[Scan]
initial_time=2016-01-28T19:12:08
final_time=2016-01-28T19:12:28
ip_count=19
run=1026
dataset=5
scan=360
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.30146E-2
qbias_imon=-3.8088E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.34754E-10
ql2_vset=
ql2_vmon=-6.91414E-4
ql2_imon=1.37185E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.75393E-9
ql4_vset=
ql4_vmon=1.19209E-4
ql4_imon=1.62204E-8
mult1=-1.18355E-8
mult2=-2.7246E-9
rf_tmon=-5.02313E-3
rf_agc=3.37722E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.05447E-3
ql5_imon=5.61202E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6367E0
bslens_imon=2.67114E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19833E1
lens5a_imon=1.99749E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12482E2
lens4a_imon=2.05125E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53845E1
cs_ef1b_imon=3.09803E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04612E2
lens23_imon=1.02045E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05108E1
cs_ea1_imon=1.24297E-5
lens1_vset=-2.7E0
lens1_vmon=-3.05337E0
lens1_imon=1.61128E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64686E1
os_ef1alow_imon=2.97982E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.04027E1
cs_ea2_imon=1.4106E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.841E1
cs_ef1a_imon=2.9982E-5
olens2_vset=9.7E-1
olens2_vmon=9.70292E-1
olens2_imon=1.18135E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11123E1
os_restr1_imon=4.31004E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.14819E1
os_ea1_imon=2.41855E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.6381E1
os_ef1bup_imon=3.0764E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.23407E0
cs_ionrep_imon=9.90628E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91884E2
cs_nozzle_imon=1.93355E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01983E1
cs_anode1_imon=2.05792E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2047E0
olens4_imon=3.90455E-8
tplens_vset=1.4E-1
tplens_vmon=1.59577E0
tplens_imon=-2.66901E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26062E1
iondef3_imon=1.51046E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26621E1
iondef2_imon=1.57535E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02915E2
lens6_imon=2.98349E-4
ql6_vset=1.0E-1
ql6_vmon=9.37462E-2
ql6_imon=8.56364E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26231E0
ionrepsh_imon=9.18168E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33369E1
lens5b_imon=2.18495E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74663E1
cs_ef2b_imon=3.11533E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.46119E0
os_ea2_imon=-6.41816E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06054E2
lens4b_imon=2.00388E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71065E1
cs_ef2a_imon=3.19966E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07798E0
os_ef2alow_imon=-2.62671E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.70394E-1
os_ef2bup_imon=-5.3405E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10919E1
os_restr2_imon=3.3777E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23085E2
cs_ionfoca_imon=6.30505E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.02085E1
cs_anode2_imon=2.10153E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.09409E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68016E1
iondef4_imon=1.07152E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71786E1
olens3_imon=6.04049E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82046E-1
olens1_imon=7.32625E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.10071E0
cs_ionaccel_imon=-9.58075E-7
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.02092E2
cs_ionfocb_imon=1.47118E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56411E1
einzel_imon=7.832E-6
window_vset=0.0E0
window_vmon=1.88511E-1
window_imon=-1.19233E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82619E2
mask1_imon=2.39181E-4
mask2_vset=0.0E0
mask2_vmon=-1.86813E1
mask2_imon=-7.74273E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92708E3
multa_neg_imon=7.53782E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93757E3
defgrida_imon=6.84567E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50132E3
multb_neg_imon=7.0151E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.45269E0
defgridb_imon=6.09945E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.3328E1
os_fil1_imon=9.39777E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.06999E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61276E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30891E1
cs_fil1_imon=9.24971E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.28061E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.61685E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.44774E-2
