[Scan]
initial_time=2016-01-28T19:01:02
final_time=2016-01-28T19:01:21
ip_count=19
run=1026
dataset=5
scan=335
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.17779E-2
qbias_imon=-3.77827E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-8.19862E-10
ql2_vset=
ql2_vmon=-2.38419E-4
ql2_imon=1.5134E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.43E-9
ql4_vset=
ql4_vmon=2.38419E-4
ql4_imon=1.62427E-8
mult1=-9.59795E-9
mult2=-2.79107E-9
rf_tmon=-7.47223E-3
rf_agc=3.07756E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.03063E-3
ql5_imon=5.50687E-10
bslens_vset=-6.2E0
bslens_vmon=-6.62631E0
bslens_imon=2.55204E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19411E1
lens5a_imon=1.97662E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05076E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53667E1
cs_ef1b_imon=3.1052E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0458E2
lens23_imon=1.02253E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04826E1
cs_ea1_imon=1.24627E-5
lens1_vset=-2.7E0
lens1_vmon=-3.09391E0
lens1_imon=1.42575E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64643E1
os_ef1alow_imon=2.96271E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04055E1
cs_ea2_imon=1.39888E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84296E1
cs_ef1a_imon=3.00268E-5
olens2_vset=9.7E-1
olens2_vmon=9.69577E-1
olens2_imon=1.22488E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11419E1
os_restr1_imon=4.29756E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14871E1
os_ea1_imon=2.41775E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63676E1
os_ef1bup_imon=3.07322E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24688E0
cs_ionrep_imon=9.61569E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91874E2
cs_nozzle_imon=1.93441E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01665E1
cs_anode1_imon=2.04316E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2048E0
olens4_imon=3.9316E-8
tplens_vset=1.4E-1
tplens_vmon=1.62058E0
tplens_imon=-4.23588E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25948E1
iondef3_imon=1.51255E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26756E1
iondef2_imon=1.57477E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02936E2
lens6_imon=2.98509E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=9.03916E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.29149E0
ionrepsh_imon=9.33064E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33692E1
lens5b_imon=2.19736E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74472E1
cs_ef2b_imon=3.12153E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46009E0
os_ea2_imon=-7.46875E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06074E2
lens4b_imon=2.00633E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71362E1
cs_ef2a_imon=3.19277E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05514E0
os_ef2alow_imon=-2.68927E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.9028E-1
os_ef2bup_imon=-5.34436E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.38078E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23087E2
cs_ionfoca_imon=6.30797E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0178E1
cs_anode2_imon=2.08834E-5
iondef1_vset=2.763E1
iondef1_vmon=2.7288E1
iondef1_imon=1.08706E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68107E1
iondef4_imon=1.08503E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=6.3188E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.53506E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12029E0
cs_ionaccel_imon=-1.03852E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02082E2
cs_ionfocb_imon=1.47216E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56156E1
einzel_imon=7.65309E-6
window_vset=0.0E0
window_vmon=1.83513E-1
window_imon=-1.0837E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82635E2
mask1_imon=2.39105E-4
mask2_vset=0.0E0
mask2_vmon=-1.86686E1
mask2_imon=-7.25748E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92639E3
multa_neg_imon=6.36892E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.56011E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.43959E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.55441E0
defgridb_imon=6.0352E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33235E1
os_fil1_imon=9.41401E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08725E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62308E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30634E1
cs_fil1_imon=9.25374E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28509E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6312E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.36943E-2
