[Scan]
initial_time=2016-01-28T19:02:22
final_time=2016-01-28T19:02:41
ip_count=19
run=1026
dataset=5
scan=338
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.29374E-2
qbias_imon=-3.8018E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-8.20076E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.46884E-9
ql3_vset=
ql3_vmon=-8.80008E1
ql3_imon=-2.1571E-9
ql4_vset=
ql4_vmon=9.53674E-5
ql4_imon=1.61227E-8
mult1=-9.70427E-9
mult2=-2.74855E-9
rf_tmon=-4.41629E-3
rf_agc=3.30272E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.126E-3
ql5_imon=5.93495E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65023E0
bslens_imon=2.60307E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19194E1
lens5a_imon=2.00102E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12507E2
lens4a_imon=2.05038E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53755E1
cs_ef1b_imon=3.11272E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02074E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04995E1
cs_ea1_imon=1.25039E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05731E0
lens1_imon=1.4195E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64537E1
os_ef1alow_imon=2.97532E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04248E1
cs_ea2_imon=1.41897E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84355E1
cs_ef1a_imon=2.99556E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.21998E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11279E1
os_restr1_imon=4.29519E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15222E1
os_ea1_imon=2.42034E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63759E1
os_ef1bup_imon=3.0808E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23652E0
cs_ionrep_imon=9.73958E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91894E2
cs_nozzle_imon=1.93257E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01848E1
cs_anode1_imon=2.04429E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20499E0
olens4_imon=3.92928E-8
tplens_vset=1.4E-1
tplens_vmon=1.63689E0
tplens_imon=-2.07924E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26693E1
iondef3_imon=1.49255E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.57626E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02909E2
lens6_imon=2.98342E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=9.24456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27351E0
ionrepsh_imon=9.23345E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33671E1
lens5b_imon=2.17311E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74618E1
cs_ef2b_imon=3.11544E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47791E0
os_ea2_imon=-7.17953E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06067E2
lens4b_imon=2.00533E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.70946E1
cs_ef2a_imon=3.18589E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.0591E0
os_ef2alow_imon=-2.66174E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91369E-1
os_ef2bup_imon=-5.38245E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10922E1
os_restr2_imon=3.37311E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23026E2
cs_ionfoca_imon=6.31602E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10462E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72919E1
iondef1_imon=1.0783E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68004E1
iondef4_imon=1.08834E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.27137E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82332E-1
olens1_imon=7.51583E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.1243E0
cs_ionaccel_imon=-1.12818E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0209E2
cs_ionfocb_imon=1.4716E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56003E1
einzel_imon=7.7579E-6
window_vset=0.0E0
window_vmon=1.72461E-1
window_imon=-1.04644E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82647E2
mask1_imon=2.39205E-4
mask2_vset=0.0E0
mask2_vmon=-1.86597E1
mask2_imon=-5.09309E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92593E3
multa_neg_imon=7.15829E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93722E3
defgrida_imon=6.81568E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50165E3
multb_neg_imon=6.96363E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50418E0
defgridb_imon=5.95914E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33231E1
os_fil1_imon=9.41687E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06642E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62219E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30757E1
cs_fil1_imon=9.25378E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.34776E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63616E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44206E-2
os_fil2_imon=-2.56145E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.8498E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.10334E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32588E-1
