
4.0E0	2.07E3	0.0E0	6.55E2	3.98E2	-7.17779E-2	-8.79998E1	-7.15256E-4	-8.80009E1	-2.38419E-5	5.17368E-3	9.33647E-2	2.72971E1	-3.26891E1	-3.26438E1	2.6819E1	1.20344E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.15461E-2	-8.79996E1	-7.86781E-4	-8.80006E1	9.53674E-5	4.98295E-3	9.35316E-2	2.73016E1	-3.2675E1	-3.26366E1	2.6816E1	1.19978E-7	2.51359E-3	2.51359E-3	6.30182E-3	3.00676E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.79998E1	-6.67572E-4	-8.80007E1	1.43051E-4	5.10216E-3	9.35316E-2	2.72744E1	-3.26667E1	-3.26708E1	2.6784E1	1.20055E-7	2.51632E-3	2.51632E-3	6.31278E-3	2.99686E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.12368E-2	-8.79997E1	-7.39098E-4	-8.80011E1	2.38419E-4	4.57764E-3	9.33886E-2	2.73317E1	-3.26637E1	-3.2648E1	2.67889E1	1.20017E-7	2.52647E-3	2.52647E-3	6.3074E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27053E-2	-8.79997E1	-7.62939E-4	-8.8001E1	3.09944E-4	4.8399E-3	9.33409E-2	2.72932E1	-3.26778E1	-3.26335E1	2.68095E1	1.19991E-7	2.51603E-3	2.51603E-3	6.31269E-3	2.98592E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.79999E1	-5.72205E-4	-8.80008E1	5.72205E-4	4.88758E-3	9.36031E-2	2.72973E1	-3.26591E1	-3.25894E1	2.6794E1	1.19721E-7	2.51611E-3	2.51611E-3	6.3074E-3	2.97823E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.23964E-2	-8.79998E1	-3.33786E-4	-8.80008E1	9.53674E-5	4.76837E-3	9.36747E-2	2.73279E1	-3.26831E1	-3.26603E1	2.68328E1	1.20209E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.00966E-1
1.4E1	2.71E2	1.0E0	5.66E2	3.82E2	-7.286E-2	-8.79999E1	-3.8147E-4	-8.80007E1	4.52995E-4	4.8399E-3	9.33886E-2	2.73122E1	-3.26402E1	-3.26012E1	2.67974E1	1.19861E-7	2.51225E-3	2.51225E-3	6.32386E-3	2.9978E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80001E1	-6.67572E-4	-8.80009E1	2.86102E-4	5.14984E-3	9.34124E-2	2.72757E1	-3.26676E1	-3.26248E1	2.67932E1	1.19809E-7	2.52209E-3	2.52209E-3	6.31288E-3	3.00302E-1
1.6E1	3.1E1	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.8E1	-6.4373E-4	-8.80006E1	5.00679E-4	4.81606E-3	9.35555E-2	2.72915E1	-3.26431E1	-3.26567E1	2.67986E1	1.19959E-7	2.51593E-3	2.51593E-3	6.32644E-3	2.99991E-1
1.7E1	6.2E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.79999E1	-8.58307E-4	-8.80008E1	2.38419E-4	4.64916E-3	9.35555E-2	2.72642E1	-3.26633E1	-3.26044E1	2.68088E1					
1.8E1	2.23E2	0.0E0	7.27E2	5.0E2	-7.201E-2	-8.80001E1	-5.72205E-4	-8.80006E1	7.15256E-5	4.88758E-3	9.35555E-2	2.73541E1	-3.26832E1	-3.2613E1	2.68012E1	1.19913E-7	2.51771E-3	2.51771E-3	6.31837E-3	2.9978E-1
1.9E1	3.58E2	0.0E0	7.68E2	5.29E2	-7.19325E-2	-8.8E1	-6.91414E-4	-8.80008E1	0.0E0	4.74453E-3	9.37223E-2	2.72919E1	-3.26717E1	-3.26362E1	2.68118E1	1.20414E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.01738E-1
2.0E1	2.263E3	1.0E0	8.08E2	5.58E2	-7.30146E-2	-8.8E1	-5.96046E-4	-8.80007E1	2.6226E-4	4.72069E-3	9.36508E-2	2.73422E1	-3.26978E1	-3.26399E1	2.68186E1	1.20017E-7	2.51007E-3	2.51007E-3	6.31288E-3	3.00563E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.79998E1	-4.05312E-4	-8.80009E1	7.39098E-4	4.57764E-3	9.34601E-2	2.72843E1	-3.26744E1	-3.26738E1	2.68101E1	1.19991E-7	2.51709E-3	2.51709E-3	6.3074E-3	2.99594E-1
2.2E1	1.76E2	0.0E0	8.89E2	6.17E2	-7.286E-2	-8.79996E1	-4.05312E-4	-8.80007E1	5.00679E-4	4.45843E-3	9.35555E-2	2.73092E1	-3.26744E1	-3.26101E1	2.67949E1	1.20191E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.99879E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.79998E1	-4.29153E-4	-8.80007E1	7.15256E-4	4.673E-3	9.37223E-2	2.72845E1	-3.26661E1	-3.26142E1	2.68022E1	1.198E-7	2.52384E-3	2.52384E-3	6.31817E-3	2.97394E-1