os_fil2_imon=-2.68656E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.05108E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31275E-1
cs_fil2_imon=-2.17686E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.02617E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21809E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32679E-3
inlet_lpb_pmon=3.00224E-1
chamber_ion_pmon=1.2005E-7
chamber_cvt_pmon=2.51787E-3
foreline_cvt_pmon=2.51787E-3
chamber_tmon=1.40035E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.81795E-1
res40_imon=-2.54678E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.98E2	0.0E0	1.47E2	4.1E1	-7.286E-2	-8.80006E1	-3.57628E-4	-8.80013E1	-1.19209E-4	5.22137E-3	9.36747E-2	2.72877E1	-3.26464E1	-3.26218E1	2.67974E1	1.19891E-7	2.51603E-3	2.51603E-3	6.32858E-3	2.99845E-1
2.0E0	8.809E3	6.0E0	3.16E2	1.6E2	-7.37874E-2	-8.80004E1	-4.52995E-4	-8.8001E1	-1.66893E-4	4.91142E-3	9.37939E-2	2.72961E1	-3.26567E1	-3.2614E1	2.67974E1	1.19913E-7	2.51334E-3	2.51334E-3	6.3074E-3	3.00041E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80005E1	-3.8147E-4	-8.8001E1	-9.53674E-5	4.74453E-3	9.37939E-2	2.72973E1	-3.26627E1	-3.26579E1	2.67908E1	1.19809E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01347E-1
4.0E0	2.067E3	1.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80007E1	-6.67572E-4	-8.80007E1	1.43051E-4	4.98295E-3	9.3627E-2	2.72709E1	-3.26627E1	-3.25978E1	2.67908E1	1.19953E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.80008E1	-4.29153E-4	-8.80006E1	9.53674E-5	5.126E-3	9.35793E-2	2.72811E1	-3.26789E1	-3.25864E1	2.67926E1	1.20174E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80006E1	-5.00679E-4	-8.80008E1	4.76837E-5	5.05447E-3	9.35793E-2	2.72877E1	-3.26398E1	-3.26693E1	2.67878E1	1.19925E-7	2.51804E-3	2.51804E-3	6.32418E-3	3.02277E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80003E1	-4.29153E-4	-8.80007E1	-2.38419E-5	4.81606E-3	9.36031E-2	2.72739E1	-3.26573E1	-3.26146E1	2.67872E1	1.19913E-7	2.5188E-3	2.5188E-3	6.30192E-3	3.01347E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.25507E-2	-8.80004E1	-3.09944E-4	-8.80006E1	9.53674E-5	4.76837E-3	9.35316E-2	2.72609E1	-3.26413E1	-3.26065E1	2.68136E1	1.20278E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.00824E-1
1.2E1	0.0E0	0.0E0	4.85E2	3.23E2	-7.30918E-2	-8.80005E1	-5.24521E-4	-8.80007E1	7.15256E-5	5.10216E-3	9.3627E-2	2.73255E1	-3.26476E1	-3.25876E1	2.68169E1	1.19749E-7	2.52169E-3	2.52169E-3	6.30202E-3	3.00966E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80007E1	-1.43051E-4	-8.80006E1	1.19209E-4	4.74453E-3	9.36508E-2	2.73094E1	-3.26591E1	-3.26162E1	2.67995E1	1.20122E-7	2.51225E-3	2.51225E-3	6.3074E-3	3.01085E-1
1.4E1	2.87E2	0.0E0	5.66E2	3.82E2	-7.17007E-2	-8.80006E1	-1.43051E-4	-8.80006E1	2.38419E-5	4.8399E-3	9.36508E-2	2.72874E1	-3.26697E1	-3.25835E1	2.6792E1	1.19978E-7	2.51915E-3	2.51915E-3	6.32418E-3	3.01475E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.13143E-2	-8.80008E1	-3.57628E-4	-8.80006E1	1.66893E-4	4.48227E-3	9.35793E-2	2.72678E1	-3.26573E1	-3.2617E1	2.68124E1	1.19749E-7	2.51632E-3	2.51632E-3	6.29665E-3	3.02253E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.14689E-2	-8.80007E1	-4.29153E-4	-8.80007E1	2.6226E-4	4.55379E-3	9.37223E-2	2.72889E1	-3.26627E1	-3.26524E1	2.67938E1	1.20017E-7	2.51443E-3	2.51443E-3	6.28552E-3	3.01871E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.20871E-2	-8.80011E1	-4.05312E-4	-8.80007E1	4.76837E-5	4.74453E-3	9.37462E-2	2.73275E1	-3.26573E1	-3.26124E1	2.68094E1	1.20122E-7	2.52099E-3	2.52099E-3	6.32386E-3	2.9978E-1
1.8E1	2.1E2	0.0E0	7.27E2	5.0E2	-7.27053E-2	-8.80009E1	-1.90735E-4	-8.80008E1	2.38419E-4	4.60148E-3	9.38177E-2	2.73142E1	-3.26215E1	-3.2552E1	2.67881E1	1.19697E-7	2.52169E-3	2.52169E-3	6.33977E-3	3.00453E-1
1.9E1	3.61E2	0.0E0	7.68E2	5.29E2	-7.40967E-2	-8.80009E1	-3.33786E-4	-8.80008E1	2.86102E-4	4.69685E-3	9.35793E-2	2.72809E1	-3.26508E1	-3.26349E1	2.6827E1	1.1988E-7	2.52093E-3	2.52093E-3	6.29185E-3	2.99753E-1
2.0E1	2.275E3	4.0E0	8.08E2	5.58E2	-7.286E-2	-8.80012E1	-5.96046E-4	-8.80006E1	9.53674E-5	4.55379E-3	9.34362E-2	2.73267E1	-3.26675E1	-3.26549E1	2.67944E1	1.19991E-7	2.51838E-3	2.51838E-3	6.3074E-3	3.00522E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.21643E-2	-8.80009E1	-4.76837E-4	-8.80006E1	-3.33786E-4	4.41074E-3	9.36031E-2	2.72968E1	-3.2662E1	-3.26254E1	2.68082E1	1.19913E-7	2.51771E-3	2.51771E-3	6.30192E-3	3.01347E-1
2.2E1	1.49E2	0.0E0	8.89E2	6.17E2	-7.22418E-2	-8.80011E1	-5.24521E-4	-8.80007E1	1.43051E-4	4.8399E-3	9.33647E-2	2.72877E1	-3.26567E1	-3.26524E1	2.67908E1	1.20004E-7	2.51954E-3	2.51954E-3	6.32896E-3	2.99175E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.17779E-2	-8.8001E1	-2.38419E-4	-8.80008E1	2.38419E-4	5.03063E-3	9.3627E-2	2.7288E1	-3.26756E1	-3.25948E1	2.68107E1	1.2005E-7	2.51787E-3	2.51787E-3	6.32679E-3	3.00224E-1
