[Scan]
initial_time=2016-01-28T19:11:15
final_time=2016-01-28T19:11:34
ip_count=19
run=1026
dataset=5
scan=358
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.23964E-2
qbias_imon=-3.81818E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.50024E-10
ql2_vset=
ql2_vmon=-8.10623E-4
ql2_imon=1.4303E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.77593E-9
ql4_vset=
ql4_vmon=3.33786E-4
ql4_imon=1.61227E-8
mult1=-1.06194E-8
mult2=-2.72859E-9
rf_tmon=-5.03514E-3
rf_agc=3.27267E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.72069E-3
ql5_imon=5.60296E-10
bslens_vset=-6.2E0
bslens_vmon=-6.69978E0
bslens_imon=2.62067E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19376E1
lens5a_imon=1.9928E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12469E2
lens4a_imon=2.04978E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53628E1
cs_ef1b_imon=3.09839E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04591E2
lens23_imon=1.02265E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.24297E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06239E0
lens1_imon=1.35893E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64554E1
os_ef1alow_imon=2.96252E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04069E1
cs_ea2_imon=1.41529E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83757E1
cs_ef1a_imon=3.00108E-5
olens2_vset=9.7E-1
olens2_vmon=9.70149E-1
olens2_imon=1.19327E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11502E1
os_restr1_imon=4.30067E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15414E1
os_ea1_imon=2.4528E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63665E1
os_ef1bup_imon=3.08289E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24128E0
cs_ionrep_imon=9.52415E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91869E2
cs_nozzle_imon=1.93337E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02019E1
cs_anode1_imon=2.0381E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20492E0
olens4_imon=3.90402E-8
tplens_vset=1.4E-1
tplens_vmon=1.6156E0
tplens_imon=-1.55148E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25942E1
iondef3_imon=1.48955E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26759E1
iondef2_imon=1.57571E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02892E2
lens6_imon=2.98281E-4
ql6_vset=1.0E-1
ql6_vmon=9.36985E-2
ql6_imon=8.6236E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.27253E0
ionrepsh_imon=9.34751E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33982E1
lens5b_imon=2.19108E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74651E1
cs_ef2b_imon=3.12289E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44256E0
os_ea2_imon=-8.90558E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06091E2
lens4b_imon=2.00551E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71294E1
cs_ef2a_imon=3.19245E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.05035E0
os_ef2alow_imon=-2.72762E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-3.0343E-1
os_ef2bup_imon=-5.45582E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.11003E1
os_restr2_imon=3.37193E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2303E2
cs_ionfoca_imon=6.31659E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01701E1
cs_anode2_imon=2.10225E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73063E1
iondef1_imon=1.10887E-5
iondef4_vset=2.691E1
iondef4_vmon=2.678E1
iondef4_imon=1.07692E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.1111E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.8238E-1
olens1_imon=7.35763E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.12654E0
cs_ionaccel_imon=-9.36451E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.0207E2
cs_ionfocb_imon=1.47212E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56207E1
einzel_imon=7.72388E-6
window_vset=0.0E0
window_vmon=1.783E-1
window_imon=-1.08421E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82615E2
mask1_imon=2.39099E-4
mask2_vset=0.0E0
mask2_vmon=-1.86758E1
mask2_imon=-7.09401E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92678E3
multa_neg_imon=7.47293E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93747E3
defgrida_imon=6.52123E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50137E3
multb_neg_imon=7.17733E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.36547E0
defgridb_imon=6.12468E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33274E1
os_fil1_imon=9.42678E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07467E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61198E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30831E1
cs_fil1_imon=9.25824E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.30043E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62258E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.52512E-2
