[Scan]
initial_time=2016-01-28T19:00:09
final_time=2016-01-28T19:00:28
ip_count=19
run=1026
dataset=5
scan=333
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.76022E-6
ql1_vset=
ql1_vmon=-8.80002E1
ql1_imon=-8.88979E-10
ql2_vset=
ql2_vmon=-3.8147E-4
ql2_imon=1.43986E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.47879E-9
ql4_vset=
ql4_vmon=-4.76837E-5
ql4_imon=1.62338E-8
mult1=-1.0125E-8
mult2=-2.81348E-9
rf_tmon=-5.91518E-3
rf_agc=3.19623E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.74453E-3
ql5_imon=5.50771E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6379E0
bslens_imon=2.54284E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19077E1
lens5a_imon=1.99522E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.04955E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53703E1
cs_ef1b_imon=3.11427E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04607E2
lens23_imon=1.023E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04969E1
cs_ea1_imon=1.23411E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11098E0
lens1_imon=1.5008E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64595E1
os_ef1alow_imon=2.96247E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03907E1
cs_ea2_imon=1.41733E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84245E1
cs_ef1a_imon=2.99634E-5
olens2_vset=9.7E-1
olens2_vmon=9.69982E-1
olens2_imon=1.22255E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11337E1
os_restr1_imon=4.30025E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15217E1
os_ea1_imon=2.40708E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63772E1
os_ef1bup_imon=3.08859E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25083E0
cs_ionrep_imon=9.77607E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91859E2
cs_nozzle_imon=1.93443E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02055E1
cs_anode1_imon=2.05051E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.93423E-8
tplens_vset=1.4E-1
tplens_vmon=1.61217E0
tplens_imon=-1.74869E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26445E1
iondef3_imon=1.4971E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26674E1
iondef2_imon=1.57001E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02934E2
lens6_imon=2.98479E-4
ql6_vset=1.0E-1
ql6_vmon=9.377E-2
ql6_imon=8.84509E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29027E0
ionrepsh_imon=9.29131E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33677E1
lens5b_imon=2.18836E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7467E1
cs_ef2b_imon=3.12439E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46203E0
os_ea2_imon=-4.87864E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06054E2
lens4b_imon=2.00596E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71134E1
cs_ef2a_imon=3.18239E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05975E0
os_ef2alow_imon=-2.64617E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.8618E-1
os_ef2bup_imon=-5.40191E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10825E1
os_restr2_imon=3.38284E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23055E2
cs_ionfoca_imon=6.29241E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01854E1
cs_anode2_imon=2.09177E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7286E1
iondef1_imon=1.0883E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68038E1
iondef4_imon=1.07978E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.31622E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.56852E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12495E0
cs_ionaccel_imon=-1.07758E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02084E2
cs_ionfocb_imon=1.47296E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56262E1
einzel_imon=7.76569E-6
window_vset=0.0E0
window_vmon=1.73759E-1
window_imon=-1.03866E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82658E2
mask1_imon=2.39033E-4
mask2_vset=0.0E0
mask2_vmon=-1.86759E1
mask2_imon=-7.58415E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92625E3
multa_neg_imon=7.74161E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93708E3
defgrida_imon=6.44764E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.15379E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34088E0
defgridb_imon=6.23771E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33198E1
os_fil1_imon=9.39696E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08121E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61892E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30601E1
cs_fil1_imon=9.26034E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33673E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63135E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.27627E-2
