[Scan]
initial_time=2016-01-28T18:58:48
final_time=2016-01-28T18:59:08
ip_count=19
run=1026
dataset=5
scan=330
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.81411E-6
ql1_vset=
ql1_vmon=-8.80001E1
ql1_imon=-9.61447E-10
ql2_vset=
ql2_vmon=-3.57628E-4
ql2_imon=1.47048E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-2.85363E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.62476E-8
mult1=-1.00655E-8
mult2=-2.7266E-9
rf_tmon=-4.03777E-3
rf_agc=3.35619E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.79619E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65292E0
bslens_imon=2.44042E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.1967E1
lens5a_imon=1.98776E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12496E2
lens4a_imon=2.05006E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.10019E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02089E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0485E1
cs_ea1_imon=1.25595E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06118E0
lens1_imon=1.42022E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64614E1
os_ef1alow_imon=2.97369E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04171E1
cs_ea2_imon=1.39691E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.0036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.2251E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1149E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.43189E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63725E1
os_ef1bup_imon=3.07785E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2533E0
cs_ionrep_imon=9.79813E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93471E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01959E1
cs_anode1_imon=2.05216E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20518E0
olens4_imon=3.9405E-8
tplens_vset=1.4E-1
tplens_vmon=1.6204E0
tplens_imon=-1.65963E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26362E1
iondef3_imon=1.49496E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26585E1
iondef2_imon=1.57103E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02903E2
lens6_imon=2.98436E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=9.61912E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24909E0
ionrepsh_imon=9.23576E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33724E1
lens5b_imon=2.19216E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74693E1
cs_ef2b_imon=3.12614E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44136E0
os_ea2_imon=-6.77866E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00435E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71198E1
cs_ef2a_imon=3.17227E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05216E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.05232E-1
os_ef2bup_imon=-5.35491E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23035E2
cs_ionfoca_imon=6.30649E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01857E1
cs_anode2_imon=2.10549E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72973E1
iondef1_imon=1.08904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6804E1
iondef4_imon=1.08954E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.3625E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.55398E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.04457E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02073E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56069E1
einzel_imon=7.68063E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82644E2
mask1_imon=2.39145E-4
mask2_vset=0.0E0
mask2_vmon=-1.8644E1
mask2_imon=-5.47223E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92621E3
multa_neg_imon=7.05836E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9373E3
defgrida_imon=6.52483E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50213E3
multb_neg_imon=7.31432E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32337E0
defgridb_imon=6.18236E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33227E1
os_fil1_imon=9.40306E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07221E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62187E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30574E1
cs_fil1_imon=9.25355E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2746E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63867E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.1253E-2
os_fil2_imon=-2.74405E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9351E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.19568E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34442E-1
