[Scan]
initial_time=2016-01-28T19:03:42
final_time=2016-01-28T19:04:01
ip_count=19
run=1026
dataset=5
scan=341
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.84339E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-7.40671E-10
ql2_vset=
ql2_vmon=-1.0252E-3
ql2_imon=1.45633E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.0474E-9
ql4_vset=
ql4_vmon=0.0E0
ql4_imon=1.61654E-8
mult1=-1.13418E-8
mult2=-2.68867E-9
rf_tmon=-4.69868E-3
rf_agc=3.30272E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.673E-3
ql5_imon=5.49483E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65909E0
bslens_imon=2.32013E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19893E1
lens5a_imon=1.96733E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12491E2
lens4a_imon=2.04937E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53573E1
cs_ef1b_imon=3.1001E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0462E2
lens23_imon=1.02042E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0512E1
cs_ea1_imon=1.23157E-5
lens1_vset=-2.7E0
lens1_vmon=-3.04052E0
lens1_imon=1.45406E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.96914E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04313E1
cs_ea2_imon=1.41194E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84252E1
cs_ef1a_imon=3.0182E-5
olens2_vset=9.7E-1
olens2_vmon=9.70197E-1
olens2_imon=1.21322E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11326E1
os_restr1_imon=4.29698E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14942E1
os_ea1_imon=2.425E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63622E1
os_ef1bup_imon=3.08875E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2468E0
cs_ionrep_imon=9.54666E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91841E2
cs_nozzle_imon=1.93392E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01829E1
cs_anode1_imon=2.0431E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20504E0
olens4_imon=3.92793E-8
tplens_vset=1.4E-1
tplens_vmon=1.62554E0
tplens_imon=-3.13839E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2641E1
iondef3_imon=1.51324E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26693E1
iondef2_imon=1.56886E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98493E-4
ql6_vset=1.0E-1
ql6_vmon=9.36508E-2
ql6_imon=9.07147E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2574E0
ionrepsh_imon=9.28446E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33334E1
lens5b_imon=2.17074E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74582E1
cs_ef2b_imon=3.1224E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46729E0
os_ea2_imon=-6.23718E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06089E2
lens4b_imon=2.00515E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71116E1
cs_ef2a_imon=3.17024E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09645E0
os_ef2alow_imon=-2.76862E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.89991E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10948E1
os_restr2_imon=3.37175E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23068E2
cs_ionfoca_imon=6.30326E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.0168E1
cs_anode2_imon=2.10432E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72853E1
iondef1_imon=1.08934E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67944E1
iondef4_imon=1.10328E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71784E1
olens3_imon=6.22857E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82523E-1
olens1_imon=7.54967E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14771E0
cs_ionaccel_imon=-1.09818E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02104E2
cs_ionfocb_imon=1.4734E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56358E1
einzel_imon=7.5581E-6
window_vset=0.0E0
window_vmon=1.82354E-1
window_imon=-1.2036E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39189E-4
mask2_vset=0.0E0
mask2_vmon=-1.86533E1
mask2_imon=-6.96787E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92623E3
multa_neg_imon=7.55232E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93725E3
defgrida_imon=6.51144E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.5015E3
multb_neg_imon=7.13914E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.32282E0
defgridb_imon=6.03868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33227E1
os_fil1_imon=9.39568E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07302E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62314E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30829E1
cs_fil1_imon=9.24662E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.48453E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63482E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.47248E-2
os_fil2_imon=-2.51956E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83899E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.0882E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33293E-1
