[Scan]
initial_time=2016-01-28T19:09:55
final_time=2016-01-28T19:10:15
ip_count=19
run=1026
dataset=5
scan=355
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.27828E-2
qbias_imon=-3.78885E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.58333E-10
ql2_vset=
ql2_vmon=-7.39098E-4
ql2_imon=1.41516E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.78882E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.61832E-8
mult1=-1.14622E-8
mult2=-2.6747E-9
rf_tmon=-4.97506E-3
rf_agc=3.35619E-2
counter1=1
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.00679E-3
ql5_imon=5.74648E-10
bslens_vset=-6.2E0
bslens_vmon=-6.66193E0
bslens_imon=2.31064E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19701E1
lens5a_imon=1.97586E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12478E2
lens4a_imon=2.05024E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53562E1
cs_ef1b_imon=3.09587E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0463E2
lens23_imon=1.0215E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04766E1
cs_ea1_imon=1.25523E-5
lens1_vset=-2.7E0
lens1_vmon=-3.07801E0
lens1_imon=1.51755E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64548E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03708E1
cs_ea2_imon=1.39294E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.85163E1
cs_ef1a_imon=3.0227E-5
olens2_vset=9.7E-1
olens2_vmon=9.70078E-1
olens2_imon=1.19324E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11213E1
os_restr1_imon=4.29923E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15384E1
os_ea1_imon=2.429E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.07496E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23648E0
cs_ionrep_imon=9.50973E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91864E2
cs_nozzle_imon=1.93265E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01815E1
cs_anode1_imon=2.04999E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20508E0
olens4_imon=3.91384E-8
tplens_vset=1.4E-1
tplens_vmon=1.62221E0
tplens_imon=-1.94802E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26068E1
iondef3_imon=1.49676E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26561E1
iondef2_imon=1.57607E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02886E2
lens6_imon=2.98447E-4
ql6_vset=1.0E-1
ql6_vmon=9.35078E-2
ql6_imon=8.60691E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.2557E0
ionrepsh_imon=9.25018E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33766E1
lens5b_imon=2.18423E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7497E1
cs_ef2b_imon=3.12902E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.41793E0
os_ea2_imon=-7.35545E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06077E2
lens4b_imon=2.00471E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.713E1
cs_ef2a_imon=3.17912E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07138E0
os_ef2alow_imon=-2.68798E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.92018E-1
os_ef2bup_imon=-5.32969E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10973E1
os_restr2_imon=3.37265E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23084E2
cs_ionfoca_imon=6.29712E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01779E1
cs_anode2_imon=2.10549E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73339E1
iondef1_imon=1.07318E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67523E1
iondef4_imon=1.08125E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1469E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81975E-1
olens1_imon=7.3883E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12834E0
cs_ionaccel_imon=-1.10944E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02096E2
cs_ionfocb_imon=1.47305E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56231E1
einzel_imon=7.72748E-6
window_vset=0.0E0
window_vmon=1.96319E-1
window_imon=-1.1599E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82639E2
mask1_imon=2.39156E-4
mask2_vset=0.0E0
mask2_vmon=-1.86602E1
mask2_imon=-6.30114E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92592E3
multa_neg_imon=7.82622E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93727E3
defgrida_imon=6.44552E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50147E3
multb_neg_imon=7.23501E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.50081E0
defgridb_imon=6.18597E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33258E1
os_fil1_imon=9.42222E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07353E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61375E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30847E1
cs_fil1_imon=9.25313E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.33947E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62643E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.37035E-2
os_fil2_imon=-2.62392E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.03721E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.48441E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34572E-1