cs_fil2_imon=-2.37164E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.19628E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21847E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29665E-3
inlet_lpb_pmon=3.01995E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.17556E-1
res40_imon=-2.48255E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.01E2	1.0E0	1.47E2	4.1E1	-7.35556E-2	-8.80002E1	-4.29153E-4	-8.8001E1	5.00679E-4	5.07832E-3	9.32932E-2	2.73027E1	-3.2688E1	-3.2616E1	2.67968E1	1.20017E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.02396E-1
2.0E0	8.915E3	3.0E0	3.16E2	1.6E2	-7.34782E-2	-8.80004E1	-5.96046E-4	-8.80007E1	4.76837E-4	4.93526E-3	9.36985E-2	2.72961E1	-3.26464E1	-3.26464E1	2.68076E1	1.19851E-7	2.51525E-3	2.51525E-3	6.29665E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.33239E-2	-8.8E1	-6.19888E-4	-8.80005E1	1.66893E-4	5.05447E-3	9.36031E-2	2.73393E1	-3.26669E1	-3.26278E1	2.68052E1	1.1966E-7	2.52473E-3	2.52473E-3	6.32418E-3	2.99083E-1
4.0E0	2.001E3	2.0E0	6.55E2	3.98E2	-7.286E-2	-8.80001E1	-7.62939E-4	-8.80009E1	2.38419E-5	5.00679E-3	9.36031E-2	2.73016E1	-3.26318E1	-3.267E1	2.67978E1	1.20363E-7	2.52169E-3	2.52169E-3	6.34518E-3	3.00453E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.36328E-2	-8.79997E1	-7.39098E-4	-8.80006E1	3.33786E-4	5.07832E-3	9.32932E-2	2.72901E1	-3.26446E1	-3.26603E1	2.67878E1	1.19851E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.99941E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.79997E1	-3.57628E-4	-8.80009E1	3.09944E-4	5.126E-3	9.34839E-2	2.73189E1	-3.26693E1	-3.25888E1	2.681E1	1.20055E-7	2.51632E-3	2.51632E-3	6.29128E-3	2.9943E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.79999E1	-5.24521E-4	-8.80008E1	2.6226E-4	4.88758E-3	9.33886E-2	2.72861E1	-3.26653E1	-3.26166E1	2.67995E1	1.19705E-7	2.51334E-3	2.51334E-3	6.32936E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.79998E1	-1.19209E-4	-8.80006E1	2.14577E-4	5.43594E-3	9.33409E-2	2.72733E1	-3.26825E1	-3.25942E1	2.68154E1	1.20072E-7	2.51668E-3	2.51668E-3	6.3131E-3	3.00387E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.21643E-2	-8.8E1	-5.00679E-4	-8.80005E1	0.0E0	5.05447E-3	9.35078E-2	2.72793E1	-3.26368E1	-3.26615E1	2.68226E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00563E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.25507E-2	-8.8E1	-4.29153E-4	-8.80007E1	-2.38419E-5	4.98295E-3	9.35793E-2	2.73263E1	-3.26968E1	-3.26001E1	2.68244E1	1.20069E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.01871E-1
1.4E1	2.88E2	0.0E0	5.66E2	3.82E2	-7.13915E-2	-8.8E1	-4.05312E-4	-8.80007E1	7.15256E-5	4.88758E-3	9.35316E-2	2.72859E1	-3.26344E1	-3.26759E1	2.68226E1	1.20158E-7	2.51847E-3	2.51847E-3	6.32356E-3	3.03027E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.201E-2	-8.80001E1	-4.52995E-4	-8.80011E1	2.14577E-4	4.76837E-3	9.35793E-2	2.73033E1	-3.26506E1	-3.26092E1	2.68112E1	1.19705E-7	2.52318E-3	2.52318E-3	6.3074E-3	3.00824E-1
1.6E1	2.9E1	0.0E0	6.47E2	4.41E2	-7.18554E-2	-8.80002E1	-5.00679E-4	-8.80009E1	2.38419E-4	4.76837E-3	9.35078E-2	2.73249E1	-3.26591E1	-3.26567E1	2.67872E1	1.20278E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02922E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.23189E-2	-8.80003E1	-2.86102E-4	-8.8001E1	3.8147E-4	4.86374E-3	9.34839E-2	2.72967E1	-3.26464E1	-3.26284E1	2.67974E1	1.19965E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.00302E-1
1.8E1	2.13E2	0.0E0	7.27E2	5.0E2	-7.19325E-2	-8.80004E1	-2.6226E-4	-8.80007E1	2.14577E-4	4.64916E-3	9.33647E-2	2.72841E1	-3.26494E1	-3.2635E1	2.68166E1	1.20017E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.01609E-1
1.9E1	3.55E2	0.0E0	7.68E2	5.29E2	-7.20871E-2	-8.80005E1	-3.33786E-4	-8.80005E1	9.53674E-5	4.52995E-3	9.33409E-2	2.73315E1	-3.26711E1	-3.26681E1	2.6816E1	1.19861E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.99E-1
2.0E1	2.273E3	2.0E0	8.08E2	5.58E2	-7.15461E-2	-8.80002E1	-2.86102E-4	-8.80008E1	2.38419E-5	4.8399E-3	9.35316E-2	2.72991E1	-3.26645E1	-3.26116E1	2.68202E1	1.19757E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01609E-1
2.1E1	1.0E1	0.0E0	8.49E2	5.88E2	-7.25507E-2	-8.8E1	-4.52995E-4	-8.80009E1	-1.43051E-4	4.64916E-3	9.36747E-2	2.73316E1	-3.26903E1	-3.26484E1	2.68004E1	1.20174E-7	2.51443E-3	2.51443E-3	6.29645E-3	3.02922E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80001E1	-7.15256E-4	-8.80008E1	-7.15256E-5	5.126E-3	9.36508E-2	2.73159E1	-3.26669E1	-3.26068E1	2.68046E1	1.2033E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.02133E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80001E1	-3.57628E-4	-8.80009E1	-2.38419E-5	4.57764E-3	9.38416E-2	2.72973E1	-3.26585E1	-3.26362E1	2.6804E1	1.20055E-7	2.51739E-3	2.51739E-3	6.29665E-3	3.01995E-1