cs_fil2_imon=-2.03302E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11594E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22037E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32896E-3
inlet_lpb_pmon=3.04322E-1
chamber_ion_pmon=1.19953E-7
chamber_cvt_pmon=2.51096E-3
foreline_cvt_pmon=2.51096E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.1229E-1
res40_imon=-2.4321E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=162
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.31E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80007E1	-5.24521E-4	-8.80006E1	3.57628E-4	4.76837E-3	9.35555E-2	2.72875E1	-3.26596E1	-3.26112E1	2.67998E1	1.20076E-7	2.52029E-3	2.52029E-3	6.3074E-3	2.99073E-1
2.0E0	8.84E3	8.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80007E1	-2.86102E-4	-8.80002E1	2.86102E-4	4.62532E-3	9.34839E-2	2.73265E1	-3.26425E1	-3.26529E1	2.68219E1	1.20293E-7	2.52025E-3	2.52025E-3	6.31798E-3	2.98592E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.27828E-2	-8.80009E1	-2.86102E-4	-8.80007E1	1.43051E-4	4.52995E-3	9.3627E-2	2.72535E1	-3.26747E1	-3.2622E1	2.67758E1	1.19861E-7	2.52099E-3	2.52099E-3	6.31288E-3	3.00041E-1
4.0E0	2.039E3	3.0E0	6.55E2	3.98E2	-7.32464E-2	-8.80011E1	-2.14577E-4	-8.80006E1	1.66893E-4	4.64916E-3	9.34839E-2	2.73309E1	-3.26518E1	-3.26404E1	2.68106E1	1.20243E-7	2.51919E-3	2.51919E-3	6.34982E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.33239E-2	-8.8001E1	-7.15256E-5	-8.80008E1	2.14577E-4	4.43459E-3	9.36031E-2	2.7321E1	-3.26921E1	-3.26431E1	2.68337E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31288E-3	2.9978E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.32464E-2	-8.80006E1	-4.29153E-4	-8.8001E1	7.15256E-5	4.52995E-3	9.37223E-2	2.72805E1	-3.26524E1	-3.26434E1	2.67914E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80009E1	-7.86781E-4	-8.80006E1	2.38419E-5	4.86374E-3	9.377E-2	2.72799E1	-3.26711E1	-3.25725E1	2.68202E1	1.19953E-7	2.51417E-3	2.51417E-3	6.31817E-3	3.00453E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.30146E-2	-8.80011E1	-9.05991E-4	-8.80007E1	1.90735E-4	4.93526E-3	9.37939E-2	2.72915E1	-3.26644E1	-3.26419E1	2.6798E1	1.20122E-7	2.52209E-3	2.52209E-3	6.31837E-3	3.01347E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.286E-2	-8.8001E1	-6.67572E-4	-8.80006E1	9.53674E-5	4.57764E-3	9.35793E-2	2.73159E1	-3.26717E1	-3.26146E1	2.6801E1	1.20174E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.00824E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.27828E-2	-8.80011E1	-7.15256E-4	-8.80006E1	2.38419E-5	4.93526E-3	9.36747E-2	2.73219E1	-3.26597E1	-3.26332E1	2.6789E1	1.20158E-7	2.51417E-3	2.51417E-3	6.32896E-3	3.00197E-1
1.4E1	2.97E2	0.0E0	5.66E2	3.82E2	-7.30146E-2	-8.80009E1	-8.10623E-4	-8.80009E1	3.33786E-4	4.8399E-3	9.37462E-2	2.72985E1	-3.26669E1	-3.25858E1	2.68466E1	1.19913E-7	2.5199E-3	2.5199E-3	6.33486E-3	3.00824E-1
1.5E1	1.0E1	0.0E0	6.06E2	4.11E2	-7.286E-2	-8.8001E1	-1.12057E-3	-8.80005E1	2.38419E-4	4.8399E-3	9.35793E-2	2.73213E1	-3.26344E1	-3.26603E1	2.6798E1	1.20031E-7	2.52027E-3	2.52027E-3	6.32978E-3	3.01742E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80013E1	-6.67572E-4	-8.80008E1	9.53674E-5	4.93526E-3	9.37462E-2	2.73045E1	-3.26526E1	-3.26065E1	2.6785E1	1.19749E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.02511E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.31692E-2	-8.80011E1	-5.72205E-4	-8.80005E1	2.86102E-4	4.57764E-3	9.3627E-2	2.7262E1	-3.26413E1	-3.26602E1	2.68064E1	1.20069E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00041E-1
1.8E1	2.26E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80011E1	-6.67572E-4	-8.80004E1	0.0E0	4.74453E-3	9.377E-2	2.7334E1	-3.26095E1	-3.25481E1	2.68018E1	1.20004E-7	2.51847E-3	2.51847E-3	6.32896E-3	2.9943E-1
1.9E1	3.51E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80012E1	-1.12057E-3	-8.80007E1	-1.90735E-4	4.86374E-3	9.35793E-2	2.7288E1	-3.26384E1	-3.26366E1	2.68262E1	1.198E-7	2.5131E-3	2.5131E-3	6.31817E-3	2.98792E-1
2.0E1	2.311E3	3.0E0	8.08E2	5.58E2	-7.30146E-2	-8.80012E1	-1.12057E-3	-8.80007E1	-2.38419E-5	4.57764E-3	9.38177E-2	2.73051E1	-3.2634E1	-3.26181E1	2.67956E1					
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80013E1	-9.05991E-4	-8.80006E1	1.43051E-4	4.48227E-3	9.35793E-2	2.72898E1	-3.2672E1	-3.2649E1	2.68034E1	1.19757E-7	2.50789E-3	2.50789E-3	6.3074E-3	3.00824E-1
2.2E1	1.69E2	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80016E1	-8.10623E-4	-8.80003E1	7.15256E-5	4.8399E-3	9.3627E-2	2.72909E1	-3.2675E1	-3.26172E1	2.68001E1	1.19697E-7	2.52061E-3	2.52061E-3	6.3074E-3	3.03286E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	-1.0252E-3	-8.80004E1	0.0E0	4.673E-3	9.36508E-2	2.72853E1	-3.26693E1	-3.2641E1	2.67944E1	1.19953E-7	2.51096E-3	2.51096E-3	6.32896E-3	3.04322E-1
