[Scan]
initial_time=2016-01-28T19:11:42
final_time=2016-01-28T19:12:01
ip_count=19
run=1026
dataset=5
scan=359
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30918E-2
qbias_imon=-3.77307E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.60932E-10
ql2_vset=
ql2_vmon=-4.76837E-4
ql2_imon=1.44931E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.71416E-9
ql4_vset=
ql4_vmon=4.29153E-4
ql4_imon=1.62114E-8
mult1=-1.03672E-8
mult2=-2.71415E-9
rf_tmon=-4.8655E-3
rf_agc=3.25985E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.89609E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6658E0
bslens_imon=2.48238E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19863E1
lens5a_imon=2.0057E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12497E2
lens4a_imon=2.05194E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53554E1
cs_ef1b_imon=3.09754E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04562E2
lens23_imon=1.023E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05072E1
cs_ea1_imon=1.24571E-5
lens1_vset=-2.7E0
lens1_vmon=-3.03266E0
lens1_imon=1.26376E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64699E1
os_ef1alow_imon=2.97298E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03827E1
cs_ea2_imon=1.42014E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.83356E1
cs_ef1a_imon=2.99634E-5
olens2_vset=9.7E-1
olens2_vmon=9.70221E-1
olens2_imon=1.18233E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.1137E1
os_restr1_imon=4.30298E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15144E1
os_ea1_imon=2.43942E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63557E1
os_ef1bup_imon=3.08664E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.21836E0
cs_ionrep_imon=9.74737E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.9192E2
cs_nozzle_imon=1.93373E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.02023E1
cs_anode1_imon=2.03961E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20511E0
olens4_imon=3.90105E-8
tplens_vset=1.4E-1
tplens_vmon=1.64014E0
tplens_imon=-4.14272E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.27323E1
iondef3_imon=1.50423E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.2647E1
iondef2_imon=1.5638E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02883E2
lens6_imon=2.98439E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.62491E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.28584E0
ionrepsh_imon=9.36972E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33561E1
lens5b_imon=2.17856E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.13374E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43444E0
os_ea2_imon=-6.51766E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06093E2
lens4b_imon=2.00455E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71284E1
cs_ef2a_imon=3.18278E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.04223E0
os_ef2alow_imon=-2.54108E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.90721E-1
os_ef2bup_imon=-5.38245E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10851E1
os_restr2_imon=3.3735E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23029E2
cs_ionfoca_imon=6.2915E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01932E1
cs_anode2_imon=2.09839E-5
iondef1_vset=2.763E1
iondef1_vmon=2.72949E1
iondef1_imon=1.09465E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67957E1
iondef4_imon=1.09068E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71783E1
olens3_imon=6.09751E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81998E-1
olens1_imon=7.33734E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.11717E0
cs_ionaccel_imon=-1.06591E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02071E2
cs_ionfocb_imon=1.47292E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56476E1
einzel_imon=7.63335E-6
window_vset=0.0E0
window_vmon=1.95166E-1
window_imon=-1.02698E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82655E2
mask1_imon=2.39096E-4
mask2_vset=0.0E0
mask2_vmon=-1.8648E1
mask2_imon=-6.61108E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92652E3
multa_neg_imon=7.16997E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9369E3
defgrida_imon=7.04149E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50133E3
multb_neg_imon=7.12715E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.43597E0
defgridb_imon=6.3952E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33273E1
os_fil1_imon=9.38833E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07582E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61365E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3088E1
cs_fil1_imon=9.24976E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.32441E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6199E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.34456E-2