cs_fil2_imon=-2.61792E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.37648E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22105E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31278E-3
inlet_lpb_pmon=3.00453E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51739E-3
foreline_cvt_pmon=2.51739E-3
chamber_tmon=1.40111E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.83318E-1
res40_imon=-2.51499E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=156
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.0E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80016E1	-8.58307E-4	-8.80005E1	-2.6226E-4	4.91142E-3	9.36031E-2	2.73187E1	-3.26679E1	-3.26154E1	2.6807E1	1.19809E-7	2.51443E-3	2.51443E-3	6.3074E-3	3.00824E-1
2.0E0	8.705E3	6.0E0	3.16E2	1.6E2	-7.37103E-2	-8.80015E1	-1.00136E-3	-8.80003E1	1.19209E-4	5.17368E-3	9.34124E-2	2.73143E1	-3.26511E1	-3.26321E1	2.68034E1	1.19841E-7	2.51287E-3	2.51287E-3	6.29157E-3	3.01356E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.31692E-2	-8.80017E1	-7.39098E-4	-8.80005E1	7.15256E-5	5.05447E-3	9.33409E-2	2.73204E1	-3.26573E1	-3.26113E1	2.68016E1	1.19829E-7	2.52066E-3	2.52066E-3	6.3131E-3	3.00251E-1
4.0E0	1.967E3	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80015E1	-5.24521E-4	-8.80001E1	0.0E0	4.8399E-3	9.30786E-2	2.73129E1	-3.26693E1	-3.26386E1	2.68082E1	1.1969E-7	2.51709E-3	2.51709E-3	6.31798E-3	3.01356E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.286E-2	-8.80015E1	-1.00136E-3	-8.80005E1	9.53674E-5	4.79221E-3	9.34124E-2	2.7285E1	-3.26626E1	-3.26095E1	2.68128E1	1.20278E-7	2.50898E-3	2.50898E-3	6.29098E-3	3.01871E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80017E1	-8.10623E-4	-8.80008E1	-1.66893E-4	4.72069E-3	9.35793E-2	2.72919E1	-3.26675E1	-3.26254E1	2.67848E1	1.20122E-7	2.5188E-3	2.5188E-3	6.3074E-3	3.00041E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.38649E-2	-8.80018E1	-6.4373E-4	-8.80009E1	-3.57628E-4	4.41074E-3	9.36985E-2	2.72997E1	-3.26747E1	-3.25689E1	2.68196E1	1.19953E-7	2.52061E-3	2.52061E-3	6.31817E-3	2.9841E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.35556E-2	-8.80018E1	-7.86781E-4	-8.80007E1	7.15256E-5	4.62532E-3	9.34601E-2	2.73069E1	-3.2653E1	-3.26272E1	2.68052E1	1.20017E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.99E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.27828E-2	-8.80018E1	-8.82149E-4	-8.80006E1	-1.19209E-4	4.86374E-3	9.34601E-2	2.72745E1	-3.26695E1	-3.25966E1	2.68107E1	1.20084E-7	2.51915E-3	2.51915E-3	6.31858E-3	2.99083E-1
1.3E1	3.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80014E1	-7.86781E-4	-8.80005E1	-3.33786E-4	4.41074E-3	9.377E-2	2.73033E1	-3.26609E1	-3.26314E1	2.68035E1	1.20226E-7	2.52538E-3	2.52538E-3	6.34037E-3	3.00041E-1
1.4E1	2.88E2	0.0E0	5.66E2	3.82E2	-7.27053E-2	-8.80016E1	-6.91414E-4	-8.80005E1	-1.90735E-4	4.74453E-3	9.35793E-2	2.72841E1	-3.26897E1	-3.2623E1	2.67978E1	1.20017E-7	2.52099E-3	2.52099E-3	6.32386E-3	3.02396E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.27828E-2	-8.80014E1	-9.29832E-4	-8.80003E1	-1.90735E-4	4.69685E-3	9.35316E-2	2.73122E1	-3.2688E1	-3.26431E1	2.68059E1	1.19965E-7	2.51662E-3	2.51662E-3	6.31288E-3	3.01347E-1
1.6E1	3.0E1	0.0E0	6.47E2	4.41E2	-7.3401E-2	-8.80016E1	-8.10623E-4	-8.80004E1	-4.76837E-5	4.55379E-3	9.35555E-2	2.7288E1	-3.26542E1	-3.26609E1	2.68082E1	1.19809E-7	2.51334E-3	2.51334E-3	6.31288E-3	3.03185E-1
1.7E1	6.1E1	0.0E0	6.87E2	4.7E2	-7.35556E-2	-8.80013E1	-1.0252E-3	-8.80004E1	0.0E0	4.60148E-3	9.34839E-2	2.73345E1	-3.26488E1	-3.25846E1	2.68059E1	1.19965E-7	2.5188E-3	2.5188E-3	6.32936E-3	3.03185E-1
1.8E1	2.46E2	0.0E0	7.27E2	5.0E2	-7.35556E-2	-8.80015E1	-1.14441E-3	-8.80004E1	-2.38419E-5	4.43459E-3	9.35316E-2	2.73334E1	-3.26602E1	-3.27086E1	2.6804E1	1.20226E-7	2.51662E-3	2.51662E-3	6.32936E-3	3.00824E-1
1.9E1	3.4E2	0.0E0	7.68E2	5.29E2	-7.44059E-2	-8.80015E1	-8.34465E-4	-8.80005E1	9.53674E-5	4.3869E-3	9.37223E-2	2.73159E1	-3.26536E1	-3.26146E1	2.67806E1	1.20106E-7	2.51525E-3	2.51525E-3	6.29128E-3	3.01223E-1
2.0E1	2.168E3	4.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80015E1	-7.86781E-4	-8.80003E1	1.90735E-4	4.673E-3	9.35078E-2	2.72907E1	-3.26164E1	-3.26254E1	2.67824E1	1.19872E-7	2.52139E-3	2.52139E-3	6.31858E-3	3.01209E-1
2.1E1	8.0E0	0.0E0	8.49E2	5.88E2	-7.32464E-2	-8.80014E1	-1.0252E-3	-8.80004E1	-4.76837E-5	4.91142E-3	9.35078E-2	2.73141E1	-3.26488E1	-3.26314E1	2.6792E1	1.20122E-7	2.51662E-3	2.51662E-3	6.30192E-3	3.00302E-1
2.2E1	1.43E2	0.0E0	8.89E2	6.17E2	-7.30146E-2	-8.80017E1	-9.05991E-4	-8.80001E1	-2.38419E-5	4.52995E-3	9.35316E-2	2.72998E1	-3.26673E1	-3.26496E1	2.67806E1	1.20106E-7	2.51203E-3	2.51203E-3	6.29128E-3	3.01223E-1
2.3E1	1.0E0	0.0E0	9.3E2	6.47E2	-7.27828E-2	-8.80018E1	-7.39098E-4	-8.80004E1	2.6226E-4	5.00679E-3	9.35078E-2	2.73339E1	-3.26561E1	-3.26068E1	2.67523E1	1.20004E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.00453E-1