os_fil2_imon=-2.73805E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=2.01318E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.56948E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.31723E-1
cs_fil2_imon=-2.74405E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.11219E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.21926E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=
inlet_lpb_pmon=
chamber_ion_pmon=
chamber_cvt_pmon=
foreline_cvt_pmon=
chamber_tmon=1.40092E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.49992E-1
res40_imon=-2.51138E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=160
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.01E2	0.0E0	1.47E2	4.1E1	-7.34782E-2	-8.80018E1	-9.29832E-4	-8.80008E1	1.19209E-4	4.64916E-3	9.37462E-2	2.73346E1	-3.26767E1	-3.25653E1	2.68273E1	1.20017E-7	2.52318E-3	2.52318E-3	6.29645E-3	2.99E-1
2.0E0	8.491E3	1.1E1	3.16E2	1.6E2	-7.24736E-2	-8.80019E1	-1.00136E-3	-8.80004E1	1.90735E-4	4.673E-3	9.34839E-2	2.73002E1	-3.26682E1	-3.26413E1	2.67889E1	1.20106E-7	2.51417E-3	2.51417E-3	6.3074E-3	3.00197E-1
3.0E0	2.0E0	0.0E0	4.85E2	2.79E2	-7.35556E-2	-8.80017E1	-8.10623E-4	-8.80004E1	5.24521E-4	4.93526E-3	9.38416E-2	2.73242E1	-3.26915E1	-3.2597E1	2.68151E1	1.20137E-7	2.51915E-3	2.51915E-3	6.31299E-3	3.00942E-1
4.0E0	1.906E3	1.0E0	6.55E2	3.98E2	-7.37103E-2	-8.80017E1	-4.05312E-4	-8.80002E1	4.05312E-4	4.79221E-3	9.36747E-2	2.73381E1	-3.26693E1	-3.26092E1	2.67926E1	1.20192E-7	2.52236E-3	2.52236E-3	6.32858E-3	3.01862E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.48695E-2	-8.80017E1	-8.58307E-4	-8.80005E1	5.48363E-4	4.95911E-3	9.35316E-2	2.72829E1	-3.2653E1	-3.26494E1	2.68274E1	1.20174E-7	2.51771E-3	2.51771E-3	6.31837E-3	3.00824E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.41738E-2	-8.80015E1	-6.4373E-4	-8.80004E1	5.24521E-4	4.93526E-3	9.3627E-2	2.72799E1	-3.26801E1	-3.26152E1	2.68094E1	1.20017E-7	2.51552E-3	2.51552E-3	6.30192E-3	3.01085E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.3401E-2	-8.80015E1	-4.52995E-4	-8.80003E1	3.09944E-4	5.10216E-3	9.33409E-2	2.73222E1	-3.26467E1	-3.26178E1	2.67896E1	1.2026E-7	2.52492E-3	2.52492E-3	6.3074E-3	2.99175E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.36328E-2	-8.80013E1	-7.15256E-4	-8.80005E1	-9.53674E-5	4.8399E-3	9.34839E-2	2.72961E1	-3.26801E1	-3.26116E1	2.67872E1	1.20226E-7	2.52428E-3	2.52428E-3	6.32936E-3	3.03449E-1
1.2E1	4.0E0	0.0E0	4.85E2	3.23E2	-7.42513E-2	-8.80014E1	-8.82149E-4	-8.80002E1	1.19209E-4	4.8399E-3	9.34839E-2	2.72865E1	-3.26861E1	-3.25816E1	2.68298E1	1.20226E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.02396E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.32464E-2	-8.80017E1	-7.39098E-4	-8.80006E1	1.43051E-4	4.98295E-3	9.31501E-2	2.73322E1	-3.26726E1	-3.25717E1	2.67763E1	1.20055E-7	2.51203E-3	2.51203E-3	6.33436E-3	3.0071E-1
1.4E1	2.99E2	0.0E0	5.66E2	3.82E2	-7.31692E-2	-8.80016E1	-8.34465E-4	-8.80004E1	-1.19209E-4	4.93526E-3	9.34362E-2	2.72626E1	-3.26549E1	-3.26354E1	2.6789E1	1.19856E-7	2.51593E-3	2.51593E-3	6.3074E-3	3.00896E-1
1.5E1	6.0E0	0.0E0	6.06E2	4.11E2	-7.30918E-2	-8.80014E1	-7.86781E-4	-8.80002E1	-1.43051E-4	4.79221E-3	9.35555E-2	2.73296E1	-3.26438E1	-3.26346E1	2.67836E1					
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.25507E-2	-8.80017E1	-5.72205E-4	-8.80005E1	4.76837E-5	4.57764E-3	9.36747E-2	2.73111E1	-3.26591E1	-3.2617E1	2.68076E1	1.20191E-7	2.52362E-3	2.52362E-3	6.33538E-3	3.02545E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.286E-2	-8.80018E1	-8.82149E-4	-8.80008E1	-4.76837E-5	5.03063E-3	9.32932E-2	2.73788E1	-3.26602E1	-3.26938E1	2.68028E1	1.20004E-7	2.52169E-3	2.52169E-3	6.32356E-3	3.00966E-1
1.8E1	2.13E2	0.0E0	7.27E2	5.0E2	-7.20871E-2	-8.80014E1	-5.00679E-4	-8.80007E1	-1.43051E-4	4.88758E-3	9.35316E-2	2.72757E1	-3.26548E1	-3.26076E1	2.6804E1	1.20122E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.01871E-1
1.9E1	3.69E2	1.0E0	7.68E2	5.29E2	-7.25507E-2	-8.80015E1	-5.48363E-4	-8.80009E1	3.57628E-4	4.86374E-3	9.35078E-2	2.73033E1	-3.26585E1	-3.26633E1	2.67914E1	1.20191E-7	2.51693E-3	2.51693E-3	6.30182E-3	2.99083E-1
2.0E1	2.141E3	4.0E0	8.08E2	5.58E2	-7.37874E-2	-8.80014E1	-4.52995E-4	-8.80006E1	2.6226E-4	5.00679E-3	9.36985E-2	2.73517E1	-3.26738E1	-3.26266E1	2.6819E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	2.9943E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.30146E-2	-8.80015E1	-4.76837E-4	-8.80005E1	-2.38419E-5	5.05447E-3	9.37939E-2	2.73303E1	-3.26711E1	-3.26476E1	2.68214E1	1.20017E-7	2.52099E-3	2.52099E-3	6.3074E-3	3.00824E-1
2.2E1	1.68E2	0.0E0	8.89E2	6.17E2	-7.34782E-2	-8.80017E1	-8.82149E-4	-8.80004E1	-1.43051E-4	5.26905E-3	9.37223E-2	2.72839E1	-3.26555E1	-3.26779E1	2.6795E1	1.20166E-7	2.51755E-3	2.51755E-3	6.31283E-3	2.99088E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.30146E-2	-8.80016E1	-6.91414E-4	-8.80005E1	1.19209E-4	5.05447E-3	9.37462E-2	2.73159E1	-3.26621E1	-3.26062E1	2.68016E1					
