[Scan]
initial_time=2016-01-28T19:12:35
final_time=2016-01-28T19:12:54
ip_count=19
run=1026
dataset=5
scan=361
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.35556E-2
qbias_imon=-3.83478E-6
ql1_vset=
ql1_vmon=-8.80016E1
ql1_imon=-6.47068E-10
ql2_vset=
ql2_vmon=-5.72205E-4
ql2_imon=1.5018E-9
ql3_vset=
ql3_vmon=-8.80004E1
ql3_imon=-1.69244E-9
ql4_vset=
ql4_vmon=2.6226E-4
ql4_imon=1.6163E-8
mult1=-1.08E-8
mult2=-2.69665E-9
rf_tmon=-2.27735E-3
rf_agc=3.55927E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=5.34058E-3
ql5_imon=5.41484E-10
bslens_vset=-6.2E0
bslens_vmon=-6.64144E0
bslens_imon=2.56449E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19925E1
lens5a_imon=1.99607E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12453E2
lens4a_imon=2.04895E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.5343E1
cs_ef1b_imon=3.11701E-5
lens23_vset=-2.05E2
lens23_vmon=-2.04595E2
lens23_imon=1.02224E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.04953E1
cs_ea1_imon=1.25315E-5
lens1_vset=-2.7E0
lens1_vmon=-3.06663E0
lens1_imon=1.18413E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64753E1
os_ef1alow_imon=2.96167E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03614E1
cs_ea2_imon=1.40959E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.84197E1
cs_ef1a_imon=3.01171E-5
olens2_vset=9.7E-1
olens2_vmon=9.70316E-1
olens2_imon=1.17923E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11338E1
os_restr1_imon=4.27983E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.15565E1
os_ea1_imon=2.44947E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63879E1
os_ef1bup_imon=3.08678E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.24266E0
cs_ionrep_imon=9.74949E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91863E2
cs_nozzle_imon=1.93264E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01751E1
cs_anode1_imon=2.02717E-5
olens4_vset=-5.21E0
olens4_vmon=-5.2052E0
olens4_imon=3.90242E-8
tplens_vset=1.4E-1
tplens_vmon=1.64438E0
tplens_imon=-2.2102E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.25918E1
iondef3_imon=1.49737E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26849E1
iondef2_imon=1.5816E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02894E2
lens6_imon=2.983E-4
ql6_vset=1.0E-1
ql6_vmon=9.37939E-2
ql6_imon=8.62682E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.25269E0
ionrepsh_imon=9.36724E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33758E1
lens5b_imon=2.17587E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.7453E1
cs_ef2b_imon=3.14829E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.43261E0
os_ea2_imon=-6.13894E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06134E2
lens4b_imon=2.00655E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71119E1
cs_ef2a_imon=3.17609E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.09221E0
os_ef2alow_imon=-2.45642E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.94914E-1
os_ef2bup_imon=-5.39996E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10735E1
os_restr2_imon=3.37314E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.2302E2
cs_ionfoca_imon=6.29822E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01554E1
