[Scan]
initial_time=2016-01-28T19:03:15
final_time=2016-01-28T19:03:35
ip_count=19
run=1026
dataset=5
scan=340
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.43285E-2
qbias_imon=-3.85812E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-7.4923E-10
ql2_vset=
ql2_vmon=-7.15256E-4
ql2_imon=1.45442E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.0916E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.61285E-8
mult1=-1.03032E-8
mult2=-2.74285E-9
rf_tmon=-7.15813E-3
rf_agc=3.26248E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.88758E-3
ql5_imon=5.8136E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64511E0
bslens_imon=2.61706E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18709E1
lens5a_imon=1.95315E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12485E2
lens4a_imon=2.05107E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53863E1
cs_ef1b_imon=3.11244E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04551E2
lens23_imon=1.02254E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05186E1
cs_ea1_imon=1.25451E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05698E0
lens1_imon=1.41661E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64446E1
os_ef1alow_imon=2.96288E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04369E1
cs_ea2_imon=1.39042E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8446E1
cs_ef1a_imon=3.01442E-5
olens2_vset=9.7E-1
olens2_vmon=9.70173E-1
olens2_imon=1.21993E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.10859E1
os_restr1_imon=4.28445E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14879E1
os_ea1_imon=2.42684E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63575E1
os_ef1bup_imon=3.07821E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24188E0
cs_ionrep_imon=9.416E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91907E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01725E1
cs_anode1_imon=2.05071E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20523E0
olens4_imon=3.92256E-8
tplens_vset=1.4E-1
tplens_vmon=1.61199E0
tplens_imon=-1.04678E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26732E1
iondef3_imon=1.50902E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26567E1
iondef2_imon=1.58617E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02943E2
lens6_imon=2.98288E-4
ql6_vset=1.0E-1
ql6_vmon=9.36747E-2
ql6_imon=9.09722E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.24609E0
ionrepsh_imon=9.41961E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33754E1
lens5b_imon=2.14313E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74705E1
cs_ef2b_imon=3.12794E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.4696E0
os_ea2_imon=-6.34607E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06059E2
lens4b_imon=2.00421E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.7118E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06056E0
os_ef2alow_imon=-2.56544E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90817E-1
os_ef2bup_imon=-5.26842E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10793E1
os_restr2_imon=3.38851E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2308E2
cs_ionfoca_imon=6.32344E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01719E1
cs_anode2_imon=2.10333E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73305E1
iondef1_imon=1.08688E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67926E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.29281E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81832E-1
olens1_imon=7.50629E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11212E0
cs_ionaccel_imon=-1.09142E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02088E2
cs_ionfocb_imon=1.47158E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56195E1
einzel_imon=7.72028E-6
window_vset=0.0E0
window_vmon=1.80102E-1
window_imon=-1.12025E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.3934E-4
mask2_vset=0.0E0
mask2_vmon=-1.86819E1
mask2_imon=-7.88688E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92626E3
multa_neg_imon=7.27466E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93685E3
defgrida_imon=6.52844E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50158E3
multb_neg_imon=7.35397E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.81059E0
defgridb_imon=6.03095E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33233E1
os_fil1_imon=9.40684E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07401E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61893E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.308E1
cs_fil1_imon=9.25055E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28001E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.633E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47353E-2
