[Scan]
initial_time=2016-01-28T19:13:02
final_time=2016-01-28T19:13:21
ip_count=19
run=1026
dataset=5
scan=362
type=Mass Scan
script=null
chamber=SwRI B178 INMS
chamberTemp=26.7
gas=H2
mode=CSN
monitorVersion=1
[Monitors]
rfac=930
rfdc=647
qbias_vset=
qbias_vmon=-7.36328E-2
qbias_imon=-3.86836E-6
ql1_vset=
ql1_vmon=-8.80018E1
ql1_imon=-6.37591E-10
ql2_vset=
ql2_vmon=-5.00679E-4
ql2_imon=1.46718E-9
ql3_vset=
ql3_vmon=-8.80005E1
ql3_imon=-1.64068E-9
ql4_vset=
ql4_vmon=6.91414E-4
ql4_imon=1.62186E-8
mult1=-9.61998E-9
mult2=-2.69865E-9
rf_tmon=-4.206E-3
rf_agc=3.39344E-2
counter1=0
counter2=0
rf_fmon=-9.999E7
ql5_vset=0.0E0
ql5_vmon=4.64916E-3
ql5_imon=5.46849E-10
bslens_vset=-6.2E0
bslens_vmon=-6.6385E0
bslens_imon=2.51973E-6
lens5a_vset=-4.15E1
lens5a_vmon=-4.19821E1
lens5a_imon=1.98379E-5
lens4a_vset=-4.11E2
lens4a_vmon=-4.12471E2
lens4a_imon=2.04866E-4
cs_ef1b_vset=-6.5E1
cs_ef1b_vmon=-6.53869E1
cs_ef1b_imon=3.11569E-5
lens23_vset=-2.05E2
lens23_vmon=-2.0459E2
lens23_imon=1.02099E-4
cs_ea1_vset=1.0E1
cs_ea1_vmon=1.05156E1
cs_ea1_imon=1.23829E-5
lens1_vset=-2.7E0
lens1_vmon=-3.11466E0
lens1_imon=1.70501E-6
os_ef1alow_vset=-6.6E1
os_ef1alow_vmon=-6.64536E1
os_ef1alow_imon=2.96937E-5
cs_ea2_vset=1.0E1
cs_ea2_vmon=1.03822E1
cs_ea2_imon=1.40736E-5
cs_ef1a_vset=-6.8E1
cs_ef1a_vmon=-6.844E1
cs_ef1a_imon=2.98955E-5
olens2_vset=9.7E-1
olens2_vmon=9.70268E-1
olens2_imon=1.17819E-6
os_restr1_vset=4.1E1
os_restr1_vmon=4.11346E1
os_restr1_imon=4.30464E-5
os_ea1_vset=2.1E1
os_ea1_vmon=2.1533E1
os_ea1_imon=2.44811E-5
os_ef1bup_vset=-6.6E1
os_ef1bup_vmon=-6.63659E1
os_ef1bup_imon=3.08361E-5
cs_ionrep_vset=1.0E0
cs_ionrep_vmon=1.22266E0
cs_ionrep_imon=9.63951E-6
cs_nozzle_vset=-3.9E2
cs_nozzle_vmon=-3.91862E2
cs_nozzle_imon=1.9342E-4
cs_anode1_vset=3.0E1
cs_anode1_vmon=3.01641E1
cs_anode1_imon=2.03918E-5
olens4_vset=-5.21E0
olens4_vmon=-5.20477E0
olens4_imon=3.89965E-8
tplens_vset=1.4E-1
tplens_vmon=1.62521E0
tplens_imon=-4.18309E-7
iondef3_vset=-3.249E1
iondef3_vmon=-3.26248E1
iondef3_imon=1.50505E-5
iondef2_vset=-3.272E1
iondef2_vmon=-3.26609E1
iondef2_imon=1.56994E-5
lens6_vset=-6.0E2
lens6_vmon=-6.02937E2
lens6_imon=2.98526E-4
ql6_vset=1.0E-1
ql6_vmon=9.36031E-2
ql6_imon=8.45456E-10
ionrepsh_vset=1.0E0
ionrepsh_vmon=1.26892E0
ionrepsh_imon=9.29344E-6
lens5b_vset=-4.3E1
lens5b_vmon=-4.33736E1
lens5b_imon=2.19432E-5
cs_ef2b_vset=-6.7E1
cs_ef2b_vmon=-6.74675E1
cs_ef2b_imon=3.12217E-5
os_ea2_vset=0.0E0
os_ea2_vmon=-1.44016E0
os_ea2_imon=-7.3194E-7
