[Scan]
initial_time=2016-01-28T19:01:28
final_time=2016-01-28T19:01:48
ip_count=19
run=1026
dataset=5
scan=336
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23189E-2
qbias_imon=-3.79322E-6
ql1_vset=
ql1_vmon=-8.8001E1
ql1_imon=-7.50852E-10
ql2_vset=
ql2_vmon=-6.19888E-4
ql2_imon=1.4304E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-2.30626E-9
ql4_vset=
ql4_vmon=2.14577E-4
ql4_imon=1.62162E-8
mult1=-1.02461E-8
mult2=-2.71462E-9
rf_tmon=-2.85415E-3
rf_agc=3.66802E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.90086E-10
bslens_vset=-6.2E0
bslens_vmon=-6.63069E0
bslens_imon=2.40437E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19785E1
lens5a_imon=1.96829E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12472E2
lens4a_imon=2.04905E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53514E1
cs_ef1b_imon=3.10487E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04608E2
lens23_imon=1.02208E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05138E1
cs_ea1_imon=1.24406E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07981E0
lens1_imon=1.52476E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64578E1
os_ef1alow_imon=2.97189E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03804E1
cs_ea2_imon=1.42502E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84604E1
cs_ef1a_imon=3.01117E-5
olens2_vset=9.7E-1
olens2_vmon=9.69863E-1
olens2_imon=1.22052E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11153E1
os_restr1_imon=4.29887E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.43153E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63641E1
os_ef1bup_imon=3.08685E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22626E0
cs_ionrep_imon=9.81255E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91865E2
cs_nozzle_imon=1.93377E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01851E1
cs_anode1_imon=2.04711E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20489E0
olens4_imon=3.93271E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-3.06556E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26302E1
iondef3_imon=1.4946E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26645E1
iondef2_imon=1.57968E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.81612E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28154E0
ionrepsh_imon=9.41961E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33676E1
lens5b_imon=2.18026E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74465E1
cs_ef2b_imon=3.12362E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46479E0
os_ea2_imon=-8.22064E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06081E2
lens4b_imon=2.00482E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18668E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07378E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.80605E-1
os_ef2bup_imon=-5.30806E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11021E1
os_restr2_imon=3.38707E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23063E2
cs_ionfoca_imon=6.29424E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01791E1
cs_anode2_imon=2.09324E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73219E1
iondef1_imon=1.08904E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68124E1
iondef4_imon=1.08629E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=6.33441E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.55347E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11813E0
cs_ionaccel_imon=-1.05538E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02072E2
cs_ionfocb_imon=1.47223E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56153E1
einzel_imon=7.66622E-6
window_vset=0.0E0
window_vmon=1.83706E-1
window_imon=-1.09142E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82649E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86416E1
mask2_imon=-6.12094E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92604E3
multa_neg_imon=7.62074E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93706E3
defgrida_imon=6.55727E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50105E3
multb_neg_imon=7.05836E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32938E0
defgridb_imon=6.11747E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33211E1
os_fil1_imon=9.42624E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06753E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62375E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30697E1
cs_fil1_imon=9.25415E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28662E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63293E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.51222E-2
os_fil2_imon=-2.67798E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.94949E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31206E-1
