[Scan]
initial_time=2016-01-28T19:04:08
final_time=2016-01-28T19:04:28
ip_count=19
run=1026
dataset=5
scan=342
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.25507E-2
qbias_imon=-3.80894E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-7.23684E-10
ql2_vset=
ql2_vmon=-4.05312E-4
ql2_imon=1.38385E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-2.05898E-9
ql4_vset=
ql4_vmon=1.90735E-4
ql4_imon=1.61614E-8
mult1=-9.95712E-9
mult2=-2.71661E-9
rf_tmon=-2.02501E-3
rf_agc=3.61034E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.43459E-3
ql5_imon=5.76913E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66674E0
bslens_imon=2.36111E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19208E1
lens5a_imon=1.98559E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12486E2
lens4a_imon=2.04794E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53484E1
cs_ef1b_imon=3.10776E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04594E2
lens23_imon=1.0233E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05042E1
cs_ea1_imon=1.2354E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06118E0
lens1_imon=1.53918E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6465E1
os_ef1alow_imon=2.96576E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03696E1
cs_ea2_imon=1.38681E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84622E1
cs_ef1a_imon=3.01982E-5
olens2_vset=9.7E-1
olens2_vmon=9.69672E-1
olens2_imon=1.22178E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11316E1
os_restr1_imon=4.29094E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15342E1
os_ea1_imon=2.42828E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63689E1
os_ef1bup_imon=3.09478E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2527E0
cs_ionrep_imon=9.78731E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91896E2
cs_nozzle_imon=1.93489E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01857E1
cs_anode1_imon=2.03954E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20496E0
olens4_imon=3.92363E-8
tplens_vset=1.4E-1
tplens_vmon=1.61139E0
tplens_imon=-4.50754E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26314E1
iondef3_imon=1.4964E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26446E1
iondef2_imon=1.57463E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02907E2
lens6_imon=2.98393E-4
ql6_vset=1.0E-1
ql6_vmon=9.38654E-2
ql6_imon=8.42679E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27313E0
ionrepsh_imon=9.124E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33532E1
lens5b_imon=2.18964E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74717E1
cs_ef2b_imon=3.12506E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.48762E0
os_ea2_imon=-8.07644E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00579E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71288E1
cs_ef2a_imon=3.17876E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.08579E0
os_ef2alow_imon=-2.49336E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91417E-1
os_ef2bup_imon=-5.48466E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10763E1
os_restr2_imon=3.37914E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23034E2
cs_ionfoca_imon=6.26864E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01809E1
cs_anode2_imon=2.10513E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72594E1
iondef1_imon=1.09806E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67806E1
iondef4_imon=1.07188E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.2525E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82261E-1
olens1_imon=7.50079E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10792E0
cs_ionaccel_imon=-9.72491E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02109E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55931E1
einzel_imon=7.76713E-6
window_vset=0.0E0
window_vmon=1.70491E-1
window_imon=-1.19594E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82624E2
mask1_imon=2.39268E-4
mask2_vset=0.0E0
mask2_vmon=-1.86764E1
mask2_imon=-8.03104E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92641E3
multa_neg_imon=6.90335E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93739E3
defgrida_imon=6.5789E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50123E3
multb_neg_imon=7.40444E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.3745E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33268E1
os_fil1_imon=9.39819E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07389E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62399E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3082E1
cs_fil1_imon=9.26557E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32866E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63596E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.49933E-2
