[Scan]
initial_time=2016-01-28T19:05:28
final_time=2016-01-28T19:05:48
ip_count=19
run=1026
dataset=5
scan=345
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.34782E-2
qbias_imon=-3.80464E-6
ql1_vset=
ql1_vmon=-8.80011E1
ql1_imon=-6.86848E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.39778E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.97924E-9
ql4_vset=
ql4_vmon=3.09944E-4
ql4_imon=1.61369E-8
mult1=-1.11321E-8
mult2=-2.73317E-9
rf_tmon=-4.21661E-3
rf_agc=3.40807E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.79214E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65253E0
bslens_imon=2.52376E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18931E1
lens5a_imon=1.98148E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.0505E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53639E1
cs_ef1b_imon=3.09715E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04619E2
lens23_imon=1.02194E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05033E1
cs_ea1_imon=1.23487E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06581E0
lens1_imon=1.31758E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.6455E1
os_ef1alow_imon=2.97532E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03296E1
cs_ea2_imon=1.40397E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84349E1
cs_ef1a_imon=2.994E-5
olens2_vset=9.7E-1
olens2_vmon=9.70459E-1
olens2_imon=1.22037E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11208E1
os_restr1_imon=4.29947E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15312E1
os_ea1_imon=2.43456E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63752E1
os_ef1bup_imon=3.08781E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.26482E0
cs_ionrep_imon=9.6921E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91855E2
cs_nozzle_imon=1.93405E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01861E1
cs_anode1_imon=2.04506E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.92742E-8
tplens_vset=1.4E-1
tplens_vmon=1.65161E0
tplens_imon=-3.39E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26209E1
iondef3_imon=1.50359E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2661E1
iondef2_imon=1.57688E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02911E2
lens6_imon=2.9846E-4
ql6_vset=1.0E-1
ql6_vmon=9.35316E-2
ql6_imon=8.57055E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28391E0
ionrepsh_imon=9.51652E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.34014E1
lens5b_imon=2.18264E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74761E1
cs_ef2b_imon=3.12984E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47348E0
os_ea2_imon=-6.86348E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00691E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71264E1
cs_ef2a_imon=3.18083E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07597E0
os_ef2alow_imon=-2.6345E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.99154E-1
os_ef2bup_imon=-5.27346E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10909E1
os_restr2_imon=3.37506E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23062E2
cs_ionfoca_imon=6.30539E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01841E1
cs_anode2_imon=2.09683E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73146E1
iondef1_imon=1.08181E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67889E1
iondef4_imon=1.09184E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1397E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82165E-1
olens1_imon=7.53011E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.08862E0
cs_ionaccel_imon=-1.11261E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47195E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56087E1
einzel_imon=7.61778E-6
window_vset=0.0E0
window_vmon=1.75705E-1
window_imon=-9.68598E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82638E2
mask1_imon=2.38979E-4
mask2_vset=0.0E0
mask2_vmon=-1.86422E1
mask2_imon=-6.57216E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92651E3
multa_neg_imon=7.12325E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.66139E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.13089E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.40457E0
defgridb_imon=5.98578E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33251E1
os_fil1_imon=9.39462E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07264E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61992E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30811E1
cs_fil1_imon=9.25301E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35684E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63409E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35821E-2
os_fil2_imon=-2.60038E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.86926E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.16565E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33987E-1