os_fil2_imon=-2.63593E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.83298E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.64038E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.34183E-1
cs_fil2_imon=-2.5999E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22026E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.32936E-3
inlet_lpb_pmon=2.9978E-1
chamber_ion_pmon=1.19861E-7
chamber_cvt_pmon=2.51334E-3
foreline_cvt_pmon=2.51334E-3
chamber_tmon=1.40075E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.19358E-1
res40_imon=-2.54022E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=178
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.36E2	0.0E0	1.47E2	4.1E1	-7.21643E-2	-8.80017E1	-9.05991E-4	-8.80002E1	3.09944E-4	5.03063E-3	9.35078E-2	2.73147E1	-3.26302E1	-3.26026E1	2.68094E1	1.20311E-7	2.51739E-3	2.51739E-3	6.31278E-3	3.0148E-1
2.0E0	8.794E3	6.0E0	3.16E2	1.6E2	-7.21643E-2	-8.80015E1	-8.10623E-4	-8.80004E1	9.53674E-5	5.34058E-3	9.36985E-2	2.72996E1	-3.26719E1	-3.27301E1	2.67956E1	1.19913E-7	2.51662E-3	2.51662E-3	6.31837E-3	3.00563E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80017E1	-1.0252E-3	-8.80003E1	0.0E0	5.10216E-3	9.37939E-2	2.73134E1	-3.26726E1	-3.25776E1	2.68215E1	1.20403E-7	2.51693E-3	2.51693E-3	6.3074E-3	3.00144E-1
4.0E0	2.025E3	0.0E0	6.55E2	3.98E2	-7.24736E-2	-8.80015E1	-1.0252E-3	-8.80001E1	-9.53674E-5	5.24521E-3	9.37939E-2	2.73228E1	-3.26537E1	-3.2777E1	2.6789E1	1.20114E-7	2.51972E-3	2.51972E-3	6.32371E-3	2.99603E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.19325E-2	-8.80018E1	-5.48363E-4	-8.80003E1	7.15256E-5	5.14984E-3	9.377E-2	2.73087E1	-3.26476E1	-3.26741E1	2.68082E1					
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27828E-2	-8.80019E1	-8.34465E-4	-8.80001E1	2.38419E-5	5.19753E-3	9.33409E-2	2.73105E1	-3.26831E1	-3.24938E1	2.67854E1	1.19902E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.98665E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.21643E-2	-8.80016E1	-9.77516E-4	-8.80003E1	-1.43051E-4	5.31673E-3	9.34124E-2	2.73093E1	-3.26915E1	-3.25725E1	2.67902E1	1.19809E-7	2.5188E-3	2.5188E-3	6.30192E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80016E1	-8.82149E-4	-8.8E1	-9.53674E-5	5.29289E-3	9.38177E-2	2.7272E1	-3.26621E1	-3.26591E1	2.68118E1	1.19913E-7	2.5188E-3	2.5188E-3	6.31837E-3	2.9952E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.24736E-2	-8.80013E1	-7.39098E-4	-8.79999E1	-9.53674E-5	5.38826E-3	9.35555E-2	2.73163E1	-3.26567E1	-3.26661E1	2.68202E1	1.20031E-7	2.51248E-3	2.51248E-3	6.30182E-3	3.01475E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.31692E-2	-8.80013E1	-8.58307E-4	-8.80001E1	-1.43051E-4	4.86374E-3	9.36508E-2	2.72745E1	-3.26374E1	-3.2587E1	2.67956E1	1.20106E-7	2.51847E-3	2.51847E-3	6.30202E-3	3.02769E-1
1.4E1	2.8E2	0.0E0	5.66E2	3.82E2	-7.286E-2	-8.80014E1	-9.53674E-4	-8.8E1	-1.43051E-4	4.98295E-3	9.377E-2	2.73448E1	-3.26747E1	-3.25275E1	2.681E1	1.19913E-7	2.51334E-3	2.51334E-3	6.31288E-3	2.99E-1
1.5E1	4.0E0	0.0E0	6.06E2	4.11E2	-7.26282E-2	-8.80016E1	-1.14441E-3	-8.80003E1	-2.38419E-4	5.126E-3	9.31025E-2	2.72889E1	-3.26747E1	-3.25912E1	2.68058E1	1.20069E-7	2.51443E-3	2.51443E-3	6.33486E-3	2.99E-1
1.6E1	4.3E1	0.0E0	6.47E2	4.41E2	-7.29374E-2	-8.80016E1	-1.00136E-3	-8.80005E1	2.38419E-5	4.98295E-3	9.35555E-2	2.73057E1	-3.26543E1	-3.26856E1	2.67902E1	1.19913E-7	2.5199E-3	2.5199E-3	6.30192E-3	3.00302E-1
1.7E1	5.5E1	0.0E0	6.87E2	4.7E2	-7.40192E-2	-8.80018E1	-1.14441E-3	-8.80002E1	2.38419E-5	5.00679E-3	9.38892E-2	2.7299E1	-3.26695E1	-3.26021E1	2.6822E1	1.19749E-7	2.51954E-3	2.51954E-3	6.32356E-3	2.99175E-1
1.8E1	2.09E2	0.0E0	7.27E2	5.0E2	-7.30146E-2	-8.80018E1	-8.34465E-4	-8.8E1	-4.76837E-5	5.07832E-3	9.36747E-2	2.72591E1	-3.26773E1	-3.26201E1	2.68106E1	1.20191E-7	2.51915E-3	2.51915E-3	6.29067E-3	3.01209E-1
1.9E1	3.41E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.80016E1	-8.34465E-4	-8.80001E1	-9.53674E-5	4.98295E-3	9.35078E-2	2.73213E1	-3.26284E1	-3.26549E1	2.67968E1	1.20106E-7	2.5131E-3	2.5131E-3	6.36687E-3	3.01995E-1
2.0E1	2.126E3	3.0E0	8.08E2	5.58E2	-7.38649E-2	-8.80018E1	-9.77516E-4	-8.80001E1	4.29153E-4	4.88758E-3	9.36031E-2	2.73104E1	-3.26596E1	-3.26071E1	2.68319E1	1.19809E-7	2.52538E-3	2.52538E-3	6.32386E-3	3.02133E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.39421E-2	-8.8002E1	-8.82149E-4	-8.8E1	4.76837E-5	4.93526E-3	9.40084E-2	2.73039E1	-3.2652E1	-3.26667E1	2.68094E1	1.19851E-7	2.52492E-3	2.52492E-3	6.32356E-3	2.9943E-1
2.2E1	1.71E2	0.0E0	8.89E2	6.17E2	-7.27053E-2	-8.80017E1	-8.82149E-4	-8.80001E1	-1.19209E-4	4.95911E-3	9.36031E-2	2.73009E1	-3.26368E1	-3.26296E1	2.68118E1	1.19851E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.00453E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.23964E-2	-8.80016E1	-8.10623E-4	-8.80004E1	3.33786E-4	4.72069E-3	9.36985E-2	2.73063E1	-3.26759E1	-3.25942E1	2.678E1	1.19861E-7	2.51334E-3	2.51334E-3	6.32936E-3	2.9978E-1