os_fil2_imon=-2.55184E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.99516E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.20599E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.81613E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=8.05853E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22019E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29098E-3
inlet_lpb_pmon=3.00824E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51771E-3
foreline_cvt_pmon=2.51771E-3
chamber_tmon=1.40093E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.50883E-1
res40_imon=-2.50057E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=210
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.33E2	1.0E0	1.47E2	4.1E1	-7.48695E-2	-8.80011E1	-7.86781E-4	-8.80003E1	4.05312E-4	4.64916E-3	9.38177E-2	2.72921E1	-3.26903E1	-3.26266E1	2.67884E1	1.19757E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.01347E-1
2.0E0	8.687E3	3.0E0	3.16E2	1.6E2	-7.43285E-2	-8.80008E1	-5.72205E-4	-8.80006E1	2.38419E-4	4.64916E-3	9.37223E-2	2.72476E1	-3.26768E1	-3.26572E1	2.67776E1	1.19941E-7	2.51498E-3	2.51498E-3	6.33919E-3	3.00348E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.38649E-2	-8.80009E1	-4.29153E-4	-8.80005E1	3.09944E-4	4.98295E-3	9.37939E-2	2.73103E1	-3.26393E1	-3.26295E1	2.68076E1	1.20137E-7	2.51804E-3	2.51804E-3	6.34099E-3	3.0041E-1
4.0E0	2.063E3	2.0E0	6.55E2	3.98E2	-7.37874E-2	-8.80011E1	-9.05991E-4	-8.80004E1	5.00679E-4	4.74453E-3	9.39846E-2	2.72757E1	-3.26482E1	-3.26651E1	2.68226E1	1.198E-7	2.51739E-3	2.51739E-3	6.34518E-3	2.99941E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.43285E-2	-8.80011E1	-6.91414E-4	-8.80005E1	3.33786E-4	4.62532E-3	9.36031E-2	2.73165E1	-3.2644E1	-3.262E1	2.67908E1	1.20122E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00302E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.31692E-2	-8.8001E1	-1.00136E-3	-8.80008E1	3.57628E-4	5.03063E-3	9.36747E-2	2.72757E1	-3.26976E1	-3.25672E1	2.67808E1	1.19861E-7	2.52209E-3	2.52209E-3	6.32936E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.36328E-2	-8.8001E1	-9.29832E-4	-8.80007E1	2.86102E-4	4.98295E-3	9.38892E-2	2.7311E1	-3.26331E1	-3.26567E1	2.67984E1	1.20278E-7	2.52209E-3	2.52209E-3	6.32386E-3	2.9952E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80009E1	-8.82149E-4	-8.80008E1	1.66893E-4	5.07832E-3	9.38177E-2	2.72809E1	-3.26579E1	-3.26113E1	2.6783E1	1.20226E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.9952E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.46377E-2	-8.80008E1	-7.62939E-4	-8.80005E1	2.86102E-4	4.93526E-3	9.35078E-2	2.73057E1	-3.26729E1	-3.2653E1	2.67938E1	1.19851E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.0071E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.40192E-2	-8.80007E1	-6.67572E-4	-8.80003E1	2.86102E-4	5.05447E-3	9.37462E-2	2.72666E1	-3.26603E1	-3.25882E1	2.68166E1	1.19595E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00966E-1
1.4E1	2.92E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80008E1	-2.86102E-4	-8.80007E1	4.29153E-4	4.93526E-3	9.37223E-2	2.73057E1	-3.26549E1	-3.26843E1	2.67848E1	1.19766E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.0041E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.42513E-2	-8.80009E1	-6.67572E-4	-8.80005E1	4.29153E-4	4.91142E-3	9.37462E-2	2.72839E1	-3.26555E1	-3.25947E1	2.67729E1	1.20106E-7	2.52276E-3	2.52276E-3	6.31278E-3	3.0148E-1
1.6E1	3.7E1	0.0E0	6.47E2	4.41E2	-7.31692E-2	-8.80011E1	-5.24521E-4	-8.80007E1	1.43051E-4	4.91142E-3	9.38416E-2	2.72835E1	-3.26482E1	-3.26837E1	2.68268E1	1.19809E-7	2.52318E-3	2.52318E-3	6.32936E-3	3.01347E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80009E1	-4.05312E-4	-8.80005E1	2.38419E-4	4.45843E-3	9.37939E-2	2.72768E1	-3.26779E1	-3.26296E1	2.6786E1	1.19965E-7	2.51225E-3	2.51225E-3	6.32386E-3	3.01871E-1
1.8E1	2.08E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80014E1	-6.19888E-4	-8.80007E1	2.86102E-4	4.72069E-3	9.35555E-2	2.72359E1	-3.25691E1	-3.26872E1	2.68034E1	1.19902E-7	2.51847E-3	2.51847E-3	6.33436E-3	3.01738E-1
1.9E1	3.42E2	0.0E0	7.68E2	5.29E2	-7.3401E-2	-8.8001E1	-6.19888E-4	-8.80011E1	2.38419E-4	4.62532E-3	9.32932E-2	2.72841E1	-3.26771E1	-3.26314E1	2.68274E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.00563E-1
2.0E1	2.259E3	0.0E0	8.08E2	5.58E2	-7.42513E-2	-8.8001E1	-5.96046E-4	-8.80009E1	4.76837E-5	4.50611E-3	9.36747E-2	2.73375E1	-3.26544E1	-3.26335E1	2.67943E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	2.97963E-1
2.1E1	6.0E0	0.0E0	8.49E2	5.88E2	-7.40192E-2	-8.80012E1	-7.86781E-4	-8.80008E1	-7.15256E-5	4.55379E-3	9.35078E-2	2.72516E1	-3.26296E1	-3.2608E1	2.67637E1	1.19953E-7	2.52061E-3	2.52061E-3	6.28592E-3	3.00966E-1
2.2E1	1.49E2	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80014E1	-7.15256E-4	-8.80007E1	-7.15256E-5	4.72069E-3	9.35555E-2	2.73207E1	-3.26506E1	-3.2605E1	2.68004E1	1.20158E-7	2.51847E-3	2.51847E-3	6.29665E-3	3.00197E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.43285E-2	-8.80011E1	-7.15256E-4	-8.80007E1	2.86102E-4	4.88758E-3	9.36747E-2	2.73305E1	-3.26567E1	-3.26732E1	2.67926E1	1.19861E-7	2.51771E-3	2.51771E-3	6.29098E-3	3.00824E-1
