[Scan]
initial_time=2016-01-28T19:06:48
final_time=2016-01-28T19:07:08
ip_count=19
run=1026
dataset=5
scan=348
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.22418E-2
qbias_imon=-3.81828E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-6.99472E-10
ql2_vset=
ql2_vmon=-7.86781E-4
ql2_imon=1.45206E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.86335E-9
ql4_vset=
ql4_vmon=2.86102E-4
ql4_imon=1.61268E-8
mult1=-1.03183E-8
mult2=-2.85634E-9
rf_tmon=-4.02576E-3
rf_agc=3.5064E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.76837E-3
ql5_imon=5.40388E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66794E0
bslens_imon=2.71079E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20806E1
lens5a_imon=1.96216E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12481E2
lens4a_imon=2.05237E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53682E1
cs_ef1b_imon=3.111E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04602E2
lens23_imon=1.0206E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05168E1
cs_ea1_imon=1.261E-5
lens1_vset=-2.7E0
lens1_vmon=-3.0696E0
lens1_imon=1.45266E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.96432E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03931E1
cs_ea2_imon=1.41241E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.8434E1
cs_ef1a_imon=3.00829E-5
olens2_vset=9.7E-1
olens2_vmon=9.69791E-1
olens2_imon=1.22127E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.28806E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14969E1
os_ea1_imon=2.43694E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63695E1
os_ef1bup_imon=3.08938E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25991E0
cs_ionrep_imon=9.6287E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91866E2
cs_nozzle_imon=1.93334E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02007E1
cs_anode1_imon=2.04243E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20482E0
olens4_imon=3.92566E-8
tplens_vset=1.4E-1
tplens_vmon=1.63723E0
tplens_imon=-2.95741E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26326E1
iondef3_imon=1.48991E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26729E1
iondef2_imon=1.5685E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02889E2
lens6_imon=2.98295E-4
ql6_vset=1.0E-1
ql6_vmon=9.38416E-2
ql6_imon=8.72815E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28334E0
ionrepsh_imon=9.33669E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.3385E1
lens5b_imon=2.17558E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74549E1
cs_ef2b_imon=3.12578E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46659E0
os_ea2_imon=-6.74261E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.061E2
lens4b_imon=2.00446E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71534E1
cs_ef2a_imon=3.1856E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06417E0
os_ef2alow_imon=-2.65915E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.95021E-1
os_ef2bup_imon=-5.254E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10955E1
os_restr2_imon=3.3867E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23064E2
cs_ionfoca_imon=6.30685E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01617E1
cs_anode2_imon=2.09612E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72787E1
iondef1_imon=1.07787E-5
iondef4_vset=2.691E1
iondef4_vmon=2.6801E1
iondef4_imon=1.09494E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.19036E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82356E-1
olens1_imon=7.54358E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.15777E0
cs_ionaccel_imon=-9.76095E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47107E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56489E1
einzel_imon=7.69505E-6
window_vset=0.0E0
window_vmon=1.93316E-1
window_imon=-1.11665E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39178E-4
mask2_vset=0.0E0
mask2_vmon=-1.86464E1
mask2_imon=-7.85084E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92681E3
multa_neg_imon=7.31792E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93721E3
defgrida_imon=6.70508E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=6.7916E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.31735E0
defgridb_imon=5.94804E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33241E1
os_fil1_imon=9.43814E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07281E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.62372E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3084E1
cs_fil1_imon=9.26358E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.31004E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63773E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.35745E-2
os_fil2_imon=-2.6059E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.87503E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.00233E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.33148E-1