lens4b_vset=-4.05E2
lens4b_vmon=-4.06097E2
lens4b_imon=2.00475E-4
cs_ef2a_vset=-6.7E1
cs_ef2a_vmon=-6.71186E1
cs_ef2a_imon=3.18344E-5
os_ef2alow_vset=0.0E0
os_ef2alow_vmon=-4.07018E0
os_ef2alow_imon=-2.72762E-6
os_ef2bup_vset=0.0E0
os_ef2bup_vmon=-2.74599E-1
os_ef2bup_imon=-5.35852E-6
os_restr2_vset=4.1E1
os_restr2_vmon=4.10907E1
os_restr2_imon=3.37445E-5
cs_ionfoca_vset=-1.25E2
cs_ionfoca_vmon=-1.23037E2
cs_ionfoca_imon=6.27981E-5
cs_anode2_vset=3.0E1
cs_anode2_vmon=3.01707E1
cs_anode2_imon=2.09216E-5
iondef1_vset=2.763E1
iondef1_vmon=2.73117E1
iondef1_imon=1.09193E-5
iondef4_vset=2.691E1
iondef4_vmon=2.67988E1
iondef4_imon=1.09278E-5
olens3_vset=-1.718E1
olens3_vmon=-1.71782E1
olens3_imon=6.10094E-9
olens1_vset=-9.9E-1
olens1_vmon=-9.82308E-1
olens1_imon=7.31615E-7
cs_ionaccel_vset=-3.0E0
cs_ionaccel_vmon=-3.0965E0
cs_ionaccel_imon=-1.18873E-6
cs_ionfocb_vset=-3.01E2
cs_ionfocb_vmon=-3.021E2
cs_ionfocb_imon=1.47201E-4
einzel_vset=-2.1E1
einzel_vmon=-2.56045E1
einzel_imon=7.73469E-6
window_vset=0.0E0
window_vmon=1.8791E-1
window_imon=-1.04817E-6
mask1_vset=-4.8E2
mask1_vmon=-4.82628E2
mask1_imon=2.39214E-4
mask2_vset=0.0E0
mask2_vmon=-1.86584E1
mask2_imon=-5.83262E-7
multa_pos_vset=0.0E0
multa_pos_vmon=0.0E0
multa_pos_imon=0.0E0
multa_neg_vset=2.902E3
multa_neg_vmon=2.92659E3
multa_neg_imon=7.49817E-5
defgrida_vset=2.902E3
defgrida_vmon=2.93733E3
defgrida_imon=6.5753E-5
multb_pos_vset=0.0E0
multb_pos_vmon=0.0E0
multb_pos_imon=0.0E0
multb_neg_vset=2.5E3
multb_neg_vmon=2.50129E3
multb_neg_imon=7.05115E-5
defgridb_vset=0.0E0
defgridb_vmon=-1.28427E0
defgridb_imon=6.20399E-5
os_fil1_bias_vset=-7.0E1
os_fil1_bias_vmon=-7.33278E1
os_fil1_imon=9.41177E2
os_fil1_emis_iset=3.0E1
os_fil1_emis_imon=3.07185E-1
os_fil1_shield_vset=-7.3E1
os_fil1_shield_vmon=-7.61474E1
os_fil1_shield_imon=0.0E0
cs_fil1_bias_vset=-7.0E1
cs_fil1_bias_vmon=-7.3086E1
cs_fil1_imon=9.24893E2
cs_fil1_emis_iset=5.0E0
cs_fil1_emis_imon=6.35089E-2
cs_fil1_shield_vset=-7.9E1
cs_fil1_shield_vmon=-7.6186E1
cs_fil1_shield_imon=0.0E0
os_fil2_bias_vset=0.0E0
os_fil2_bias_vmon=2.48643E-2
os_fil2_imon=-2.73204E0
os_fil2_emis_iset=0.0E0
os_fil2_emis_imon=1.90506E-3
os_fil2_shield_vset=0.0E0
os_fil2_shield_vmon=3.58753E-1
os_fil2_shield_imon=0.0E0
cs_fil2_bias_vset=0.0E0
cs_fil2_bias_vmon=-4.325E-1
cs_fil2_imon=-2.65996E0
cs_fil2_emis_iset=0.0E0
cs_fil2_emis_imon=1.07014E-3
cs_fil2_shield_vset=-7.9E1
cs_fil2_shield_vmon=-8.22002E1
cs_fil2_shield_imon=0.0E0
inlet_hpb_pmon=6.31817E-3
