[Scan]
initial_time=2016-01-28T19:09:02
final_time=2016-01-28T19:09:21
ip_count=19
run=1026
dataset=5
scan=353
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.80454E-6
ql1_vset=
ql1_vmon=-8.80014E1
ql1_imon=-7.14302E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.46028E-9
ql3_vset=
ql3_vmon=-8.80006E1
ql3_imon=-1.84546E-9
ql4_vset=
ql4_vmon=4.05312E-4
ql4_imon=1.61134E-8
mult1=-1.04989E-8
mult2=-2.69466E-9
rf_tmon=-4.58452E-3
rf_agc=3.36039E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.86374E-3
ql5_imon=6.00064E-10
bslens_vset=-6.2E0
bslens_vmon=-6.65801E0
bslens_imon=2.40841E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.18714E1
lens5a_imon=1.94107E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.1248E2
lens4a_imon=2.05236E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53788E1
cs_ef1b_imon=3.10882E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0461E2
lens23_imon=1.02269E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05118E1
cs_ea1_imon=1.26362E-5
lens1_vset=-2.7E0
lens1_vmon=-3.08132E0
lens1_imon=1.5908E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64621E1
os_ef1alow_imon=2.97298E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.0417E1
cs_ea2_imon=1.40145E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83758E1
cs_ef1a_imon=2.99712E-5
olens2_vset=9.7E-1
olens2_vmon=9.69958E-1
olens2_imon=1.20224E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11292E1
os_restr1_imon=4.30025E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15092E1
os_ea1_imon=2.43591E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63869E1
os_ef1bup_imon=3.09209E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.25275E0
cs_ionrep_imon=9.62668E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91878E2
cs_nozzle_imon=1.93233E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01724E1
cs_anode1_imon=2.04545E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20484E0
olens4_imon=3.91729E-8
tplens_vset=1.4E-1
tplens_vmon=1.65701E0
tplens_imon=-3.13045E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.2626E1
iondef3_imon=1.46686E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26476E1
iondef2_imon=1.58483E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02938E2
lens6_imon=2.98669E-4
ql6_vset=1.0E-1
ql6_vmon=9.3627E-2
ql6_imon=8.52823E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27611E0
ionrepsh_imon=9.15947E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33554E1
lens5b_imon=2.19297E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74787E1
cs_ef2b_imon=3.11077E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.47337E0
os_ea2_imon=-9.08727E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.0608E2
lens4b_imon=2.00712E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71225E1
cs_ef2a_imon=3.18745E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.06948E0
os_ef2alow_imon=-2.70456E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.88126E-1
os_ef2bup_imon=-5.53814E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11123E1
os_restr2_imon=3.38051E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.22997E2
cs_ionfoca_imon=6.29305E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01692E1
cs_anode2_imon=2.09722E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72991E1
iondef1_imon=1.11801E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67816E1
iondef4_imon=1.07044E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.15306E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82189E-1
olens1_imon=7.46608E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11587E0
cs_ionaccel_imon=-1.06201E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02095E2
cs_ionfocb_imon=1.47102E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56172E1
einzel_imon=7.77347E-6
window_vset=0.0E0
window_vmon=1.90625E-1
window_imon=-1.19435E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82626E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86305E1
mask2_imon=-7.54523E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92724E3
multa_neg_imon=6.52757E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93761E3
defgrida_imon=6.48085E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50124E3
multb_neg_imon=7.29845E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.53342E0
defgridb_imon=6.00197E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.39507E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.0755E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61828E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30864E1
cs_fil1_imon=9.26144E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.39187E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.63432E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.46992E-2
os_fil2_imon=-2.57443E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.9017E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.34278E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35944E-1
