[Scan]
initial_time=2016-01-28T18:59:42
final_time=2016-01-28T19:00:01
ip_count=19
run=1026
dataset=5
scan=332
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.37874E-2
qbias_imon=-3.86212E-6
ql1_vset=
ql1_vmon=-8.80005E1
ql1_imon=-8.53527E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.45639E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.65414E-9
ql4_vset=
ql4_vmon=-2.38419E-5
ql4_imon=1.62235E-8
mult1=-1.0812E-8
mult2=-2.78648E-9
rf_tmon=-5.13728E-3
rf_agc=3.27748E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.79321E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66798E0
bslens_imon=2.45831E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19984E1
lens5a_imon=1.98368E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12487E2
lens4a_imon=2.05058E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5367E1
cs_ef1b_imon=3.10091E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04581E2
lens23_imon=1.02344E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05023E1
cs_ea1_imon=1.25138E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07017E0
lens1_imon=1.5947E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64644E1
os_ef1alow_imon=2.97765E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03909E1
cs_ea2_imon=1.42622E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84508E1
cs_ef1a_imon=3.00036E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.22217E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11328E1
os_restr1_imon=4.2949E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15241E1
os_ea1_imon=2.43849E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63773E1
os_ef1bup_imon=3.08577E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24738E0
cs_ionrep_imon=9.73888E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9188E2
cs_nozzle_imon=1.93303E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01761E1
cs_anode1_imon=2.04963E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20539E0
olens4_imon=3.9309E-8
tplens_vset=1.4E-1
tplens_vmon=1.62315E0
tplens_imon=-2.98887E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2632E1
iondef3_imon=1.47755E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26705E1
iondef2_imon=1.57276E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02928E2
lens6_imon=2.98367E-4
ql6_vset=1.0E-1
ql6_vmon=9.38892E-2
ql6_imon=9.0431E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27274E0
ionrepsh_imon=9.33538E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3384E1
lens5b_imon=2.17198E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.12398E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48334E0
os_ea2_imon=-5.89119E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06075E2
lens4b_imon=2.00517E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71035E1
cs_ef2a_imon=3.18272E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06177E0
os_ef2alow_imon=-2.57986E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.77602E-1
os_ef2bup_imon=-5.29004E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.38598E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23044E2
cs_ionfoca_imon=6.29928E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01851E1
cs_anode2_imon=2.1073E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72769E1
iondef1_imon=1.10095E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67836E1
iondef4_imon=1.0881E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.32679E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82642E-1
olens1_imon=7.5346E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12714E0
cs_ionaccel_imon=-1.00853E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47273E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.70586E-6
window_vset=0.0E0
window_vmon=1.9692E-1
window_imon=-1.13107E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82633E2
mask1_imon=2.39243E-4
mask2_vset=0.0E0
mask2_vmon=-1.86356E1
mask2_imon=-7.52649E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92624E3
multa_neg_imon=7.18696E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93717E3
defgrida_imon=6.48262E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50148E3
multb_neg_imon=7.26483E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32878E0
defgridb_imon=6.01896E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33192E1
os_fil1_imon=9.40726E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07059E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62369E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30583E1
cs_fil1_imon=9.25415E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28722E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62755E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.70801E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.95912E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.96071E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33407E-1
