[Scan]
initial_time=2016-01-28T19:08:35
final_time=2016-01-28T19:08:55
ip_count=19
run=1026
dataset=5
scan=352
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27053E-2
qbias_imon=-3.81413E-6
ql1_vset=
ql1_vmon=-8.80015E1
ql1_imon=-6.77705E-10
ql2_vset=
ql2_vmon=-6.4373E-4
ql2_imon=1.44519E-9
ql3_vset=
ql3_vmon=-8.80009E1
ql3_imon=-1.81429E-9
ql4_vset=
ql4_vmon=5.96046E-4
ql4_imon=1.61534E-8
mult1=-1.08738E-8
mult2=-2.85412E-9
rf_tmon=-4.1237E-3
rf_agc=3.4516E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.22137E-3
ql5_imon=5.93448E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64321E0
bslens_imon=2.62113E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.20119E1
lens5a_imon=1.95324E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12466E2
lens4a_imon=2.05118E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53688E1
cs_ef1b_imon=3.10199E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04599E2
lens23_imon=1.02259E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04787E1
cs_ea1_imon=1.25492E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08669E0
lens1_imon=1.41773E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64458E1
os_ef1alow_imon=2.97405E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03785E1
cs_ea2_imon=1.42021E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84328E1
cs_ef1a_imon=3.00504E-5
olens2_vset=9.7E-1
olens2_vmon=9.70054E-1
olens2_imon=1.20162E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11141E1
os_restr1_imon=4.29671E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15211E1
os_ea1_imon=2.42788E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6396E1
os_ef1bup_imon=3.07352E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24502E0
cs_ionrep_imon=9.72118E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93519E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01863E1
cs_anode1_imon=2.04675E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.9164E-8
tplens_vset=1.4E-1
tplens_vmon=1.58126E0
tplens_imon=-3.27202E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26327E1
iondef3_imon=1.50834E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.27056E1
iondef2_imon=1.57523E-5
lens6_vset=-6.0E2
lens6_vmon=-6.0291E2
lens6_imon=2.98537E-4
ql6_vset=1.0E-1
ql6_vmon=9.35793E-2
ql6_imon=8.61514E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27097E0
ionrepsh_imon=9.28229E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33663E1
lens5b_imon=2.18507E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74567E1
cs_ef2b_imon=3.13587E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46092E0
os_ea2_imon=-6.03276E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06083E2
lens4b_imon=2.00548E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71258E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06837E0
os_ef2alow_imon=-2.66996E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.55978E-1
os_ef2bup_imon=-5.41618E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10739E1
os_restr2_imon=3.3795E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23058E2
cs_ionfoca_imon=6.3007E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01773E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73039E1
iondef1_imon=1.1006E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67992E1
iondef4_imon=1.07873E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71779E1
olens3_imon=6.14644E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.4426E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.14095E0
cs_ionaccel_imon=-1.13827E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02097E2
cs_ionfocb_imon=1.47302E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56213E1
einzel_imon=7.57612E-6
window_vset=0.0E0
window_vmon=1.72293E-1
window_imon=-9.79699E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82648E2
mask1_imon=2.39095E-4
mask2_vset=0.0E0
mask2_vmon=-1.86428E1
mask2_imon=-6.01282E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92629E3
multa_neg_imon=7.88423E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93702E3
defgrida_imon=6.70206E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50149E3
multb_neg_imon=7.24005E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.44099E0
defgridb_imon=6.12868E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33272E1
os_fil1_imon=9.40666E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06741E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61806E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.24298E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.2704E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62847E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.55983E-2
os_fil2_imon=-2.59389E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.92909E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.28469E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35867E-1
