[Scan]
initial_time=2016-01-28T19:04:35
final_time=2016-01-28T19:04:55
ip_count=19
run=1026
dataset=5
scan=343
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.33239E-2
qbias_imon=-3.82671E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-7.06112E-10
ql2_vset=
ql2_vmon=-6.67572E-4
ql2_imon=1.44353E-9
ql3_vset=
ql3_vmon=-8.80007E1
ql3_imon=-2.00369E-9
ql4_vset=
ql4_vmon=7.15256E-5
ql4_imon=1.6187E-8
mult1=-1.12334E-8
mult2=-2.7266E-9
rf_tmon=-4.77078E-3
rf_agc=3.37421E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.8399E-3
ql5_imon=5.76103E-10
bslens_vset=-6.2E0
bslens_vmon=-6.67798E0
bslens_imon=2.4894E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19974E1
lens5a_imon=1.99331E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12464E2
lens4a_imon=2.04932E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53613E1
cs_ef1b_imon=3.09754E-5
lens23_vset=-2.05E2
lens23_vmon=-2.046E2
lens23_imon=1.02354E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.0474E1
cs_ea1_imon=1.24518E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07027E0
lens1_imon=1.40156E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64673E1
os_ef1alow_imon=2.96676E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0369E1
cs_ea2_imon=1.39328E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.842E1
cs_ef1a_imon=3.00801E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.21838E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11299E1
os_restr1_imon=4.29325E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15153E1
os_ea1_imon=2.43265E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63629E1
os_ef1bup_imon=3.08236E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.2381E0
cs_ionrep_imon=9.75699E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93531E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01899E1
cs_anode1_imon=2.0439E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.93622E-8
tplens_vset=1.4E-1
tplens_vmon=1.60899E0
tplens_imon=-1.74869E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26098E1
iondef3_imon=1.5013E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26627E1
iondef2_imon=1.5639E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02925E2
lens6_imon=2.98464E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.71515E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28963E0
ionrepsh_imon=9.23024E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33461E1
lens5b_imon=2.16851E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74709E1
cs_ef2b_imon=3.124E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44677E0
os_ea2_imon=-6.90165E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00546E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71361E1
cs_ef2a_imon=3.18161E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06818E0
os_ef2alow_imon=-2.55276E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.91369E-1
os_ef2bup_imon=-5.27346E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11033E1
os_restr2_imon=3.3844E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23092E2
cs_ionfoca_imon=6.30997E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01899E1
cs_anode2_imon=2.09956E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72907E1
iondef1_imon=1.07799E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6807E1
iondef4_imon=1.06888E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71781E1
olens3_imon=6.18997E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82022E-1
olens1_imon=7.51504E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14895E0
cs_ionaccel_imon=-9.91952E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0208E2
cs_ionfocb_imon=1.47218E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56009E1
einzel_imon=7.70341E-6
window_vset=0.0E0
window_vmon=1.8803E-1
window_imon=-1.06201E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82637E2
mask1_imon=2.39146E-4
mask2_vset=0.0E0
mask2_vmon=-1.86707E1
mask2_imon=-7.03923E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.9264E3
multa_neg_imon=7.4477E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93736E3
defgrida_imon=6.5278E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=6.90568E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.37591E0
defgridb_imon=6.07739E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.41791E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07349E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6208E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30853E1
cs_fil1_imon=9.2606E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.26473E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6331E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.28993E-2
os_fil2_imon=-2.58091E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.98603E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.03327E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34266E-1