cs_fil2_imon=-2.76808E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=9.25985E-4
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22243E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.33977E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.19749E-7
chamber_cvt_pmon=2.5131E-3
foreline_cvt_pmon=2.5131E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.23563E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=165
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.31E2	0.0E0	1.47E2	4.1E1	-7.27828E-2	-8.80013E1	-8.58307E-4	-8.80008E1	2.6226E-4	4.72069E-3	9.39846E-2	2.72666E1	-3.26609E1	-3.26314E1	2.68016E1	1.19757E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.02396E-1
2.0E0	8.741E3	9.0E0	3.16E2	1.6E2	-7.15461E-2	-8.80016E1	-8.82149E-4	-8.80004E1	-2.14577E-4	4.95911E-3	9.38177E-2	2.73112E1	-3.26566E1	-3.25844E1	2.68106E1	1.19861E-7	2.51771E-3	2.51771E-3	6.32386E-3	3.02659E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.24736E-2	-8.80017E1	-6.4373E-4	-8.80004E1	-1.66893E-4	4.8399E-3	9.37939E-2	2.73022E1	-3.26607E1	-3.26129E1	2.67972E1	1.20122E-7	2.5188E-3	2.5188E-3	6.31288E-3	3.02922E-1
4.0E0	2.13E3	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80022E1	-9.29832E-4	-8.80004E1	9.53674E-5	4.81606E-3	9.3627E-2	2.72913E1	-3.26807E1	-3.26434E1	2.67872E1	1.20092E-7	2.52236E-3	2.52236E-3	6.29684E-3	3.02621E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.30146E-2	-8.80017E1	-1.04904E-3	-8.80003E1	-1.43051E-4	4.81606E-3	9.35078E-2	2.73075E1	-3.26897E1	-3.26008E1	2.6813E1	1.19861E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.03449E-1
6.0E0	1.0E0	0.0E0	9.93E2	6.35E2	-7.29374E-2	-8.80018E1	-7.39098E-4	-8.80005E1	-1.19209E-4	5.126E-3	9.35078E-2	2.73099E1	-3.26861E1	-3.25978E1	2.67764E1	1.19809E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.99E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80015E1	-9.05991E-4	-8.80005E1	1.90735E-4	4.64916E-3	9.36031E-2	2.73015E1	-3.26404E1	-3.26621E1	2.68134E1	1.19757E-7	2.51225E-3	2.51225E-3	6.34588E-3	3.00041E-1
8.0E0	1.0E0	0.0E0	1.332E3	8.73E2	-7.34782E-2	-8.80014E1	-1.14441E-3	-8.80002E1	4.76837E-4	4.91142E-3	9.377E-2	2.72685E1	-3.26685E1	-3.2577E1	2.67854E1	1.19902E-7	2.51847E-3	2.51847E-3	6.31278E-3	3.0071E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.27053E-2	-8.80017E1	-1.04904E-3	-8.80004E1	1.19209E-4	4.673E-3	9.3627E-2	2.73291E1	-3.26717E1	-3.26284E1	2.68064E1	1.19965E-7	2.51334E-3	2.51334E-3	6.30192E-3	3.00824E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80017E1	-1.0252E-3	-8.80004E1	2.86102E-4	4.57764E-3	9.34839E-2	2.73039E1	-3.26506E1	-3.26458E1	2.67926E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
1.4E1	3.06E2	0.0E0	5.66E2	3.82E2	-7.35556E-2	-8.80017E1	-8.82149E-4	-8.80006E1	-1.19209E-4	4.95911E-3	9.33409E-2	2.72981E1	-3.267E1	-3.26388E1	2.68024E1	1.20209E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.99175E-1
1.5E1	3.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80018E1	-1.09673E-3	-8.80004E1	2.38419E-5	4.79221E-3	9.34362E-2	2.72823E1	-3.26585E1	-3.26038E1	2.67986E1	1.19902E-7	2.52384E-3	2.52384E-3	6.35601E-3	2.99175E-1
1.6E1	3.2E1	0.0E0	6.47E2	4.41E2	-7.20871E-2	-8.80017E1	-8.82149E-4	-8.80006E1	-2.6226E-4	4.72069E-3	9.34124E-2	2.73267E1	-3.26585E1	-3.26801E1	2.68202E1	1.20174E-7	2.51116E-3	2.51116E-3	6.32386E-3	3.00563E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.24736E-2	-8.80017E1	-7.86781E-4	-8.80006E1	-1.90735E-4	4.64916E-3	9.33886E-2	2.73207E1	-3.26735E1	-3.2638E1	2.68148E1	1.19861E-7	2.51552E-3	2.51552E-3	6.34037E-3	3.00563E-1
1.8E1	2.51E2	0.0E0	7.27E2	5.0E2	-7.22418E-2	-8.80018E1	-8.82149E-4	-8.80006E1	-9.53674E-5	4.95911E-3	9.35078E-2	2.73099E1	-3.26524E1	-3.26176E1	2.67788E1	1.19913E-7	2.52099E-3	2.52099E-3	6.34588E-3	3.02133E-1
1.9E1	3.51E2	0.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80018E1	-8.10623E-4	-8.80005E1	-1.19209E-4	4.673E-3	9.31501E-2	2.73104E1	-3.26549E1	-3.26272E1	2.67637E1	1.19965E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00563E-1
2.0E1	2.323E3	5.0E0	8.08E2	5.58E2	-7.3401E-2	-8.80015E1	-8.58307E-4	-8.80003E1	2.38419E-5	4.79221E-3	9.3317E-2	2.73117E1	-3.26669E1	-3.26819E1	2.68112E1	1.19953E-7	2.51632E-3	2.51632E-3	6.32356E-3	2.99941E-1
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.19325E-2	-8.80017E1	-9.05991E-4	-8.80005E1	3.33786E-4	4.72069E-3	9.35793E-2	2.72853E1	-3.2629E1	-3.26014E1	2.68076E1	1.19497E-7	2.51771E-3	2.51771E-3	6.34588E-3	3.00302E-1
2.2E1	1.43E2	0.0E0	8.89E2	6.17E2	-7.23964E-2	-8.80017E1	-1.00136E-3	-8.80007E1	9.53674E-5	4.98295E-3	9.34601E-2	2.73305E1	-3.26762E1	-3.26496E1	2.6829E1	1.19965E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.22418E-2	-8.80014E1	-7.86781E-4	-8.80004E1	2.86102E-4	4.76837E-3	9.38416E-2	2.72787E1	-3.26729E1	-3.26326E1	2.6801E1	1.19749E-7	2.5131E-3	2.5131E-3	6.33977E-3	3.00453E-1