cs_fil2_imon=-2.57443E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10378E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22035E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=2.98665E-1
chamber_ion_pmon=1.20158E-7
chamber_cvt_pmon=2.51632E-3
foreline_cvt_pmon=2.51632E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.65225E-1
res40_imon=-2.57222E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=212
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.44E2	0.0E0	1.47E2	4.1E1	-7.3401E-2	-8.80011E1	-6.91414E-4	-8.80009E1	4.52995E-4	4.79221E-3	9.377E-2	2.72957E1	-3.26508E1	-3.26349E1	2.68184E1	1.20116E-7	2.52106E-3	2.52106E-3	6.34231E-3	3.01193E-1
2.0E0	8.674E3	8.0E0	3.16E2	1.6E2	-7.25507E-2	-8.80011E1	-7.15256E-4	-8.80008E1	4.76837E-4	5.07832E-3	9.36747E-2	2.73265E1	-3.26425E1	-3.26499E1	2.68256E1	1.19861E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00302E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80012E1	-8.10623E-4	-8.80005E1	3.09944E-4	5.126E-3	9.377E-2	2.73486E1	-3.26306E1	-3.26127E1	2.6785E1	1.19766E-7	2.52139E-3	2.52139E-3	6.33538E-3	3.00942E-1
4.0E0	2.027E3	0.0E0	6.55E2	3.98E2	-7.29374E-2	-8.8001E1	-9.53674E-4	-8.80006E1	2.86102E-4	4.673E-3	9.37462E-2	2.73243E1	-3.26675E1	-3.26218E1	2.67782E1	1.19941E-7	2.52342E-3	2.52342E-3	6.32328E-3	3.00348E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80009E1	-5.96046E-4	-8.80008E1	2.38419E-4	4.76837E-3	9.3627E-2	2.73267E1	-3.26735E1	-3.2635E1	2.68148E1	1.20106E-7	2.52169E-3	2.52169E-3	6.32896E-3	3.01223E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.38649E-2	-8.80011E1	-8.34465E-4	-8.80005E1	9.53674E-5	4.76837E-3	9.39131E-2	2.72745E1	-3.26458E1	-3.26633E1	2.68208E1	1.19965E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.03449E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80008E1	-7.62939E-4	-8.80007E1	1.43051E-4	5.34058E-3	9.36508E-2	2.72744E1	-3.26673E1	-3.25883E1	2.67818E1	1.19913E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.01609E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.47923E-2	-8.80009E1	-5.48363E-4	-8.80009E1	2.38419E-5	4.72069E-3	9.3627E-2	2.72913E1	-3.26476E1	-3.26338E1	2.67998E1	1.19851E-7	2.51417E-3	2.51417E-3	6.33977E-3	2.9892E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80009E1	-7.15256E-4	-8.80006E1	5.72205E-4	4.88758E-3	9.38416E-2	2.73273E1	-3.26392E1	-3.2596E1	2.67974E1	1.19925E-7	2.5147E-3	2.5147E-3	6.31858E-3	3.01475E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.44831E-2	-8.80009E1	-5.00679E-4	-8.80006E1	1.90735E-4	5.07832E-3	9.377E-2	2.73087E1	-3.26639E1	-3.26338E1	2.67914E1	1.19809E-7	2.52099E-3	2.52099E-3	6.31837E-3	3.00563E-1
1.4E1	2.84E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80009E1	-4.76837E-4	-8.80005E1	9.53674E-5	4.69685E-3	9.36747E-2	2.73116E1	-3.26844E1	-3.2629E1	2.68004E1	1.20226E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.01085E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.8001E1	-6.67572E-4	-8.80009E1	-9.53674E-5	4.81606E-3	9.37223E-2	2.72927E1	-3.26703E1	-3.26042E1	2.67978E1	1.19902E-7	2.52492E-3	2.52492E-3	6.32896E-3	3.00966E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.41738E-2	-8.8001E1	-7.62939E-4	-8.80007E1	4.76837E-5	4.8399E-3	9.40561E-2	2.73027E1	-3.265E1	-3.26212E1	2.67956E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	2.99941E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.40967E-2	-8.80008E1	-6.67572E-4	-8.80008E1	-2.38419E-5	5.00679E-3	9.36508E-2	2.73201E1	-3.26645E1	-3.26272E1	2.67878E1	1.19757E-7	2.5188E-3	2.5188E-3	6.34588E-3	3.00302E-1
1.8E1	2.15E2	0.0E0	7.27E2	5.0E2	-7.38649E-2	-8.80009E1	-7.39098E-4	-8.80006E1	2.86102E-4	4.673E-3	9.36747E-2	2.74184E1	-3.27629E1	-3.25234E1	2.68059E1	1.19809E-7	2.52099E-3	2.52099E-3	6.30192E-3	3.01609E-1
1.9E1	3.22E2	0.0E0	7.68E2	5.29E2	-7.33239E-2	-8.8001E1	-4.76837E-4	-8.80008E1	1.90735E-4	4.74453E-3	9.3627E-2	2.73069E1	-3.26536E1	-3.26132E1	2.68244E1	1.19851E-7	2.52599E-3	2.52599E-3	6.31817E-3	3.0148E-1
2.0E1	2.241E3	1.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80006E1	-6.67572E-4	-8.80006E1	1.66893E-4	5.19753E-3	9.3627E-2	2.7275E1	-3.26632E1	-3.26472E1	2.68128E1	1.19809E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.9874E-1
2.1E1	1.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80007E1	-8.10623E-4	-8.80004E1	-1.43051E-4	4.98295E-3	9.377E-2	2.73175E1	-3.26779E1	-3.26455E1	2.67998E1	1.19965E-7	2.51443E-3	2.51443E-3	6.3074E-3	2.96671E-1
2.2E1	1.47E2	0.0E0	8.89E2	6.17E2	-7.32464E-2	-8.80007E1	-7.15256E-4	-8.80008E1	2.86102E-4	4.79221E-3	9.34839E-2	2.73219E1	-3.26619E1	-3.2633E1	2.6807E1	1.1969E-7	2.51498E-3	2.51498E-3	6.31269E-3	2.98342E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.29374E-2	-8.80011E1	-7.15256E-4	-8.80008E1	9.53674E-5	5.126E-3	9.37939E-2	2.72919E1	-3.26759E1	-3.26693E1	2.68004E1	1.20158E-7	2.51632E-3	2.51632E-3	6.32896E-3	2.98665E-1
