[Scan]
initial_time=2016-01-28T19:00:35
final_time=2016-01-28T19:00:55
ip_count=19
run=1026
dataset=5
scan=334
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.16233E-2
qbias_imon=-3.81214E-6
ql1_vset=
ql1_vmon=-8.80006E1
ql1_imon=-7.9385E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.45481E-9
ql3_vset=
ql3_vmon=-8.8001E1
ql3_imon=-2.43926E-9
ql4_vset=
ql4_vmon=-1.19209E-4
ql4_imon=1.62028E-8
mult1=-9.66815E-9
mult2=-2.83638E-9
rf_tmon=-5.14329E-3
rf_agc=3.32074E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.57764E-3
ql5_imon=5.87809E-10
bslens_vset=-6.2E0
bslens_vmon=-6.70084E0
bslens_imon=2.66537E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20233E1
lens5a_imon=1.97961E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12483E2
lens4a_imon=2.05042E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53786E1
cs_ef1b_imon=3.1064E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04622E2
lens23_imon=1.0214E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04904E1
cs_ea1_imon=1.24805E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05277E0
lens1_imon=1.62974E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64509E1
os_ef1alow_imon=2.97354E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03405E1
cs_ea2_imon=1.40573E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84338E1
cs_ef1a_imon=2.99749E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.2269E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11273E1
os_restr1_imon=4.29879E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15455E1
os_ea1_imon=2.41567E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08918E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2216E0
cs_ionrep_imon=9.59164E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91875E2
cs_nozzle_imon=1.93397E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01853E1
cs_anode1_imon=2.05735E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.93887E-8
tplens_vset=1.4E-1
tplens_vmon=1.62975E0
tplens_imon=-2.15711E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26206E1
iondef3_imon=1.49138E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26699E1
iondef2_imon=1.56653E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02917E2
lens6_imon=2.98365E-4
ql6_vset=1.0E-1
ql6_vmon=9.39608E-2
ql6_imon=8.60429E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29557E0
ionrepsh_imon=9.28017E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33496E1
lens5b_imon=2.17739E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74769E1
cs_ef2b_imon=3.12399E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47921E0
os_ea2_imon=-6.6734E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06065E2
lens4b_imon=2.00529E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.17489E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05269E0
os_ef2alow_imon=-2.66414E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.96384E-1
os_ef2bup_imon=-5.40745E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10861E1
os_restr2_imon=3.37849E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23028E2
cs_ionfoca_imon=6.29811E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01784E1
cs_anode2_imon=2.10114E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72823E1
iondef1_imon=1.08064E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6798E1
iondef4_imon=1.08466E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.33091E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81593E-1
olens1_imon=7.54853E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1239E0
cs_ionaccel_imon=-1.06606E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02078E2
cs_ionfocb_imon=1.47267E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56287E1
einzel_imon=7.77392E-6
window_vset=0.0E0
window_vmon=1.70191E-1
window_imon=-1.08851E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82665E2
mask1_imon=2.39122E-4
mask2_vset=0.0E0
mask2_vmon=-1.86612E1
mask2_imon=-6.58114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92591E3
multa_neg_imon=6.83125E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93741E3
defgrida_imon=6.40298E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50155E3
multb_neg_imon=7.13104E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.34177E0
defgridb_imon=6.04869E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33205E1
os_fil1_imon=9.3957E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07878E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62083E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30602E1
cs_fil1_imon=9.24424E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.29574E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63225E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.21919E-2