cs_fil2_imon=-2.6393E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.56437E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22173E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9841E-1
chamber_ion_pmon=1.19902E-7
chamber_cvt_pmon=2.51525E-3
foreline_cvt_pmon=2.51525E-3
chamber_tmon=1.40077E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.09435E-1
res40_imon=-2.57611E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=152
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.36E2	1.0E0	1.47E2	4.1E1	-7.19325E-2	-8.80012E1	-7.39098E-4	-8.80002E1	2.6226E-4	4.76837E-3	9.36985E-2	2.73134E1	-3.27015E1	-3.26189E1	2.68316E1	1.20019E-7	2.52147E-3	2.52147E-3	6.31925E-3	3.04452E-1
2.0E0	8.685E3	7.0E0	3.16E2	1.6E2	-7.10825E-2	-8.80015E1	-6.67572E-4	-8.80004E1	2.6226E-4	5.00679E-3	9.38416E-2	2.72935E1	-3.26536E1	-3.25954E1	2.67992E1	1.20192E-7	2.51919E-3	2.51919E-3	6.33919E-3	3.00852E-1
3.0E0	4.0E0	0.0E0	4.85E2	2.79E2	-7.13915E-2	-8.80013E1	-4.05312E-4	-8.80006E1	4.05312E-4	4.86374E-3	9.34124E-2	2.73074E1	-3.26608E1	-3.26527E1	2.67943E1	1.201E-7	2.50931E-3	2.50931E-3	6.3245E-3	2.97823E-1
4.0E0	2.007E3	0.0E0	6.55E2	3.98E2	-7.286E-2	-8.80014E1	-1.09673E-3	-8.80007E1	4.52995E-4	4.76837E-3	9.35793E-2	2.72954E1	-3.26363E1	-3.26129E1	2.68012E1	1.19979E-7	2.52093E-3	2.52093E-3	6.29185E-3	3.00494E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.31692E-2	-8.80013E1	-5.00679E-4	-8.80004E1	5.00679E-4	4.74453E-3	9.377E-2	2.73314E1	-3.26689E1	-3.2604E1	2.67902E1	1.20078E-7	2.51575E-3	2.51575E-3	6.3282E-3	2.99014E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.286E-2	-8.80015E1	-9.53674E-4	-8.80004E1	1.19209E-4	4.76837E-3	9.38416E-2	2.72652E1	-3.26466E1	-3.26154E1	2.68157E1	1.20479E-7	2.51498E-3	2.51498E-3	6.3245E-3	3.01065E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.20871E-2	-8.80013E1	-6.19888E-4	-8.80005E1	4.76837E-5	5.05447E-3	9.377E-2	2.72845E1	-3.26555E1	-3.25888E1	2.681E1	1.20031E-7	2.51581E-3	2.51581E-3	6.32418E-3	3.00942E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80012E1	-8.58307E-4	-8.80007E1	-7.15256E-5	4.88758E-3	9.36747E-2	2.73009E1	-3.26651E1	-3.26206E1	2.68058E1	1.20174E-7	2.52209E-3	2.52209E-3	6.34037E-3	3.01609E-1
1.2E1	6.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80014E1	-6.4373E-4	-8.80007E1	2.38419E-4	4.64916E-3	9.38177E-2	2.72558E1	-3.26452E1	-3.2629E1	2.68334E1	1.19953E-7	2.52061E-3	2.52061E-3	6.33436E-3	2.9841E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.3401E-2	-8.80017E1	-6.91414E-4	-8.80007E1	1.90735E-4	4.52995E-3	9.34601E-2	2.73508E1	-3.26819E1	-3.25323E1	2.68076E1	1.19766E-7	2.51693E-3	2.51693E-3	6.32978E-3	2.98554E-1
1.4E1	2.9E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80015E1	-7.62939E-4	-8.80007E1	1.90735E-4	4.8399E-3	9.34601E-2	2.72907E1	-3.26795E1	-3.25984E1	2.681E1	1.19902E-7	2.52169E-3	2.52169E-3	6.30202E-3	2.9892E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80015E1	-8.34465E-4	-8.80006E1	2.38419E-5	4.8399E-3	9.35078E-2	2.73159E1	-3.26122E1	-3.2632E1	2.6818E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3514E-3	2.99E-1
1.6E1	3.4E1	0.0E0	6.47E2	4.41E2	-7.34782E-2	-8.80014E1	-7.15256E-4	-8.80007E1	2.14577E-4	4.76837E-3	9.33886E-2	2.72898E1	-3.26744E1	-3.26708E1	2.67944E1	1.20069E-7	2.51552E-3	2.51552E-3	6.33486E-3	3.00302E-1
1.7E1	4.2E1	0.0E0	6.87E2	4.7E2	-7.25507E-2	-8.80014E1	-6.91414E-4	-8.80007E1	-7.15256E-5	4.76837E-3	9.34601E-2	2.73105E1	-3.26597E1	-3.26266E1	2.68112E1	1.20226E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00824E-1
1.8E1	2.14E2	0.0E0	7.27E2	5.0E2	-7.32464E-2	-8.80013E1	-6.91414E-4	-8.80007E1	1.43051E-4	4.88758E-3	9.37223E-2	2.73201E1	-3.26825E1	-3.26296E1	2.67998E1	1.20174E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00041E-1
1.9E1	3.67E2	0.0E0	7.68E2	5.29E2	-7.39421E-2	-8.80015E1	-8.34465E-4	-8.80005E1	2.6226E-4	4.88758E-3	9.37223E-2	2.73003E1	-3.26795E1	-3.26657E1	2.67992E1	1.20106E-7	2.52169E-3	2.52169E-3	6.31278E-3	3.0071E-1
2.0E1	2.308E3	0.0E0	8.08E2	5.58E2	-7.35556E-2	-8.80014E1	-8.34465E-4	-8.80006E1	9.53674E-5	5.00679E-3	9.39369E-2	2.72859E1	-3.26897E1	-3.25635E1	2.68004E1	1.19861E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.00302E-1
2.1E1	9.0E0	0.0E0	8.49E2	5.88E2	-7.29374E-2	-8.80015E1	-8.58307E-4	-8.80002E1	4.76837E-5	4.86374E-3	9.36747E-2	2.72738E1	-3.26661E1	-3.27015E1	2.68154E1	1.20084E-7	2.51581E-3	2.51581E-3	6.31299E-3	3.01209E-1
2.2E1	1.7E2	0.0E0	8.89E2	6.17E2	-7.25507E-2	-8.80013E1	-6.67572E-4	-8.80005E1	3.33786E-4	4.88758E-3	9.36508E-2	2.72847E1	-3.26404E1	-3.26657E1	2.6789E1	1.20414E-7	2.52384E-3	2.52384E-3	6.32356E-3	2.99941E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80014E1	-4.76837E-4	-8.80006E1	4.05312E-4	4.86374E-3	9.3627E-2	2.72991E1	-3.26476E1	-3.2626E1	2.67816E1	1.19902E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.9841E-1