os_fil2_imon=-2.6393E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.79142E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.17384E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32448E-1
cs_fil2_imon=-2.66525E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.21406E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21793E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29721E-3
inlet_lpb_pmon=3.00392E-1
chamber_ion_pmon=1.19919E-7
chamber_cvt_pmon=2.5267E-3
foreline_cvt_pmon=2.5267E-3
chamber_tmon=1.40043E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.13426E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=213
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.59E2	0.0E0	1.47E2	4.1E1	-7.24736E-2	-8.80004E1	-6.19888E-4	-8.80004E1	3.33786E-4	4.74453E-3	9.37223E-2	2.73069E1	-3.26771E1	-3.26242E1	2.67914E1	1.20171E-7	2.51874E-3	2.51874E-3	6.32483E-3	3.03139E-1
2.0E0	8.639E3	3.0E0	3.16E2	1.6E2	-7.27828E-2	-8.80003E1	-4.29153E-4	-8.80003E1	1.66893E-4	4.36306E-3	9.38416E-2	2.72898E1	-3.26554E1	-3.26205E1	2.6813E1	1.20122E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.00824E-1
3.0E0	6.0E0	0.0E0	4.85E2	2.79E2	-7.30918E-2	-8.80003E1	-6.4373E-4	-8.80002E1	1.90735E-4	4.17233E-3	9.3627E-2	2.73068E1	-3.26324E1	-3.26237E1	2.68151E1	1.20031E-7	2.52139E-3	2.52139E-3	6.31858E-3	2.99613E-1
4.0E0	2.05E3	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80003E1	-4.05312E-4	-8.80006E1	1.90735E-4	4.3869E-3	9.38654E-2	2.73093E1	-3.26651E1	-3.26723E1	2.67884E1	1.19991E-7	2.51287E-3	2.51287E-3	6.31269E-3	2.98092E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80002E1	-4.76837E-4	-8.80003E1	5.24521E-4	4.52995E-3	9.36747E-2	2.72654E1	-3.26603E1	-3.2623E1	2.68028E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.17779E-2	-8.80005E1	-5.24521E-4	-8.80007E1	5.48363E-4	4.24385E-3	9.36508E-2	2.73027E1	-3.26667E1	-3.26042E1	2.6804E1	1.20004E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.0071E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.25507E-2	-8.80004E1	-4.52995E-4	-8.80004E1	4.52995E-4	4.3869E-3	9.38177E-2	2.73219E1	-3.26314E1	-3.26116E1	2.6792E1	1.20278E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80006E1	-2.86102E-4	-8.80009E1	3.57628E-4	4.43459E-3	9.36747E-2	2.73269E1	-3.26443E1	-3.26349E1	2.67995E1	1.20017E-7	2.51225E-3	2.51225E-3	6.31837E-3	3.01085E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.22418E-2	-8.80004E1	-6.91414E-4	-8.80006E1	1.43051E-4	4.43459E-3	9.3627E-2	2.72901E1	-3.26663E1	-3.2641E1	2.68082E1	1.20055E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99686E-1
1.3E1	6.0E0	0.0E0	5.25E2	3.53E2	-7.26282E-2	-8.80007E1	-5.72205E-4	-8.80005E1	1.90735E-4	4.43459E-3	9.34362E-2	2.73321E1	-3.26783E1	-3.26134E1	2.68256E1	1.20174E-7	2.5188E-3	2.5188E-3	6.3074E-3	2.9926E-1
1.4E1	2.86E2	0.0E0	5.66E2	3.82E2	-7.29374E-2	-8.80006E1	-6.91414E-4	-8.80008E1	1.19209E-4	4.673E-3	9.36508E-2	2.73257E1	-3.26738E1	-3.26472E1	2.68136E1	1.19965E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00302E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80005E1	-6.91414E-4	-8.80007E1	2.6226E-4	4.55379E-3	9.36747E-2	2.73387E1	-3.26579E1	-3.26128E1	2.68262E1	1.20004E-7	2.51525E-3	2.51525E-3	6.3074E-3	3.0071E-1
1.6E1	2.2E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80002E1	-6.91414E-4	-8.80007E1	5.48363E-4	4.22001E-3	9.33409E-2	2.73057E1	-3.26354E1	-3.25983E1	2.67902E1	1.19913E-7	2.52318E-3	2.52318E-3	6.33486E-3	3.01871E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80008E1	-4.76837E-4	-8.80008E1	2.14577E-4	4.62532E-3	9.35793E-2	2.72721E1	-3.26759E1	-3.26128E1	2.67932E1	1.2026E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.0071E-1
1.8E1	2.47E2	0.0E0	7.27E2	5.0E2	-7.26282E-2	-8.80005E1	-3.09944E-4	-8.80008E1	4.52995E-4	4.72069E-3	9.36031E-2	2.72234E1	-3.25966E1	-3.27233E1	2.67932E1	1.20017E-7	2.52538E-3	2.52538E-3	6.3074E-3	2.97963E-1
1.9E1	3.56E2	0.0E0	7.68E2	5.29E2	-7.30146E-2	-8.80008E1	-7.86781E-4	-8.80005E1	4.05312E-4	4.52995E-3	9.36031E-2	2.73183E1	-3.26579E1	-3.26446E1	2.68022E1	1.19965E-7	2.50898E-3	2.50898E-3	6.30192E-3	2.98481E-1
2.0E1	2.296E3	0.0E0	8.08E2	5.58E2	-7.22418E-2	-8.80009E1	-7.62939E-4	-8.80005E1	3.33786E-4	4.81606E-3	9.36031E-2	2.7278E1	-3.26549E1	-3.26101E1	2.67956E1	1.19985E-7	2.52189E-3	2.52189E-3	6.29926E-3	3.01025E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80003E1	-1.00136E-3	-8.80009E1	1.66893E-4	4.60148E-3	9.377E-2	2.7255E1	-3.26526E1	-3.2639E1	2.68186E1					
2.2E1	1.71E2	1.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80005E1	-5.24521E-4	-8.80006E1	2.14577E-4	4.88758E-3	9.34839E-2	2.73471E1	-3.2678E1	-3.26098E1	2.67995E1	1.19953E-7	2.5131E-3	2.5131E-3	6.31817E-3	3.0148E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80002E1	-3.8147E-4	-8.80007E1	-4.76837E-5	4.74453E-3	9.377E-2	2.7286E1	-3.26674E1	-3.26445E1	2.68038E1	1.19919E-7	2.5267E-3	2.5267E-3	6.29721E-3	3.00392E-1