cs_fil2_imon=-2.35362E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.34044E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21824E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29645E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.20069E-7
chamber_cvt_pmon=2.51552E-3
foreline_cvt_pmon=2.51552E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.85721E-1
res40_imon=-2.55103E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=161
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	2.97E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80009E1	-3.57628E-4	-8.80005E1	1.66893E-4	4.69685E-3	9.37939E-2	2.72744E1	-3.26451E1	-3.25912E1	2.68034E1	1.19851E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.02511E-1
2.0E0	8.85E3	5.0E0	3.16E2	1.6E2	-7.55652E-2	-8.80009E1	-4.76837E-4	-8.80006E1	4.76837E-4	4.8399E-3	9.37462E-2	2.72537E1	-3.2678E1	-3.2648E1	2.6822E1	1.19953E-7	2.51203E-3	2.51203E-3	6.32356E-3	3.01223E-1
3.0E0	9.0E0	0.0E0	4.85E2	2.79E2	-7.48695E-2	-8.80009E1	-2.6226E-4	-8.80007E1	4.52995E-4	4.62532E-3	9.39369E-2	2.73458E1	-3.26514E1	-3.26231E1	2.67989E1	1.20191E-7	2.51915E-3	2.51915E-3	6.31858E-3	3.0041E-1
4.0E0	2.11E3	3.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80013E1	-7.39098E-4	-8.80007E1	2.38419E-5	4.62532E-3	9.36508E-2	2.7275E1	-3.26278E1	-3.2616E1	2.68118E1	1.19941E-7	2.51603E-3	2.51603E-3	6.31798E-3	3.00852E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23964E-2	-8.80011E1	-3.57628E-4	-8.80007E1	2.38419E-4	5.10216E-3	9.36747E-2	2.73092E1	-3.26856E1	-3.26413E1	2.68196E1	1.20004E-7	2.51632E-3	2.51632E-3	6.33436E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.23964E-2	-8.8001E1	-5.24521E-4	-8.80008E1	3.33786E-4	4.91142E-3	9.40323E-2	2.73117E1	-3.26645E1	-3.26032E1	2.68024E1	1.19705E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.00824E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80009E1	-5.48363E-4	-8.80005E1	2.38419E-5	4.88758E-3	9.38416E-2	2.73381E1	-3.27059E1	-3.26524E1	2.68346E1	1.20122E-7	2.52099E-3	2.52099E-3	6.36244E-3	3.02133E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.29374E-2	-8.80013E1	-3.33786E-4	-8.80006E1	4.29153E-4	4.57764E-3	9.36747E-2	2.72845E1	-3.26756E1	-3.26579E1	2.68004E1	1.1983E-7	2.51647E-3	2.51647E-3	6.32371E-3	3.00766E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.20871E-2	-8.8001E1	-4.52995E-4	-8.80006E1	7.39098E-4	4.8399E-3	9.36031E-2	2.72751E1	-3.26398E1	-3.26068E1	2.6792E1					
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.27053E-2	-8.80008E1	-5.00679E-4	-8.80007E1	5.96046E-4	4.62532E-3	9.3627E-2	2.73345E1	-3.26579E1	-3.2617E1	2.68034E1	1.20106E-7	2.51525E-3	2.51525E-3	6.30202E-3	3.02253E-1
1.4E1	2.98E2	1.0E0	5.66E2	3.82E2	-7.23964E-2	-8.8001E1	-5.00679E-4	-8.80007E1	6.4373E-4	4.673E-3	9.39369E-2	2.73204E1	-3.26708E1	-3.26514E1	2.67764E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32936E-3	3.00824E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.29374E-2	-8.8001E1	-5.96046E-4	-8.80007E1	6.4373E-4	4.91142E-3	9.36747E-2	2.72812E1	-3.26793E1	-3.26211E1	2.68088E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00171E-1
1.6E1	3.3E1	1.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80011E1	-5.00679E-4	-8.80007E1	6.67572E-4	5.17368E-3	9.36985E-2	2.72945E1	-3.26679E1	-3.26508E1	2.68012E1					
1.7E1	6.6E1	0.0E0	6.87E2	4.7E2	-7.27828E-2	-8.80012E1	-3.57628E-4	-8.80007E1	2.14577E-4	4.81606E-3	9.34839E-2	2.73033E1	-3.2644E1	-3.25972E1	2.6801E1	1.19913E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01609E-1
1.8E1	2.38E2	0.0E0	7.27E2	5.0E2	-7.31692E-2	-8.80012E1	-6.19888E-4	-8.80009E1	2.14577E-4	4.95911E-3	9.36031E-2	2.72817E1	-3.26398E1	-3.26152E1	2.6786E1	1.19965E-7	2.5199E-3	2.5199E-3	6.32936E-3	3.00563E-1
1.9E1	3.3E2	0.0E0	7.68E2	5.29E2	-7.18554E-2	-8.80008E1	-3.8147E-4	-8.80007E1	1.43051E-4	5.22137E-3	9.38416E-2	2.73299E1	-3.26567E1	-3.26071E1	2.68178E1	1.20004E-7	2.51739E-3	2.51739E-3	6.32896E-3	3.00966E-1
2.0E1	2.269E3	0.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80005E1	-4.52995E-4	-8.80009E1	2.38419E-4	5.22137E-3	9.37223E-2	2.73003E1	-3.26524E1	-3.26693E1	2.67962E1	1.19601E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.00041E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.34782E-2	-8.8001E1	-2.86102E-4	-8.80009E1	2.38419E-4	4.74453E-3	9.38416E-2	2.73228E1	-3.26679E1	-3.26148E1	2.68094E1	1.20174E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9926E-1
2.2E1	1.59E2	0.0E0	8.89E2	6.17E2	-7.33239E-2	-8.80011E1	-6.19888E-4	-8.80007E1	1.90735E-4	5.17368E-3	9.34839E-2	2.72903E1	-3.26632E1	-3.26219E1	2.68094E1	1.19841E-7	2.51709E-3	2.51709E-3	6.31269E-3	3.00097E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23189E-2	-8.8001E1	-6.19888E-4	-8.80005E1	2.14577E-4	4.88758E-3	9.38654E-2	2.73219E1	-3.26645E1	-3.26302E1	2.68124E1	1.20069E-7	2.51552E-3	2.51552E-3	6.29645E-3	3.01609E-1