os_fil2_imon=-2.60038E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01198E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.81191E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.35245E-1
cs_fil2_imon=-2.20466E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.3438E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22074E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.29211E-3
inlet_lpb_pmon=3.01609E-1
chamber_ion_pmon=1.19676E-7
chamber_cvt_pmon=2.5216E-3
foreline_cvt_pmon=2.5216E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.49753E-1
res40_imon=-2.36982E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=155
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.21E2	0.0E0	1.47E2	4.1E1	-7.26282E-2	-8.8002E1	-7.15256E-4	-8.80004E1	1.19209E-4	4.91142E-3	9.38892E-2	2.73103E1	-3.26631E1	-3.25837E1	2.67943E1	1.19851E-7	2.52147E-3	2.52147E-3	6.3074E-3	3.03596E-1
2.0E0	8.632E3	1.6E1	3.16E2	1.6E2	-7.27053E-2	-8.80019E1	-5.00679E-4	-8.80003E1	1.90735E-4	5.10216E-3	9.38416E-2	2.72745E1	-3.26684E1	-3.26023E1	2.6802E1	1.19891E-7	2.51077E-3	2.51077E-3	6.34982E-3	3.006E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.21643E-2	-8.80018E1	-7.62939E-4	-8.80002E1	2.38419E-4	4.673E-3	9.38892E-2	2.73155E1	-3.26735E1	-3.26718E1	2.68001E1	1.19829E-7	2.51611E-3	2.51611E-3	6.30171E-3	2.97555E-1
4.0E0	2.029E3	1.0E0	6.55E2	3.98E2	-7.14689E-2	-8.80017E1	-8.34465E-4	-8.80001E1	3.57628E-4	4.91142E-3	9.38654E-2	2.73293E1	-3.26679E1	-3.25953E1	2.6807E1	1.19841E-7	2.51919E-3	2.51919E-3	6.2863E-3	2.98592E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.23189E-2	-8.80014E1	-7.62939E-4	-8.80003E1	4.05312E-4	5.34058E-3	9.377E-2	2.72913E1	-3.26855E1	-3.25425E1	2.6819E1	1.19749E-7	2.51954E-3	2.51954E-3	6.33977E-3	3.00966E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.22418E-2	-8.80017E1	-5.96046E-4	-8.80002E1	-2.38419E-5	4.91142E-3	9.35793E-2	2.72823E1	-3.26344E1	-3.26182E1	2.68198E1	1.19861E-7	2.5188E-3	2.5188E-3	6.32386E-3	2.9926E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.201E-2	-8.80018E1	-5.96046E-4	-8.80004E1	1.19209E-4	4.98295E-3	9.36747E-2	2.73305E1	-3.26455E1	-3.26113E1	2.67818E1	1.19965E-7	2.5199E-3	2.5199E-3	6.31837E-3	2.9874E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.22418E-2	-8.80018E1	-5.48363E-4	-8.80008E1	3.33786E-4	5.00679E-3	9.36985E-2	2.72531E1	-3.26493E1	-3.26713E1	2.67842E1	1.19953E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.9892E-1
1.2E1	2.0E0	0.0E0	4.85E2	3.23E2	-7.23189E-2	-8.80017E1	-8.34465E-4	-8.80005E1	3.57628E-4	4.95911E-3	9.38892E-2	2.73057E1	-3.26404E1	-3.26068E1	2.68256E1	1.19809E-7	2.51443E-3	2.51443E-3	6.34037E-3	2.96929E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.201E-2	-8.80016E1	-8.82149E-4	-8.80004E1	1.43051E-4	4.93526E-3	9.42469E-2	2.72757E1	-3.26543E1	-3.2626E1	2.6813E1	1.20031E-7	2.5147E-3	2.5147E-3	6.32418E-3	2.99348E-1
1.4E1	2.75E2	0.0E0	5.66E2	3.82E2	-7.20871E-2	-8.80016E1	-4.76837E-4	-8.80006E1	0.0E0	5.00679E-3	9.40323E-2	2.72945E1	-3.26644E1	-3.2659E1	2.67872E1	1.20069E-7	2.51552E-3	2.51552E-3	6.31288E-3	2.9926E-1
1.5E1	7.0E0	0.0E0	6.06E2	4.11E2	-7.22418E-2	-8.80016E1	-7.39098E-4	-8.80004E1	7.15256E-5	4.98295E-3	9.35793E-2	2.73185E1	-3.26831E1	-3.25801E1	2.68048E1	1.20055E-7	2.51739E-3	2.51739E-3	6.33436E-3	3.02511E-1
1.6E1	3.8E1	0.0E0	6.47E2	4.41E2	-7.201E-2	-8.80015E1	-4.29153E-4	-8.80005E1	1.43051E-4	4.12464E-3	9.38892E-2	2.72968E1	-3.26623E1	-3.26585E1	2.6782E1	1.20064E-7	2.51447E-3	2.51447E-3	6.3023E-3	3.00149E-1
1.7E1	6.4E1	0.0E0	6.87E2	4.7E2	-7.13915E-2	-8.80014E1	-5.00679E-4	-8.80003E1	5.72205E-4	4.57764E-3	9.39369E-2	2.73352E1	-3.26738E1	-3.26018E1	2.68106E1	1.19895E-7	2.51874E-3	2.51874E-3	6.32483E-3	3.00363E-1
1.8E1	2.31E2	0.0E0	7.27E2	5.0E2	-7.23189E-2	-8.80013E1	-4.76837E-4	-8.80006E1	1.90735E-4	5.14984E-3	9.41038E-2	2.73139E1	-3.26667E1	-3.26815E1	2.68059E1	1.20055E-7	2.51096E-3	2.51096E-3	6.3074E-3	2.9943E-1
1.9E1	3.39E2	0.0E0	7.68E2	5.29E2	-7.16233E-2	-8.80018E1	-5.96046E-4	-8.80005E1	3.57628E-4	4.95911E-3	9.38892E-2	2.73204E1	-3.26561E1	-3.25487E1	2.68022E1	1.20106E-7	2.51417E-3	2.51417E-3	6.32356E-3	3.0071E-1
2.0E1	2.238E3	0.0E0	8.08E2	5.58E2	-7.201E-2	-8.80019E1	-5.48363E-4	-8.80005E1	4.29153E-4	4.74453E-3	9.37223E-2	2.72997E1	-3.26849E1	-3.26591E1	2.68172E1	1.20106E-7	2.51525E-3	2.51525E-3	6.31817E-3	2.99175E-1
2.1E1	2.0E0	0.0E0	8.49E2	5.88E2	-7.286E-2	-8.80017E1	-2.6226E-4	-8.80005E1	-2.38419E-5	5.05447E-3	9.37462E-2	2.73228E1	-3.27174E1	-3.27056E1	2.67932E1	1.19861E-7	2.5199E-3	2.5199E-3	6.31288E-3	3.00563E-1
2.2E1	1.5E2	0.0E0	8.89E2	6.17E2	-7.27828E-2	-8.80016E1	-5.00679E-4	-8.80003E1	1.43051E-4	5.03063E-3	9.34839E-2	2.72909E1	-3.26328E1	-3.25457E1	2.67769E1	1.20004E-7	2.51954E-3	2.51954E-3	6.3074E-3	3.02253E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30918E-2	-8.80016E1	-4.76837E-4	-8.80004E1	4.29153E-4	5.05447E-3	9.37939E-2	2.72949E1	-3.2647E1	-3.27323E1	2.67957E1	1.19676E-7	2.5216E-3	2.5216E-3	6.29211E-3	3.01609E-1