cs_anode2_imon=2.07965E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73159E1
iondef1_imon=1.08467E-5
iondef4_vset=2.691E1
iondef4_vmon=2.68148E1
iondef4_imon=1.09928E-5
olens3_vset=-1.718E1
olens3_vmon=-1.7178E1
olens3_imon=6.05862E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.81951E-1
olens1_imon=7.33112E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.13246E0
cs_ionaccel_imon=-1.26789E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47365E-4
einzel_vset=-2.1E1
einzel_vmon=-2.55965E1
einzel_imon=7.63919E-6
window_vset=0.0E0
window_vmon=1.7772E-1
window_imon=-7.70926E-7
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.38962E-4
mask2_vset=0.0E0
mask2_vmon=-1.86616E1
mask2_imon=-5.4851E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92655E3
multa_neg_imon=7.37455E-5
defgrida_vset=2.902E3
defgrida_vmon=2.9372E3
defgrida_imon=6.73746E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50152E3
multb_neg_imon=7.31438E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.26382E0
defgridb_imon=6.28795E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33261E1
os_fil1_imon=9.39675E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.08273E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.6105E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.30857E1
cs_fil1_imon=9.24818E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.37313E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.62385E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48385E-2
os_fil2_imon=-2.47225E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.85444E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.7251E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.32773E-1
cs_fil2_imon=-2.31008E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.40844E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.2198E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.3074E-3
inlet_lpb_pmon=3.03804E-1
chamber_ion_pmon=1.20055E-7
chamber_cvt_pmon=2.52276E-3
foreline_cvt_pmon=2.52276E-3
chamber_tmon=
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-4.90107E-1
res40_imon=-2.51203E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=271
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.02E2	0.0E0	1.47E2	4.1E1	-7.30146E-2	-8.80018E1	-1.14441E-3	-8.80002E1	7.15256E-5	4.8399E-3	9.37939E-2	2.72919E1	-3.26536E1	-3.26134E1	2.6801E1	1.20158E-7	2.52815E-3	2.52815E-3	6.31278E-3	3.02511E-1
2.0E0	8.656E3	1.4E1	3.16E2	1.6E2	-7.29374E-2	-8.80017E1	-6.4373E-4	-8.80003E1	2.14577E-4	4.72069E-3	9.38177E-2	2.73351E1	-3.26543E1	-3.26789E1	2.68244E1	1.198E-7	2.51632E-3	2.51632E-3	6.31817E-3	3.0071E-1
3.0E0	1.0E0	0.0E0	4.85E2	2.79E2	-7.20871E-2	-8.80018E1	-7.39098E-4	-8.80002E1	1.90735E-4	4.91142E-3	9.37223E-2	2.72895E1	-3.26503E1	-3.26121E1	2.67902E1	1.20122E-7	2.51771E-3	2.51771E-3	6.3074E-3	3.01347E-1
4.0E0	1.971E3	1.0E0	6.55E2	3.98E2	-7.29374E-2	-8.80019E1	-6.91414E-4	-8.80003E1	3.33786E-4	5.00679E-3	9.35793E-2	2.73134E1	-3.26555E1	-3.26378E1	2.68088E1	1.2026E-7	2.51632E-3	2.51632E-3	6.30202E-3	2.98665E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.32464E-2	-8.80016E1	-7.86781E-4	-8.80003E1	2.14577E-4	5.03063E-3	9.35793E-2	2.72926E1	-3.26676E1	-3.25719E1	2.68032E1	1.20004E-7	2.52276E-3	2.52276E-3	6.30202E-3	3.0071E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.30918E-2	-8.80017E1	-8.58307E-4	-8.80006E1	1.90735E-4	4.673E-3	9.37223E-2	2.73249E1	-3.265E1	-3.26603E1	2.68118E1	1.20078E-7	2.5199E-3	2.5199E-3	6.3126E-3	3.02977E-1