inlet_lpb_pmon=2.9892E-1
chamber_ion_pmon=1.20004E-7
chamber_cvt_pmon=2.51203E-3
foreline_cvt_pmon=2.51203E-3
chamber_tmon=1.40073E0
turbopump=0
drytel=0
rfhighfreq=1
ip=1000
os_fil1_on=1
cs_fil1_on=1
os_fil2_on=0
cs_fil2_on=0
res40_vset=0.0E0
res40_vmon=-3.45477E-1
res40_imon=-2.59067E-6
threshold1=1.0E-1
threshold2=1.0E-1
a0_osi=5.39763E1
a1_osi=-9.27894E-1
b0_osi=6.0E1
c0_osi=1.5E0
a0_osnb=8.4624E0
a1_osnb=-9.27894E-1
b0_osnb=1.0E1
c0_osnb=3.0E0
hw_read_time=172
sp=10
os_locked=1
cs_locked=1
srg_gasid=19
chamber_srg_pmon=-9.9999E2
angle_x=0.0E0
angle_y=-9.99E2
angle_z=-9.99E2
flux=-1.0E0
energy=-1.0E0
[Data]
mass	counter1	counter2	rfac	rfdc	qbias_vmon	ql1_vmon	ql2_vmon	ql3_vmon	ql4_vmon	ql5_vmon	ql6_vmon	iondef1_vmon	iondef2_vmon	iondef3_vmon	iondef4_vmon	chamber_ion_pmon	chamber_cvt_pmon	foreline_cvt_pmon	inlet_hpb_pmon	inlet_lpb_pmon
1.0E0	3.27E2	0.0E0	1.47E2	4.1E1	-7.32464E-2	-8.80017E1	-5.00679E-4	-8.80002E1	1.19209E-4	4.8399E-3	9.39369E-2	2.72791E1	-3.26809E1	-3.26201E1	2.67848E1	1.20158E-7	2.51954E-3	2.51954E-3	6.31817E-3	3.01223E-1
2.0E0	8.53E3	1.2E1	3.16E2	1.6E2	-7.29374E-2	-8.80013E1	-1.43051E-4	-8.80005E1	1.43051E-4	4.76837E-3	9.38892E-2	2.73314E1	-3.26456E1	-3.26621E1	2.6825E1	1.19757E-7	2.5199E-3	2.5199E-3	6.3074E-3	3.00824E-1
3.0E0	0.0E0	0.0E0	4.85E2	2.79E2	-7.22418E-2	-8.80016E1	-4.29153E-4	-8.80008E1	1.19209E-4	5.14984E-3	9.39131E-2	2.73246E1	-3.26502E1	-3.25853E1	2.68118E1	1.19978E-7	2.51359E-3	2.51359E-3	6.33538E-3	2.99879E-1
4.0E0	2.102E3	0.0E0	6.55E2	3.98E2	-7.3401E-2	-8.80015E1	-5.00679E-4	-8.80002E1	-4.76837E-5	4.91142E-3	9.377E-2	2.72522E1	-3.265E1	-3.25918E1	2.67798E1	1.20209E-7	2.52061E-3	2.52061E-3	6.32356E-3	2.9943E-1
5.0E0	0.0E0	0.0E0	8.24E2	5.17E2	-7.3401E-2	-8.80015E1	-5.72205E-4	-8.80002E1	1.19209E-4	4.86374E-3	9.36747E-2	2.73116E1	-3.26526E1	-3.26248E1	2.67908E1	1.20106E-7	2.51739E-3	2.51739E-3	6.3074E-3	3.01738E-1
6.0E0	0.0E0	0.0E0	9.93E2	6.35E2	-7.27053E-2	-8.80013E1	-2.38419E-4	-8.80002E1	1.43051E-4	4.98295E-3	9.377E-2	2.73086E1	-3.26649E1	-3.2639E1	2.68034E1	1.19913E-7	2.51662E-3	2.51662E-3	6.33486E-3	3.02922E-1
7.0E0	1.0E0	0.0E0	1.163E3	7.54E2	-7.27828E-2	-8.80012E1	-8.34465E-4	-8.80004E1	0.0E0	4.79221E-3	9.37223E-2	2.72763E1	-3.26729E1	-3.25846E1	2.68028E1	1.20158E-7	2.52815E-3	2.52815E-3	6.3074E-3	3.02511E-1
8.0E0	0.0E0	0.0E0	1.332E3	8.73E2	-7.27828E-2	-8.80013E1	-5.48363E-4	-8.80003E1	2.38419E-5	5.03063E-3	9.38654E-2	2.73363E1	-3.26014E1	-3.26092E1	2.67926E1	1.20017E-7	2.51552E-3	2.51552E-3	6.34588E-3	3.02659E-1