cs_fil2_imon=-2.38966E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.18427E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22096E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31563E-3
inlet_lpb_pmon=3.0174E-1
chamber_ion_pmon=1.19991E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40074E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.91728E-1
res40_imon=-2.38525E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=153
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.4E2	0.0E0	1.47E2	4.1E1	-7.201E-2	-8.80018E1	-5.48363E-4	-8.80004E1	1.90735E-4	4.64916E-3	9.34362E-2	2.73327E1	-3.26615E1	-3.26561E1	2.67873E1	1.19757E-7	2.52099E-3	2.52099E-3	6.32936E-3	2.99E-1
2.0E0	8.636E3	1.4E1	3.16E2	1.6E2	-7.19325E-2	-8.80015E1	-5.24521E-4	-8.80004E1	0.0E0	5.03063E-3	9.36031E-2	2.73135E1	-3.26699E1	-3.25954E1	2.67926E1	1.20106E-7	2.51847E-3	2.51847E-3	6.3074E-3	2.9841E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.23964E-2	-8.80016E1	-4.76837E-4	-8.80005E1	1.43051E-4	4.98295E-3	9.39369E-2	2.72856E1	-3.26868E1	-3.26626E1	2.68244E1	1.1966E-7	2.52027E-3	2.52027E-3	6.3074E-3	2.99879E-1
4.0E0	2.063E3	2.0E0	6.55E2	3.98E2	-7.22418E-2	-8.80017E1	-3.8147E-4	-8.80004E1	-4.76837E-5	5.24521E-3	9.36985E-2	2.73015E1	-3.26488E1	-3.26687E1	2.67896E1	1.20092E-7	2.51814E-3	2.51814E-3	6.33388E-3	3.006E-1
5.0E0	1.0E0	0.0E0	8.24E2	5.17E2	-7.21643E-2	-8.80017E1	-4.76837E-4	-8.80007E1	9.53674E-5	4.79221E-3	9.35078E-2	2.7245E1	-3.26723E1	-3.2629E1	2.68136E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.03185E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.21643E-2	-8.80017E1	-3.57628E-4	-8.80007E1	2.14577E-4	4.91142E-3	9.37223E-2	2.73369E1	-3.26536E1	-3.26038E1	2.68064E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.00563E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.286E-2	-8.80015E1	-2.6226E-4	-8.80008E1	7.15256E-5	4.86374E-3	9.37939E-2	2.72811E1	-3.26759E1	-3.25924E1	2.68106E1	1.19965E-7	2.52209E-3	2.52209E-3	6.33486E-3	3.00302E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.31692E-2	-8.80016E1	-5.96046E-4	-8.80009E1	2.86102E-4	4.62532E-3	9.36985E-2	2.7321E1	-3.26649E1	-3.25959E1	2.67974E1	1.19925E-7	2.52027E-3	2.52027E-3	6.31858E-3	3.00676E-1
1.2E1	1.0E0	0.0E0	4.85E2	3.23E2	-7.37103E-2	-8.80015E1	-6.19888E-4	-8.80011E1	3.33786E-4	5.05447E-3	9.36985E-2	2.73181E1	-3.26478E1	-3.26443E1	2.67885E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	3.00453E-1
1.3E1	0.0E0	0.0E0	5.25E2	3.53E2	-7.30918E-2	-8.80016E1	-6.91414E-4	-8.8001E1	3.09944E-4	4.95911E-3	9.38177E-2	2.72806E1	-3.26456E1	-3.26236E1	2.68202E1	1.19697E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
1.4E1	3.06E2	0.0E0	5.66E2	3.82E2	-7.38649E-2	-8.80014E1	-5.72205E-4	-8.80008E1	2.38419E-4	4.79221E-3	9.36508E-2	2.73346E1	-3.26974E1	-3.2636E1	2.67848E1	1.19913E-7	2.5199E-3	2.5199E-3	6.32386E-3	2.9978E-1
1.5E1	8.0E0	0.0E0	6.06E2	4.11E2	-7.32464E-2	-8.80012E1	-1.00136E-3	-8.80006E1	4.76837E-5	4.673E-3	9.39846E-2	2.73129E1	-3.26543E1	-3.26104E1	2.6789E1	1.19851E-7	2.51203E-3	2.51203E-3	6.30202E-3	3.0148E-1
1.6E1	2.1E1	0.0E0	6.47E2	4.41E2	-7.32464E-2	-8.80012E1	-9.77516E-4	-8.80006E1	2.14577E-4	5.03063E-3	9.35316E-2	2.73399E1	-3.2682E1	-3.25906E1	2.6795E1	1.20174E-7	2.51662E-3	2.51662E-3	6.29645E-3	3.00302E-1
1.7E1	5.4E1	0.0E0	6.87E2	4.7E2	-7.23964E-2	-8.80015E1	-9.05991E-4	-8.80008E1	3.57628E-4	4.60148E-3	9.34601E-2	2.7298E1	-3.26673E1	-3.26319E1	2.67671E1	1.19913E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.01085E-1
1.8E1	2.21E2	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80015E1	-6.91414E-4	-8.80011E1	2.6226E-4	5.05447E-3	9.36985E-2	2.73357E1	-3.26813E1	-3.262E1	2.68388E1	1.1974E-7	2.52131E-3	2.52131E-3	6.32328E-3	3.01356E-1
1.9E1	3.47E2	0.0E0	7.68E2	5.29E2	-7.23964E-2	-8.80015E1	-6.19888E-4	-8.80012E1	3.57628E-4	5.126E-3	9.36747E-2	2.72691E1	-3.26567E1	-3.26065E1	2.68226E1	1.20174E-7	2.51552E-3	2.51552E-3	6.3074E-3	3.00563E-1
2.0E1	2.301E3	0.0E0	8.08E2	5.58E2	-7.26282E-2	-8.80016E1	-1.16825E-3	-8.80009E1	4.29153E-4	4.74453E-3	9.36747E-2	2.73051E1	-3.26655E1	-3.26254E1	2.68285E1	1.20174E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.02396E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.23189E-2	-8.80016E1	-9.53674E-4	-8.80006E1	4.29153E-4	4.95911E-3	9.377E-2	2.7337E1	-3.2633E1	-3.26915E1	2.67978E1	1.19972E-7	2.51777E-3	2.51777E-3	6.31007E-3	3.00781E-1
2.2E1	1.43E2	0.0E0	8.89E2	6.17E2	-7.18554E-2	-8.80016E1	-8.10623E-4	-8.80008E1	4.76837E-4	4.98295E-3	9.32217E-2	2.72829E1	-3.26482E1	-3.26422E1	2.68046E1					
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27053E-2	-8.80015E1	-6.4373E-4	-8.80009E1	5.96046E-4	5.22137E-3	9.35793E-2	2.73039E1	-3.27056E1	-3.26327E1	2.67992E1	1.19991E-7	2.51334E-3	2.51334E-3	6.31563E-3	3.0174E-1