os_fil2_imon=-2.60636E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.96582E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.1813E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35164E-1
cs_fil2_imon=-2.50032E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.27968E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21842E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.00966E-1
chamber_ion_pmon=1.19851E-7
chamber_cvt_pmon=2.52061E-3
foreline_cvt_pmon=2.52061E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.70414E-1
res40_imon=-2.49572E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.44E2	1.0E0	1.47E2	4.1E1	-7.40192E-2	-8.80003E1	-1.90735E-4	-8.80007E1	2.38419E-4	4.3869E-3	9.37223E-2	2.73034E1	-3.26324E1	-3.26231E1	2.67955E1	1.19895E-7	2.51411E-3	2.51411E-3	6.3074E-3	2.99811E-1
2.0E0	8.859E3	3.0E0	3.16E2	1.6E2	-7.27053E-2	-8.80005E1	-6.19888E-4	-8.80007E1	2.38419E-4	4.69685E-3	9.34839E-2	2.73424E1	-3.26554E1	-3.26487E1	2.67957E1	1.20192E-7	2.51814E-3	2.51814E-3	6.29684E-3	3.01104E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.34782E-2	-8.80004E1	-4.29153E-4	-8.80009E1	4.76837E-5	4.69685E-3	9.35555E-2	2.73196E1	-3.27048E1	-3.26312E1	2.6807E1	1.20031E-7	2.51581E-3	2.51581E-3	6.31858E-3	3.00676E-1
4.0E0	2.008E3	1.0E0	6.55E2	3.98E2	-7.36328E-2	-8.80007E1	-5.24521E-4	-8.80007E1	7.15256E-5	4.91142E-3	9.39131E-2	2.73039E1	-3.26813E1	-3.2611E1	2.67872E1	1.19991E-7	2.52131E-3	2.52131E-3	6.29684E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.42513E-2	-8.80006E1	-4.76837E-4	-8.80009E1	7.15256E-5	4.88758E-3	9.38416E-2	2.72871E1	-3.26543E1	-3.26404E1	2.68118E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.44059E-2	-8.80004E1	-5.24521E-4	-8.80008E1	4.76837E-5	4.91142E-3	9.408E-2	2.72739E1	-3.26657E1	-3.26482E1	2.68052E1	1.20122E-7	2.52209E-3	2.52209E-3	6.30192E-3	2.9952E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80006E1	-7.62939E-4	-8.80007E1	1.90735E-4	4.55379E-3	9.37939E-2	2.73299E1	-3.26478E1	-3.26024E1	2.67995E1	1.20069E-7	2.5188E-3	2.5188E-3	6.32386E-3	3.00824E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.8001E1	-3.57628E-4	-8.80007E1	1.19209E-4	4.52995E-3	9.39131E-2	2.72817E1	-3.26422E1	-3.26248E1	2.68028E1	1.20209E-7	2.51096E-3	2.51096E-3	6.28056E-3	2.99941E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.29374E-2	-8.80007E1	-5.00679E-4	-8.80007E1	1.90735E-4	4.76837E-3	9.3627E-2	2.73027E1	-3.26885E1	-3.26449E1	2.68124E1	1.20069E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80006E1	-8.34465E-4	-8.80007E1	1.19209E-4	4.74453E-3	9.40323E-2	2.72823E1	-3.26693E1	-3.2641E1	2.6813E1	1.20158E-7	2.51632E-3	2.51632E-3	6.30202E-3	3.0148E-1
1.4E1	2.78E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80005E1	-6.67572E-4	-8.80007E1	2.14577E-4	4.57764E-3	9.37462E-2	2.73033E1	-3.26735E1	-3.2605E1	2.68076E1	1.19757E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01609E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.23964E-2	-8.80008E1	-5.96046E-4	-8.80008E1	7.15256E-5	4.45843E-3	9.38892E-2	2.72727E1	-3.26789E1	-3.26302E1	2.68154E1	1.19861E-7	2.52867E-3	2.52867E-3	6.30192E-3	3.02133E-1
1.6E1	2.3E1	0.0E0	6.47E2	4.41E2	-7.24736E-2	-8.80008E1	-3.8147E-4	-8.80005E1	1.90735E-4	4.3869E-3	9.3627E-2	2.72985E1	-3.26338E1	-3.26296E1	2.68226E1	1.20069E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.01085E-1
1.7E1	6.0E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80005E1	-5.00679E-4	-8.80006E1	3.8147E-4	4.64916E-3	9.40084E-2	2.73222E1	-3.26343E1	-3.26425E1	2.68105E1	1.20017E-7	2.52209E-3	2.52209E-3	6.33486E-3	2.9874E-1
1.8E1	2.33E2	1.0E0	7.27E2	5.0E2	-7.18554E-2	-8.80007E1	-5.72205E-4	-8.8001E1	1.90735E-4	4.673E-3	9.39131E-2	2.73141E1	-3.26831E1	-3.26476E1	2.67878E1	1.20055E-7	2.52384E-3	2.52384E-3	6.30202E-3	2.98665E-1
1.9E1	3.38E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80005E1	-5.96046E-4	-8.80012E1	7.15256E-5	4.673E-3	9.35793E-2	2.73104E1	-3.26596E1	-3.25658E1	2.67914E1	1.2014E-7	2.52026E-3	2.52026E-3	6.32371E-3	2.99346E-1
2.0E1	2.277E3	1.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80006E1	-1.66893E-4	-8.80008E1	-1.19209E-4	4.52995E-3	9.35555E-2	2.7302E1	-3.26817E1	-3.26572E1	2.68178E1					
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.27053E-2	-8.80007E1	-4.05312E-4	-8.80007E1	-7.15256E-5	4.45843E-3	9.41515E-2	2.72874E1	-3.26661E1	-3.2613E1	2.68058E1	1.2035E-7	2.52362E-3	2.52362E-3	6.32418E-3	3.00144E-1
2.2E1	1.53E2	0.0E0	8.89E2	6.17E2	-7.26282E-2	-8.80008E1	-5.24521E-4	-8.8001E1	-1.66893E-4	4.31538E-3	9.38654E-2	2.72997E1	-3.26597E1	-3.26585E1	2.68064E1	1.19749E-7	2.5131E-3	2.5131E-3	6.29665E-3	2.9943E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.16233E-2	-8.80006E1	-5.72205E-4	-8.8001E1	-1.19209E-4	4.57764E-3	9.39608E-2	2.72823E1	-3.26699E1	-3.26206E1	2.6798E1	1.19851E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.00966E-1