cs_fil2_imon=-2.4197E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.16625E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21768E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.34518E-3
inlet_lpb_pmon=3.0148E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=166
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.32E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.80005E1	-7.15256E-4	-8.80009E1	-2.38419E-5	4.81606E-3	9.377E-2	2.7347E1	-3.26378E1	-3.26254E1	2.68128E1	1.2033E-7	2.51225E-3	2.51225E-3	6.34037E-3	3.00041E-1
2.0E0	8.799E3	5.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80005E1	-8.34465E-4	-8.80008E1	1.19209E-4	4.64916E-3	9.3627E-2	2.7269E1	-3.26646E1	-3.26413E1	2.67992E1	1.19891E-7	2.52131E-3	2.52131E-3	6.30212E-3	3.006E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80006E1	-5.48363E-4	-8.80008E1	1.90735E-4	4.41074E-3	9.39131E-2	2.73104E1	-3.26667E1	-3.26596E1	2.68118E1	1.19819E-7	2.52027E-3	2.52027E-3	6.3074E-3	3.00676E-1
4.0E0	2.004E3	3.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80008E1	-7.15256E-4	-8.80008E1	9.53674E-5	4.8399E-3	9.41277E-2	2.72909E1	-3.26511E1	-3.26203E1	2.68199E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.40192E-2	-8.80005E1	-7.86781E-4	-8.80005E1	4.76837E-5	5.17368E-3	9.36747E-2	2.73141E1	-3.26549E1	-3.26699E1	2.68046E1	1.19979E-7	2.50955E-3	2.50955E-3	6.29703E-3	3.00989E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80006E1	-5.48363E-4	-8.80007E1	3.57628E-4	4.74453E-3	9.36985E-2	2.73051E1	-3.264E1	-3.26235E1	2.67894E1	1.19913E-7	2.52318E-3	2.52318E-3	6.29645E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.31692E-2	-8.80007E1	-9.05991E-4	-8.80008E1	-4.76837E-5	4.57764E-3	9.37223E-2	2.72871E1	-3.27053E1	-3.26146E1	2.68136E1	1.20281E-7	2.51642E-3	2.51642E-3	6.3016E-3	3.01748E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.40192E-2	-8.80004E1	-8.82149E-4	-8.80009E1	2.14577E-4	4.69685E-3	9.36747E-2	2.72945E1	-3.26791E1	-3.26207E1	2.68059E1	1.20122E-7	2.51116E-3	2.51116E-3	6.26916E-3	3.01347E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.44831E-2	-8.80003E1	-8.58307E-4	-8.80007E1	2.38419E-4	4.72069E-3	9.34124E-2	2.7255E1	-3.26767E1	-3.26331E1	2.68118E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.0148E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80006E1	-5.00679E-4	-8.80007E1	1.19209E-4	4.64916E-3	9.36747E-2	2.72955E1	-3.2629E1	-3.26008E1	2.67992E1	1.19757E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03449E-1
1.4E1	2.76E2	0.0E0	5.66E2	3.82E2	-7.40192E-2	-8.80005E1	-7.39098E-4	-8.80005E1	-2.38419E-5	4.57764E-3	9.37223E-2	2.73321E1	-3.26831E1	-3.2629E1	2.68214E1	1.19953E-7	2.52061E-3	2.52061E-3	6.32356E-3	3.02511E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.80006E1	-5.72205E-4	-8.80007E1	3.57628E-4	4.45843E-3	9.3627E-2	2.72949E1	-3.26783E1	-3.26218E1	2.67818E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.02922E-1
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80003E1	-8.34465E-4	-8.80008E1	1.66893E-4	4.69685E-3	9.36031E-2	2.73069E1	-3.26621E1	-3.26278E1	2.68058E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.02922E-1
1.7E1	5.1E1	0.0E0	6.87E2	4.7E2	-7.30146E-2	-8.80004E1	-6.91414E-4	-8.80009E1	1.43051E-4	4.74453E-3	9.36508E-2	2.73093E1	-3.26699E1	-3.26476E1	2.67908E1	1.19809E-7	2.51552E-3	2.51552E-3	6.29098E-3	3.01347E-1
1.8E1	2.34E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80006E1	-6.67572E-4	-8.80009E1	2.14577E-4	4.81606E-3	9.38177E-2	2.73736E1	-3.27492E1	-3.25401E1	2.6813E1	1.20174E-7	2.51443E-3	2.51443E-3	6.32936E-3	3.01085E-1
1.9E1	3.25E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80006E1	-8.10623E-4	-8.80006E1	-1.43051E-4	4.55379E-3	9.36031E-2	2.72922E1	-3.26438E1	-3.26578E1	2.68064E1	1.19809E-7	2.51007E-3	2.51007E-3	6.32386E-3	3.00041E-1
2.0E1	2.153E3	0.0E0	8.08E2	5.58E2	-7.25507E-2	-8.80004E1	-4.29153E-4	-8.80003E1	1.19209E-4	4.57764E-3	9.36747E-2	2.73225E1	-3.26813E1	-3.26122E1	2.68154E1	1.19872E-7	2.51359E-3	2.51359E-3	6.29624E-3	3.00676E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.80005E1	-5.72205E-4	-8.80005E1	2.38419E-5	4.72069E-3	9.33647E-2	2.73098E1	-3.26661E1	-3.26225E1	2.67968E1	1.20122E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.01085E-1
2.2E1	1.51E2	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80003E1	-4.76837E-4	-8.80007E1	-2.38419E-4	4.673E-3	9.39131E-2	2.72774E1	-3.26844E1	-3.2626E1	2.67955E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32356E-3	3.01738E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.37874E-2	-8.80005E1	-6.91414E-4	-8.80004E1	-2.38419E-5	5.00679E-3	9.38892E-2	2.72769E1	-3.26705E1	-3.2632E1	2.67836E1	1.19953E-7	2.52276E-3	2.52276E-3	6.34518E-3	3.0148E-1