cs_fil2_imon=-2.36684E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.42814E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22214E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32386E-3
inlet_lpb_pmon=2.99E-1
chamber_ion_pmon=1.19913E-7
chamber_cvt_pmon=2.51662E-3
foreline_cvt_pmon=2.51662E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-2.93315E-1
res40_imon=-2.50605E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=158
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.13E2	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80012E1	-5.72205E-4	-8.80003E1	1.19209E-4	4.74453E-3	9.38416E-2	2.72868E1	-3.26508E1	-3.26278E1	2.68065E1	1.20116E-7	2.51642E-3	2.51642E-3	6.33065E-3	2.99811E-1
2.0E0	8.885E3	7.0E0	3.16E2	1.6E2	-7.16233E-2	-8.80011E1	-4.76837E-4	-8.80006E1	0.0E0	4.86374E-3	9.36031E-2	2.73015E1	-3.26573E1	-3.26224E1	2.67986E1	1.19851E-7	2.52276E-3	2.52276E-3	6.32896E-3	3.0148E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.15461E-2	-8.80011E1	-5.00679E-4	-8.80005E1	-1.66893E-4	4.33922E-3	9.3627E-2	2.73039E1	-3.26785E1	-3.26213E1	2.67986E1	1.19925E-7	2.52139E-3	2.52139E-3	6.32978E-3	3.01742E-1
4.0E0	2.063E3	0.0E0	6.55E2	3.98E2	-7.10825E-2	-8.80012E1	-5.96046E-4	-8.80004E1	-1.43051E-4	4.24385E-3	9.36508E-2	2.73285E1	-3.26573E1	-3.26422E1	2.68274E1	1.20042E-7	2.52448E-3	2.52448E-3	6.31269E-3	2.99845E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.22418E-2	-8.8001E1	-7.39098E-4	-8.80006E1	3.33786E-4	4.86374E-3	9.36985E-2	2.72886E1	-3.2649E1	-3.25983E1	2.6807E1	1.19809E-7	2.52538E-3	2.52538E-3	6.3074E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.20871E-2	-8.80008E1	-4.05312E-4	-8.80004E1	3.33786E-4	4.50611E-3	9.39131E-2	2.72702E1	-3.26585E1	-3.26302E1	2.68196E1	1.19953E-7	2.51417E-3	2.51417E-3	6.30202E-3	3.00966E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80008E1	-4.29153E-4	-8.80005E1	4.05312E-4	4.60148E-3	9.33886E-2	2.72967E1	-3.26747E1	-3.26362E1	2.6792E1	1.19965E-7	2.52867E-3	2.52867E-3	6.31837E-3	3.01085E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80011E1	-5.96046E-4	-8.80005E1	5.72205E-4	4.86374E-3	9.37939E-2	2.73014E1	-3.26505E1	-3.26125E1	2.6816E1	1.20278E-7	2.5188E-3	2.5188E-3	6.31837E-3	3.01085E-1
1.2E1	8.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80012E1	-4.29153E-4	-8.80006E1	3.33786E-4	4.91142E-3	9.35555E-2	2.72703E1	-3.2636E1	-3.2629E1	2.68106E1	1.20403E-7	2.52362E-3	2.52362E-3	6.3074E-3	3.00144E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.37874E-2	-8.8001E1	-5.00679E-4	-8.80004E1	2.14577E-4	5.07832E-3	9.3627E-2	2.72727E1	-3.26705E1	-3.262E1	2.67962E1	1.20106E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01223E-1
1.4E1	3.04E2	0.0E0	5.66E2	3.82E2	-7.44059E-2	-8.80009E1	-5.48363E-4	-8.80002E1	0.0E0	4.88758E-3	9.34839E-2	2.73051E1	-3.26428E1	-3.265E1	2.67974E1	1.19809E-7	2.51225E-3	2.51225E-3	6.30192E-3	2.9978E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.37874E-2	-8.80012E1	-7.15256E-4	-8.80004E1	1.66893E-4	4.93526E-3	9.38177E-2	2.72786E1	-3.26697E1	-3.26113E1	2.6795E1	1.20174E-7	2.52538E-3	2.52538E-3	6.31837E-3	3.00302E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.27828E-2	-8.80012E1	-5.48363E-4	-8.80003E1	1.90735E-4	4.76837E-3	9.37462E-2	2.73105E1	-3.26843E1	-3.26218E1	2.67716E1	1.198E-7	2.52061E-3	2.52061E-3	6.32896E-3	3.00197E-1
1.7E1	5.7E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.8001E1	-3.33786E-4	-8.80004E1	2.14577E-4	4.76837E-3	9.34362E-2	2.73021E1	-3.26434E1	-3.26302E1	2.68232E1	1.19809E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9978E-1
1.8E1	2.42E2	1.0E0	7.27E2	5.0E2	-7.29374E-2	-8.80008E1	-5.00679E-4	-8.80003E1	1.43051E-4	4.93526E-3	9.37223E-2	2.72006E1	-3.25984E1	-3.27342E1	2.6804E1	1.19861E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.9E1	3.42E2	0.0E0	7.68E2	5.29E2	-7.37103E-2	-8.80011E1	-5.96046E-4	-8.80005E1	1.19209E-4	4.76837E-3	9.3627E-2	2.72907E1	-3.26723E1	-3.26326E1	2.68106E1	1.19757E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.02133E-1
2.0E1	2.213E3	1.0E0	8.08E2	5.58E2	-7.39421E-2	-8.80012E1	-8.82149E-4	-8.80007E1	2.38419E-5	4.88758E-3	9.36031E-2	2.72841E1	-3.26621E1	-3.26482E1	2.68106E1	1.19861E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02922E-1
2.1E1	7.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.80012E1	-8.10623E-4	-8.80006E1	0.0E0	4.69685E-3	9.3627E-2	2.73069E1	-3.26723E1	-3.26398E1	2.68316E1	1.19757E-7	2.51443E-3	2.51443E-3	6.30192E-3	3.00302E-1
2.2E1	1.42E2	0.0E0	8.89E2	6.17E2	-7.29374E-2	-8.80011E1	-8.10623E-4	-8.80005E1	7.15256E-5	4.69685E-3	9.39369E-2	2.7311E1	-3.26856E1	-3.26396E1	2.68204E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.97704E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.33239E-2	-8.80011E1	-6.67572E-4	-8.80007E1	7.15256E-5	4.8399E-3	9.37939E-2	2.72907E1	-3.26627E1	-3.26098E1	2.6807E1	1.19913E-7	2.51662E-3	2.51662E-3	6.32386E-3	2.99E-1