cs_fil2_imon=-2.1852E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.10378E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22018E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31761E-3
inlet_lpb_pmon=3.00635E-1
chamber_ion_pmon=1.1987E-7
chamber_cvt_pmon=2.52058E-3
foreline_cvt_pmon=2.52058E-3
chamber_tmon=1.40094E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.82189E-1
res40_imon=-2.48659E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=207
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.05E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80011E1	-6.91414E-4	-8.80005E1	-7.15256E-5	4.98295E-3	9.3627E-2	2.72827E1	-3.26703E1	-3.26195E1	2.67908E1	1.2006E-7	2.51758E-3	2.51758E-3	6.34815E-3	3.03139E-1
2.0E0	8.672E3	9.0E0	3.16E2	1.6E2	-7.44831E-2	-8.80013E1	-3.57628E-4	-8.80004E1	3.33786E-4	5.22137E-3	9.38654E-2	2.73155E1	-3.26529E1	-3.26468E1	2.68076E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31278E-3	3.00197E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.37874E-2	-8.8001E1	-6.19888E-4	-8.80007E1	3.09944E-4	4.79221E-3	9.35555E-2	2.73051E1	-3.26337E1	-3.26213E1	2.67845E1	1.19766E-7	2.52139E-3	2.52139E-3	6.34099E-3	3.0041E-1
4.0E0	2.077E3	3.0E0	6.55E2	3.98E2	-7.3401E-2	-8.8001E1	-5.48363E-4	-8.80008E1	2.86102E-4	5.17368E-3	9.35316E-2	2.73015E1	-3.26705E1	-3.26314E1	2.68016E1	1.19851E-7	2.5131E-3	2.5131E-3	6.32356E-3	3.01738E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.41738E-2	-8.80008E1	-6.67572E-4	-8.80006E1	-3.8147E-4	5.10216E-3	9.37939E-2	2.73122E1	-3.2672E1	-3.26472E1	2.6804E1	1.20017E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.36328E-2	-8.80011E1	-5.24521E-4	-8.80008E1	-1.90735E-4	4.98295E-3	9.33886E-2	2.72457E1	-3.26389E1	-3.26034E1	2.67992E1	1.20055E-7	2.51525E-3	2.51525E-3	6.31817E-3	3.01223E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.33239E-2	-8.80011E1	-8.10623E-4	-8.80008E1	-2.38419E-4	4.8399E-3	9.35078E-2	2.73129E1	-3.26627E1	-3.26392E1	2.68154E1	1.20244E-7	2.52473E-3	2.52473E-3	6.32418E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.20871E-2	-8.80007E1	-7.39098E-4	-8.80008E1	-9.53674E-5	5.14984E-3	9.3317E-2	2.73069E1	-3.26455E1	-3.25947E1	2.67848E1	1.20226E-7	2.52099E-3	2.52099E-3	6.33486E-3	3.01085E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80011E1	-5.72205E-4	-8.80007E1	1.90735E-4	5.126E-3	9.37223E-2	2.72528E1	-3.26428E1	-3.26242E1	2.68028E1	1.19953E-7	2.51847E-3	2.51847E-3	6.32356E-3	2.99941E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.17779E-2	-8.80011E1	-7.62939E-4	-8.80006E1	1.90735E-4	4.64916E-3	9.38416E-2	2.73478E1	-3.26837E1	-3.26212E1	2.68232E1	1.19913E-7	2.51007E-3	2.51007E-3	6.31837E-3	2.9926E-1
1.4E1	2.71E2	0.0E0	5.66E2	3.82E2	-7.30918E-2	-8.80008E1	-7.86781E-4	-8.80003E1	1.43051E-4	4.673E-3	9.37223E-2	2.73081E1	-3.26693E1	-3.2647E1	2.67974E1	1.20069E-7	2.52099E-3	2.52099E-3	6.34037E-3	3.00302E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.24736E-2	-8.80009E1	-8.10623E-4	-8.80004E1	2.38419E-5	4.64916E-3	9.34839E-2	2.73231E1	-3.26789E1	-3.26645E1	2.67926E1	1.19766E-7	2.5147E-3	2.5147E-3	6.34099E-3	3.00144E-1
1.6E1	2.4E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80009E1	-8.10623E-4	-8.80005E1	2.6226E-4	4.55379E-3	9.39846E-2	2.72933E1	-3.2672E1	-3.26325E1	2.67931E1	1.20004E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.00197E-1
1.7E1	7.0E1	0.0E0	6.87E2	4.7E2	-7.30918E-2	-8.80008E1	-9.29832E-4	-8.80005E1	9.53674E-5	4.93526E-3	9.377E-2	2.73554E1	-3.27304E1	-3.25846E1	2.68048E1	1.19851E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.00197E-1
1.8E1	2.21E2	0.0E0	7.27E2	5.0E2	-7.3401E-2	-8.80012E1	-7.62939E-4	-8.80008E1	4.76837E-5	5.14984E-3	9.3627E-2	2.72841E1	-3.26783E1	-3.26591E1	2.68094E1	1.20072E-7	2.52088E-3	2.52088E-3	6.31586E-3	2.99695E-1
1.9E1	3.54E2	1.0E0	7.68E2	5.29E2	-7.286E-2	-8.8001E1	-9.05991E-4	-8.80006E1	1.43051E-4	5.126E-3	9.37939E-2	2.72901E1	-3.26622E1	-3.26098E1	2.67907E1					
2.0E1	2.24E3	0.0E0	8.08E2	5.58E2	-7.38649E-2	-8.8001E1	-6.67572E-4	-8.80008E1	7.15256E-5	4.93526E-3	9.3627E-2	2.73393E1	-3.26537E1	-3.26443E1	2.68024E1	1.19809E-7	2.5068E-3	2.5068E-3	6.3074E-3	3.01871E-1
2.1E1	5.0E0	0.0E0	8.49E2	5.88E2	-7.3401E-2	-8.80009E1	-8.34465E-4	-8.8001E1	1.66893E-4	5.00679E-3	9.40084E-2	2.73428E1	-3.26756E1	-3.26431E1	2.67986E1	1.19902E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
2.2E1	1.57E2	0.0E0	8.89E2	6.17E2	-7.31692E-2	-8.80011E1	-5.96046E-4	-8.80002E1	1.19209E-4	5.05447E-3	9.38177E-2	2.72844E1	-3.26887E1	-3.2668E1	2.67953E1	1.19697E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.01995E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.34782E-2	-8.80011E1	-7.86781E-4	-8.80004E1	3.09944E-4	5.05447E-3	9.35316E-2	2.73146E1	-3.2661E1	-3.26209E1	2.67889E1	1.1987E-7	2.52058E-3	2.52058E-3	6.31761E-3	3.00635E-1