7.0E0	0.0E0	0.0E0	1.163E3	7.54E2	-7.22418E-2	-8.80018E1	-6.91414E-4	-8.80004E1	1.43051E-4	4.88758E-3	9.38892E-2	2.73128E1	-3.26596E1	-3.26502E1	2.681E1	1.19965E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.02922E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.23964E-2	-8.80017E1	-8.10623E-4	-8.80003E1	-1.43051E-4	4.93526E-3	9.35793E-2	2.72937E1	-3.26607E1	-3.26089E1	2.68026E1	1.19902E-7	2.51739E-3	2.51739E-3	6.33977E-3	3.0071E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.25507E-2	-8.80017E1	-5.24521E-4	-8.80003E1	3.8147E-4	5.05447E-3	9.3627E-2	2.73057E1	-3.26747E1	-3.26158E1	2.67974E1	1.19831E-7	2.51575E-3	2.51575E-3	6.3126E-3	3.03726E-1
1.3E1	1.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80015E1	-3.57628E-4	-8.80003E1	4.05312E-4	4.673E-3	9.34601E-2	2.72835E1	-3.26723E1	-3.26957E1	2.68424E1	1.20069E-7	2.51771E-3	2.51771E-3	6.32936E-3	3.02396E-1
1.4E1	2.67E2	1.0E0	5.66E2	3.82E2	-7.34782E-2	-8.80018E1	-5.00679E-4	-8.80003E1	3.33786E-4	4.74453E-3	9.35555E-2	2.73399E1	-3.26585E1	-3.26951E1	2.68052E1	1.20017E-7	2.51662E-3	2.51662E-3	6.3074E-3	2.9926E-1
1.5E1	9.0E0	0.0E0	6.06E2	4.11E2	-7.35556E-2	-8.80017E1	-7.86781E-4	-8.80004E1	3.8147E-4	4.673E-3	9.39369E-2	2.73069E1	-3.26579E1	-3.26002E1	2.67746E1	1.20069E-7	2.51334E-3	2.51334E-3	6.29645E-3	3.01347E-1
1.6E1	2.8E1	0.0E0	6.47E2	4.41E2	-7.30918E-2	-8.80014E1	-6.67572E-4	-8.80003E1	4.52995E-4	4.91142E-3	9.36508E-2	2.73424E1	-3.26627E1	-3.26561E1	2.68124E1	1.19965E-7	2.51607E-3	2.51607E-3	6.31837E-3	3.00954E-1
1.7E1	5.3E1	0.0E0	6.87E2	4.7E2	-7.41738E-2	-8.80015E1	-5.72205E-4	-8.80002E1	4.29153E-4	5.10216E-3	9.37223E-2	2.73039E1	-3.26819E1	-3.26224E1	2.68214E1					
1.8E1	2.17E2	0.0E0	7.27E2	5.0E2	-7.44059E-2	-8.80013E1	-5.72205E-4	-8.80004E1	1.90735E-4	5.17368E-3	9.36508E-2	2.73333E1	-3.26789E1	-3.25828E1	2.6798E1	1.20069E-7	2.51443E-3	2.51443E-3	6.31288E-3	3.00563E-1
1.9E1	3.58E2	0.0E0	7.68E2	5.29E2	-7.37874E-2	-8.80016E1	-4.76837E-4	-8.80004E1	0.0E0	4.93526E-3	9.36508E-2	2.73057E1	-3.26661E1	-3.26248E1	2.68016E1	1.19697E-7	2.51739E-3	2.51739E-3	6.32356E-3	3.0071E-1
2.0E1	2.22E3	1.0E0	8.08E2	5.58E2	-7.286E-2	-8.80016E1	-5.96046E-4	-8.80004E1	2.38419E-4	5.10216E-3	9.37223E-2	2.72666E1	-3.26663E1	-3.25791E1	2.678E1	1.20017E-7	2.51552E-3	2.51552E-3	6.31288E-3	3.00041E-1
2.1E1	4.0E0	0.0E0	8.49E2	5.88E2	-7.27828E-2	-8.80015E1	-5.24521E-4	-8.80002E1	2.86102E-4	4.88758E-3	9.34839E-2	2.72919E1	-3.26747E1	-3.26512E1	2.67943E1	1.19965E-7	2.5188E-3	2.5188E-3	6.33486E-3	3.01609E-1
2.2E1	1.4E2	0.0E0	8.89E2	6.17E2	-7.3401E-2	-8.80017E1	-1.66893E-4	-8.8E1	6.91414E-4	5.126E-3	9.37939E-2	2.72892E1	-3.26484E1	-3.26065E1	2.68172E1	1.19861E-7	2.5199E-3	2.5199E-3	6.32386E-3	3.02659E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.35556E-2	-8.80016E1	-5.72205E-4	-8.80004E1	2.6226E-4	5.34058E-3	9.37939E-2	2.73159E1	-3.26849E1	-3.25918E1	2.68148E1	1.20055E-7	2.52276E-3	2.52276E-3	6.3074E-3	3.03804E-1