1.2E1	3.0E0	0.0E0	4.85E2	3.23E2	-7.35556E-2	-8.80011E1	-6.19888E-4	-8.80003E1	1.66893E-4	5.19753E-3	9.37939E-2	2.7255E1	-3.26726E1	-3.25918E1	2.68076E1	1.19757E-7	2.52318E-3	2.52318E-3	6.30192E-3	3.01609E-1
1.3E1	2.0E0	0.0E0	5.25E2	3.53E2	-7.34782E-2	-8.80011E1	-6.91414E-4	-8.80006E1	2.14577E-4	5.14984E-3	9.377E-2	2.73814E1	-3.26615E1	-3.26212E1	2.68148E1	1.19902E-7	2.51739E-3	2.51739E-3	6.31817E-3	2.99175E-1
1.4E1	3.12E2	0.0E0	5.66E2	3.82E2	-7.36328E-2	-8.80012E1	-8.10623E-4	-8.80004E1	-7.15256E-5	5.03063E-3	9.34839E-2	2.72827E1	-3.26649E1	-3.26296E1	2.6789E1	1.20069E-7	2.51334E-3	2.51334E-3	6.31837E-3	3.00041E-1
1.5E1	5.0E0	0.0E0	6.06E2	4.11E2	-7.47149E-2	-8.80012E1	-8.10623E-4	-8.80007E1	7.15256E-5	4.74453E-3	9.38177E-2	2.73155E1	-3.26572E1	-3.2593E1	2.67746E1	1.20004E-7	2.50775E-3	2.50775E-3	6.32896E-3	2.99686E-1
1.6E1	3.9E1	0.0E0	6.47E2	4.41E2	-7.36328E-2	-8.80014E1	-9.77516E-4	-8.80002E1	-2.38419E-5	4.62532E-3	9.36985E-2	2.73193E1	-3.26661E1	-3.26815E1	2.6804E1	1.19872E-7	2.51693E-3	2.51693E-3	6.29624E-3	2.9829E-1
1.7E1	4.2E1	0.0E0	6.87E2	4.7E2	-7.32464E-2	-8.80018E1	-6.67572E-4	-8.80002E1	-1.90735E-4	5.07832E-3	9.34839E-2	2.72904E1	-3.26664E1	-3.25807E1	2.68028E1	1.20004E-7	2.52061E-3	2.52061E-3	6.31817E-3	3.0148E-1
1.8E1	2.48E2	0.0E0	7.27E2	5.0E2	-7.33239E-2	-8.80018E1	-8.82149E-4	-8.80007E1	9.53674E-5	5.17368E-3	9.3627E-2	2.73027E1	-3.26655E1	-3.26455E1	2.67956E1	1.20122E-7	2.51662E-3	2.51662E-3	6.3074E-3	3.00041E-1
1.9E1	3.21E2	0.0E0	7.68E2	5.29E2	-7.29374E-2	-8.8002E1	-7.39098E-4	-8.80003E1	1.43051E-4	4.76837E-3	9.35316E-2	2.73434E1	-3.2672E1	-3.26236E1	2.6818E1	1.20226E-7	2.51552E-3	2.51552E-3	6.31837E-3	3.02396E-1
2.0E1	2.171E3	3.0E0	8.08E2	5.58E2	-7.27828E-2	-8.80023E1	-5.24521E-4	-8.80005E1	0.0E0	4.93526E-3	9.39131E-2	2.72721E1	-3.26639E1	-3.2653E1	2.68046E1	1.20004E-7	2.5131E-3	2.5131E-3	6.30202E-3	3.02511E-1
2.1E1	3.0E0	0.0E0	8.49E2	5.88E2	-7.41738E-2	-8.8002E1	-7.15256E-4	-8.80005E1	1.43051E-4	4.48227E-3	9.34362E-2	2.73219E1	-3.26549E1	-3.2611E1	2.68034E1	1.19653E-7	2.51334E-3	2.51334E-3	6.33486E-3	2.98481E-1
2.2E1	1.4E2	0.0E0	8.89E2	6.17E2	-7.38649E-2	-8.80019E1	-8.34465E-4	-8.80007E1	2.38419E-5	4.55379E-3	9.36508E-2	2.7308E1	-3.2675E1	-3.26549E1	2.67966E1	1.19953E-7	2.51417E-3	2.51417E-3	6.3074E-3	2.99686E-1
2.3E1	0.0E0	0.0E0	9.3E2	6.47E2	-7.36328E-2	-8.80018E1	-5.00679E-4	-8.80005E1	6.91414E-4	4.64916E-3	9.36031E-2	2.73117E1	-3.26609E1	-3.26248E1	2.67988E1	1.20004E-7	2.51203E-3	2.51203E-3	6.31817E-3	2.9892E-1