os_fil2_imon=-2.68999E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.0312E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=2.99718E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.21547E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.20229E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22219E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.02133E-1
chamber_ion_pmon=1.19757E-7
chamber_cvt_pmon=2.52099E-3
foreline_cvt_pmon=2.52099E-3
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.94441E-1
res40_imon=-2.46453E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=176
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.25E2	0.0E0	1.47E2	4.1E1	-7.31692E-2	-8.80012E1	-7.86781E-4	-8.80008E1	2.38419E-5	4.88758E-3	9.37939E-2	2.72721E1	-3.26531E1	-3.26484E1	2.67926E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.0148E-1
2.0E0	8.748E3	1.1E1	3.16E2	1.6E2	-7.38649E-2	-8.80017E1	-7.39098E-4	-8.80007E1	-2.38419E-5	4.79221E-3	9.35793E-2	2.72922E1	-3.2645E1	-3.25758E1	2.6802E1	1.19851E-7	2.52815E-3	2.52815E-3	6.32356E-3	2.99686E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.37103E-2	-8.80014E1	-7.86781E-4	-8.80008E1	-9.53674E-5	4.98295E-3	9.32932E-2	2.73446E1	-3.26231E1	-3.2682E1	2.68094E1	1.20084E-7	2.51581E-3	2.51581E-3	6.3074E-3	3.00676E-1
4.0E0	2.031E3	0.0E0	6.55E2	3.98E2	-7.41738E-2	-8.80013E1	-1.12057E-3	-8.80004E1	-2.38419E-4	4.74453E-3	9.33409E-2	2.73039E1	-3.26461E1	-3.26113E1	2.67968E1	1.20055E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99686E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.39421E-2	-8.80012E1	-9.05991E-4	-8.80003E1	-2.6226E-4	4.95911E-3	9.35078E-2	2.72861E1	-3.26658E1	-3.26395E1	2.68166E1	1.19861E-7	2.51552E-3	2.51552E-3	6.32386E-3	2.99E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.39421E-2	-8.8001E1	-8.34465E-4	-8.80005E1	-2.14577E-4	4.93526E-3	9.35793E-2	2.72962E1	-3.26449E1	-3.26343E1	2.681E1	1.20226E-7	2.5199E-3	2.5199E-3	6.3074E-3	2.9978E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.40967E-2	-8.80015E1	-8.82149E-4	-8.80005E1	-9.53674E-5	4.88758E-3	9.38177E-2	2.73069E1	-3.26467E1	-3.26154E1	2.68099E1	1.20004E-7	2.51525E-3	2.51525E-3	6.34518E-3	3.04063E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.44831E-2	-8.80012E1	-1.09673E-3	-8.80005E1	-1.19209E-4	4.72069E-3	9.3627E-2	2.72889E1	-3.26951E1	-3.26314E1	2.67896E1	1.19779E-7	2.51755E-3	2.51755E-3	6.30469E-3	3.00766E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.38649E-2	-8.80015E1	-8.58307E-4	-8.80005E1	-2.38419E-5	4.98295E-3	9.36747E-2	2.72684E1	-3.26729E1	-3.26266E1	2.68082E1					
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80014E1	-8.34465E-4	-8.80006E1	1.90735E-4	4.62532E-3	9.36985E-2	2.73333E1	-3.26801E1	-3.26128E1	2.6789E1	1.19861E-7	2.51334E-3	2.51334E-3	6.34037E-3	2.99E-1
1.4E1	3.0E2	0.0E0	5.66E2	3.82E2	-7.3401E-2	-8.80015E1	-8.34465E-4	-8.80007E1	7.15256E-5	5.03063E-3	9.3627E-2	2.73045E1	-3.26638E1	-3.26679E1	2.68238E1	1.20383E-7	2.51443E-3	2.51443E-3	6.28552E-3	2.98481E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.33239E-2	-8.80013E1	-7.39098E-4	-8.8001E1	1.66893E-4	4.93526E-3	9.38416E-2	2.72997E1	-3.26585E1	-3.26302E1	2.6807E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32936E-3	2.9926E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80013E1	-7.15256E-4	-8.80007E1	2.38419E-4	4.72069E-3	9.37223E-2	2.73303E1	-3.26316E1	-3.26238E1	2.67881E1	1.20004E-7	2.51203E-3	2.51203E-3	6.32896E-3	3.02511E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.38649E-2	-8.80013E1	-8.34465E-4	-8.80005E1	-4.76837E-5	4.48227E-3	9.35555E-2	2.73089E1	-3.26165E1	-3.26572E1	2.68088E1	1.19967E-7	2.51752E-3	2.51752E-3	6.31761E-3	3.02342E-1
1.8E1	2.31E2	1.0E0	7.27E2	5.0E2	-7.42513E-2	-8.80013E1	-9.05991E-4	-8.80008E1	-1.19209E-4	5.03063E-3	9.36747E-2	2.73297E1	-3.26945E1	-3.2477E1	2.6822E1	1.20245E-7	2.51793E-3	2.51793E-3	6.32518E-3	3.01609E-1
1.9E1	3.0E2	1.0E0	7.68E2	5.29E2	-7.30918E-2	-8.80013E1	-8.34465E-4	-8.80007E1	1.43051E-4	4.86374E-3	9.39369E-2	2.72874E1	-3.26567E1	-3.26756E1	2.6825E1	1.2026E-7	2.51847E-3	2.51847E-3	6.35059E-3	3.03027E-1
2.0E1	2.219E3	0.0E0	8.08E2	5.58E2	-7.37103E-2	-8.80013E1	-7.15256E-4	-8.8001E1	3.09944E-4	4.81606E-3	9.38177E-2	2.7301E1	-3.26691E1	-3.25971E1	2.68331E1	1.20055E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.00966E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.33239E-2	-8.80016E1	-7.86781E-4	-8.80005E1	7.15256E-5	4.8399E-3	9.40561E-2	2.73157E1	-3.26579E1	-3.2606E1	2.68082E1	1.20004E-7	2.5131E-3	2.5131E-3	6.3074E-3	3.01223E-1
2.2E1	1.43E2	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80013E1	-7.86781E-4	-8.80006E1	4.05312E-4	4.86374E-3	9.36985E-2	2.72886E1	-3.27104E1	-3.26402E1	2.67891E1	1.19953E-7	2.51847E-3	2.51847E-3	6.30202E-3	2.9943E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.25507E-2	-8.80014E1	-4.05312E-4	-8.80004E1	1.90735E-4	4.43459E-3	9.38654E-2	2.72594E1	-3.26446E1	-3.26314E1	2.67806E1	1.19757E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.02133E-1
